JPS6054333U - 吸着式保持装置 - Google Patents

吸着式保持装置

Info

Publication number
JPS6054333U
JPS6054333U JP14596483U JP14596483U JPS6054333U JP S6054333 U JPS6054333 U JP S6054333U JP 14596483 U JP14596483 U JP 14596483U JP 14596483 U JP14596483 U JP 14596483U JP S6054333 U JPS6054333 U JP S6054333U
Authority
JP
Japan
Prior art keywords
liquid supply
holding table
liquid
supply source
suction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14596483U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6325737Y2 (enrdf_load_stackoverflow
Inventor
利之 森
Original Assignee
株式会社　デイスコ
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社　デイスコ filed Critical 株式会社　デイスコ
Priority to JP14596483U priority Critical patent/JPS6054333U/ja
Publication of JPS6054333U publication Critical patent/JPS6054333U/ja
Application granted granted Critical
Publication of JPS6325737Y2 publication Critical patent/JPS6325737Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP14596483U 1983-09-22 1983-09-22 吸着式保持装置 Granted JPS6054333U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14596483U JPS6054333U (ja) 1983-09-22 1983-09-22 吸着式保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14596483U JPS6054333U (ja) 1983-09-22 1983-09-22 吸着式保持装置

Publications (2)

Publication Number Publication Date
JPS6054333U true JPS6054333U (ja) 1985-04-16
JPS6325737Y2 JPS6325737Y2 (enrdf_load_stackoverflow) 1988-07-13

Family

ID=30325050

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14596483U Granted JPS6054333U (ja) 1983-09-22 1983-09-22 吸着式保持装置

Country Status (1)

Country Link
JP (1) JPS6054333U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002144181A (ja) * 2000-11-10 2002-05-21 Disco Abrasive Syst Ltd 加工装置のバキューム生成機構
JP2011023708A (ja) * 2009-06-17 2011-02-03 Tokyo Seimitsu Co Ltd ウェーハ保持装置およびウェーハ処理装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56156580U (enrdf_load_stackoverflow) * 1980-04-18 1981-11-21
JPS56164549A (en) * 1980-05-23 1981-12-17 Disco Abrasive Sys Ltd Mounting method by positioning

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56156580U (enrdf_load_stackoverflow) * 1980-04-18 1981-11-21
JPS56164549A (en) * 1980-05-23 1981-12-17 Disco Abrasive Sys Ltd Mounting method by positioning

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002144181A (ja) * 2000-11-10 2002-05-21 Disco Abrasive Syst Ltd 加工装置のバキューム生成機構
JP2011023708A (ja) * 2009-06-17 2011-02-03 Tokyo Seimitsu Co Ltd ウェーハ保持装置およびウェーハ処理装置

Also Published As

Publication number Publication date
JPS6325737Y2 (enrdf_load_stackoverflow) 1988-07-13

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