JPS6054141U - マスクブランクス - Google Patents

マスクブランクス

Info

Publication number
JPS6054141U
JPS6054141U JP1983144585U JP14458583U JPS6054141U JP S6054141 U JPS6054141 U JP S6054141U JP 1983144585 U JP1983144585 U JP 1983144585U JP 14458583 U JP14458583 U JP 14458583U JP S6054141 U JPS6054141 U JP S6054141U
Authority
JP
Japan
Prior art keywords
mask blanks
film
mask blank
chrome film
glass substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1983144585U
Other languages
English (en)
Japanese (ja)
Other versions
JPS631315Y2 (enrdf_load_stackoverflow
Inventor
逸治 芦田
池田　重
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP1983144585U priority Critical patent/JPS6054141U/ja
Publication of JPS6054141U publication Critical patent/JPS6054141U/ja
Application granted granted Critical
Publication of JPS631315Y2 publication Critical patent/JPS631315Y2/ja
Granted legal-status Critical Current

Links

JP1983144585U 1983-09-20 1983-09-20 マスクブランクス Granted JPS6054141U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1983144585U JPS6054141U (ja) 1983-09-20 1983-09-20 マスクブランクス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1983144585U JPS6054141U (ja) 1983-09-20 1983-09-20 マスクブランクス

Publications (2)

Publication Number Publication Date
JPS6054141U true JPS6054141U (ja) 1985-04-16
JPS631315Y2 JPS631315Y2 (enrdf_load_stackoverflow) 1988-01-13

Family

ID=30322385

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1983144585U Granted JPS6054141U (ja) 1983-09-20 1983-09-20 マスクブランクス

Country Status (1)

Country Link
JP (1) JPS6054141U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS631315Y2 (enrdf_load_stackoverflow) 1988-01-13

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