JPS6049279U - cryopump - Google Patents

cryopump

Info

Publication number
JPS6049279U
JPS6049279U JP14096183U JP14096183U JPS6049279U JP S6049279 U JPS6049279 U JP S6049279U JP 14096183 U JP14096183 U JP 14096183U JP 14096183 U JP14096183 U JP 14096183U JP S6049279 U JPS6049279 U JP S6049279U
Authority
JP
Japan
Prior art keywords
cryopanel
cryopump
liquid helium
cooled
equalizing plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14096183U
Other languages
Japanese (ja)
Inventor
真田　芳直
Original Assignee
株式会社東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東芝 filed Critical 株式会社東芝
Priority to JP14096183U priority Critical patent/JPS6049279U/en
Publication of JPS6049279U publication Critical patent/JPS6049279U/en
Pending legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は一般的なりライオポンプを示す全体構成図、第
２図及び第３図は従来のクライオパネルを示す断面図、
第４図は本考案に用いるクライオパネルを示す断面図で
ある。 １・・・クライオパネル、２・・・輻射シールド板、３
・・・シェブロン、４・・・真空容器、５・・・均温板
、６・・・液体ヘリウム、１１・・・液体ヘリウム供給
口、１２・・・ガスヘリウム回収口、１３・・・液体窒
素供給口、１４・・・ガス窒素回収口。Fig. 1 is an overall configuration diagram showing a general cryopump, Figs. 2 and 3 are sectional views showing a conventional cryopanel,
FIG. 4 is a sectional view showing a cryopanel used in the present invention. 1... Cryopanel, 2... Radiation shield plate, 3
... Chevron, 4 ... Vacuum container, 5 ... Soaking plate, 6 ... Liquid helium, 11 ... Liquid helium supply port, 12 ... Gas helium recovery port, 13 ... Liquid Nitrogen supply port, 14... gas nitrogen recovery port.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 真空容器内にクライオパネルを設け、このクライオパネ
ルをその内部に満たされる液体ヘリウムにより冷却する
ものにおいて、クライオパネルの内部にアルミ又は銅製
の均温板を挿入し、この均温板と前記液体ヘリウムが直
接熱交換できるようにしたことを特徴とするクライオポ
ンプ。A cryopanel is provided in a vacuum container, and this cryopanel is cooled by liquid helium filled inside the cryopanel, and an aluminum or copper temperature equalizing plate is inserted inside the cryopanel, and this temperature equalizing plate and the liquid helium are cooled. A cryopump that is characterized by being able to directly exchange heat.
JP14096183U 1983-09-13 1983-09-13 cryopump Pending JPS6049279U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14096183U JPS6049279U (en) 1983-09-13 1983-09-13 cryopump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14096183U JPS6049279U (en) 1983-09-13 1983-09-13 cryopump

Publications (1)

Publication Number Publication Date
JPS6049279U true JPS6049279U (en) 1985-04-06

Family

ID=30315414

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14096183U Pending JPS6049279U (en) 1983-09-13 1983-09-13 cryopump

Country Status (1)

Country Link
JP (1) JPS6049279U (en)

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