JPS58165898U - Water cooling system for neutral particle injection device - Google Patents

Water cooling system for neutral particle injection device

Info

Publication number
JPS58165898U
JPS58165898U JP6122982U JP6122982U JPS58165898U JP S58165898 U JPS58165898 U JP S58165898U JP 6122982 U JP6122982 U JP 6122982U JP 6122982 U JP6122982 U JP 6122982U JP S58165898 U JPS58165898 U JP S58165898U
Authority
JP
Japan
Prior art keywords
cooling system
injection device
water cooling
neutral particle
particle injection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6122982U
Other languages
Japanese (ja)
Inventor
小野 要一
上出 泰生
岡 勇蔵
Original Assignee
株式会社日立製作所
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日立製作所 filed Critical 株式会社日立製作所
Priority to JP6122982U priority Critical patent/JPS58165898U/en
Publication of JPS58165898U publication Critical patent/JPS58165898U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は従来の実施例の系統図、第2図は本考案の実施
例の系統図である。 1・・・クライオポンプ、2・・・受熱機器、3・・・
中性粒子入射装置、5・・・熱交換器、6・・・加温器
、9・・・クーリングタワー。
FIG. 1 is a system diagram of a conventional embodiment, and FIG. 2 is a system diagram of an embodiment of the present invention. 1... Cryopump, 2... Heat receiving equipment, 3...
Neutral particle injection device, 5... heat exchanger, 6... warmer, 9... cooling tower.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] クライオポンプ冷却のための液体窒素系と受熱機器の冷
却のための水冷系をもった中性粒子入射装置において、
前記クライオポンプで使用後のコールド窒素ガスで、前
記水冷却系の水を冷却することを特徴とする中性粒子入
射装置の水冷却シス
In a neutral particle injection device that has a liquid nitrogen system for cooling the cryopump and a water cooling system for cooling the heat receiving equipment,
A water cooling system for a neutral particle injection device, characterized in that water in the water cooling system is cooled with cold nitrogen gas after being used in the cryopump.
JP6122982U 1982-04-28 1982-04-28 Water cooling system for neutral particle injection device Pending JPS58165898U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6122982U JPS58165898U (en) 1982-04-28 1982-04-28 Water cooling system for neutral particle injection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6122982U JPS58165898U (en) 1982-04-28 1982-04-28 Water cooling system for neutral particle injection device

Publications (1)

Publication Number Publication Date
JPS58165898U true JPS58165898U (en) 1983-11-04

Family

ID=30071437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6122982U Pending JPS58165898U (en) 1982-04-28 1982-04-28 Water cooling system for neutral particle injection device

Country Status (1)

Country Link
JP (1) JPS58165898U (en)

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