JPS58165898U - Water cooling system for neutral particle injection device - Google Patents
Water cooling system for neutral particle injection deviceInfo
- Publication number
- JPS58165898U JPS58165898U JP6122982U JP6122982U JPS58165898U JP S58165898 U JPS58165898 U JP S58165898U JP 6122982 U JP6122982 U JP 6122982U JP 6122982 U JP6122982 U JP 6122982U JP S58165898 U JPS58165898 U JP S58165898U
- Authority
- JP
- Japan
- Prior art keywords
- cooling system
- injection device
- water cooling
- neutral particle
- particle injection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第1図は従来の実施例の系統図、第2図は本考案の実施
例の系統図である。
1・・・クライオポンプ、2・・・受熱機器、3・・・
中性粒子入射装置、5・・・熱交換器、6・・・加温器
、9・・・クーリングタワー。FIG. 1 is a system diagram of a conventional embodiment, and FIG. 2 is a system diagram of an embodiment of the present invention. 1... Cryopump, 2... Heat receiving equipment, 3...
Neutral particle injection device, 5... heat exchanger, 6... warmer, 9... cooling tower.
Claims (1)
却のための水冷系をもった中性粒子入射装置において、
前記クライオポンプで使用後のコールド窒素ガスで、前
記水冷却系の水を冷却することを特徴とする中性粒子入
射装置の水冷却シスIn a neutral particle injection device that has a liquid nitrogen system for cooling the cryopump and a water cooling system for cooling the heat receiving equipment,
A water cooling system for a neutral particle injection device, characterized in that water in the water cooling system is cooled with cold nitrogen gas after being used in the cryopump.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6122982U JPS58165898U (en) | 1982-04-28 | 1982-04-28 | Water cooling system for neutral particle injection device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6122982U JPS58165898U (en) | 1982-04-28 | 1982-04-28 | Water cooling system for neutral particle injection device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS58165898U true JPS58165898U (en) | 1983-11-04 |
Family
ID=30071437
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6122982U Pending JPS58165898U (en) | 1982-04-28 | 1982-04-28 | Water cooling system for neutral particle injection device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58165898U (en) |
-
1982
- 1982-04-28 JP JP6122982U patent/JPS58165898U/en active Pending
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