JPS6048237U - UV cleaning equipment - Google Patents
UV cleaning equipmentInfo
- Publication number
- JPS6048237U JPS6048237U JP13912283U JP13912283U JPS6048237U JP S6048237 U JPS6048237 U JP S6048237U JP 13912283 U JP13912283 U JP 13912283U JP 13912283 U JP13912283 U JP 13912283U JP S6048237 U JPS6048237 U JP S6048237U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning equipment
- cleaning device
- ultraviolet
- ultraviolet cleaning
- cleaned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning In General (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Drying Of Semiconductors (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図面は本考案実施例の断面図である。
１・・・・・・装置箱、２・・・・・・照射箱、３・・
・・・・照射室、４・・・・・・灯具、５・・・・・・
紫外線ランプ、６・・・・・・ミラー、７・・・・・・
被洗浄体、９・・・・・・加熱器、１０・・・・・・冷
却水路、２１・・・・・・内箱、２２・・・・・・外箱
。The drawing is a sectional view of an embodiment of the present invention. 1... Equipment box, 2... Irradiation box, 3...
...Irradiation room, 4...Lamp, 5...
Ultraviolet lamp, 6...Mirror, 7...
Object to be cleaned, 9... Heater, 10... Cooling channel, 21... Inner box, 22... Outer box.
Claims (1)
有機汚染物などを分解して洗浄する紫外線洗浄装置であ
って、被洗浄体が内部に支持される照射箱を内箱との二
重構造とし、外箱を水冷あるいは空冷により冷却するよ
うにしたことを特徴とする紫外線洗浄装置。This is an ultraviolet cleaning device that irradiates the object to be cleaned with light from an ultraviolet lamp to decompose and clean organic contaminants adhering to the surface. An ultraviolet cleaning device characterized by having a heavy structure and having an outer box cooled by water or air cooling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13912283U JPS6048237U (en) | 1983-09-09 | 1983-09-09 | UV cleaning equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13912283U JPS6048237U (en) | 1983-09-09 | 1983-09-09 | UV cleaning equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6048237U true JPS6048237U (en) | 1985-04-04 |
Family
ID=30311926
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13912283U Pending JPS6048237U (en) | 1983-09-09 | 1983-09-09 | UV cleaning equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6048237U (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52155144A (en) * | 1976-06-21 | 1977-12-23 | Tokyo Ouka Kougiyou Kk | Improved apparatus for low temperature plasma etching |
| JPS56105480A (en) * | 1980-01-25 | 1981-08-21 | Mitsubishi Electric Corp | Plasma etching method |
| JPS5852827A (en) * | 1981-09-25 | 1983-03-29 | Hitachi Ltd | Dry etching and device thereof |
-
1983
- 1983-09-09 JP JP13912283U patent/JPS6048237U/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52155144A (en) * | 1976-06-21 | 1977-12-23 | Tokyo Ouka Kougiyou Kk | Improved apparatus for low temperature plasma etching |
| JPS56105480A (en) * | 1980-01-25 | 1981-08-21 | Mitsubishi Electric Corp | Plasma etching method |
| JPS5852827A (en) * | 1981-09-25 | 1983-03-29 | Hitachi Ltd | Dry etching and device thereof |
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