JPS6044353U - イオン注入装置用電源装置 - Google Patents

イオン注入装置用電源装置

Info

Publication number
JPS6044353U
JPS6044353U JP13628083U JP13628083U JPS6044353U JP S6044353 U JPS6044353 U JP S6044353U JP 13628083 U JP13628083 U JP 13628083U JP 13628083 U JP13628083 U JP 13628083U JP S6044353 U JPS6044353 U JP S6044353U
Authority
JP
Japan
Prior art keywords
power supply
supply device
ion implanter
circuit
self
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13628083U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0228610Y2 (en, 2012
Inventor
関根　幸平
田上　邦治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP13628083U priority Critical patent/JPS6044353U/ja
Publication of JPS6044353U publication Critical patent/JPS6044353U/ja
Application granted granted Critical
Publication of JPH0228610Y2 publication Critical patent/JPH0228610Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Dc-Dc Converters (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Protection Of Static Devices (AREA)
JP13628083U 1983-09-01 1983-09-01 イオン注入装置用電源装置 Granted JPS6044353U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13628083U JPS6044353U (ja) 1983-09-01 1983-09-01 イオン注入装置用電源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13628083U JPS6044353U (ja) 1983-09-01 1983-09-01 イオン注入装置用電源装置

Publications (2)

Publication Number Publication Date
JPS6044353U true JPS6044353U (ja) 1985-03-28
JPH0228610Y2 JPH0228610Y2 (en, 2012) 1990-07-31

Family

ID=30306471

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13628083U Granted JPS6044353U (ja) 1983-09-01 1983-09-01 イオン注入装置用電源装置

Country Status (1)

Country Link
JP (1) JPS6044353U (en, 2012)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009100497A (ja) * 2007-10-12 2009-05-07 Fuji Electric Device Technology Co Ltd Ｄｃ−ｄｃコンバータにおけるソフトスタート方法および該方法を使用するｄｃ−ｄｃコンバータ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009100497A (ja) * 2007-10-12 2009-05-07 Fuji Electric Device Technology Co Ltd Ｄｃ−ｄｃコンバータにおけるソフトスタート方法および該方法を使用するｄｃ−ｄｃコンバータ

Also Published As

Publication number Publication date
JPH0228610Y2 (en, 2012) 1990-07-31

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