JPS6042406B2 - thermography equipment - Google Patents

thermography equipment

Info

Publication number
JPS6042406B2
JPS6042406B2 JP54105686A JP10568679A JPS6042406B2 JP S6042406 B2 JPS6042406 B2 JP S6042406B2 JP 54105686 A JP54105686 A JP 54105686A JP 10568679 A JP10568679 A JP 10568679A JP S6042406 B2 JPS6042406 B2 JP S6042406B2
Authority
JP
Japan
Prior art keywords
window
lens
furnace
optical scanning
scanning means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54105686A
Other languages
Japanese (ja)
Other versions
JPS5629128A (en
Inventor
芳郎 内川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP54105686A priority Critical patent/JPS6042406B2/en
Publication of JPS5629128A publication Critical patent/JPS5629128A/en
Publication of JPS6042406B2 publication Critical patent/JPS6042406B2/en
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0044Furnaces, ovens, kilns
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/07Arrangements for adjusting the solid angle of collected radiation, e.g. adjusting or orienting field of view, tracking position or encoding angular position
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0806Focusing or collimating elements, e.g. lenses or concave mirrors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0808Convex mirrors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0814Particular reflectors, e.g. faceted or dichroic mirrors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/084Adjustable or slidable
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/08Optical arrangements
    • G01J5/0875Windows; Arrangements for fastening thereof
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02Constructional details
    • G01J5/04Casings
    • G01J5/047Mobile mounting; Scanning arrangements

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Radiation Pyrometers (AREA)

Description

【発明の詳細な説明】 本発明は例えば炉等の側壁に設けられた窓を介して炉内
部を観察する際に用いて好適なサーモグラフィー装置に
関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thermography device suitable for use when observing the inside of a furnace through a window provided in the side wall of the furnace, for example.

近時、製鉄高炉の炉頂或いは炉壁に窓を設け、該窓を介
してサーモグラフィー装置により炉内部の表面温度分布
像を撮影し、該温度墳布像に布像に基づいて炉の操業を
制御することが行われてい。
Recently, a window has been installed on the top or wall of a steelmaking blast furnace, and a thermography device is used to photograph the surface temperature distribution image inside the furnace through the window. Control is being done.

る。炉内は一般に高温高圧でしかも粉塵等が浮遊してい
て窓の汚れが著しい。
Ru. The inside of a furnace is generally high temperature and pressure, and there is dust floating around inside the furnace, making the windows extremely dirty.

そこで窓に付着した粉塵を高圧ガスで吹き飛ばしたり、
洗浄液により流し去つたりする清掃装置を窓に付着させ
る必要がΣある。窓が小さければ清掃装置も小型ですむ
が、実際は炉の制御のための炉内の視野を確保する必要
があり、窓は十分に大きくしなければならなかつた。そ
のさめ高価な赤外線透過窓材(シリコンQ+日、、)、
Jll、、ハ′ ”j、、^ ゛一、+1:、L−L
、−−゛に伴なつて大型化しなければならず、価格の
面で不利になつていた。また窓の全体が均一に洗浄され
ないと視野のある部分には透過率の低下が生じ、そのた
め画像にムラが出来るので、洗浄は大きくなる程技術的
に困難になる。本発明は上述した従来の問題点に鑑みて
なされたものであり、小さな窓面積で大きな視野を観察
することができ従つて清掃装置を小型化できるサーモグ
ラフィー装置を提供することを目的とするJものである
Therefore, we use high-pressure gas to blow away the dust that has adhered to the windows.
It is necessary to attach a cleaning device to the window that can be washed away with a cleaning solution. If the window is small, the cleaning device can be small, but in reality it was necessary to secure a field of view inside the furnace for controlling the furnace, so the window had to be sufficiently large. The expensive infrared transmitting window material (silicon Q + day,...)
Jll,,ha' ”j,,^ ゛1,+1:,L-L
, −−゛, the size had to be increased, which was disadvantageous in terms of price. Furthermore, if the entire window is not cleaned uniformly, the transmittance will decrease in certain areas of the field of view, resulting in uneven images, so cleaning becomes technically more difficult as the size of the window increases. The present invention has been made in view of the above-mentioned conventional problems, and an object of the present invention is to provide a thermography device that can observe a large field of view with a small window area, and can therefore miniaturize the cleaning device. It is.

以下図面を用いて本発明を詳説する。第1図は本発明の
一実施例の構成を示し、同図において1は炉壁、2は該
炉壁に設けられた赤外線透過窓、3は光学的走査機構で
ある。
The present invention will be explained in detail below using the drawings. FIG. 1 shows the structure of an embodiment of the present invention, in which 1 is a furnace wall, 2 is an infrared transmitting window provided on the furnace wall, and 3 is an optical scanning mechanism.

該走査機構3は例えば2図に示す様に軸Jを中心に回転
する角錐台形のx方向走査鏡M、とその上方に配置され
るY方向走査鏡M2とから構成される。該走査機構3と
上記窓2との間にはアフオーカル系を構成する2つのレ
ンズ4、5が配置されている。そして窓2を透過レンズ
4、5を介して取出され、上記走査機構3によつて走査
集光された赤外線は、レンズ6を介して検出器7ヘ送ら
れて検出される。上述の如き構成において走査機構3で
はx方向偏向点が略一致している。
For example, as shown in FIG. 2, the scanning mechanism 3 is composed of a truncated pyramid-shaped x-direction scanning mirror M that rotates around an axis J, and a Y-direction scanning mirror M2 disposed above it. Two lenses 4 and 5 forming an afocal system are arranged between the scanning mechanism 3 and the window 2. The infrared rays are extracted from the window 2 through the transmission lenses 4 and 5, scanned and focused by the scanning mechanism 3, and sent to the detector 7 through the lens 6, where they are detected. In the above-described configuration, the x-direction deflection points of the scanning mechanism 3 substantially coincide with each other.

即ち走査鏡隅は適宜軸oを中心として往復回動されるた
め、Y方向の偏向点は第2図に示す様にX方向偏向点で
ある走査鏡M、の鏡面の近傍の点Pに一致している。そ
してアフオーカル系を構成するレンズ4、5は、上記X
、Y方向偏向点Pがレンズ4の焦点位置又はその極く近
傍に置かれ、上記窓2がレンズ5の焦点位置又はその極
く近傍に置かれるようになされている。そのためX,Y
方向偏向点Pの像P″が窓2の中心部に形成され、実質
的にX,Y方向偏向点はP″に移つたものとみなすこと
ができる。この様にX,Y方向偏向点が窓2の位置とな
るための窓面積は極めて少ないものですみ、高価なシリ
コン窓の使用量を少なくすることができると共に清掃装
置も小型のもので良い。又強度の関係で大きな窓を設け
ることができない場合には、小さな窓でありながら従来
よりも広い視野を確保することができる。尚上述した実
施例ではX,Y方向偏向点が一致した走査機構を用いた
が、これに限らずX,Y方向偏向点が異なるものでもそ
のうちの一方の偏向点例えばX方向偏向点をレンズ4の
焦点位置に置くことにより本発明を実施することができ
る。
That is, since the corner of the scanning mirror is rotated back and forth about the axis o as appropriate, the deflection point in the Y direction is aligned with the point P near the mirror surface of the scanning mirror M, which is the deflection point in the X direction, as shown in FIG. We are doing so. The lenses 4 and 5 constituting the afocal system are
, the Y-direction deflection point P is placed at or very close to the focal position of the lens 4, and the window 2 is placed at or very close to the focal position of the lens 5. Therefore, X, Y
An image P'' of the direction deflection point P is formed at the center of the window 2, and it can be considered that the X and Y direction deflection points have substantially moved to P''. In this way, the window area required for the X and Y direction deflection points to be at the positions of the windows 2 is extremely small, making it possible to reduce the amount of expensive silicon windows used and also requiring a small cleaning device. Furthermore, if a large window cannot be provided due to strength issues, a wider field of view than before can be secured even with a small window. In the above-described embodiment, a scanning mechanism in which the X and Y direction deflection points coincide is used, but the invention is not limited to this, and even if the X and Y direction deflection points are different, one of the deflection points, for example, the X direction deflection point, is set to the lens 4. The present invention can be carried out by placing the focal point at the focal position.

ただしその場合、Y方向偏向点は窓の位置に移らないた
め、Y方向に関しては窓巾の減少を期待することはでき
ない。又レンズ4,5の夫々を複数のレンズを組合わせ
て構成することも可能である。
However, in that case, since the Y-direction deflection point does not move to the window position, it is not possible to expect the window width to decrease in the Y-direction. It is also possible to configure each of the lenses 4 and 5 by combining a plurality of lenses.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の構成を示す図であり、第2
図は光学的走査機構の一例を示す図である。 1:炉壁、2:赤外線透過窓、3:光学的走査機構、4
,5,6:レンズ、7:赤外線検出器。
FIG. 1 is a diagram showing the configuration of one embodiment of the present invention.
The figure is a diagram showing an example of an optical scanning mechanism. 1: Furnace wall, 2: Infrared transmission window, 3: Optical scanning mechanism, 4
, 5, 6: Lens, 7: Infrared detector.

Claims (1)

【特許請求の範囲】[Claims] 1 赤外線透過窓を介して取出された赤外線を検出する
ための検出器と、該検出器に入射する赤外線束を走査す
る光学的光学的走査手段とを備えたサーモグラフィ装置
において、前記光学的走査手段と窓との間にアフオーカ
ル系を構成する少なくとも2つのレンズを配置し、一方
のレンズの焦点位置を前記光学的走査手段のX方向偏向
点及び又はY方向偏向点に略一致させると共に他方のレ
ンズの焦点位置又はその近傍に前記窓を配置するように
構成したことを特徴とするサーモグラフィー装置。
1. A thermography apparatus comprising a detector for detecting infrared rays extracted through an infrared transmitting window and an optical scanning means for scanning the infrared flux incident on the detector, wherein the optical scanning means and a window, at least two lenses constituting an afocal system are arranged, and the focal position of one lens is made to substantially coincide with the deflection point in the X direction and/or the deflection point in the Y direction of the optical scanning means, and the other lens A thermography apparatus characterized in that the window is arranged at or near a focal point position.
JP54105686A 1979-08-20 1979-08-20 thermography equipment Expired JPS6042406B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54105686A JPS6042406B2 (en) 1979-08-20 1979-08-20 thermography equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54105686A JPS6042406B2 (en) 1979-08-20 1979-08-20 thermography equipment

Publications (2)

Publication Number Publication Date
JPS5629128A JPS5629128A (en) 1981-03-23
JPS6042406B2 true JPS6042406B2 (en) 1985-09-21

Family

ID=14414280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54105686A Expired JPS6042406B2 (en) 1979-08-20 1979-08-20 thermography equipment

Country Status (1)

Country Link
JP (1) JPS6042406B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58206681A (en) * 1982-05-27 1983-12-01 Mitsubishi Chem Ind Ltd Inspection of coke oven wall

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5377641A (en) * 1976-12-21 1978-07-10 Mitsubishi Electric Corp Scanner
JPS5382427A (en) * 1976-12-28 1978-07-20 Canon Inc Scanning optical system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5377641A (en) * 1976-12-21 1978-07-10 Mitsubishi Electric Corp Scanner
JPS5382427A (en) * 1976-12-28 1978-07-20 Canon Inc Scanning optical system

Also Published As

Publication number Publication date
JPS5629128A (en) 1981-03-23

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