JPS6042256U - 電子顕微鏡等における試料汚染防止装置 - Google Patents

電子顕微鏡等における試料汚染防止装置

Info

Publication number
JPS6042256U
JPS6042256U JP13465883U JP13465883U JPS6042256U JP S6042256 U JPS6042256 U JP S6042256U JP 13465883 U JP13465883 U JP 13465883U JP 13465883 U JP13465883 U JP 13465883U JP S6042256 U JPS6042256 U JP S6042256U
Authority
JP
Japan
Prior art keywords
prevention device
heat shield
sample
cryopump
electron microscopes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13465883U
Other languages
English (en)
Japanese (ja)
Other versions
JPS643171Y2 (enrdf_load_stackoverflow
Inventor
平野　治男
青木　好則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP13465883U priority Critical patent/JPS6042256U/ja
Publication of JPS6042256U publication Critical patent/JPS6042256U/ja
Application granted granted Critical
Publication of JPS643171Y2 publication Critical patent/JPS643171Y2/ja
Granted legal-status Critical Current

Links

JP13465883U 1983-08-31 1983-08-31 電子顕微鏡等における試料汚染防止装置 Granted JPS6042256U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13465883U JPS6042256U (ja) 1983-08-31 1983-08-31 電子顕微鏡等における試料汚染防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13465883U JPS6042256U (ja) 1983-08-31 1983-08-31 電子顕微鏡等における試料汚染防止装置

Publications (2)

Publication Number Publication Date
JPS6042256U true JPS6042256U (ja) 1985-03-25
JPS643171Y2 JPS643171Y2 (enrdf_load_stackoverflow) 1989-01-26

Family

ID=30303353

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13465883U Granted JPS6042256U (ja) 1983-08-31 1983-08-31 電子顕微鏡等における試料汚染防止装置

Country Status (1)

Country Link
JP (1) JPS6042256U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005100988A (ja) * 2003-09-24 2005-04-14 Carl Zeiss Nts Gmbh 粒子放射装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005100988A (ja) * 2003-09-24 2005-04-14 Carl Zeiss Nts Gmbh 粒子放射装置

Also Published As

Publication number Publication date
JPS643171Y2 (enrdf_load_stackoverflow) 1989-01-26

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