JPS6038891A - Spiral-mode piezoelectric oscillator - Google Patents

Spiral-mode piezoelectric oscillator

Info

Publication number
JPS6038891A
JPS6038891A JP58148671A JP14867183A JPS6038891A JP S6038891 A JPS6038891 A JP S6038891A JP 58148671 A JP58148671 A JP 58148671A JP 14867183 A JP14867183 A JP 14867183A JP S6038891 A JPS6038891 A JP S6038891A
Authority
JP
Japan
Prior art keywords
polarization
oscillator
mode piezoelectric
spiral mode
piezoelectric vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP58148671A
Other languages
Japanese (ja)
Inventor
Akio Kumada
熊田 明生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Maxell Ltd
Original Assignee
Hitachi Maxell Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Maxell Ltd filed Critical Hitachi Maxell Ltd
Priority to JP58148671A priority Critical patent/JPS6038891A/en
Publication of JPS6038891A publication Critical patent/JPS6038891A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/15Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Jigging Conveyors (AREA)

Abstract

PURPOSE:To obtain the spiral oscillator in which an oscillation and a twisted oscillation are combined by a method wherein plural piezoelectric oscillation plates are overlapped in a manner the directions of a polarization of their thickness directions are not in parallel to that of the next one, and the elastic member whose compressive force works in the direction crossing obliquely the polarization direction and fastens those plates tightly. CONSTITUTION:The element 1 and 2 for Langevin type oscillator which are cylinders polarized in their thickness directions are sandwiched to be fixed by truncated-cone-shaped connectors 3 and 4. Then these are inserted between a wheel-shaped twist connects 5 and 6 which are arranged like two wheels of a car and the periphery of 6 and the periphery of 52 of 5 are fixed obliquely by impeller blades 7. The force which fastens firmly the whole oscillator by fitting the twist connector 5 in a screw of 52 is balanced with the tension working upon the impeller blades 7 so that a twisting force functions between the connectors 5 and 6. When an alternate signal of about 40kHz and 20V, for example, is applied between the electronic terminals 8 and 9 of the supersonic oscillator fastened to be set, a resonance phenomenon occurs at 42.7kHz and the end surfaces show an elliptical movement with the longitudinal direction as a longer axis.

Description

【発明の詳細な説明】 本発明は円柱を捻じるツイストモードでしかも振動子の
端面が面の法線を軸とする細円運動を行なうスパイラル
モードの圧電具振子を提供することを目的とする。
[Detailed Description of the Invention] An object of the present invention is to provide a piezoelectric pendulum in a twist mode in which a cylinder is twisted, and in a spiral mode in which the end face of the vibrator makes a thin circular motion with the normal to the surface as an axis. .

圧電モーターの一種に橢円運動を駆動力としたものがあ
る。これは、第1図に示すようにローター15とステー
ター14とを加圧密着させ、ステーターの表面を密着面
の法線方向を主軸とする細円運動(点線で示す)をさせ
、細円が右廻シならばローターを右方に左&!I、りな
らば左方に移動させるモーターである。このモーターの
駆動力は(i■円運動の速さと振幅とで決まるので圧電
振動子を高周波共振子として用いるのが最善である。従
来この押橢円運動を行なう圧電素子は第1ν1(b)に
hλ理を図示したように上下振動子lと左右振動子(辷
シモード振動子)2とを組み合せた振動子で、1と2と
が90°異なる位相で励振される振動子である。しかし
振動が結合しないので、1と2の振動子は振動方向が9
0°異なるため互に干渉することなく強力な細円運動を
する共振子とはならず、しかも、位相の異なる−2つの
信号で駆動しなければならない欠点があシ橢円運動を行
なう強力超音波振動子の無かったことが従来技術の欠陥
であった。
One type of piezoelectric motor uses circular motion as its driving force. As shown in Fig. 1, the rotor 15 and stator 14 are brought into close contact with each other under pressure, and the surface of the stator is made to move in a thin circle (indicated by a dotted line) with the main axis normal to the contact surface. If it is a clockwise rotation, move the rotor to the right and left &! If it is I, then it is a motor that moves it to the left. Since the driving force of this motor is determined by the speed and amplitude of circular motion (i), it is best to use a piezoelectric vibrator as a high-frequency resonator. Conventionally, the piezoelectric element that performs this pushing circular motion is As shown in Figure 1, the hλ principle is a oscillator that combines a vertical oscillator 1 and a left and right oscillator (travel mode oscillator) 2, in which 1 and 2 are excited with a phase different by 90 degrees.However, Since the vibrations are not coupled, the vibration direction of oscillators 1 and 2 is 9.
Because they are different by 0°, it is not possible to create a resonator that can perform strong thin circular motion without mutual interference.Moreover, it has the disadvantage that it must be driven using two signals with different phases. The lack of a sonic transducer was a deficiency in the prior art.

この発明は上述した従来の技術欠陥を解決するもので、
厚さ方向に印加した電気信号によって厚み方向に振動す
る円板状圧電振動子の複数個を、分極の向きが隣同志互
いに反平行になるごとくに積み重ね、分極方向と斜交す
る方向に圧縮力が作用する弾性体によって締めつけるこ
とによシ、分極方向の伸縮力と、分極と垂直な曲内にお
ける圧電円板の中心軸を回転中心とする捻シカとを結合
させ、圧電振動子を電気信号で励振したとき弾性体の端
面が分極方向を軸とする細円運動を行う共振子によって
目的を達成したものである。以下本発明の実施例を図面
に従って説明する。
This invention solves the above-mentioned conventional technical deficiencies.
A plurality of disc-shaped piezoelectric vibrators that vibrate in the thickness direction in response to an electric signal applied in the thickness direction are stacked so that the directions of polarization are antiparallel to each other, and a compressive force is applied in a direction oblique to the polarization direction. By tightening with an elastic body on which a This objective was achieved by using a resonator in which the end face of the elastic body makes a thin circular motion with the polarization direction as the axis when excited. Embodiments of the present invention will be described below with reference to the drawings.

実施例】 第2因は本発明の一実施例を示す 外径30龍φ内径15闘φ厚さ5間のpJ筒を厚さ方向
に分極したランジュバン型振動子用素子1および2をこ
ま形の結合子3および4でサンドイッチ固定し、これを
第2図(b)に示す車輪状の捻り結合子5および6の間
に挿入する。捻り結合子5及び6は車の両輪のごとく配
置され6の外周部と5の外周部52 とは羽根7で斜に
同定されている0つl)6、?および52は円筒形をな
しているので、セラミック1.2をサンドインチした結
合子3.4は円筒の中心部にセットされていることにな
る。ここで捻り結合子51を52のネジに嵌めると振動
子全体を固く締めつけることができる。
Embodiment] The second factor shows an embodiment of the present invention. Elements 1 and 2 for Langevin type resonators, which are polarized in the thickness direction of a PJ cylinder with an outer diameter of 30 mm, an inner diameter of 15 mm, and a thickness of 5 mm, are top-shaped. The connectors 3 and 4 are sandwiched and fixed, and this is inserted between the wheel-shaped torsion connectors 5 and 6 shown in FIG. 2(b). The torsion connectors 5 and 6 are arranged like the two wheels of a car, and the outer periphery of 6 and the outer periphery 52 of 5 are obliquely identified by the blades 7. Since 52 and 52 are cylindrical, the connector 3.4 made by sandwiching the ceramic 1.2 is set in the center of the cylinder. Here, by fitting the torsion connector 51 into the screw 52, the entire vibrator can be firmly tightened.

この締めつけ力は、羽根7に働らく張力とバランスする
ので強く締め付けると5と6の間に捻シカが作用する。
This tightening force is balanced with the tension acting on the blades 7, so if the blades are tightened too strongly, twisting force will act between the blades 5 and 6.

締めつけセットされメこ超音波振動子の電子端子8およ
び9の間に約40KJ]、zの20ボルト交流信号を印
加したところ、42.7 K11z で共振現象が現ら
れれた。この状態で振動子の端面を側面から顕術鐘で観
察したところ、長さ方向を長軸とした細円運動をしてい
ることがわかった。振幅は長袖方向に9μnL短軸方向
に6μmであった。
When a 20 volt alternating current signal of about 40 KJ],z was applied between the electronic terminals 8 and 9 of the mechanical ultrasonic transducer that had been tightened and set, a resonance phenomenon appeared at 42.7 K11z. When the end face of the vibrator was observed from the side with a microscope in this state, it was found that it was moving in a thin circular motion with the long axis being the longitudinal direction. The amplitude was 9 μnL in the long sleeve direction and 6 μm in the short axis direction.

このようにたて振動と捻れ振動とが結合したスパイラル
振動子を得ることができた。
In this way, we were able to obtain a spiral vibrator in which vertical vibration and torsional vibration were combined.

実施例2 第3図は、第2図のスパイラル振動子を高効率化した実
施例である。構造の概要は30 trtv、φ/12闘
φX1間tの圧1にセラミック円板10枚を分極の向き
を互い違いに積層し、一枚置きに電気的に接続した積層
型圧電リング1および2を、通常のジュラルミン結合子
3および4を用いボルト8で締めつけたランジュバン型
の振動子である。通常のランジュバン型振動子との違い
は積層型圧電リング1および20同に捻シ結合子5がサ
ンドイッチされボルトを締めつけると結合子3および4
の間に捻れが生ずることである。捻シ結合子5は羽根車
の形状をなした金属で羽根は2開の厚さの金属板であり
、ホルト締めの方向に対して数度傾いて配4されている
。電気均子9および10に48.3 KJ(z、5vの
交流信号を印加したところ、結合子6の端面が長軸15
μm短軸10μmの抑円運動を行うスパイラル振動子と
して動作することが確認できた。振動速度約700TI
V′81市力約5Wであル、したがって高効率の強力ス
パイラル超音波振動子を提供することができる。11.
12はボールベヤリングである。
Example 2 FIG. 3 shows an example in which the spiral oscillator shown in FIG. 2 is made highly efficient. The outline of the structure is as follows: 10 ceramic discs are stacked at a pressure 1 of 30 trtv, φ/12 to φ , is a Langevin type vibrator using ordinary duralumin connectors 3 and 4 and tightened with bolts 8. The difference from a normal Langevin type vibrator is that the laminated piezoelectric rings 1 and 20 are sandwiched with twisted connectors 5, and when the bolts are tightened, the connectors 3 and 2
A twist occurs between the two. The screw connector 5 is a metal in the shape of an impeller, and the blades are metal plates with a thickness of 2 mm, and are arranged 4 at an angle of several degrees with respect to the bolt tightening direction. When an AC signal of 48.3 KJ (z, 5V) was applied to the electric equalizers 9 and 10, the end face of the connector 6 was aligned with the long axis 15.
It was confirmed that it operated as a spiral oscillator that performed a circular motion with a short axis of 10 μm. Vibration speed approximately 700TI
V'81 city power is approximately 5 W, and therefore a highly efficient and powerful spiral ultrasonic transducer can be provided. 11.
12 is a ball bearing.

実施例3 実施例2では2個の結合子が互いに逆向きの捻れ振動を
生じるが、この振動から轡械的出力を取シ出すため一方
の結合子を固定すると他方にも影響を与えるので、固定
方法が困難である。ここでは、振動子を官印に固定して
大出力を得るためのπ本構造を開示する。
Embodiment 3 In Embodiment 2, the two connectors generate torsional vibrations in opposite directions, but when one connector is fixed in order to extract mechanical output from this vibration, it also affects the other. The fixing method is difficult. Here, a π structure for obtaining a large output by fixing a vibrator to an official seal is disclosed.

第4図にその正面図を示す。大略は第3図の素子を中心
面から2分し左右対称の11<で棺成(7たものである
。主な相違点は■左右が面対称になっている点であシ、
対称面の固定板13によって全体を支持し固定できるこ
と、■4.1結合子の羽根の傾斜角が左右対称になって
いること。■結合子3および4は固定板に対して同じ向
きに変形するので両者を直接ボルト締め固定することが
でき、第3図の場合のようなボールベアリングなどによ
る辷シ機構は不要である。
Fig. 4 shows its front view. Roughly speaking, the element shown in Figure 3 is divided into two parts from the center plane, and the left and right sides are symmetrical.
The whole can be supported and fixed by the fixing plate 13 having a symmetrical surface; (4.1) The angle of inclination of the blades of the connector is symmetrical. (2) Since the connectors 3 and 4 deform in the same direction relative to the fixing plate, they can be directly bolted and fixed, and there is no need for a latch mechanism using ball bearings or the like as in the case of FIG. 3.

上記の3点を除けは実施例2と同様に構成すればよい。Except for the above three points, the configuration may be the same as in the second embodiment.

このようにして組み立てたスパイラルモードの圧電振動
子はリード線9.10に約40KHzの高周波信号によ
シ、固定板13に対して、結合子3.4がそろって捻シ
振動を生じた結果、強力なスパイラルモードの振動が励
振できた。このスパイラルモードの圧1E振動子は固定
板でがつちシと保持できるので、強力な機械的出力も容
易に取シ出せる。以上説明したように、複数個の圧電振
動板を厚み方向の分極の向きが隣同志互いに反平行にな
るように重ね、分極方向と斜交する方向に圧縮力が作用
する伸性体で締めつけることによシ、電気的に励振され
たとき分極方向に発生する伸縮力と分極軸の周pに発生
する捻シカとが結合共振するごとく構成したから振動子
端面が分極方向を軸とする欄内運動を行うことを特徴と
するスパイラルモードの圧電振動子という従来の強力超
音波発生技術に欠けていた新技術のための素子を提供で
きたという大きな効果がある。しかもこの素子は2つの
モードの結合素子であるため高効率で大きな捻シトルク
が発生できるという特長を有して
The spiral mode piezoelectric vibrator assembled in this way is caused by a high frequency signal of about 40 KHz applied to the lead wire 9.10, and as a result, the couplers 3.4 align against the fixed plate 13, causing torsional vibration. , a strong spiral mode vibration could be excited. This spiral mode pressure 1E vibrator can be firmly held by a fixed plate, so strong mechanical output can be easily extracted. As explained above, multiple piezoelectric diaphragms are stacked so that the direction of polarization in the thickness direction is antiparallel to each other, and then tightened with an elastic body that applies compressive force in a direction diagonal to the direction of polarization. In addition, since the structure is configured so that the elastic force generated in the polarization direction when electrically excited and the twisting force generated around the polarization axis combine to resonate, the end face of the vibrator is located within the column with the polarization direction as the axis. The great effect is that we were able to provide an element for a new technology that was lacking in conventional high-intensity ultrasonic generation technology, which is a spiral mode piezoelectric vibrator that is characterized by motion. Furthermore, since this element is a two-mode coupling element, it has the feature of being highly efficient and capable of generating a large torsion torque.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は欄内運動を駆動力とした圧1TLモーターの動
作原理説明図。 (a)は原理説明図(b)は従来の部用運動発生用圧電
素子の正面図 第2図は本発明の一実施例を示す正面図(、)と側面図
(b) 第3図は本発明の他の実施例を示す正面図第4図は本発
明の他の実施例を示す正面図である。 1.2・・・圧電振動板 3.4・・・結合子5.6.
7・・・捻シ羽根 8・・・ボルトナツト(a) 第 [a) (b) 只 第8図 5 M4図
FIG. 1 is an explanatory diagram of the operating principle of a pressure 1TL motor that uses in-column motion as driving force. (a) is an explanatory diagram of the principle; (b) is a front view of a conventional piezoelectric element for generating partial motion; FIG. 2 is a front view (,) and side view showing an embodiment of the present invention; Front view showing another embodiment of the invention FIG. 4 is a front view showing another embodiment of the invention. 1.2...Piezoelectric diaphragm 3.4...Coupler 5.6.
7... Twisting blade 8... Bolt nut (a) No. [a] (b) Figure 8 5 M4 diagram

Claims (1)

【特許請求の範囲】 (1)複数個の圧電振動板を厚み方向の分極の向きが隣
同志互いに反平行になるように重ね、分極方向と斜交す
る方向に圧縮力が作用する弾性体で締めつけることによ
り、電気的に励振されたとき分極方向に発生する伸縮力
と、分極軸の回わシに発生するP1シカとが結合共振す
る結果、振動子端面が分極方向を軸とする細円運動を行
うことを特徴とするスパイラルモードの圧電振動子。 (2、特許請求の範囲第1項記載のスパイラルモードの
圧電振動子において、弾性体は軸方向に伸縮させたとき
軸まわりの捻シ変形を生じるものとし、これを複数個の
圧電振動子と振動結合子とでサンドインチした状態でボ
ルト締めしたことを特徴とするスパイラルモードの圧電
振動子。 (3)特許請求の範囲第2項記載のスパイラルモードの
圧電振動子において、捻シ変形弾性結合子、セラミック
振動子および振動結合子を対としこれらを中心の支持板
に面対称の形状で#薄酸することによシ振動結合子の両
端面が支持板に対して同方向にそろって捻れることを特
徴としたスパイラルモードの圧電振動子。
[Claims] (1) An elastic body in which a plurality of piezoelectric diaphragms are stacked so that the directions of polarization in the thickness direction are antiparallel to each other, and a compressive force is applied in a direction oblique to the direction of polarization. By tightening, the elastic force generated in the polarization direction when electrically excited and the P1 deer generated in the rotation of the polarization axis combine and resonate, resulting in the end face of the vibrator forming a thin circle with the polarization direction as its axis. A spiral mode piezoelectric vibrator that is characterized by motion. (2. In the spiral mode piezoelectric vibrator described in claim 1, the elastic body causes torsional deformation around the axis when expanded and contracted in the axial direction, and this is caused by a plurality of piezoelectric vibrators. A spiral mode piezoelectric vibrator characterized in that it is bolted in a sandwiched state with a vibration coupler. (3) In the spiral mode piezoelectric vibrator according to claim 2, a torsional deformation elastic coupling is provided. By making a pair of a ceramic resonator, a ceramic resonator, and a vibration coupler and coating them with a thin acid in a planar symmetrical shape on a central support plate, both end faces of the vibration coupler are twisted in the same direction with respect to the support plate. A spiral mode piezoelectric vibrator that is characterized by
JP58148671A 1983-08-11 1983-08-11 Spiral-mode piezoelectric oscillator Pending JPS6038891A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58148671A JPS6038891A (en) 1983-08-11 1983-08-11 Spiral-mode piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58148671A JPS6038891A (en) 1983-08-11 1983-08-11 Spiral-mode piezoelectric oscillator

Publications (1)

Publication Number Publication Date
JPS6038891A true JPS6038891A (en) 1985-02-28

Family

ID=15458010

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58148671A Pending JPS6038891A (en) 1983-08-11 1983-08-11 Spiral-mode piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS6038891A (en)

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