JPS6037714A - Method for marking defective dice - Google Patents

Abstract

PURPOSE:To effect positive and rapid discrimination of defective dice in a probing process or a process of classifying defective and non-defective dice, by putting a mark on a dice determined as defective, the mark being of a color complementary to the color reflected from the dice, and by detecting the difference in chroma of these colors. CONSTITUTION:In a proving process or a process of classifying defective and non-defective dice, dice determined as defective are marked with ink of a predetermined color which is complementary or approximately complementary to the color of reflection produced depending on the surface condition of the dice. For example, if reflected light is blue, a ink color will be red or the like. In such a manner, a color factor is introduced into discrimination of defective and non-defective dice to make calssification thereof positive and easy.

Description

DETAILED DESCRIPTION OF THE INVENTION (Technical Field) The present invention relates to a method for marking defective dies, which is carried out in the blobbing process or the process of selecting good or defective dies during the IC manufacturing process.

(Background Art) As a conventional marking method for defective dice, one is known that is based on, for example, the difference in reflectance between the surface color of the die and the defective mark attached to the defective mark. Figures 1 to 5 are examples of this.

In FIG. 1, 1 is a die and 2 is a bump pattern. Such a die is imaged by a television camera that recognizes the position of the die provided above the die, and the surface 1 and pattern 2 of the die are binarized as shown in FIG. In the figure, 1' represents black in the binarized information, and l does not represent white. Here, when it is determined that the die is defective, a defective mark 3 is placed on the surface of the pattern 2, as shown in FIG. The diameter of the defective mark 3 is preferably as small as possible in order to avoid affecting adjacent dies. The defective mark 3 attached in this way is binarized, and as shown in FIG. The difference with the reflectance of 2' is detected, and as a result, the dice marked with a defective mark: 3 are not selected.

However, when the defective mark 4 is shifted and placed on the die surface 2, as shown in FIG. Otherwise, the defective product will be judged as a good product and the die will be big-amped. In this way, although conventional marking methods aim to automatically sort out defective dies, they mainly focus on detecting the difference in reflectance from the die surface.
There was a problem in that defective marks could not be detected depending on the positional relationship between the C pattern and the defective mark.

(Objective of the Invention) The purpose of the present invention is to solve these conventional problems, and its feature lies in the introduction of a color dimension as a criterion for determining whether a die is good or bad.

Step 2: The present invention will be explained based on examples.) (Structure and operation of the invention) The present invention provides a method for handling dies that have been determined to be defective in the blobbing process or the process of sorting out good and defective dies. When attaching a defective mark, a defective mark of a predetermined color (ink color) is selected and used.Here, the predetermined color is the color (~ It is preferable that the colors be complementary colors or colors close to complementary colors1.Since the reflective color differs depending on the type of die, it is preferable to provide various colors for the defect mark corresponding to this.For example, if the reflective color is If it is blue, select red or a color close to red as the defective mark color t7.

In addition, the primary colors of red, evening, and green or 11 of these may be used as predetermined colors.
It is also preferable to select colors that are close to each other.

In this way, the defect mark placed on the surface of the defective die has a color that is almost complementary to the reflected color caused by the surface condition of the defective die σ), or a color that is close to the primary color.
Regardless of the pattern, clearly distinguish it from the surroundings.
I can do that. Therefore, for example, a color sensor consisting of a color sensor and a color sensor head is used to extract the color of the defective mark, and this is compared and calculated with the color around the defective die, and a preset value is set between them. When there is a difference in saturation power, it is determined that the die is defective and a defect signal is output, so that the defective die is not picked up.

(Effects of the Invention) As explained above, according to the present invention, by introducing the color dimension into the criterion for determining whether a die is good or bad, it is possible to make a judgment based on information different from the conventional binary black and white, and the IC Good regardless of the pattern or marking position inside the chip.
It is possible to identify defects with certainty. Furthermore, since conventional pattern recognition technology is not used as a discrimination criterion, there is an advantage that it is possible to quickly discriminate between good and bad products.

[Brief explanation of drawings]

1 to 5 are diagrams for explaining conventional marking methods. J... Dice, 2... Pattern 3... Defective mark 1'... Binary screen is curved, it was die 12'.
...Patterns 23', 4...2 converted to binarized screen
Defective mark converted to value screen 3 Patent applicant Oki'1

Claims (3)

[Claims] (1) In the blobbing process or the process of sorting out good and defective dies, a defective mark of a predetermined color is placed on the defective die determined as defective, and the difference in saturation between the defective mark and the reflected color is calculated. A method for marking defective dice□, which is characterized by detecting and sorting defective dice. (2) The method for marking a defective die according to claim 1, wherein the predetermined color is a color that is substantially complementary to a reflected color caused by the surface condition of the defective die. (3) The method for marking defective dice according to claim 1, wherein the predetermined color is a primary color.