JPS6037638A - 多荷電イオンの生成方法ならびに該方法の実行を可能にするパルス状条件下で作用するイオン源 - Google Patents

多荷電イオンの生成方法ならびに該方法の実行を可能にするパルス状条件下で作用するイオン源

Info

Publication number
JPS6037638A
JPS6037638A JP13503184A JP13503184A JPS6037638A JP S6037638 A JPS6037638 A JP S6037638A JP 13503184 A JP13503184 A JP 13503184A JP 13503184 A JP13503184 A JP 13503184A JP S6037638 A JPS6037638 A JP S6037638A
Authority
JP
Japan
Prior art keywords
gas
ion source
oxygen
nitrogen
enclosure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13503184A
Other languages
English (en)
Japanese (ja)
Inventor
ベルナール ジヤツコ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Publication of JPS6037638A publication Critical patent/JPS6037638A/ja
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns
    • H01J27/16Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation
    • H01J27/18Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation with an applied axial magnetic field

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Particle Accelerators (AREA)
JP13503184A 1983-06-30 1984-06-29 多荷電イオンの生成方法ならびに該方法の実行を可能にするパルス状条件下で作用するイオン源 Pending JPS6037638A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR8310862A FR2548436B1 (fr) 1983-06-30 1983-06-30 Procede de production d'ions lourds multicharges et sources d'ions en regime impulsionnel, permettant la mise en oeuvre du procede
FR8310862 1983-06-30

Publications (1)

Publication Number Publication Date
JPS6037638A true JPS6037638A (ja) 1985-02-27

Family

ID=9290347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13503184A Pending JPS6037638A (ja) 1983-06-30 1984-06-29 多荷電イオンの生成方法ならびに該方法の実行を可能にするパルス状条件下で作用するイオン源

Country Status (4)

Country Link
EP (1) EP0130907B1 (de)
JP (1) JPS6037638A (de)
DE (1) DE3473966D1 (de)
FR (1) FR2548436B1 (de)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2601498B1 (fr) * 1986-07-10 1988-10-07 Commissariat Energie Atomique Source d'ions a resonance cyclotronique electronique
FR2679066B1 (fr) * 1991-07-08 1993-09-24 Commissariat Energie Atomique Procede de production d'ions multicharges.
DE19933762C2 (de) * 1999-07-19 2002-10-17 Juergen Andrae Gepulste magnetische Öffnung von Elektronen-Zyklotron-Resonanz-Jonenquellen zur Erzeugung kurzer, stromstarker Pulse hoch geladener Ionen oder von Elektronen

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3476968A (en) * 1966-12-19 1969-11-04 Hitachi Ltd Microwave ion source
FR2475798A1 (fr) * 1980-02-13 1981-08-14 Commissariat Energie Atomique Procede et dispositif de production d'ions lourds fortement charges et une application mettant en oeuvre le procede

Also Published As

Publication number Publication date
FR2548436A1 (fr) 1985-01-04
FR2548436B1 (fr) 1986-01-10
DE3473966D1 (en) 1988-10-13
EP0130907A1 (de) 1985-01-09
EP0130907B1 (de) 1988-09-07

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