JPS6033587A - 固体映像表示板およびその製造法 - Google Patents
固体映像表示板およびその製造法Info
- Publication number
- JPS6033587A JPS6033587A JP58143191A JP14319183A JPS6033587A JP S6033587 A JPS6033587 A JP S6033587A JP 58143191 A JP58143191 A JP 58143191A JP 14319183 A JP14319183 A JP 14319183A JP S6033587 A JPS6033587 A JP S6033587A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrodes
- spanning
- solid
- transparent
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000007787 solid Substances 0.000 title 1
- 238000000034 method Methods 0.000 claims description 15
- 238000010030 laminating Methods 0.000 claims description 3
- 239000010408 film Substances 0.000 description 14
- 239000000758 substrate Substances 0.000 description 12
- 239000011521 glass Substances 0.000 description 11
- 230000000694 effects Effects 0.000 description 4
- 238000005566 electron beam evaporation Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- -1 manganese-activated zinc sulfide Chemical class 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910001120 nichrome Inorganic materials 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 239000002689 soil Substances 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58143191A JPS6033587A (ja) | 1983-08-04 | 1983-08-04 | 固体映像表示板およびその製造法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58143191A JPS6033587A (ja) | 1983-08-04 | 1983-08-04 | 固体映像表示板およびその製造法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6033587A true JPS6033587A (ja) | 1985-02-20 |
JPH0576637B2 JPH0576637B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-10-25 |
Family
ID=15332983
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58143191A Granted JPS6033587A (ja) | 1983-08-04 | 1983-08-04 | 固体映像表示板およびその製造法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6033587A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5978384A (ja) * | 1982-10-28 | 1984-05-07 | 富士通株式会社 | 表示パネル |
-
1983
- 1983-08-04 JP JP58143191A patent/JPS6033587A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5978384A (ja) * | 1982-10-28 | 1984-05-07 | 富士通株式会社 | 表示パネル |
Also Published As
Publication number | Publication date |
---|---|
JPH0576637B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-10-25 |
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