JPS6030968B2 - Drawing/measuring equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a drawing device and a device for automating accuracy inspection of the drawing device using the measurement function of the measurement function portion in a measurement function portion that measures drawing results.

A conventional drawing measurement device is shown in FIG.

In Fig. 1, 1 is a drawing machine, 2 is a control device that controls the drawing machine, 3 is a measurement function section, and 4 is a paper tape reader (hereinafter referred to as PT).
R), 5 is configured like a printer, and PT
A drawing command is input to the control device 2 from R4, and the drawing machine 1 is driven by this drawing command. A feedback pulse obtained by converting the feedback of the feedback means used in the drawing device 1 into a pulse, which was only moved by the drive command, is returned from the drawing device 1 to the control device 2, and the drive is controlled in the control device 2. After being optically drawn in this way,
The measuring function unit 3 is configured to check whether the drawing result is correct. The method is to operate the control device 2 by inputting a command to the PTR 4, move the drawing machine, and optically determine whether it is black or white. For example, while the black part continues, the drawing machine 1 moves from the control device 2. Calculate the feedback pulse that is input to the measurement function unit 3 through the line, check whether the line is in accordance with the command, and similarly check whether the distance between the lines is correct from the feedback pulse while the white area continues. I was inspecting it. This result was output from the measurement function section 3 to the printer 5 and printed. The discrimination between the black part and the white part is performed by a black-and-white detection pulse sent from the drawing device 1 to the measurement function part 3. In such a rigorous device, for example, a laser beam length device was used to generate a feedback pulse, and this was well considered in terms of the system, but mechanical fluctuation factors such as elastic displacement and yawing ( In order to confirm whether the flatness of the plane mirror that reflects the laser beam is within standard values, the drawing machine 1 is periodically inspected to see if it moves correctly as instructed, and any malfunctions are corrected. There was a need. Various methods have been proposed to check whether the values are within the standard values, but no matter which method is used, commands are given to the control device to move the drawing machine, and whether the drawing machine moves according to the commands or not. For example, it took a whole day to measure the repeatability of seven IQ rib pitches for a 100-stroke stroke, which required a great deal of effort.

In addition, if another laser extender is set and driving and measurement are performed using this different laser extender, the path of the laser beam will naturally be in a different location, so differences in air density, temperature, etc. It is well known that ambient conditions can lead to inaccurate results. Furthermore, the provision of the separate laser lateral length system would incur considerable expense. In order to solve these drawbacks, the present invention attempts to automatically check whether the movement is performed according to the movement command using the measurement function section 3 provided in the device, and will be described in detail below. do.

FIG. 2 shows an embodiment of the present invention, in which 1 is a drawing machine, 2 is a control device, 3 is a measurement function section, 4 is a PTR, 5 is a printer, and 6
3 shows an example of an OR circuit provided in the drawing machine, FIG. 3 shows details of the control device 2 related to the present invention, and FIG. 4 shows an example of the detailed configuration of the measurement function section 3 related to the present invention. The original function is the same as a conventional drawing measurement device, but during inspection, it functions as if it were automatically inspected.

The functions during inspection will be explained in more detail below. To simplify the explanation, a description will be given of the process when inspecting the moving distance.

M80R×500CRG04P5CRM8 from PTR4
Input the part program 0CR... In the control device 2, by reading R into the auxiliary function word M8 by the instruction decoder 2--, the pseudo-pulse generating section generates a pseudo-black-and-white detection pulse corresponding to a black-and-white detection pulse that means inversion from black to white or white to black. 2-3 and sent to the drawing machine 1. In the drawing device 1, the pseudo black and white detection pulse is input to the OR circuit 6, and the result is sent to the measurement function section 3. Since this is the first black-and-white detection pulse input to the measurement function unit 3, the control unit (not shown) in the measurement function unit 3 resets the incremental value counter 3-1 and the absolute value counter 3-2, and the feedback pulse is input. wait until Next, the control device 2 inputs ×500R, and when the input unit is a Buddha desk, the command pulse generator 2-2 outputs pulses equivalent to 500 Buddhas, and outputs 2-4 UP/DO.
Count up WN Kawanta and calculate the error amount by 2-5 D.
Ana by /A converter. The signal is converted into an analog amount and driven by the drive section 2-6 according to the analog amount. The drawing machine 1 is driven to send feedback pulses to the control device 4.
Send to. The control device 2 uses the feedback pulse to count down the UP/DOWN counters 2 to 4 and controls the drive so as to make the error amount zero, and also sends the feedback pulse to the measurement function section 3. 3, counting is performed by the increment value counter 3-1 and absolute value counter 3-2. The control device 2 reads the next block G04P$R from the command decoder 2-1 at the stage when the command pulse generator 2-2 has finished outputting pulses for 500 mountains. In other words, dwell command G04 (P5) that commands a temporary stop of the program (0.9 sand)
is used to read R again into the second auxiliary function word M8 after the movable body of the drawing machine to be driven has enough time to reach the target location, and the pseudo pulse generator 2
From -3, a pseudo black and white detection pulse is generated again. In the above explanation, what is meant by "sufficient time to reach the target location" is that even if the drawing machine 1 is driven from the control device 2 by a movement command pulse, it does not move immediately, but after a certain delay. This means waiting until this delay disappears before moving, which is necessary for accurate drawing and measurement.

For example, if the movement speed command is 40 m/min, the rising and falling time constants are 50 sec, and the output pulse unit is 0.2 m, the UP/DOWN counter 2-4 will be Approximately 400 seconds are required for the error amount to be within one pulse.

This time varies depending on the pulse unit and required accuracy, but in practice, a time of about 500 seconds is sufficient. As described above, when the control device 2 outputs a pseudo black and white pulse, the measurement function unit 3 transmits the values of the increment value counter 3-1 and the absolute value counter 3-2 at that time to the printer 5 through the data transfer gate 3-3. At the same time, the increment value KAWANTA is reset to prepare for the next movement command.

In this way, the printer 5 prints the actual amount of movement for each movement command and the absolute amount from the point at which the measurement was started.

Here, the measurement method will be explained in more detail.

To compare with measurement, we will explain the case of drawing first.Drawing machines always move according to command pulses even if there is sufficient time for the moving object to reach the target location due to mechanical factors etc. Therefore, in order to increase the speed between blocks in the case of drawing, for example, within 5 pulses of the target movement command value, it is treated as having reached the movement command value. This is because, as is well known to those skilled in the art, if the vehicle is decelerated exponentially in order to come to a stop, it would theoretically take an infinite amount of time to come to a stop. This is how it is handled inside the control device 2, so for some reason on the machine side, the above ±
The configuration is such that even if the machine is located at a location different from the movement command value within 5 pulses, the control device 2 will not detect it. However, since it is necessary to measure positioning accuracy etc. strictly, the feedback pulses are input as they are to the measurement function section 3 and counted separately from the control device 2, so that mechanical fluctuations within the above ±5 pulses can be The error due to this can be measured. Furthermore, by using a high-precision laser length measuring device as a feedback, there is no contradiction that the control and the length measuring are performed using the same device. In addition, if the feedback pulse is a feedback means that is not highly accurate, such as an inductor synchronized feedback or an encoder, a highly accurate means such as a laser length detector is used to measure the length, and the output of the laser length detector is used to measure the output of the laser length detector. Needless to say, it can be done by inputting it to the feedback pulse input of section 3. Note that it is of course possible to directly drive the D/A converter 2-5 and the drive unit 2-6 using a digital quantity without converting it into an analog quantity. As explained above, since the difference between the command value given to the control device and the actual amount of movement becomes clear from the result printed on the printer 5, the operation result of the drawing machine is simply the movement command and the auxiliary function word M80. The inspection time to confirm the normality of the device is less than 1/10 compared to the conventional method when measuring 100 strokes at a pitch of 7 lines, and the labor is reduced. All you have to do is prepare beforehand, and you don't need to do anything afterwards.

Furthermore, among the functions necessary to achieve these effects, most of the circuit functions are those originally provided as a drawing/measuring device, and newly required parts are created using the auxiliary function word M80. Combined with the fact that there is only the circuit 2-3 that generates the pseudo black and white detection pulse and the OR circuit 6 that ORs the original black and white detection pulse, the effect is tremendous.

In the above embodiment, the movement results were simply counted by the incremental value counter and the absolute value counter, and the results were printed on the printer 5, but the command value given by the control device 2 is sent to the measurement function section 3. , in the explanation of the above embodiment, after reading the auxiliary function word M8 eaves R and allowing enough time to reach the target location, calculate the difference between the increment value counter and the command value and send it to the printer 5. If output, the difference between the command value and the actual amount of movement becomes obvious, making it possible to provide a more convenient device. The present invention aims to measure the accuracy of the device itself by taking advantage of its extremely high accuracy when using a laser extender or the like as feedback for movement control. The idea is that it can be fully used in IC mask pattern drawing machines that require high precision, and even higher precision drawing devices.

[Brief explanation of drawings]

FIG. 1 is a block diagram of a conventional drawing/measuring device, and FIG. 2 is a block diagram of a drawing/measuring device which is an embodiment of the present invention.
FIG. 3 is a block diagram showing a detailed example of the control device 2, and FIG. 4 is a block diagram showing a detailed example of the measurement function section 3. 1...Drawing machine, 2...Control device, 3.
...Measurement function unit, 4...Paper tape reader, 5...Printer, 6...OR circuit, 2-1...Instruction decoder , 2-2...
・Command pulse generation section, 2-3...Pseudo pulse generation section, 2-4...UP/DOWN counter, 2
-5...D/A converter, 2-6...driver, 3-1...increment value counter, 3-2...
...Absolute value counter, 3-3...Data transfer gate. Figure 1 Figure 2 Figure 3 Figure 4

Claims (1)

[Claims] 1. In a drawing/determination device consisting of a drawing machine with a moving means equipped with pulsed feedback, its control device, and a measurement function unit that measures the drawing results, specific commands can be sent as auxiliary function words by a part program. Equipped with means for generating pseudo black and white detection pulses instead of black and white detection pulses for measuring the line width of drawing results by inputting them to a control device that controls the drawing machine, and counting feedback pulses between the pseudo black and white detection pulses. A drawing/measuring device characterized by having a function of automatically measuring the positioning accuracy of the moving means itself.