JPS6029967U - thin film element - Google Patents
thin film elementInfo
- Publication number
- JPS6029967U JPS6029967U JP12203383U JP12203383U JPS6029967U JP S6029967 U JPS6029967 U JP S6029967U JP 12203383 U JP12203383 U JP 12203383U JP 12203383 U JP12203383 U JP 12203383U JP S6029967 U JPS6029967 U JP S6029967U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film element
- coating layer
- ceramic coating
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Level Indicators Using A Float (AREA)
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Diaphragms And Bellows (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図および第２図は本考案に係る薄膜素子を適用する
従来の液面計検出部を示す概略構成図およびその要部拡
大図、第３図は本考案に係る薄膜素子の一実施例を示す
要部拡大図、第４図ａないしｄはその受形例を示す概略
図、第５図ａｔ ｂｙＣは本考案の別の実施例を示す図
である。
１・・・・・・タンク、２・・・・・・被測定液体、５
・・・・・リッド、５Ａ・・・・・・外ロッド（接合さ
れる部材）、１０・・・・・・シールダイヤフラム（薄
膜状部材）、２０・・・・・・セラミックコーティング
層、２１・・・・・・ダイヤフラム、２２・・・・・・
ベローズ、２３・・・・・・カプセル、２４・・・・・
・ブルドン管、２５・・・・・・接合部材、２６・・・
・・・トルクチューブ、２９・・・・・・ハウジング。
第４図
（ｂ）
（ａ）２０
１ ｌ 、。
第５図
（ａ）
２９ ２８ ＩＩ
（ｂ） （ｃ）
３１
一−−−−−＼２９２６− 〜−−−１〜”２０FIGS. 1 and 2 are schematic configuration diagrams and enlarged views of essential parts of a conventional liquid level gauge detection section to which the thin film element according to the present invention is applied, and FIG. 3 is an example of the thin film element according to the present invention. FIGS. 4A to 4D are schematic diagrams showing an example of its shape, and FIG. 5 at byC is a diagram showing another embodiment of the present invention. 1...tank, 2...liquid to be measured, 5
...Lid, 5A ... Outer rod (member to be joined), 10 ... Seal diaphragm (thin film member), 20 ... Ceramic coating layer, 21 ...Diaphragm, 22...
Bellows, 23... Capsule, 24...
・Bourdon tube, 25... Joining member, 26...
... Torque tube, 29 ... Housing. FIG. 4(b) (a) 20 1 l,. Figure 5 (a) 29 28 II (b) (c) 31 1-----\2926- ~---1~"20
Claims (1)
かつこれら部材の腐蝕性雰囲気中に臨む面には、その接
合部分をも含めてセラミックコーティング層が形成され
ていることを特徴とする薄膜素子。Comprising a metal thin film member and a member joined to the member,
A thin film element characterized in that a ceramic coating layer is formed on the surfaces of these members facing a corrosive atmosphere, including their joint parts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12203383U JPS6029967U (en) | 1983-08-05 | 1983-08-05 | thin film element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12203383U JPS6029967U (en) | 1983-08-05 | 1983-08-05 | thin film element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6029967U true JPS6029967U (en) | 1985-02-28 |
Family
ID=30279091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12203383U Pending JPS6029967U (en) | 1983-08-05 | 1983-08-05 | thin film element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6029967U (en) |
-
1983
- 1983-08-05 JP JP12203383U patent/JPS6029967U/en active Pending
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