JPS6051444U - Capacitive pressure sensor - Google Patents
Capacitive pressure sensorInfo
- Publication number
- JPS6051444U JPS6051444U JP14360683U JP14360683U JPS6051444U JP S6051444 U JPS6051444 U JP S6051444U JP 14360683 U JP14360683 U JP 14360683U JP 14360683 U JP14360683 U JP 14360683U JP S6051444 U JPS6051444 U JP S6051444U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- capacitive pressure
- glass
- sealed
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は静電容量型圧力センサの基本構造を示す図、第
２図は本考案の静電容量型圧力センサにおける真空封止
部の構造を拡大して示した図である。
１・・・アルミナダイアフラム、２・・・アルミナ基体
、３，４・・・電極、５・・・封着ガラス、６・・・真
空封止部、７・・・真空封止孔、８・・・封止ガラス。FIG. 1 is a diagram showing the basic structure of a capacitive pressure sensor, and FIG. 2 is an enlarged diagram showing the structure of a vacuum sealing part in the capacitive pressure sensor of the present invention. DESCRIPTION OF SYMBOLS 1... Alumina diaphragm, 2... Alumina base, 3, 4... Electrode, 5... Sealing glass, 6... Vacuum sealing part, 7... Vacuum sealing hole, 8... ...Sealing glass.
Claims (1)
に対応して湾曲出来るアルミナセラミックのダイヤフラ
ムが所定の間隔を隔ててガラス封着され、前記基体およ
びダイヤフラムのそれぞれの対向面に導電性電極が形成
され、内部が真空に排気された絶対圧検知圧力センサに
おいて、真空封止部をガラスで封止したことを特徴とす
る静電容量型圧力センサ。An alumina ceramic diaphragm that can bend in response to pressure changes is glass-sealed at a predetermined interval to face a base made of alumina ceramic, and conductive electrodes are formed on opposing surfaces of the base and the diaphragm, respectively. A capacitive pressure sensor characterized in that an absolute pressure sensing pressure sensor whose inside is evacuated to a vacuum is characterized in that a vacuum sealing part is sealed with glass.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14360683U JPS6051444U (en) | 1983-09-19 | 1983-09-19 | Capacitive pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14360683U JPS6051444U (en) | 1983-09-19 | 1983-09-19 | Capacitive pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6051444U true JPS6051444U (en) | 1985-04-11 |
Family
ID=30320503
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14360683U Pending JPS6051444U (en) | 1983-09-19 | 1983-09-19 | Capacitive pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6051444U (en) |
-
1983
- 1983-09-19 JP JP14360683U patent/JPS6051444U/en active Pending
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