JPS58165640U

JPS58165640U - pressure gauge

Info

Publication number: JPS58165640U
Application number: JP4330682U
Authority: JP
Inventors: 三枝　徳治
Original assignee: 横河電機株式会社
Priority date: 1982-03-26
Filing date: 1982-03-26
Publication date: 1983-11-04

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

第１図は従来より一般に使用されている従来例　　　　
゛の構成説明図、第２図〜第４図は第１図の動作説明図
、第５図は本考案の一実施例の構成説明図、第６図は本
考案の他の実施例の構成説明図である。１・・・ボデー、２・・・絶縁リング、２１・・・大気
連通パイプ、３・・・測定ダイアフラム、４・・・電極
ユニット、４１・・・電極基板、４２・・・電極、５・
・・連結軸、６・・：カバー、６１・・・真空室、７・
・・固定容量電極、８・・・接合層、９・・・受圧素子
、９１・・・大気圧室。Figure 1 shows a conventional example that has been commonly used.
2 to 4 are explanatory diagrams of the operation of FIG. 1, FIG. 5 is an explanatory diagram of the configuration of one embodiment of the present invention, and FIG. 6 is a configuration explanatory diagram of another embodiment of the present invention. It is an explanatory diagram. DESCRIPTION OF SYMBOLS 1... Body, 2... Insulating ring, 21... Atmospheric communication pipe, 3... Measuring diaphragm, 4... Electrode unit, 41... Electrode substrate, 42... Electrode, 5...
...Connection shaft, 6...: Cover, 61... Vacuum chamber, 7.
...Fixed capacitance electrode, 8...Joining layer, 9...Pressure receiving element, 91...Atmospheric pressure chamber.

Claims

[Scope of utility model registration request]

A cylindrical main body tenon, an insulating ring having one end connected to one end of the main body and having a wall thickness thinner than that of the main body, a measuring diaphragm covering the other end of the insulating ring, and the measuring diaphragm. a plate-shaped electrode unit provided in parallel to face the main body; a connecting shaft connecting the electrode unit and the measuring diaphragm; and a cover constituting a vacuum chamber, a plate-shaped plate whose peripheral edge is connected to the other end of the insulating ring and is arranged parallel to the chain diaphragm and the electrode unit. a fixed capacitance electrode, a through hole provided in the fixed capacitance electrode through which the connecting shaft passes, and a seal between the through hole and the connecting shaft; 1. A pressure gauge comprising: a pressure receiving element forming an atmospheric pressure chamber communicating with the atmosphere and having an effective area smaller than the effective area of the measuring diaphragm.