JPS5821839U - pressure detector - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of the drawing]

Fig. 1 is a block diagram of a conventional pressure detector, Fig. 2 is an enlarged view of the main parts of Fig. 1, Fig. 3 is a block diagram showing an embodiment of the pressure detector according to this invention, and Fig. 4 FIG. 2 is a configuration diagram showing another embodiment of the same pressure detector. 3.21... Electrode support, 4... Insulating material, 2゜22... Diaphragm, 5...
・Opposing surface (inner surface of recess), 6: ...Fixed electrode, 2
0.23...Welded joint. Figure 3 Figure 4

Claims (1)

[Scope of utility model registration request] An electrode support, an insulating material inserted and fixed inside the electrode support, and a diaphragm that is provided to cover the insulating material and the electrode support and receives the pressure of the measurement fluid and also serves as a moving electrode. , a fixed electrode provided on the insulating material portion of the inner surface of a recess formed in the electrode support and the insulating material facing the diaphragm, and the measurement pressure applied to the diaphragm is transferred between the diaphragm and the above 1. A pressure detector which converts and detects capacitance changes between fixed electrodes, characterized in that the diaphragm and the electrode support are welded together near the outer periphery of the inner surface of the recess.