JPS5952541U - vacuum valve - Google Patents
vacuum valveInfo
- Publication number
- JPS5952541U JPS5952541U JP14782182U JP14782182U JPS5952541U JP S5952541 U JPS5952541 U JP S5952541U JP 14782182 U JP14782182 U JP 14782182U JP 14782182 U JP14782182 U JP 14782182U JP S5952541 U JPS5952541 U JP S5952541U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- vacuum valve
- metal bellows
- small chamber
- vacuum container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の一実施例を示す断面図、第２図は本考
案の他の実施例を示す断面図である。
１・・・・・・真空容器、２・・・・・・固定電極、３
・・・・・・可動電極、４・・・・・・金属ベローズ、
５・・・・・・金属ベローズ、５ａ・・・・・・接点、
５ｂ・・・・・・金属ベローズ内部、１１・・・・・・
金属パイプ、１２・・・・・・検出用電極、１２ａ・・
・・・・接点、１３・・・・・・封印用金属、１４・・
・・・・穴。FIG. 1 is a cross-sectional view showing one embodiment of the present invention, and FIG. 2 is a cross-sectional view showing another embodiment of the present invention. 1... Vacuum container, 2... Fixed electrode, 3
......Movable electrode, 4...Metal bellows,
5...Metal bellows, 5a...Contact,
5b...Inside metal bellows, 11...
Metal pipe, 12...Detection electrode, 12a...
...Contact, 13...Metal for sealing, 14...
····hole.
Claims (1)
極を収納し、第１の金属ベローズを設けて前記電極を接
離可能に構成した真空７＜ルブにおいて、前記真空容器
内に該容器内と略同−圧力の収縮自在な密封した真空不
良検出用の第２の金属ベローズからなる小室を形成し、
且つこの小室と前記真空容器とを金属パイプにより連通
したことを特徴とする真空バルブ。A pair of fixed and movable electrodes are housed in a vacuum container made of an insulating material, and a first metal bellows is provided to make the electrodes detachable. Forming a small chamber made of a second metal bellows for detecting a vacuum defect, which is substantially the same as that of a sealed chamber capable of contracting the pressure;
A vacuum valve characterized in that the small chamber and the vacuum container are communicated through a metal pipe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14782182U JPS5952541U (en) | 1982-09-29 | 1982-09-29 | vacuum valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14782182U JPS5952541U (en) | 1982-09-29 | 1982-09-29 | vacuum valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5952541U true JPS5952541U (en) | 1984-04-06 |
| JPH0117066Y2 JPH0117066Y2 (en) | 1989-05-18 |
Family
ID=30328611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14782182U Granted JPS5952541U (en) | 1982-09-29 | 1982-09-29 | vacuum valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5952541U (en) |
-
1982
- 1982-09-29 JP JP14782182U patent/JPS5952541U/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0117066Y2 (en) | 1989-05-18 |
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