JPS6029611A - 検出ヘツド - Google Patents

検出ヘツド

Info

Publication number
JPS6029611A
JPS6029611A JP13720583A JP13720583A JPS6029611A JP S6029611 A JPS6029611 A JP S6029611A JP 13720583 A JP13720583 A JP 13720583A JP 13720583 A JP13720583 A JP 13720583A JP S6029611 A JPS6029611 A JP S6029611A
Authority
JP
Japan
Prior art keywords
head
blocks
cos
phase difference
outputs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13720583A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429967B2 (OSRAM
Inventor
Akira Himuro
氷室　陽
Katsutoshi Mibu
捷利 壬生
Takamoto Yoshioka
崇元 吉岡
Akiyoshi Narimatsu
成松　明壽
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Magnescale Inc
Original Assignee
Sony Magnescale Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Magnescale Inc filed Critical Sony Magnescale Inc
Priority to JP13720583A priority Critical patent/JPS6029611A/ja
Priority to EP84305094A priority patent/EP0157034B1/en
Priority to DE3486351T priority patent/DE3486351T2/de
Priority to US06/634,791 priority patent/US4663588A/en
Publication of JPS6029611A publication Critical patent/JPS6029611A/ja
Publication of JPH0429967B2 publication Critical patent/JPH0429967B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/247—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using time shifts of pulses

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
JP13720583A 1983-07-27 1983-07-27 検出ヘツド Granted JPS6029611A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP13720583A JPS6029611A (ja) 1983-07-27 1983-07-27 検出ヘツド
EP84305094A EP0157034B1 (en) 1983-07-27 1984-07-26 Detector head
DE3486351T DE3486351T2 (de) 1983-07-27 1984-07-26 Detektorkopf.
US06/634,791 US4663588A (en) 1983-07-27 1984-07-26 Detector for use for measuring dimensions of an object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13720583A JPS6029611A (ja) 1983-07-27 1983-07-27 検出ヘツド

Publications (2)

Publication Number Publication Date
JPS6029611A true JPS6029611A (ja) 1985-02-15
JPH0429967B2 JPH0429967B2 (OSRAM) 1992-05-20

Family

ID=15193240

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13720583A Granted JPS6029611A (ja) 1983-07-27 1983-07-27 検出ヘツド

Country Status (1)

Country Link
JP (1) JPS6029611A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63225124A (ja) * 1987-03-14 1988-09-20 Hitachi Ltd 磁気的位置検出装置
WO2005073672A1 (ja) * 2004-02-02 2005-08-11 Sankyo Seiki Mfg. Co., Ltd. 磁気センサ及びその製造方法

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51151568A (en) * 1975-06-20 1976-12-27 Ono Sokki Co Ltd Detector
JPS5559314A (en) * 1978-10-27 1980-05-02 Sony Corp Magnetic scale signal detector
JPS561567A (en) * 1979-06-15 1981-01-09 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS5687862A (en) * 1979-12-19 1981-07-16 Hitachi Ltd Magnetic head of revolution detector
JPS57158513A (en) * 1981-03-25 1982-09-30 Sharp Corp Magnetic scale
JPS57197909A (en) * 1981-04-22 1982-12-04 Philips Nv Acoustic band filter

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51151568A (en) * 1975-06-20 1976-12-27 Ono Sokki Co Ltd Detector
JPS5559314A (en) * 1978-10-27 1980-05-02 Sony Corp Magnetic scale signal detector
JPS561567A (en) * 1979-06-15 1981-01-09 Matsushita Electric Ind Co Ltd Manufacture of semiconductor device
JPS5687862A (en) * 1979-12-19 1981-07-16 Hitachi Ltd Magnetic head of revolution detector
JPS57158513A (en) * 1981-03-25 1982-09-30 Sharp Corp Magnetic scale
JPS57197909A (en) * 1981-04-22 1982-12-04 Philips Nv Acoustic band filter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63225124A (ja) * 1987-03-14 1988-09-20 Hitachi Ltd 磁気的位置検出装置
WO2005073672A1 (ja) * 2004-02-02 2005-08-11 Sankyo Seiki Mfg. Co., Ltd. 磁気センサ及びその製造方法

Also Published As

Publication number Publication date
JPH0429967B2 (OSRAM) 1992-05-20

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