JPS6028435B2 - solid state imaging device - Google Patents

solid state imaging device

Info

Publication number
JPS6028435B2
JPS6028435B2 JP51154017A JP15401776A JPS6028435B2 JP S6028435 B2 JPS6028435 B2 JP S6028435B2 JP 51154017 A JP51154017 A JP 51154017A JP 15401776 A JP15401776 A JP 15401776A JP S6028435 B2 JPS6028435 B2 JP S6028435B2
Authority
JP
Japan
Prior art keywords
photoelectric conversion
signal
field
charge transfer
imaging device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP51154017A
Other languages
Japanese (ja)
Other versions
JPS5377125A (en
Inventor
善夫 太田
康明 照井
孝道 和田
優 吉野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP51154017A priority Critical patent/JPS6028435B2/en
Publication of JPS5377125A publication Critical patent/JPS5377125A/en
Publication of JPS6028435B2 publication Critical patent/JPS6028435B2/en
Expired legal-status Critical Current

Links

Description

【発明の詳細な説明】 本発明は光情報を電気信号に変換する固体糠像装置に関
し、アナログ遅延線を用いることなく、簡単な回路処理
で再現画像の垂直方向の解像度を視覚的に向上させるこ
とを目的とする。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a solid-state image device that converts optical information into electrical signals, and visually improves the vertical resolution of reproduced images through simple circuit processing without using analog delay lines. The purpose is to

二次元の光情報を電気信号に変換する装置として、光電
変換セルとBBDやCCDに代表される電荷転送素子を
組み合せ、或いは光電変換セルとMOS−FETとの組
み合せによるものがある。
Some devices that convert two-dimensional optical information into electrical signals include a combination of a photoelectric conversion cell and a charge transfer element such as a BBD or a CCD, or a combination of a photoelectric conversion cell and a MOS-FET.

このような固体撮像装置の代表的な概略図を第1図aに
示し、その動作説明を同図b,cおよび第2図で行なう
。la,lb,……,ln,2a,2 b,・・・…,
2n,〜na,nb,..,...nnの各々は光電変
換セルを示す。該各光電変換セルは二次元の被写体光晴
報中の光の強弱に対応した光電変換信号を発生せる素子
、例えばフオトダィオードのような素子であり、該光電
変換信号の各々は同図中で示した電荷転送段IT,2T
,.・・…nTの各々に同図中で示した矢印p(実線で
示す)、q(点数で示す)のように読み込まれる。前記
の電荷転送段に読み込まれた光電変換信号が水平信号出
力ライン4まで移送され、水平信号出力ライン4の出力
端子5より時系列化光電変換信号、すなわち映像出力信
号を得る。同図中で示す矢印pは1つのTV信号に於け
る1フィールド期間、例えば第1フィールド期間に於け
る光電変換セルから電荷転送段への信号電荷の移送方向
を示し、矢印qは第2フィールド期間におけるそれを示
している。
A typical schematic diagram of such a solid-state imaging device is shown in FIG. 1A, and its operation will be explained with reference to FIGS. 1B and 2C and FIG. la, lb, ..., ln, 2a, 2 b, ......,
2n, ~na, nb, . .. 、. .. .. Each of nn indicates a photoelectric conversion cell. Each photoelectric conversion cell is an element, such as a photodiode, that generates a photoelectric conversion signal corresponding to the intensity of light in the two-dimensional object light report, and each of the photoelectric conversion signals is shown in the figure. Charge transfer stage IT, 2T
、. ... are read into each of nT as indicated by arrows p (indicated by a solid line) and q (indicated by points) shown in the figure. The photoelectric conversion signal read into the charge transfer stage is transferred to the horizontal signal output line 4, and a time-series photoelectric conversion signal, that is, a video output signal is obtained from the output terminal 5 of the horizontal signal output line 4. The arrow p shown in the same figure shows the direction of signal charge transfer from the photoelectric conversion cell to the charge transfer stage in one field period of one TV signal, for example, the first field period, and the arrow q shows the direction of signal charge transfer from the photoelectric conversion cell to the charge transfer stage in one field period of one TV signal. It shows that in the period.

前記の光電変換セル列のうちの任意の列、ma,mb,
mc,mf,mKとこれらの光電変換セルから移送され
た光電変換信号を転送するための電荷転送段mTとだけ
を、説明の明白化のため同図bに示す。
Any column of the photoelectric conversion cell columns, ma, mb,
For clarity of explanation, only mc, mf, mK and a charge transfer stage mT for transferring photoelectric conversion signals transferred from these photoelectric conversion cells are shown in FIG.

同図中に於ける実線で示す矢印pは第1フィールド期間
に於ける信号電荷の移送方向を示し、まず第1フィール
ド期間に該光電変換セルma,mc,me,mKから得
られる信号電荷が同図中の垂直方向に沿って一つ置きに
同時に該電荷転送段mTに矢印pに示す流れで移送され
、次のフィールド期間すなわち第2フィールド期間にな
ると同図中の点線で示す矢印qで示す信号電荷の流れで
、残りの該光電変換セルmb,md,mfから得られる
信号電荷が該転送段mTに移送される。
An arrow p indicated by a solid line in the figure indicates the transfer direction of signal charges in the first field period, and first, the signal charges obtained from the photoelectric conversion cells ma, mc, me, mK during the first field period are Along the vertical direction in the figure, every other charge is simultaneously transferred to the charge transfer stage mT in the flow shown by the arrow p, and in the next field period, that is, the second field period, the charge is transferred by the arrow q shown by the dotted line in the figure. With the flow of signal charges shown, the signal charges obtained from the remaining photoelectric conversion cells mb, md, mf are transferred to the transfer stage mT.

ここで、前記の第1フィールド期間に於いて得られる各
光電変換セルma,mc,me,mばから得られる信号
電荷の大きさを各々a,c,e・・・・・・xとし、第
2フィールド期間に於いて得られる各光電変換セルmb
,md,mfから得られる信号電荷の大きさを各々b,
d,fとする。説明の簡易のため、同図cにこれら第1
のフィールド及び第2のフィ−ルド‘こ於いて得られる
信号電荷の大きさと順序を各フィールド期間の時間軸t
を同一に取り、各々IF,2Fに示す。第2図は以上の
ようにして各信号電荷を読み出し、映像出力信号として
TV画面に再生したときの走査線上の信号の大きさa,
c,e,xが第1フィールド目f,の走査線上再生され
、同じくb,d,fが第2フィールド自らの走査線上に
再生されることを示す。
Here, the magnitudes of signal charges obtained from each photoelectric conversion cell ma, mc, me, mb obtained in the first field period are respectively a, c, e...x, Each photoelectric conversion cell mb obtained in the second field period
The magnitude of the signal charge obtained from , md, mf is expressed as b,
Let them be d and f. For ease of explanation, these first
The magnitude and order of the signal charges obtained in the field and the second field are determined by the time axis t of each field period.
are taken as the same and shown in IF and 2F, respectively. Figure 2 shows the signal magnitude a,
This shows that c, e, and x are reproduced on the scanning lines of the first field f, and similarly, b, d, and f are reproduced on the scanning lines of the second field itself.

本発明は、上記のような固体撮像装置の解像度を更に向
上させるためになされたものであり、垂直方向の補間信
号を用いることにより、高解像度の得られる固体撮像装
置を提案するものである。
The present invention has been made to further improve the resolution of the solid-state imaging device as described above, and proposes a solid-state imaging device that can obtain high resolution by using vertical interpolation signals.

従来では垂直方向の補間信号を用いて解像度の向上を図
るのに、超音波ガラス遅延線、或いは電荷転送素子列等
のアナログ遅延線を別に設けて回路処理することにより
行なわれきたが、これらのアナログ遅延線は電気的特性
、価格、回路処理の複雑性、容積の点で問題があった。
本発明はこのような複雑な回路を用いることのない、小
型で安価な固体撮像装置を提供するものである。
Conventionally, to improve resolution using vertical interpolation signals, this was done by separately providing an analog delay line such as an ultrasonic glass delay line or a charge transfer element array and processing the circuit. Analog delay lines had problems in terms of electrical characteristics, cost, circuit processing complexity, and volume.
The present invention provides a compact and inexpensive solid-state imaging device that does not use such complicated circuits.

以下図面とともに本発明を実施例に基いて説明する。The present invention will be explained below based on examples together with the drawings.

第3図a,b,dにもとづいて本発明の構成を述べる。The configuration of the present invention will be described based on FIGS. 3a, b, and d.

同図aに於いて、Am,Bm,・・・・・・Ymは光電
変換セルを、a,b,…・・・,yはこれらの光電変換
セルから得られる信号電荷の大きさを示し、各矢印の方
向に電荷転送素子段Tmに移送される。言うまでもなく
、ここで図示した光電変換セルと電荷転送段は本固体撮
擬装層に於ける撮像面の一部のみを説明の簡易化のため
に示したものである。
In the same figure a, Am, Bm,...Ym indicate photoelectric conversion cells, and a, b,..., y indicate the magnitude of signal charges obtained from these photoelectric conversion cells. , are transferred to the charge transfer element stage Tm in the direction of each arrow. Needless to say, the photoelectric conversion cell and the charge transfer stage shown here are only a part of the imaging surface of the solid-state imaging layer for the purpose of simplifying the explanation.

同図中に於けるぐ1,ぐ2は各々、該電荷転送段Tmを
駆動するためのクロックラィンと、該光電変換セルから
の信号電荷を該電荷転送手段Tmに移送するためのクロ
ックラィンとを兼ねたラインを示し、?1,ぐ2には例
えば二相のパルス電圧を加えて動作させる。
In the figure, G1 and G2 are a clock line for driving the charge transfer stage Tm, and a clock line for transferring signal charges from the photoelectric conversion cell to the charge transfer means Tm, respectively. Indicates a line that also serves as ? 1 and 2 are operated by applying, for example, a two-phase pulse voltage.

このように電荷転送段のクロックラインと信号電荷を移
送するクロツクラィンを共通に用い得る園体撮像装置の
構成の説明は、本出願人が概に提案した特脇昭50−5
8827号明細書(特公昭58−22898号公報参照
)に於いて詳述されているのでここでは省略する。
A description of the structure of the Sonobody imaging device that can commonly use the clock line of the charge transfer stage and the clock line for transferring signal charges is given in the Tokuwaki Sho 50-5, which was generally proposed by the present applicant.
Since it is detailed in the specification of No. 8827 (see Japanese Patent Publication No. 58-22898), it is omitted here.

該2相パルス波形のタイミングにより第1フィールドか
ら第4フィールドまで至る信号電荷の読み出し状態を同
図bに、前記の同図aと幾何学的に対応させて示す。
The state of signal charge readout from the first field to the fourth field according to the timing of the two-phase pulse waveform is shown in FIG. 2B, geometrically corresponding to FIG.

同図cの駆動パルス波形ぐ1,ぐ2とともに動作を述べ
る。なお、同図cには転送パルス◇V,,ぐV2は簡略
化して示したが、実際に印加する波形は同図cの点線部
を拡大した示した同図dの様な転送パルスとなっている
。また、各光電変換セルは、上記特額昭50−5882
7号の第2図に示しためsラインに、リセット信号をフ
ィールド毎に印加することにより、フィールド毎にリセ
ットされ、次のフィールドの読み込みに備えるようにな
っている。まず、最初のフィ−ルド、すなわち第1フィ
ールド期間IFに於いて、該クロックラィン?1に、電
荷転送パルス◇V,と、該光電変換セルAm,Cm,E
m,・・…・Ymから得られる信号電荷を該電荷転送段
Tm‘こ移送、すなわち読み出すための前記の転送パル
ス?V,より高い電位の読み込みパルスRとを、第1フ
ィールド走査IFの始まる前のフィールドプランキング
期間BI中に重畳させたパルス信号を与え、もう一方の
クロックラィンで2には転送パルス■V2のみを与える
The operation will be described together with drive pulse waveforms 1 and 2 shown in FIG. Although the transfer pulses ◇V,, and V2 are shown in a simplified manner in figure c, the waveform that is actually applied is the transfer pulse shown in figure d, which is an enlarged version of the dotted line in figure c. ing. In addition, each photoelectric conversion cell is
By applying a reset signal to the s line shown in FIG. 2 of No. 7 for each field, each field is reset and prepared for reading the next field. First, in the first field, that is, the first field period IF, the clock line? 1, the charge transfer pulse ◇V, and the photoelectric conversion cells Am, Cm, E
The aforementioned transfer pulse for transferring the signal charge obtained from m,...Ym to the charge transfer stage Tm', that is, reading it out? V, a read pulse R with a higher potential is applied, and a pulse signal is given that is superimposed with it during the field blanking period BI before the start of the first field scan IF, and on the other clock line 2, a transfer pulse ■ V2 only is applied. give.

このようにJ1,?2とを印加することにより、一水平
走査期間日(TV標準走査の場合は63.5〃S)毎に
第1フィ−ルド期間IFに於いて、信号電荷がa,b,
c,・…・・yのように現われる(同図b)。次の第2
フィールド期間2Fに於いて、第2フィールド走査期間
2Fの始る直前のフィールドプランキング期間B2中に
01,ぐ2ラインとも前記のような電位を有する読み込
みパルスRと、各々の転送パルスJV,,ぐV2とを重
畳させたパルス信号を加える。
Like this J1,? 2, the signal charges a, b,
They appear as c,...y (b in the same figure). next second
In the field period 2F, during the field blanking period B2 immediately before the start of the second field scanning period 2F, the read pulse R having the potential as described above for the 01 and 2 lines, and the respective transfer pulses JV, . A pulse signal that is superimposed with V2 is added.

この期間中に於いてはOV・パルスが◇V2パルスに先
行して加わるタイミングとする。そうすると、各光電変
換信号の信号電荷は二つづつ浸り合い、すなわち、該信
号電荷aとb,cとd,eとf,gとxとの各和信号が
同図bの2Fのごとく順次得られる。第3フィールド期
間F3の始まる直前のフィ−ルドブランキング期間B3
中には、前記のような読み込みパルスRをぐ2ラインの
みに重畳させると、このフィールド期間中に得られる水
平走査信号の一部として、各信号電荷に対応する信号と
して同図bの3Fに示すように、b,d,f,×のよう
に現われる。
During this period, the OV pulse is added in advance of the ◇V2 pulse. Then, the signal charges of each photoelectric conversion signal are immersed two by two, that is, the respective sum signals of the signal charges a and b, c and d, e and f, and g and x are sequentially generated as shown in 2F in b in the same figure. can get. Field blanking period B3 immediately before the start of the third field period F3
In some cases, when the above-mentioned read pulse R is superimposed on only 2 lines, the signal corresponding to each signal charge is generated as a part of the horizontal scanning signal obtained during this field period in 3F of the same figure (b). As shown, they appear as b, d, f, and x.

さらに第4フィールド期間4Fの始まる直前のフィール
ドプランキング期間B4中に於いて、前記の読み込みパ
ルスRを?1,ぐ2の各々のクロックラインに重畳させ
、かっこの期間中に於いて前記転送パルスぐV2パルス
がめV,パルスに先行して加わるタイミングで動作させ
る。
Furthermore, during the field blanking period B4 immediately before the start of the fourth field period 4F, the above-mentioned read pulse R is applied? It is superimposed on each of the clock lines 1 and 2, and is operated at the timing when the transfer pulse V2 pulse precedes the V pulse during the period in parentheses.

このとき得られる各信号電荷は同図bの4Fに示すよう
に、該各信号電荷bとc,dとe,fとg,xとyが混
り合った信号電荷、すなわち水平走査信号の一部として
得られる。このようにすれば、TV画面の垂直方向の走
査期間tに対して日の期間ずれた例えばaとcの映像信
号の間にそれぞれH/4ずつの期間をずらしてa+b,
b,b+cという映像信号を挿入することが可能となる
訳である。以上のような第1フィールドから第4フィー
ルドまでの動作をくり返して、実質的に1:4の飛び越
し走査による映像出力信号を得るこの1:4の飛び越し
走査による映像出力信号を再生するには、従来のTV受
像機とは異なる形式の受像機、すなわち従来の1フィー
ルドの半分の時間を1フィールドとして走査線が1:2
でなく1:4である受像機を用いる。
Each signal charge obtained at this time is a mixture of signal charges b and c, d and e, f and g, and x and y, as shown in 4F in Figure b, that is, a horizontal scanning signal. Obtained as a part. In this way, for example, a period of H/4 is shifted between video signals a and c, which are shifted by a period of days with respect to a scanning period t in the vertical direction of the TV screen, and a + b,
This makes it possible to insert video signals b and b+c. By repeating the operations from the first field to the fourth field as described above, a video output signal obtained by substantially 1:4 interlaced scanning is obtained.To reproduce this video output signal by 1:4 interlaced scanning, The receiver is of a different format from the conventional TV receiver, in other words, the scanning line is 1:2, with one field taking half the time of the conventional one field.
Instead, use a receiver with a ratio of 1:4.

説明の明白化のため、前記の各信号電荷a,b,c,…
・・・yは二次元光情報中に於ける垂直方向に沿った一
点、すなわち一絵素づつの信号に相当する信号電荷とし
た。
For clarity of explanation, each of the signal charges a, b, c,...
. . . y is a signal charge corresponding to one point along the vertical direction in the two-dimensional optical information, that is, a signal corresponding to one pixel.

すなわち、これらの信号電荷を映像信号として用いて、
TV画面に再現すると画面上の垂直方向の1本の画像が
得られる。実際は同図aに示すような光電変換セルと電
荷転送段との組合せは水平方向にも多数くり返して設け
られているので、前記の信号電荷a,b,c,・・・・
・・yは水平方向にも拡張して考えて、a′,b′,c
′,・・・・・・y′なる水平走査信号として考えるこ
とができるのは明らかである。このようにして得た映像
出力信号をTV画面上に再現したときの画像を走査線信
号として、第4図に示す。
In other words, using these signal charges as a video signal,
When reproduced on a TV screen, a single vertical image on the screen is obtained. In reality, the combination of photoelectric conversion cells and charge transfer stages as shown in FIG.
...If y is expanded in the horizontal direction, a', b', c
', . . . y' can obviously be considered as horizontal scanning signals. An image obtained by reproducing the video output signal thus obtained on a TV screen is shown in FIG. 4 as a scanning line signal.

同図中に於いて 実線で示す走査信号f,は第1フィールド、点線
〃 りま第2 〃一点鎖線 〃 払
ま第3 〃 二点鎖線 〃 りま第4 〃 の各フィールド期間に於ける走査線の位置を示す。
In the figure, the scanning signal f, shown by the solid line, is the first field, and the dotted line
〃 Rima No. 2〃 One-dot chain line〃 〃 Rima No. 3〃 Double-dot chain line〃 Rima No. 4〃 Indicates the position of the scanning line in each field period.

上述のように、第2フィールド期間と第4フィールド期
間に於いては二つの光電変換信号の和として信号出力を
得るので、この二つの期間中のみ信号レベルを1′2に
調整する利得調整回路に映像出力信号を導く。
As mentioned above, in the second field period and the fourth field period, the signal output is obtained as the sum of the two photoelectric conversion signals, so the gain adjustment circuit adjusts the signal level to 1'2 only during these two periods. Guide the video output signal to.

また第2フィールドと第4フィールドの信号出力は第1
フィールドの信号出力と第3フィールドの信号出力との
間に表示するようなTV受像機を用いる。このようにす
ると、第4図に示すように、前記のf,には前記の水平
走査線信号a′〃 ら 〃 a′+b′ 2’ 〃 ら 〃 b′, b′+d′ 〃 L 〃 「「 が現われ、f,〜f4の周期をもつてくり返してTV画
面の下端まで至る。
Also, the signal output of the second field and the fourth field is
A TV receiver is used that displays a display between the signal output of one field and the signal output of the third field. If this is done, as shown in FIG. 4, the horizontal scanning line signal a'a' + b'2'b',b' + d' L ' `` appears and repeats with a cycle of f, to f4 until it reaches the bottom of the TV screen.

同図中からも分るように本来の水平走査信号を,b′,
c′,……y′,のそれぞれの間に、a′十b′ b′
+c′ c′+d′−−‐‐‐‐‐‐ご亨どの水平走査
信 2’2’2’ 号(これらの信号を補間信号と呼ぶ)が得られる。
As can be seen from the figure, the original horizontal scanning signals are
Between each of c',...y', a' ten b'b'
+c'c'+d' - - - - - - - Horizontal scanning signals 2'2'2' (these signals are called interpolated signals) are obtained.

二次元の光情報、すなわち被写体中に於いて垂直方向
の画像の相関性が高ければ高いほど、再現画像の垂直方
向の解像度が実質的に増加したのと等価な効果を視覚に
与える。なお、本発明は光電変換セルとMOS−FET
との組み合せによる固体撮像装置にも適用し得る。以上
説明したように本発明の固体撮像装置は電荷転送手段が
各列内または各行内の複数の光電変換セルの和の信号電
荷を転送するものであるため、複雑な回路や、価格、電
気特性の点で問題のあるアナログ遅延線を用いることな
く、簡単な構成で小型、安価にして、垂直方向または水
平方向の補間信号が得られ、この桶間信号で画像の解像
度を向上せしめることができ、非常に実用的価値となる
ものである。
The higher the correlation between the two-dimensional optical information, that is, the vertical images in the subject, the more the visual effect is equivalent to a substantial increase in the vertical resolution of the reproduced image. Note that the present invention relates to a photoelectric conversion cell and a MOS-FET.
It can also be applied to a solid-state imaging device in combination with As explained above, in the solid-state imaging device of the present invention, the charge transfer means transfers the sum of signal charges of a plurality of photoelectric conversion cells in each column or each row. It is possible to obtain interpolated signals in the vertical or horizontal direction with a simple configuration, small size, and low cost without using an analog delay line, which is problematic in terms of problems.This interpolated signal can be used to improve image resolution. , which is of great practical value.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図a〜cおよび第2図は従来の固体撮像装置の構成
図および動作説明図、第3図a〜dおよび第4図は本発
明の固体撮像装置の構成図および動作説明図である。 Am,Bm〜Ym・・・・・・光電変換セル、Tm・…
・・電荷転送段、J1,02・・・…クロックラィン、
R……読み込みパルス、マV,,JV2……転送パルス
。 第1図 第2図 第4図 第3図
1A to 2C are configuration diagrams and operation explanatory diagrams of a conventional solid-state imaging device, and FIGS. 3A to 3D and FIG. 4 are configuration diagrams and operation explanatory diagrams of a solid-state imaging device of the present invention. . Am, Bm~Ym...Photoelectric conversion cell, Tm...
...Charge transfer stage, J1,02...Clock line,
R...Reading pulse, MAV,, JV2...Transfer pulse. Figure 1 Figure 2 Figure 4 Figure 3

Claims (1)

【特許請求の範囲】[Claims] 1 行列状に配置されフイールド毎にリセツトされる形
式の複数個の光電変換セルと、前記各光電変換セルに入
射した光量に対応した信号電荷を前記各列方向または前
記各行方向に転送する複数の電荷転送手段と、前記電荷
転送手段から前記各列内または前記各行内の複数の光電
変換セルの和の信号電荷を得る手段とを備え、上記手段
で得た複数の光電変換セルの和の信号電荷及び光電変換
セルの直読信号電荷の両方の信号電荷を映像信号として
用いることを特徴とする固体撮像装置。
1 A plurality of photoelectric conversion cells arranged in a matrix and reset for each field, and a plurality of photoelectric conversion cells that transfer signal charges corresponding to the amount of light incident on each of the photoelectric conversion cells in the column direction or the row direction. charge transfer means; and means for obtaining, from the charge transfer means, a sum signal charge of a plurality of photoelectric conversion cells in each of the columns or in each row; A solid-state imaging device characterized in that both signal charges and direct read signal charges of a photoelectric conversion cell are used as video signals.
JP51154017A 1976-12-20 1976-12-20 solid state imaging device Expired JPS6028435B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP51154017A JPS6028435B2 (en) 1976-12-20 1976-12-20 solid state imaging device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP51154017A JPS6028435B2 (en) 1976-12-20 1976-12-20 solid state imaging device

Publications (2)

Publication Number Publication Date
JPS5377125A JPS5377125A (en) 1978-07-08
JPS6028435B2 true JPS6028435B2 (en) 1985-07-04

Family

ID=15575079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51154017A Expired JPS6028435B2 (en) 1976-12-20 1976-12-20 solid state imaging device

Country Status (1)

Country Link
JP (1) JPS6028435B2 (en)

Also Published As

Publication number Publication date
JPS5377125A (en) 1978-07-08

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