JPS6027430U - ウエハ保持具 - Google Patents

ウエハ保持具

Info

Publication number
JPS6027430U
JPS6027430U JP7813984U JP7813984U JPS6027430U JP S6027430 U JPS6027430 U JP S6027430U JP 7813984 U JP7813984 U JP 7813984U JP 7813984 U JP7813984 U JP 7813984U JP S6027430 U JPS6027430 U JP S6027430U
Authority
JP
Japan
Prior art keywords
wafer
rod
holes
wafer holder
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7813984U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6244525Y2 (enrdf_load_stackoverflow
Inventor
賢 小川
英樹 津屋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP7813984U priority Critical patent/JPS6027430U/ja
Publication of JPS6027430U publication Critical patent/JPS6027430U/ja
Application granted granted Critical
Publication of JPS6244525Y2 publication Critical patent/JPS6244525Y2/ja
Granted legal-status Critical Current

Links

JP7813984U 1984-05-28 1984-05-28 ウエハ保持具 Granted JPS6027430U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7813984U JPS6027430U (ja) 1984-05-28 1984-05-28 ウエハ保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7813984U JPS6027430U (ja) 1984-05-28 1984-05-28 ウエハ保持具

Publications (2)

Publication Number Publication Date
JPS6027430U true JPS6027430U (ja) 1985-02-25
JPS6244525Y2 JPS6244525Y2 (enrdf_load_stackoverflow) 1987-11-25

Family

ID=30208142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7813984U Granted JPS6027430U (ja) 1984-05-28 1984-05-28 ウエハ保持具

Country Status (1)

Country Link
JP (1) JPS6027430U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6244525Y2 (enrdf_load_stackoverflow) 1987-11-25

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