JPS6027143B2 - Target of image pickup tube for color camera and its manufacturing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a target for a three-electrode single-tube color camera image pickup tube, and relates to a color camera image pickup tube target that has a simple manufacturing process and can use a lens with a shallow depth of focus. This paper attempts to provide a manufacturing method for the same.

Single-tube and two-tube image pickup tubes for small color cameras are available.

There is a 3-tube type.

Furthermore, among single-tube color camera image pickup tubes, they are divided into frequency separation type, phase separation type, three-electrode type, etc. 3
The electrode type single-tube image pickup tube for color cameras extracts three color signals of red, green, and blue from a single tube, and the target of the conventional three-electrode type single-view color camera image pickup tube is shown in Figure 1. What was suggested was shown.

In this FIG. 1, 1 is a glass substrate, and a red stripe filter 2R is provided on the -main surface of this glass substrate 1.
, green stripe filter phantom, and blue stripe filter 2B are arranged alternately.

Furthermore, these stripe filters for each color 2R, 2G, 2
A light-transmitting thin plate 4 is provided on the light-transmitting layer 8 with a light-transmitting adhesive 3 interposed therebetween. A transparent electrode 5 is formed on this transparent thin plate 4. After this transparent electrode 5 is formed all over the light-transmitting thin plate 4, unnecessary portions of the transparent electrode are removed by chemical etching and physical etching using IC technology to form each red stripe filter. 2R, green stripe filter 2G, and blue stripe filter 2B, and are formed in stripes separated from each other.
A light conversion film is deposited on the transparent electrode 5. In the above structure, the light-transmitting thin plate 4 is used to prevent the stripe filters for each color from being damaged when performing chemical etching or physical etching to remove unnecessary parts of the transparent electrode formed on one surface. In addition, the adhesive 3 is a stripe filter for each color and a translucent thin plate 4.
is required for gluing.

Due to the interposition of the adhesive 3 and the transparent substrate 4, the distance between the stripe filter for each color and the transparent electrode 5 is 3.
0 to 50 mm, requiring the use of a lens with a deep depth of focus, resulting in a decline in image quality such as S/N. The present invention eliminates the drawbacks of the conventional image pickup tube targets for color cameras, and uses a simple manufacturing method that does not require chemical etching or physical etching of the transparent electrodes, and allows stripe filters for each color and transparent electrodes to be formed. The object is to provide a target for a color camera image pickup tube that can use a lens with a shallow depth of focus in close proximity, and one embodiment of the present invention will be described below with reference to FIG. 2. 11 is a transparent substrate, and first, for example, 20 m
For example, the width of red stripe filter 12R is 34 mm.
After that, a green stripe filter 12G having a width of, for example, 20 mm is partially overlapped with the red stripe filter 12R, for example, by 2 mm, on the transparent substrate 11, and further, for example, The stripe filter 128 for blue color having a width of 20 French meters is replaced by the stripe filter filter 12R for red color,
A portion of the green stripe filter 12G, for example, 2 m each, is formed on the transparent substrate.

As a result, the red stripe filter 12R, the green stripe filter 12G, and the blue stripe filter 12B are sequentially and alternately formed on the transparent substrate 11, and both ends of the stripe filter for each color in the width direction are adjacent to each other. The outer part of the striped fill for pond color is overlapped, and this overlapped part is folded and has a difference in level compared to the part without it.
After that, a transparent electrode 13 of oxide such as ln or Sn is formed on these striped filters for each color by vapor deposition or sputtering. The transparent electrode 13 is formed only on the non-overlapping portion of the stripe filter for each color, and is not formed on the folded portion, if the step is lowered by 4 degrees from the non-overlapping portion. Therefore, since the transparent electrodes 13 formed in the non-overlapping portions of the stripe filters for each color are separated from each other, there is no need to perform chemical etching or physical etching. Thereafter, a photoconductive film such as SQC3, ZnSe-ZnxCd, 1xTe(ln)1Sb3, etc. is formed on the transparent electrode 13 to complete the target. In the target of this embodiment, since the stripe filter for each color and the transparent electrode are in contact with each other, a lens with a shallow V point depth can be used.

In addition, when the stripe filter for each color is chemically weak, a thin glass film may be interposed as a protective film to form a transparent electrode.

As is clear from the above explanation, according to the manufacturing method of the present invention, the stripe filters for each color are formed by partially folding and overlapping each other alternately, and the transparent electrode is formed only in the part where there is no transparent electrode. There is no need to remove unnecessary parts of the color camera, and the manufacturing process is simplified. In addition, since the target of the color camera image pickup tube of the present invention has a narrow interval between the stripe filter for each color and the transparent electrode, it is possible to use a lens with a shallow depth of focus. The image quality can be improved.

[Brief explanation of the drawing]

FIG. 1 is a sectional view of a target of a conventional image pickup tube for a color camera, and FIG. 2 is a sectional view of a target of an image pickup tube for a color camera showing an embodiment of the present invention. 11... Translucent substrate, 12R... Stripe filter for red, 12G... Stripe filter for green, 128... Stripe filter for blue. , 13...transparent electrode, 14...
・Photoconductive film. Figure 1 Figure 2

Claims (1)

[Scope of Claims] 1. A light-transmitting substrate, a plurality of color stripe filters formed on the light-transmitting substrate so as to partially overlap each other, and portions of the color stripe filters that do not overlap with each other. A target for an image pickup tube for a color camera, comprising a transparent electrode formed solely on the transparent electrode and a photoconductive film formed on the transparent electrode. 2. The target for a color camera image pickup tube according to claim 1, wherein a glass film is interposed between the color stripe filter and the transparent electrode. 3. A step of forming a plurality of color stripe filters partially overlapping each other on a light-transmitting substrate, a step of forming a transparent electrode only on the non-overlapping portion of the color stripe filter, and a step of forming a transparent electrode on the transparent electrode. A method for manufacturing a target for an image pickup tube for a color camera, comprising the steps of: forming a photoconductive film;