JPS60262123A - Optical shutter element - Google Patents

Abstract

PURPOSE:To decrease the change in the transmittance of an optical shutter element with temp. by adhering light transmittable sintered ceramics consisting of different compsns. and having an electrooptic effect by a transparent adhesive agent each other and disposing transparent electrodes on both surfaces thereof. CONSTITUTION:Plural pieces of the transparent electrodes 44a, 44b are provided on both surfaces of a plate substrate made by adhering the light transmittable sintered ceramics 41, 42 consisting of PLZT (compsn. formed by substituting part of lead of lead titanate zirconate with lanthanum) having different compsn. by means of the transparent adhesive agent 43. The electrodes 44a, 44b are so disposed that the optical shutter parts on both surfaces to be formed by said electrodes do not overlap on each other. The change in the transmittance with temp. changes as well if the compsns. of the light transmittable sintered ceramics are different and therefore the change in the transmittance with temp. is smaller than the change when the light transmittable sintered ceramics is used in the form of a single plate.

Description

[Detailed description of the invention] Industrial applications The present invention relates to a single-body optical shutter element.

Conventional configurations and their problems In recent years, mechanical, electrical, or chemical means have been used to
Controls the light transmission jM ffi. So-called optical shutter elements are widely used in various fields. Among these, solid-state optical shutter devices that utilize electro-optic effects such as the Kerr effect have excellent responsiveness and can be made smaller, making them ideal for application to optical shutters that require speed, such as camera shutters. is considered. Currently, what is known as the "1. optical shutter element" is a flat plate of translucent sintered porcelain such as a composition in which part of the lead in lead zirconate titanate is replaced with lanthanum (hereinafter referred to as PLZT). - A substrate on which a plurality of electrodes are provided is placed on a polarizing plate so that the polarization axes are perpendicular to each other in the direction of 4S° with respect to the direction of the electric field vector generated when a voltage is applied to the electrodes. It has a sandwiched structure.

A conventional optical shutter element will be described below with reference to the drawings.

FIG. 1 shows an example of a configuration diagram of a conventional optical shutter element, in which numeral 11 shows a PLZT substrate, and numeral 12a.

12b is an electrode provided on the PLZT substrate, and 1
2a is a voltage applying electrode, and 12b is a grounding electrode. 1
3 is a polarizer, 14 is an analyzer, and voltage application type 441
The polarization axes are configured to be orthogonal to each other in directions of ±45° with respect to the direction of an electric field vector generated when a voltage is applied to the electrode 2a and the ground electrode 12b. The operation of the optical shutter element constructed in this way will be explained below.

When light is irradiated from the light source 15 provided at the rear of the polarizer 13 in FIG. 1, no voltage is applied between the voltage application electrode 12a and the ground electrode 12b formed on the PLZT substrate 11-1-. In this case, birefringence due to the electro-optic effect does not occur, and the light is blocked by the polarizer 13 and analyzer 14, or when a voltage is applied, birefringence occurs due to the Kerr effect of the electro-optic effect, and the light is The polarization state changes and light passes through. Based on this principle, a small, high-speed optical shutter element can be realized.

Figure 2 has the same electrode configuration as Figure 1;
Frame width 60μm, electrode spacing 50μm 1 electrode material □:
This figure shows the change in transmittance with temperature when a voltage of 20 ov is applied to an optical shutter element made of In2O3-8nO2. The composition of the PLZT substrate used was P
In the general formula (%) of LZT, x=0.09, 7-0.65 was used.

(Since PLZT usually takes the ratio of La, Zr, and Ti and expresses it as 100x/100y/100Z, below, for example, when X = 0.097-0.65, that is, Pbo, 910.09 (ZrO, e s T
1 o, s,) 0.9775 is 9/65/3
5) As is clear from Figure 2, in the conventional optical shutter element using a single PLZT substrate, when the same voltage is applied between the electrodes, the transmittance of the opening of the optical shutter changes as the temperature increases. Dogs are affected by changes. Therefore, when an optical shutter using PLZT is incorporated into a device that has a wide operating temperature range, such as a camera shutter, the transmittance changes greatly due to temperature changes, which poses a major problem in terms of reliability.

OBJECTS OF THE INVENTION The present invention relates to an optical shutter element, and an object of the present invention is to provide an optical shutter element that exhibits smaller temperature changes than conventional optical shutter elements.

Structure of the Invention The optical shutter element of the present invention has a plurality of transparent electrodes on both sides of a flat substrate made by laminating transparent sintered porcelain having electro-optic effects of different compositions with a transparent adhesive. By arranging transparent electrodes on each side so that the double-sided transparent parts formed by the electrodes do not overlap with each other,
This is intended to reduce temperature changes in transmittance. That is, the present invention focused on the fact that the temperature change in transmittance of PLZT varies depending on its composition. For example, Figure 3 has the same optical shutter configuration as Figure 1, with 9/65/36 composition as PLZT, or 9,25/65/
Using a flat substrate with a composition of 35, the electrode width is 50 Ji.
m, electrode spacing 50 μm, electrode material In 20s
This figure shows the temperature dependence of the transmittance when a voltage of 200 V is applied in a Hikari 7 Yanota device provided with a transparent electrode configuration group made of Sn○2. As can be seen from Figure 3, for example, in the vicinity of point a, g, 25 / 6
5/35 has a higher transmittance than 9/e 5/3s, but near point b where the temperature is high, 9/e
e 6/35 is 9.25/e s/3 es
The transmittance is greater than that. Therefore, for example 9.25
In the light shutter element of the present invention, in which multiple pairs of electrodes are provided on both sides of a flat plate made by gluing PLZT substrates with different compositions such as PLZT substrates such as /65/35 and 9/65/35, the temperature from point a to point b As the temperature increases in the region 9.
25/65/35 light beam A=The transmittance of the ivy part is
The decrease is towards 1, but the other light shutter part, that is, 9
/65/35, the transmittance tends to increase, so within the temperature range from point a to point b, the average transmittance is lower than when a single PLZT substrate is used as in a conventional optical shutter element. temperature change is improved. In addition, in the optical shutter according to the present invention, the electrodes provided on both sides of the bonded PLZT substrates are designed so that the optical shutter parts formed by these electrodes do not overlap each other on each surface, so that they do not overlap with each other. Light passing through the opening of the optical sensor in a PLZT substrate with a different composition always passes through the PLZT substrate with a different composition.
Since the light passes through the electrode part of the light shutter provided on the LZT substrate, it is necessary to use a transparent electrode such as In203Sn○2.

DESCRIPTION OF THE PREFERRED EMBODIMENTS The optical shutter device according to the present invention will now be described in detail.

La/Zr/Ti =9/65/35. 9.25/6
5/35 PLZT sintered porcelains with different compositions were honotopped for 20 hours at 1200°C in an oxygen stream, then sliced and double-sided polished to produce a 120 μm thick transparent substrate. Created. Next, after gluing these PLZT substrates with different compositions together using butyral resin, I n 203 Sn2 was vapor-deposited on both sides of the substrates,
An optical shutter element as shown in FIG. 4 was created using photolithography technology. Both electrode width and electrode spacing are 5.
The electrode thickness was 5000 people at 0 μm.
The electrode arrangement on both sides was designed so that a plurality of transparent electrodes were provided on both sides of the substrate, and the light shutter portions on each side formed by these electrodes did not overlap with each other, as shown in Figure 4(b). .

FIG. 4(a) is a block diagram of the present invention.
5/35 PLZ consisting of composition, T substrate, 42 is 9,2
A pLZT substrate having a composition of 5/65/35, 43 is an adhesive layer of both end plates, 44&, 44b is a voltage application electrode and a grounding electrode. 45, 46 added, 10℃ to 6
The results of measuring the transmittance in the temperature range of oci are shown in the sixth section.
As shown in the figure. For comparison, we used a light shutter element in which electrodes similar to those shown in Fig. 4 were provided on both sides of a 250 μm thick PLZT substrate with compositions of 9/66/35 and 9.25/65/35, respectively, and the voltage was Changes in transmittance from 10°C to 60°C were investigated while applying 200V. The results are also shown in FIG. As is clear from FIG. 5, the optical shutter element according to the present invention can reduce the change in temperature characteristics of transmittance over a wide temperature range, compared to an optical shutter element using a conventional PLZT substrate as the middle plate. can.

As is clear from the explanation of the effects of the invention, the optical shutter element according to the present invention can significantly reduce the temperature change in transmittance compared to conventional optical shutter elements, and can be used for camera shutters, etc. This is extremely effective for the practical use of solid-state shutter elements, where variations in transmitted light 1 (t) are a problem due to temperature changes.

In the examples of the present invention, PLZT was used as the translucent sintered porcelain having an electro-optic effect, but it shows the same electro-optic effect as PLZT and has a large temperature change in transmittance (Pb, La). (Zr, Nb) 03 series (hereinafter -
written as FPLZN), (Pb, Bi) (Zr
, Ti)03 series (hereinafter referred to as PBZT), similar effects can be expected. Also, PLZT
It goes without saying that similar effects can be expected even if , PLZN, and PBZT are combined with each other.

[Brief explanation of drawings]

Figure 1 is a configuration diagram of a conventional optical shingle/vine element; Figure 2;
Fig. 3 is a diagram showing the temperature change in transmittance of a conventional optical shutter element, Fig. 4 (a) and (b) are a block diagram and a cross-sectional view of the optical shutter element according to the present invention, and Fig. 5 is a diagram showing a change in transmittance with temperature. FIG. 3 is a diagram showing a temperature change in transmittance of a light shutter element according to the present invention. 41.42...PLZT substrate with different composition, 43
...adhesive layer, 44a, 44b...electrode, 46...polarizer, 46...analyzer, 47
·····light source. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2: Temperature, Soaking (a) Figure 3: Temperature 1 Bleaching (1'C) Figures 11, 4

Claims (2)

[Claims] (1) Translucent sintered porcelain with different compositions and electro-optic effects are glued together with a transparent adhesive on both sides of a flat substrate.
1. A light shutter element having a plurality of transparent electrodes, the transparent electrodes being disposed on both sides of a substrate so that the double-sided light shutter parts cut out by the electrodes do not overlap with each other. (2) The light shutter element according to claim 1, characterized in that the light-transmitting sintered porcelain is a composition in which a part of the lead in the titanate zirconate vessel is replaced with lanthanum.