JPS6026190A - Pressure balance valve for piston vacuum pump - Google Patents

Pressure balance valve for piston vacuum pump

Info

Publication number
JPS6026190A
JPS6026190A JP13466983A JP13466983A JPS6026190A JP S6026190 A JPS6026190 A JP S6026190A JP 13466983 A JP13466983 A JP 13466983A JP 13466983 A JP13466983 A JP 13466983A JP S6026190 A JPS6026190 A JP S6026190A
Authority
JP
Japan
Prior art keywords
valve
pressure
piston
cylinder
pressure balance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13466983A
Other languages
Japanese (ja)
Inventor
Komei Yokoi
康名 横井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ANRETSUTO KK
Anlet Co Ltd
Original Assignee
ANRETSUTO KK
Anlet Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ANRETSUTO KK, Anlet Co Ltd filed Critical ANRETSUTO KK
Priority to JP13466983A priority Critical patent/JPS6026190A/en
Publication of JPS6026190A publication Critical patent/JPS6026190A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10Adaptations or arrangements of distribution members
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/10Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
    • F04B37/14Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum

Abstract

PURPOSE:To simplify the structure considerably by opening/closing a pressure balance valve for feeding pressure into a cylinder by means of piston itself. CONSTITUTION:Only the foot rod 18 of a pressure balance valve 16 for closing the valve port 15 through resilience is projected to a cylinder 2 without projecting a pressure balance sleeve 10 fixed to the delivery chamber 9 side. A press chip 20 for pushing the foot rod 18 to open said valve 15 near the final stage of compression stroke is provided on the piston head. Consequently, only the pressure balance valve 16 is provided movably to function it directly by means of the press chip 20 of piston 3. Since a mechanism for driving said valve 16 is not required independently, the structure can be simplified considerably. Also since the sleeve 10 is not movable, occurrence of faults can be reduced.

Description

【発明の詳細な説明】 本発明は、ピストン式真空ポンプの圧力平衡弁に閏する
ものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a pressure balancing valve for a piston vacuum pump.

ベーン式等の回転式真空ポンプはピストン式真空ポンプ
のように往復運動がないから、吸込弁及び吐出弁がなく
、真空吸引される稀薄ガスを圧縮して吐出側に1ノド出
するポンプ機構を比較曲部おに構成1ろごとが出来る力
へピストン式と同様に吸込側から油封油を供給して真空
吸引機能を高めか1)焼付を防止するものであるので、
吐出側に油ミス1の回収装置乃至油流出防止弁を設け、
吐出側の圧縮排出ガス中に油ミス1が混入しないように
しflければならない。然るに油ミストの圧縮IJF気
中への混入を完全に防止できるものはなく、排気煙突な
どから油汚染排気が大気中にIR出さiするばかりでな
く、このため油封油の消耗量も甚だ多く、また、高真空
機種におい−(はピストン式真空ポンプのピストン往復
駆動動力に比して50%を越える動力を必要とする領域
が多い。
A rotary vacuum pump such as a vane type does not have reciprocating motion like a piston type vacuum pump, so it does not have a suction valve or a discharge valve, and has a pump mechanism that compresses the diluted gas that is vacuum-suctioned and releases it to the discharge side. Comparative curved section structure 1) Like the piston type, sealing oil is supplied from the suction side to enhance the vacuum suction function and 1) prevent seizure.
Install an oil mistake 1 recovery device or oil spill prevention valve on the discharge side,
It is necessary to prevent oil leakage 1 from being mixed into the compressed exhaust gas on the discharge side. However, there is nothing that can completely prevent oil mist from entering the compressed IJF air, and not only is oil-contaminated exhaust emitted into the atmosphere from exhaust chimneys, etc., but the amount of sealing oil consumed is extremely large. In addition, many high vacuum models require more than 50% of the piston reciprocation driving power of a piston type vacuum pump.

これに対してピストン式真空ポンプはピストンの駆動動
力が少なく、油封油の圧縮排気中への混入率とか、油封
油の消耗とかを有効的に少くできるが、ピストンの吸込
行程におい゛(シリンダ内に吸引した稀薄ガスを、同圧
縮行程において排気側の圧力(通常は外気圧であり、二
段真空ポンプの第一段ポンプにおいては外気圧以下)に
打勝つ圧力に圧縮しなければ吐出弁を開くことが出来な
いので、前記の圧縮行程の終期に吐出側圧力をシリンダ
内に導入する圧力平衡弁の設置を必要とする。該平衡弁
は例えばピストンロッドを駆動するクランク機構によっ
て偏心カムを連動し、該偏心カムの機構により滑り弁を
駆動して、前記吐出側圧力をシリンダ内に導入する弁「
1を!ハ・要時に開閉する滑り弁を連動するように構成
されたものであり、滑り弁からtJる置火圧力平衡弁及
び該弁の駆動機構であるクランク機構等が大がかりとt
lる等の欠点があって、比較的小馬力のビス1ン式真空
ポンプの利用を少なくシ゛でいる。
On the other hand, piston-type vacuum pumps require less driving power for the piston, and can effectively reduce the rate of sealing oil mixed into the compressed exhaust gas and the consumption of oil sealing oil. If the diluted gas sucked into the vacuum pump is not compressed to a pressure that overcomes the pressure on the exhaust side during the same compression stroke (usually the external pressure, and in the case of the first stage pump of a two-stage vacuum pump, it is less than the external pressure), the discharge valve will close. Since it cannot be opened, it is necessary to install a pressure balance valve that introduces the discharge side pressure into the cylinder at the end of the compression stroke.The balance valve is connected to an eccentric cam by, for example, a crank mechanism that drives the piston rod. and a valve for introducing the discharge side pressure into the cylinder by driving a slide valve by the mechanism of the eccentric cam.
1! C. It is configured to interlock a slide valve that opens and closes when necessary, and the ignition pressure balancing valve that is connected to the slide valve and the crank mechanism that is the drive mechanism for this valve are large-scale and
However, there are disadvantages such as low power consumption, and the use of relatively low-horsepower screw-type vacuum pumps is limited.

本発明は前記した圧力平衡弁を、往復運動するピストン
自体により開閉する構成にして前記の欠点を改善するこ
とを目的としたものであっζ、一端を前記シリンダの前
@壁部内に臨ませた圧力平衡用スリーブを吐出側に固定
すると共に、吐出側からの(J勢によって該平衡用スリ
ーブに設けた弁口を閉じる圧力平衡弁を圧力平衡用スリ
ーブの内部に慴動可能に設け、該圧力平衡弁から突出す
る脚杆を前記弁口に遊挿してシリンダ内に突出し、前記
ビスIンのヘッドには圧縮行程におい°C前記脚杆に衝
き当って前記付勢に抗する方向に押圧する押圧片を設け
たことを特徴とするものである。
The present invention aims to improve the above-mentioned drawbacks by making the above-described pressure balance valve open and close by the reciprocating piston itself, and has one end facing inside the front wall of the cylinder. The pressure balancing sleeve is fixed to the discharge side, and a pressure balancing valve is movably provided inside the pressure balancing sleeve to close the valve opening provided in the balancing sleeve by J force from the discharge side. A leg rod protruding from the balance valve is loosely inserted into the valve port and protrudes into the cylinder, and the head of the screw I collides with the leg rod during the compression stroke and is pressed in a direction that resists the biasing force. It is characterized by the provision of a pressing piece.

本発明の実施例を添付図面につい゛ζ説明する。Embodiments of the present invention will be described with reference to the accompanying drawings.

第1図は二段型ピストン式真空ポンプを示し、第一段゛
ポンプ(I)及び第:1段ポンプ(It)は端板1に取
付けたシリンダ2.22内に交互に吸引行程と圧縮行程
の往復運動を行うビス1ンを嵌め、夫々をクランクR横
により駆動されるピストンロッド4.24に連結Jる。
FIG. 1 shows a two-stage piston-type vacuum pump, in which the first stage pump (I) and the first stage pump (It) are pumped into a cylinder 2.22 attached to the end plate 1, which alternates between suction stroke and compression stroke. Screws 1 and 24 for reciprocating stroke are fitted and connected to piston rods 4 and 24, respectively, which are driven by the side of the crank R.

端板1には第一段ポンプ(I)に対応する吸込弁6と吐
出弁7及び第二段ポンプ(II’)に対応する吸込弁2
6と吐出弁27を設け、端板lに冠着したカバー5に、
吸込パイプ8aを連結した吸込v8と吐出パイプ9aを
連結した吐出室9と、吸込バイブ28aを連結した吸込
室28と、吐出パイプ29aを連結した吐出室29とを
、前記各吸込弁6.26、吐出弁7.27に夫々対応さ
すて設ける。吸込パイプ8aは真空室等に連結し、吐出
パイプ9aは吸込バイブ28aに接続し、吐出パイプ2
9aは排気筒などに連結する。
The end plate 1 has a suction valve 6 and a discharge valve 7 corresponding to the first stage pump (I) and a suction valve 2 corresponding to the second stage pump (II').
6 and a discharge valve 27, the cover 5 is attached to the end plate l,
A suction v8 connected to a suction pipe 8a, a discharge chamber 9 connected to a discharge pipe 9a, a suction chamber 28 connected to a suction vibrator 28a, and a discharge chamber 29 connected to a discharge pipe 29a are connected to each suction valve 6.26. , are provided correspondingly to the discharge valves 7 and 27, respectively. The suction pipe 8a is connected to a vacuum chamber etc., the discharge pipe 9a is connected to the suction vibe 28a, and the discharge pipe 2
9a is connected to an exhaust pipe or the like.

本実施例は前記した公知構造においζ、一端を前記シリ
ンダの前端壁部である端板1内に臨まけた圧力平衡用第
1スリーブ1oと圧力平衡用第2スリーブ30とを吐出
室9及び吐出室29内に各別に突出して固定する。それ
らの圧力平衡用第1スリーブ10と圧力平衡用第2スリ
ーブ30とには前記端板1の外側に固定する取付鍔1i
31を夫々に設け、吐出室9と吐出室29えの各突出端
から段部12a、32aを形成した案内スリーブ12.
32を嵌め、さらに圧力通人孔 13.33と通気孔1
4.34と、シリンダ2.22側の弁口15.35とを
夫々に形成する。
This embodiment has the above-mentioned known structure ζ, and a first sleeve 1o for pressure balancing and a second sleeve 30 for pressure balancing, each having one end facing into the end plate 1 which is the front end wall of the cylinder, are connected to the discharge chamber 9 and the discharge chamber 9. They are each protruded and fixed into the chamber 29 separately. The first sleeve 10 for pressure balancing and the second sleeve 30 for pressure balancing have mounting collars 1i fixed to the outside of the end plate 1.
31 respectively, and step portions 12a, 32a are formed from the respective protruding ends of the discharge chamber 9 and the discharge chamber 29.
Insert 32, and then press pressure hole 13.33 and ventilation hole 1.
4.34 and a valve port 15.35 on the cylinder 2.22 side are formed respectively.

16.36は吐出室9.29側から圧力平衡用YSlス
リーブ10と同第2スリーブとに夫々挿入した圧力平衡
弁ぐあつ′C1案内スリーブ12若しくは32に挿入し
た方杆17.37と、弁1コ15.35の中心部を通つ
゛ζシリンダ2.22内に突出する脚杆18.38とを
夫々に設け、段部12a、32aにJJIけた第1発条
19、第2発条39を付勢勢力とし−ζ弁口15.35
に圧接する。
16.36 is a pressure equalization valve inserted into the pressure equalization YSL sleeve 10 and the second sleeve respectively from the discharge chamber 9.29 side; a rod 17.37 inserted into the C1 guide sleeve 12 or 32; Leg rods 18.38 protruding into the ζ cylinder 2.22 passing through the center of each column 15.35 are provided respectively, and a first spring 19 and a second spring 39 with a JJI angle are attached to the stepped portions 12a and 32a. As a force - ζbenguchi 15.35
press against.

ピストン3.33のヘッド中心には圧縮行程において脚
杆18.38に衝き当る押圧片20.40を設ける。
A pressing piece 20.40 is provided at the center of the head of the piston 3.33, which abuts against the leg rod 18.38 during the compression stroke.

圧力平衡用第1スリーブlOと抑圧片20及び圧力平衡
用第2スリーブ30と抑圧片40には、その何れかに第
3.4図に示ず欠溝aを設けて、どのような場合にも弁
口15.35を塞がないようにする。
The first sleeve lO for pressure balancing and the suppressing piece 20 and the second sleeve 30 for pressure balancing and the suppressing piece 40 are provided with a groove a not shown in FIG. Make sure not to block the valve port 15.35.

前記実施例の作用を説明する。The operation of the above embodiment will be explained.

第1段ポンプ(+)によりピストン3を第1図矢線Xの
方向の行程により吸引すると、吸込弁6が開閉し、吐出
弁7は閉弁すると共に、圧力平衡用第1スリーブ10の
弁口15も第1発条19によつ゛ζ付勢された弁杆17
により閉弁し、シリンダ2内には真空室などの稀薄なカ
スが吸引される。
When the piston 3 is sucked by the first stage pump (+) through a stroke in the direction of the arrow X in FIG. The mouth 15 is also a valve rod 17 which is biased by the first spring 19.
The valve is closed, and thin waste such as the vacuum chamber is sucked into the cylinder 2.

ピストン3が第2図矢線yのように圧縮行程に移ると、
シリンダ2内の稀薄ガスが圧縮され、その圧力で吸込弁
6が閉じるが、ガスの圧縮圧力が低いため吐出弁7は開
かない。ピストン3がさらに矢線yの方向に進むと、そ
の終期近くにヘッドの押圧片20により脚杆18を押し
、圧力平衡弁16を第1発条19の付勢に抗して図のと
おりに押すため、弁口15が開かれ吐出室9の圧力がシ
リンダ2内に流込む。このためシリンダ2内の圧力は増
大して圧縮され、吐出弁7を開弁し“で圧縮ガスを吐出
室9に吐出する。ピストン3が圧縮の支点から再び第1
図の吸込行程に移行するとき、押圧片20が脚杆18か
ら離れζまでは弁口15が開かれた才まであり、吸込室
8の圧力よりシリンダ2内の圧力が高いため吸込弁6は
開弁しないこともあるが、押圧片2()が脚杆18がら
離れ、前後にピストン3の吸込行程でシリンダ2の内空
容積が拡大されるので、圧力は低下し、吸込弁6 ゛を
開弁して稀薄ガスを吸引する。
When the piston 3 moves to the compression stroke as indicated by the arrow y in Figure 2,
The diluted gas in the cylinder 2 is compressed, and the suction valve 6 is closed by the pressure, but the discharge valve 7 is not opened because the compression pressure of the gas is low. As the piston 3 further advances in the direction of the arrow y, near the end of the movement, the pressing piece 20 of the head pushes the leg rod 18 and pushes the pressure equalization valve 16 as shown in the figure against the bias of the first spring 19. Therefore, the valve port 15 is opened and the pressure in the discharge chamber 9 flows into the cylinder 2. Therefore, the pressure inside the cylinder 2 increases and is compressed, and the discharge valve 7 is opened to discharge compressed gas into the discharge chamber 9.The piston 3 moves from the compression fulcrum again to the first
When moving to the suction stroke shown in the figure, the pressure piece 20 is separated from the leg rod 18 until the valve port 15 is opened, and the pressure in the cylinder 2 is higher than the pressure in the suction chamber 8, so the suction valve 6 is closed. Although the valve may not open, the pressure piece 2 ( ) separates from the leg rod 18 and the internal volume of the cylinder 2 is expanded by the suction stroke of the piston 3 back and forth, so the pressure decreases and the suction valve 6 is closed. Open the valve and suck in the diluted gas.

第2段ポンプ(I[)のビスiン23の往復行程による
作用はピストン3の場合と変らない。
The action of the reciprocating stroke of the screw 23 of the second stage pump (I[) is the same as that of the piston 3.

本発明は前記の説明により明らかにしたように、ピスト
ン式真空ポンプのシリンダとは吐出弁を介して遮断され
た吐出室側に突出し”ζ固定した圧力平行用スリーブを
、シリンダに突出させることなく、一つの前端壁に挿入
し゛ζ弁口の開口により連通させ、その弁[1を付勢弾
力によつ゛ζ開閉1する圧力平衡弁の脚杆のみをシリン
ダに突出し、ピストンには圧縮行程の終期の近くで脚杆
を押し−(弁口を開弁させる押圧片をヘッドに設けてな
り、シリンダ内に圧力を導入する用力平iφi弁ののを
可動的に設け、しかもその開弁とか閉弁とかをピストン
の押圧片により直接的に動作さゼるものでJ)るため、
圧力平衡弁の駆動に必要な機構を別途に設ける必要なく
、しかも圧力平衡用スリーブは不動としているものであ
るから、故障発生部分は少なく、圧縮行程における圧縮
圧力が不足である場合の圧力補給を簡易な構成によら゛
ζ実現できる効果をもつ。
As clarified from the above description, the present invention is based on the cylinder of a piston type vacuum pump.The cylinder of a piston type vacuum pump has a pressure parallel sleeve which protrudes from the discharge chamber side which is blocked off via the discharge valve and is fixed to the cylinder without protruding into the cylinder. , is inserted into one front end wall and communicated through the opening of the ``ζ valve port, and only the foot rod of the pressure equalization valve that opens and closes the ``ζ'' valve [1] by the biasing elasticity protrudes into the cylinder, and the piston is connected to the piston for the compression stroke. Push the leg lever near the end (the head is equipped with a pressure piece that opens the valve port, and the power valve that introduces pressure into the cylinder is movably installed, and the valve can be opened or closed). Since the valve is operated directly by the pressure piece of the piston,
There is no need to provide a separate mechanism to drive the pressure balancing valve, and since the pressure balancing sleeve is immovable, there are fewer parts that can fail, and it is easy to replenish pressure when compression pressure is insufficient during the compression stroke. It has the effect that can be achieved with a simple configuration.

【図面の簡単な説明】[Brief explanation of drawings]

添付図面は本発明の−・実施例を示し1、第1図は縦断
側面図、第2図はピストンの第1図の反対動作の状態を
示したれ(断IFI1面図、第3図は案内スリーブと圧
力平衡ブiの斜視図、第4.5図は圧力平衡用スリーブ
と押圧片の数例を示した斜視図である。 30−・圧力平衡用第2スリーブ 2→シリンダ 3→ビス1ン 6−◆吸込カフ→吐出弁
 9−吐出室 12−案内スリーブ13−圧力通人孔 
1’5−子弁口
The attached drawings show an embodiment of the present invention, FIG. 1 is a vertical side view, and FIG. 2 is a diagram showing the piston in a state of opposite movement to that in FIG. A perspective view of a sleeve and a pressure balancing valve i, and FIG. 4.5 is a perspective view showing several examples of a pressure balancing sleeve and a pressing piece. 30-・Second pressure balancing sleeve 2 → cylinder 3 → screw 1 6-◆Suction cuff→Discharge valve 9-Discharge chamber 12-Guiding sleeve 13-Pressure through hole
1'5-child mouth

Claims (1)

【特許請求の範囲】[Claims] ピストンの吸込行程において吸込弁を開い゛ζシリング
内への真空吸引を生じ、同圧縮行程におい゛ζ吐出弁を
開いてシリング内の圧縮ガスを吐出するピストン式真空
ポンプにおい゛(、一端を前記シリングの前端壁部内に
臨ませた圧力平衡用スリーブを吐出側に固定すると共に
、吐出側からのイ:J勢によつ′ζg亥平衡用スリ〜ブ
に設けたJf゛口を閉じる圧力平衡弁を圧力平衡用スリ
ーブの内部にIi’f !lJ可能に設け、該圧力平衡
弁から突出する脚杆をシリング内に突出し、ピストンの
ヘッドには圧縮行程におい′ζ前記脚杆に衝き当って圧
力平衡弁をイリ勢に抗する方向に押圧して開弁さゼる押
圧片を設は−たことを特徴とするピストン式真空ポンプ
の圧力平衡弁。
In a piston-type vacuum pump, the suction valve is opened during the suction stroke of the piston to create a vacuum suction into the cylinder, and during the same compression stroke, the discharge valve is opened to discharge the compressed gas in the cylinder. The pressure balancing sleeve facing inside the front end wall of the cylinder is fixed to the discharge side, and the pressure balancing by closing the Jf mouth provided on the balancing sleeve by the A:J force from the discharge side. A valve is removably provided inside the pressure balancing sleeve, a leg rod protruding from the pressure balancing valve projects into the sill, and the head of the piston is provided with a valve that collides with the leg rod during the compression stroke. A pressure balance valve for a piston type vacuum pump, characterized in that a pressure piece is provided that opens the pressure balance valve by pressing the pressure balance valve in a direction that resists the force.
JP13466983A 1983-07-22 1983-07-22 Pressure balance valve for piston vacuum pump Pending JPS6026190A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13466983A JPS6026190A (en) 1983-07-22 1983-07-22 Pressure balance valve for piston vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13466983A JPS6026190A (en) 1983-07-22 1983-07-22 Pressure balance valve for piston vacuum pump

Publications (1)

Publication Number Publication Date
JPS6026190A true JPS6026190A (en) 1985-02-09

Family

ID=15133788

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13466983A Pending JPS6026190A (en) 1983-07-22 1983-07-22 Pressure balance valve for piston vacuum pump

Country Status (1)

Country Link
JP (1) JPS6026190A (en)

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