JPS60260772A - Variable conductance valve - Google Patents

Variable conductance valve

Info

Publication number
JPS60260772A
JPS60260772A JP11453584A JP11453584A JPS60260772A JP S60260772 A JPS60260772 A JP S60260772A JP 11453584 A JP11453584 A JP 11453584A JP 11453584 A JP11453584 A JP 11453584A JP S60260772 A JPS60260772 A JP S60260772A
Authority
JP
Japan
Prior art keywords
degree
vacuum
valve
valves
mentioned
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11453584A
Other languages
Japanese (ja)
Other versions
JP2685431B2 (en
Inventor
Tsunehiko Tsubone
恒彦 坪根
Fumio Shibata
柴田　史雄
Norio Kanai
金井　謙雄
Sumio Fukuda
福田　澄雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59114535A priority Critical patent/JP2685431B2/en
Publication of JPS60260772A publication Critical patent/JPS60260772A/en
Application granted granted Critical
Publication of JP2685431B2 publication Critical patent/JP2685431B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/16—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members
    • F16K1/165—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces with pivoted closure-members with a plurality of closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Flow Control (AREA)

Abstract

PURPOSE:To suitably use throttle valves in accordance with the degree of vacuum to make the variation rate of conductance thereof appropriate to control the degree of vacuum over a wide range with a high degree of accuracy, by disposing at least two throttle valves having areas different from each other in one valve casing. CONSTITUTION:At least two throttle valves 20, 30 are disposed fitted respectively on rotary shafts 21, 31 in one valve casing 10. Further, the above-mentioned valves 20, 30 are formed such that one end thereof is overlapped with each other when they are fully closed. Meanwhile the rotary shafts 21, 31 is rotated by means of motors through worm wheels 25, 35 and worm gears 24, 34. In this arrangement the original points of the above-mentioned valves 20, 30 are set between detecing plates 40a, 40b and photosensors 41a, 41b, are pulse motors are used as the above-mentioned motors. With this arrangement, the above-mentioned valve may be suitably used in accordance with the degree of vacuum to attain a desired purpose.

Description

【発明の詳細な説明】 〔発明の利用分野〕 本発明は、可変コンダクタンスバルブに関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Application of the Invention] The present invention relates to a variable conductance valve.

〔発明の背景〕　゛ 従来、可変コンダクタンスバルブとしては、例ル 、ｔ（ｆ、１個のバルブケースに１個のスロットパル八 ブを設けた構造のものが知られている。（特公昭５８−
３４７１２号公報、特公昭５８−４３６３４号公報） このような可変コンダクタンスバルブは、真空度が低い
場合、スロットバルブの開閉の分解能に八 対しコンダクタンスの変化率が大きく真空度を直線的に
制御できず、真空度が高い場合、コンダクタンス変化率
が逆に小さくなって真空度がほとんど変化しないため、
広範囲な真空度を精度良く制御するには問題があった。[Background of the Invention] Conventionally, as a variable conductance valve, one having a structure in which one slot pallet is provided in one valve case is known. −
(Japanese Patent Publication No. 34712, Japanese Patent Publication No. 58-43634) When the degree of vacuum is low, such variable conductance valves cannot linearly control the degree of vacuum because the rate of change in conductance is large compared to the opening/closing resolution of the slot valve. , when the degree of vacuum is high, the rate of change in conductance decreases and the degree of vacuum hardly changes.
There was a problem in accurately controlling the degree of vacuum over a wide range.

〔発明の目的〕[Purpose of the invention]

本発明の目的は、真空度に応じてコンダクタンスの変化
率を適正化することで、広範囲な真空度を精度良く制御
できる可変コンダクタンスバルブを提供することにある
。An object of the present invention is to provide a variable conductance valve that can accurately control a wide range of degrees of vacuum by optimizing the rate of change in conductance depending on the degree of vacuum.

〔発明の概要〕[Summary of the invention]

本発明は、１個のバルブケースに面積の異なるスロット
ルバルブを少なくとも２個設けたことを特徴とするもの
で、真空度に応じて面積の異なるスロットルバルブを使
い分はコンダクタンスの変化率を適正化したものである
。The present invention is characterized in that at least two throttle valves with different areas are provided in one valve case, and the rate of change in conductance is optimized by using throttle valves with different areas depending on the degree of vacuum. This is what I did.

〔発明の実施例〕[Embodiments of the invention]

本発明の一実施例を第１図、第２図により説明する。 An embodiment of the present invention will be described with reference to FIGS. 1 and 2.

第１図、第２図で、１個のバルブケース１０内には、面
積の異なるスロットルバルブが、この場合は２個、即ち
、面積の大きなスロットルバルブＩと面積の小さなスロ
ットルバルブ（資）とが、回転軸４．３１にそれぞれ取
り付けられて設けられている。In FIGS. 1 and 2, there are two throttle valves with different areas in one valve case 10, in this case two throttle valves, namely a throttle valve I with a large area and a throttle valve (supplement) with a small area. are respectively attached to the rotating shaft 4.31.

スロットルバルブ加とスロットルバルブ（資）とは、完
全閉止時（第２図に示す状態）にそれぞれの一端部が重
なり合う形状となっている。回転軸２１゜３１は、ヘア
リング２２ａ、２２ｂ、３２ａ、３２ｂでバルブケース
に回転自在に支持されている。回転軸２１゜３１には、
０リング幻、３３が環装されてバルブケース１０内は気
密保持される。回転軸２１．３１のバルブケース１０外
に突出した部分には、ウオームギヤ冴。The throttle valve holder and the throttle valve (part) are shaped so that one end of each one overlaps when the throttle valve is completely closed (the state shown in FIG. 2). The rotating shaft 21.degree. 31 is rotatably supported by the valve case by hair rings 22a, 22b, 32a, and 32b. On the rotation axis 21°31,
The inside of the valve case 10 is kept airtight by enclosing an O-ring 33. A worm gear is attached to the portion of the rotating shaft 21.31 that protrudes outside the valve case 10.

あが設けられ、ウオームギヤ必、３４は、モーター（図
示省略）で回転駆動されるウオームホイール５．３５に
噛合している。回転軸２１．３１の第１図では、上端部
には、検出板４０ａ、４０ｂが設けられ、回転軸力、３
１のバルブケース１０外へ突出した部分。The worm gear 34 meshes with a worm wheel 5.35 which is rotationally driven by a motor (not shown). In FIG. 1 of the rotation shaft 21.31, detection plates 40a and 40b are provided at the upper end, and the rotation axis force, 3
The part that protrudes outside of the valve case 10 of No. 1.

ウォームギャス、３４．ウオームホイール２５．　３５
゜検出板４０ａ、４０ｂを収納するギヤケース力、３６
の側壁には、検出板４０ａ、４０ｂと対応してホトセン
サー４１ａ、４１ｂが設けられている。ホトセンサー４
１８．４１ｂは、モーターにそれぞれ接続されている。Warm gas, 34. Worm wheel 25. 35
゜Gear case force for housing detection plates 40a and 40b, 36
Photo sensors 41a and 41b are provided on the side wall of the sensor in correspondence with the detection plates 40a and 40b. Photo sensor 4
18.41b are each connected to a motor.

第１図、第２図で、スロットバルブ加、３０の原点（全
開又は全閉）は、検出板４０ａ、４０ｂとホトセンサー
４１ａ、４１ｂとにより設定され、モーターにパルスモ
ータ−を用いることで、スロットルバルブ加、３０の全
開から全閉までを高分解能で制御できる。スロットルバ
ルブ加、３０は、真空度に応じて使い分けされ、スロッ
トルバルブＩで精度良く制御できなくなった真空度範囲
は、スロットルバルブ園により精度良く制御される。In FIGS. 1 and 2, the origin (fully open or fully closed) of the slot valve opening 30 is set by detection plates 40a, 40b and photosensors 41a, 41b, and by using a pulse motor as the motor, The throttle valve can be controlled with high resolution from fully open to fully closed. The throttle valve 30 is used differently depending on the degree of vacuum, and the range of vacuum degrees that cannot be precisely controlled by the throttle valve I are precisely controlled by the throttle valve.

本実施例のような可変コンダクタンスバルブでは、真空
度に応じて面積の大きなスロットルバルブと面積の小さ
なスロットルバルブを使い分けることで、真空度に応じ
てコンダクタンスの変化率を適正化できるため、広範囲
な真空度を精度良（制御することができる。In a variable conductance valve like this example, by properly using a throttle valve with a large area and a throttle valve with a small area depending on the degree of vacuum, the rate of change in conductance can be optimized depending on the degree of vacuum, so it can be used over a wide range of vacuum conditions. The degree can be controlled with good precision.

〔発明の効果〕〔Effect of the invention〕

本発明は、以上説明したように、１個のバルブケース内
に面積の異なるスロットルバルブを少なくとも２個設け
たことで、真空度に応じて面積の異なるスロットルバル
ブを使い分はコンダクタンスの変化率を適正化できるの
で、広範囲な真空度を精度長々制御できるという効果が
ある。As explained above, by providing at least two throttle valves with different areas in one valve case, the rate of change in conductance can be adjusted by using throttle valves with different areas depending on the degree of vacuum. Since it can be optimized, it has the effect of being able to precisely control the degree of vacuum over a wide range over a long period of time.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本発明による可変コンダクタンスバルブの縦
断面図、第２図は、第１図のＡ−Ａ線断面図である。 １０・・・・・・バルブケース、２０．３０・・曲スロ
ットルバルブ 第１図FIG. 1 is a longitudinal sectional view of a variable conductance valve according to the present invention, and FIG. 2 is a sectional view taken along line A--A in FIG. 10... Valve case, 20.30... Curved throttle valve Figure 1

Claims (1)

【特許請求の範囲】[Claims] １．１個のバルブケース内に面積の異なるスロッル トパルブを少なくとも２個設けたことを特徴と八 する可変コンダクタンスバルブ。1. Throttles with different areas in one valve case The feature is that at least two topal valves are provided. variable conductance valve.
JP59114535A 1984-06-06 1984-06-06 Variable conductance valve Expired - Lifetime JP2685431B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59114535A JP2685431B2 (en) 1984-06-06 1984-06-06 Variable conductance valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59114535A JP2685431B2 (en) 1984-06-06 1984-06-06 Variable conductance valve

Publications (2)

Publication Number Publication Date
JPS60260772A true JPS60260772A (en) 1985-12-23
JP2685431B2 JP2685431B2 (en) 1997-12-03

Family

ID=14640186

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59114535A Expired - Lifetime JP2685431B2 (en) 1984-06-06 1984-06-06 Variable conductance valve

Country Status (1)

Country Link
JP (1) JP2685431B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0393916U (en) * 1990-01-08 1991-09-25

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54229A (en) * 1977-06-03 1979-01-05 Hitachi Ltd Flow adjuster
JPS551016U (en) * 1978-06-19 1980-01-07

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54229A (en) * 1977-06-03 1979-01-05 Hitachi Ltd Flow adjuster
JPS551016U (en) * 1978-06-19 1980-01-07

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0393916U (en) * 1990-01-08 1991-09-25

Also Published As

Publication number Publication date
JP2685431B2 (en) 1997-12-03

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