JPS60256036A - Collimator in fluorescent x-ray film thickness measuring and analyzing apparatus - Google Patents

Abstract

PURPOSE:To enhance working efficiency by omitting labor for replacing a collimator, by mounting a plurality of irradiation ports having different calibers to one collimator and selecting the irradiation port having a required caliber by moving the collimator in the left and right or circumferential direction. CONSTITUTION:Irradiation ports 2-6 having different calibers are arranged to a collimator 1 formed into a plate form linearily in one line in the longitudinal direction. The collimator 1 is made movable in the left and right direction by a drive means not shown in the drawing. A fluorescent X-ray tube 12 is arranged to the bottom part of an oil tank 10 holding heat dissipating or insulating oil and a detector 14 is arranged in the front surface side of the collimator 1. X-rays are allowed to irradiate an article 15 to be measured having a film 15 applied thereto form the irradiation ports 2-6. By mounting a calibration standard 7 to the collimator 1 provided with the irradiation ports 2-6, labor for attaching and detaching the collimator 1 every time can be omitted. A locating mirror 8 is also provided on the same line as the irradiation ports 2-6.

Description

DETAILED DESCRIPTION OF THE INVENTION "Field of Industrial Application" The present invention relates to a Corley meter in a fluorescent X-ray film thickness measurement and analysis device.

"Conventional technology" Fluorescence X&! Conventionally, most Corey meters for irradiating excited X-rays in film thickness measurement and analysis equipment are attached by screwing or insertion methods, and it is necessary to use a Corey meter of an appropriate diameter according to the size of the part to be measured. I selected it and then removed it and replaced it. In addition, the X-ray energy quictor and the standard for calibration of the X-ray output had to be attached and detached from time to time in the same manner as the Corley meter. Therefore, replacement or attachment/detachment takes too much time, which is a factor in reducing work efficiency.

"Problems to be Solved by the Invention" The present invention has been made in view of the above points, and has made it possible to improve work efficiency by eliminating the trouble of attaching and detaching each time as in the past. It is something.

Therefore, the gist of the invention is that the irradiation ports are formed in a plate shape and arranged in a straight line in the entire longitudinal direction of the irradiation ports having different diameters, or are formed in a cylindrical shape, and the irradiation ports have different diameters that pass from the top surface to the bottom surface. The Corey meter for fluorescent X-ray film thickness measurement and analysis equipment is characterized by the ports being arranged on the same circumference and the required diameter of the irradiation cap can be selected as appropriate, and the Corey meter is formed into a plate shape and has five different diameters. The openings are arranged in a straight line in the longitudinal direction or formed into a columnar shape, and all the irradiation openings with different diameters extending from the upper surface to the lower surface are provided on the same circumference, so that the irradiation opening with the required diameter can be selected as appropriate, A Corley meter in a fluorescent X-ray film thickness measurement and analysis apparatus is characterized in that a standard for calibrating an XL energy spectrum and an X-ray output is provided on the same line as the irradiation ports arranged in a row.

"Means for Solving the Problems" The present invention will be described in more detail below with reference to illustrated embodiments.

Figure 1 is a vertical front view of the plate-shaped Corey meter in its operational state, Figure 2 is a vertical side view of the irradiation port aligned with the X-ray passage hole in the oil tank, and Figure 3 is for calibration. A longitudinal side view of the standard aligned with the X-ray passage hole, and Figure 4 is a longitudinal cross-sectional view of the positioning mirror aligned with the X-ray passage hole and the X-ray passage hole shielded. A side view, FIG. 5 is a front view of a cylindrical Corey meter, and FIG. 6 is a sectional view taken along line A--A in FIG.

In the figure, l is a Corey meter formed in a plate shape, and irradiation ports 2, 3, 4, 5.6 having different diameters are linearly arranged in a line in the longitudinal direction. In this embodiment, the irradiation port 2 has a diameter of Q, 1jEjL, the irradiation port 4 has a diameter of 0.5B, the irradiation port 5 has a diameter of 1 mm, and the irradiation port 6 has a diameter of 2B. Further, in this embodiment, although not shown, it is possible to move in the left and right directions in the figure by known means such as rails, solenoids, or pulse motors. Therefore, in this embodiment, the Corey meter 1 can be moved using a solenoid or a non-lust motor, and the irradiation port of a required diameter can be appropriately set to the XIIJ communication through-hole of the oil tank described later. Further, 7 is a calibration standard, and the irradiation ports 2, 3, 4,
5.6 is provided on the same line. In this embodiment, it is provided next to the irradiation port 6, but it may be located at any other location. Further, the diameter of the irradiation lower a to the calibration standard 7 is 0.5 mm. By providing the calibration standard 7 in the Corley meter 1 provided with the irradiation ports 2.degree. 3.4 and 5.6 in this manner, it is possible to save the effort of attaching and detaching the calibration standard 7 one by one. 8
are the irradiation ports 2.3, 4, and 5 in the Corey meter IK.
．． It is a mirror for positioning provided on the same line as 6,
In this embodiment, it is provided adjacent to the calibration standard 7. The mirror 8 is tilted at a position slightly lower than the top surface 1a of the Corey meter 1, and has a through hole 9 communicating from the bottom surface 1b of the Corey meter 1 to the front surface of the Corey meter 1 that is aligned with the mirror 8. It is perforated.

Furthermore, by providing the mirror 8 at a position slightly below the top surface of the Corley meter 1 as described above, the area above the mirror 8 can be used as a shutter for the X-ray passage hole. Further, 10 is an oil tank containing oil for heat radiation and insulation, and a through hole 11 for passing X-rays is bored in the bottom surface.

12 is a fluorescent X-ray tube installed at the bottom of the oil tank;
13 is Patsukin. Further, reference numeral 14 designates the Corey meter 116 as a light source.

Next, the operation of this embodiment having the above configuration will be explained.

When not in use, as shown in Figure 4, the oil tank 10
In order to shield the 0X-ray passage hole 11, the first positioning mirror 8 is shifted to a position that coincides with the X-ray passage hole 11. When using the object, first turn on the light source 16 with the alignment mirror 8 in the same position as the X-ray passage hole 11, and
Illuminate 5. In this state, as shown in FIG. 5, the part to be measured on the coating 15a of the object to be measured 15 is aligned through a microscope installed on the front side of the Corley meter I (not shown). Next, as shown in Figure 2, for example, if the diameter that fits the part to be measured is 0.5 JIJL,
Q, 5JLIE diameter irradiation port 5 is X-ray passage hole 11
The Corey meter 1 may be moved in the left-right direction to a position that coincides with the above, and in this state, fluorescent X-rays may be irradiated onto the measurement area. Furthermore, if it is necessary to change the aperture depending on the part to be measured, the Corey meter 1 may be moved appropriately so that the irradiation aperture of the required aperture can be used. and,
After the irradiation with the fluorescent light X111j1 is completed in this way, the calibration standard 7 is first placed in the
What is necessary is to move the Corey meter l so that it is in a position that coincides with 1.

Next, another Ω embodiment of the present invention shown in FIGS. 5 and 6 will be described.

In this embodiment, the Corey meter 1 has a cylindrical shape, and the upper surface 1a'
Irradiation ports 2' and 3 with different diameters pass through to the lower surface 1b'.
', 4', 5', and 6' are provided on the same circumference. Further, 7' is the irradiation port 2' having a different diameter.

A calibration standard 8' provided on the same circumference as 3', 4', 5', and 6' is a mirror for positioning.

The method of use of this embodiment is the same as that of the previous embodiment, and when not in use, the positioning mirror 8' is
It is set at the same position as the line passing through hole 11, and when used, the Corley meter 1' is rotated in the circumferential direction as shown by the arrow to select an irradiation aperture of a desired diameter. Alternatively, it may be shifted until the fluorescent X-ray position is reached.

According to the present invention, the irradiation aperture can be changed to a desired diameter by moving the sb and the Corey meter in the left-right direction or the circumferential direction with the above-described configuration and operation. Therefore, it is possible to eliminate the inconvenience of having to attach and detach the device each time it is replaced as in the past, and work efficiency can be significantly improved. In addition, there is no need to attach and detach the calibration standards one by one as in the past, and all you have to do is move the Corley meter, so if the work can be done very smoothly, it will be of great practical use. There is.

[Brief explanation of the drawing]

Figure 1 is a vertical front view of the plate-shaped Corey meter in its operational state, Figure 2 is a vertical side view of the irradiation port aligned with the X-ray passage hole in the oil tank, and Figure 3 is for calibration. A longitudinal side view of the standard aligned with the X-ray passage hole, and Figure 4 is a longitudinal cross-sectional view of the positioning mirror aligned with the X-ray passage hole and the X-ray passage hole shielded. A side view, FIG. 5 is a front view of a cylindrical Corey meter, and FIG. 6 is a sectional view taken along line A--A in FIG. ■+1'...Coley meter, 2.2', 3.3',
4゜4', 5.5', 6.54...Irradiation port, 7,7'.
...Calibration standard, 8.8'...Mirror for positioning, 9
...Through hole, 10...Oil tank, 11...X8 passage hole, 12...Fluorescent X-ray tube. 13... Packkin, 14... Detector. 1) Figure 2 1 Figure 3 Figure 4 11111〒-111:l Figure 6 Procedural amendment July 1985-) 20 Commissioner of the Patent Office Manabu Shiga 1, Indication of the case 1981 Patent Application No. 1110012, name of invention Fluorescence Xll1! Coley Meter Densoku Kogyo Co., Ltd. 4, agent voluntarily 6, "Detailed description of the invention" column and drawing 7 in the specification subject to the amendment, and the circular amendment in the appendix of the contents of the amendment regarding film thickness measurement and analysis equipment Contents (1) Look at page 6, line 17 of the specification. In this state, as shown in Fig. 5, K and fig. In this state, the figures will be corrected, and (2) The middle-aged drawing 1 will be corrected as shown in the attached sheet. that's all

Claims (1)

[Claims] +11 It is formed into a plate shape, and the irradiation ports with different diameters are arranged linearly in the longitudinal direction, or it is formed into a columnar shape, and the irradiation ports with different diameters extending from the upper surface to the lower surface are arranged around the same circumference. 1. A Corley meter in a fluorescent X-ray film thickness measurement and analysis device, characterized in that an irradiation port of a required diameter can be selected as appropriate. (2) It is formed into a plate shape, and the irradiation ports with different diameters are arranged in a straight line in the longitudinal direction, or it is formed into a columnar shape, and the irradiation ports with different diameters are provided on the same circumference from the top surface to the bottom surface, Fluorescent
Corey meter in line film thickness measurement and analysis equipment.