JPS60251116A - 四塩化珪素の製造方法 - Google Patents

四塩化珪素の製造方法

Info

Publication number
JPS60251116A
JPS60251116A JP10552984A JP10552984A JPS60251116A JP S60251116 A JPS60251116 A JP S60251116A JP 10552984 A JP10552984 A JP 10552984A JP 10552984 A JP10552984 A JP 10552984A JP S60251116 A JPS60251116 A JP S60251116A
Authority
JP
Japan
Prior art keywords
silicon
chlorine
silicon tetrachloride
carbonaceous material
silica
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10552984A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0353247B2 (enrdf_load_stackoverflow
Inventor
Hideki Matsumura
秀樹 松村
Masayuki Shinoyama
篠山　雅行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Denka Co Ltd
Original Assignee
Denki Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Denki Kagaku Kogyo KK filed Critical Denki Kagaku Kogyo KK
Priority to JP10552984A priority Critical patent/JPS60251116A/ja
Priority to DE19843442370 priority patent/DE3442370C2/de
Publication of JPS60251116A publication Critical patent/JPS60251116A/ja
Publication of JPH0353247B2 publication Critical patent/JPH0353247B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP10552984A 1983-11-21 1984-05-24 四塩化珪素の製造方法 Granted JPS60251116A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP10552984A JPS60251116A (ja) 1984-05-24 1984-05-24 四塩化珪素の製造方法
DE19843442370 DE3442370C2 (de) 1983-11-21 1984-11-20 Verfahren zur Herstellung von Siliciumtetrachlorid

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10552984A JPS60251116A (ja) 1984-05-24 1984-05-24 四塩化珪素の製造方法

Publications (2)

Publication Number Publication Date
JPS60251116A true JPS60251116A (ja) 1985-12-11
JPH0353247B2 JPH0353247B2 (enrdf_load_stackoverflow) 1991-08-14

Family

ID=14410114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10552984A Granted JPS60251116A (ja) 1983-11-21 1984-05-24 四塩化珪素の製造方法

Country Status (1)

Country Link
JP (1) JPS60251116A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0353247B2 (enrdf_load_stackoverflow) 1991-08-14

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