JPS60250235A - Method and apparatus for inspecting thread surface - Google Patents

Method and apparatus for inspecting thread surface

Info

Publication number
JPS60250235A
JPS60250235A JP10623484A JP10623484A JPS60250235A JP S60250235 A JPS60250235 A JP S60250235A JP 10623484 A JP10623484 A JP 10623484A JP 10623484 A JP10623484 A JP 10623484A JP S60250235 A JPS60250235 A JP S60250235A
Authority
JP
Japan
Prior art keywords
screw
image signal
thread
autocorrelation
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10623484A
Other languages
Japanese (ja)
Other versions
JPH0258588B2 (en
Inventor
Kazuyuki Sakurada
桜田 和之
Yutaka Funiyu
船生 豊
Koichiro Miyagi
宮城 幸一郎
Junkichi Kino
城野 順吉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Anritsu Corp
Original Assignee
Anritsu Corp
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anritsu Corp, Kawasaki Steel Corp filed Critical Anritsu Corp
Priority to JP10623484A priority Critical patent/JPS60250235A/en
Publication of JPS60250235A publication Critical patent/JPS60250235A/en
Publication of JPH0258588B2 publication Critical patent/JPH0258588B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

PURPOSE:To detect the presence or degree of quality deficiency such as chattering on the thread surface at a high accuracy by irradiating the thread surface with one belt-like luminous flux to detect the reflection pattern. CONSTITUTION:A screw cut section 10A of a steel pipe 10 having the section made by cutting is irradiated with at least one belt-like luminous flux expanding in the direction of the thread axis A by a surface light source 20 and a filter 22 with a slit from the direction almost at the right angle to the thread axis A and the reflection pattern at the thread cut section 10A is taken with a TV camera 24 arranged to have the direction of the horizontal scan line coinciding with the thread axis A to obtain an image signal. Then, the image signal is processed to detect changes or the level thereof caused in a self-correlation image signal during the rotation centered on the thread axis A thereby inspecting quality deficiency of the thread surface.

Description

【発明の詳細な説明】 本発明は、ねじ表面の検査方法及び検査装置に係り、特
に、油井用等の使用目的で製造される鋼管等のねじ切削
部の品質検査を自動的に行う際に用いるのに91適な、
ねじ表面の検査方法及び検査装置の改良に関−4る。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thread surface inspection method and an inspection device, and in particular, to automatic quality inspection of threaded parts of steel pipes manufactured for use in oil wells, etc. 91 suitable for use,
Concerning improvements in screw surface inspection methods and inspection devices.

石油掘削等の使用目的で!′1造される14費には、通
常、その筐長手方向両端にねじが切削加工されており、
使用時には、一般に、両端の管外周面に2− M4ねじが形成された管と管のねじ部同十を、両端の内
周面に細ねじが切削加工されたカップリングと称Jる継
手で接続して使用Aるか、或いは、片端ずつに、管外周
面に雄ねじが切削加Tされたねじ部と管内周面に自ねじ
が切削加Tされたねじ部をそれぞれ有覆る管と管とを直
接ねじ込み接続して使用覆るようにされている。
For use in oil drilling, etc. The 14-piece manufactured in 1993 usually has screws machined on both longitudinal ends of its casing.
In use, generally, a pipe with 2-M4 threads formed on the outer peripheral surface of the pipe at both ends and a threaded part of the pipe with the same tenth diameter are connected with a joint called a coupling, in which fine threads are machined on the inner peripheral surface of both ends. Either they are connected and used A, or each end has a threaded part with a male thread cut on the outer circumferential surface of the pipe and a threaded part with a self-thread cut cut on the inner circumferential surface of the pipe. It is used by directly screwing the connection over the cover.

このように油井用鋼管は、管と管とを連続的に接続して
地中深く吊下げて実用に供せられるものであるが、この
場合、管には大きな引張り力が作用しており、特にその
ねじ接続部には一層苛酷な応力が集中Jることになる。
In this way, steel pipes for oil wells are used for practical use by continuously connecting pipes and suspending them deep underground, but in this case, large tensile forces act on the pipes. In particular, even more severe stress will be concentrated on the threaded connection.

従って、このような苛酷な用途に用いられる鋼管のねじ
接続部分の欠陥はΦ大な事故を招く危険性があり、ねじ
切削加工に際しては、充分な品質検査が要求される。
Therefore, a defect in the threaded connection part of a steel pipe used for such severe applications has the risk of causing a major accident, and sufficient quality inspection is required during thread cutting.

このため従来は、u4管のねじ切削工程において、ねじ
切削後に、各種のねじ要素ゲージを用いて、ねじ有効イ
¥、テーパ、リード、ねじ山高さ、ねじ山形状等の各種
ねじ要素を検査刃るねじ要素検査と、人間の目視により
、ねじ要素検査では発見することができない、ねじ切削
1iI−げ面のびびり等の微細な品質欠陥を検査する外
観検査とが一般的に行われている。しかしながら、人間
の目視による外観検査では、ねじ切削什モげ面における
微細な品質欠陥を発見することができないことがあると
いう問題点を有していた。
For this reason, conventionally, in the thread cutting process of U4 pipe, after thread cutting, various thread element gauges were used to inspect various thread elements such as effective thread size, taper, lead, thread height, and thread shape. Generally, screw element inspection is carried out using human visual inspection, and visual inspection is carried out to inspect minute quality defects such as chatter on the thread cutting surface, which cannot be discovered by screw element inspection, by human visual inspection. However, human visual inspection has a problem in that it may not be possible to discover minute quality defects on the thread cutting surface.

又、従来人手に頼っていたねじ要素検査は、近年、ねじ
部に直接センサプローブを接触させて、ねじ形状を三次
元測定−4ることによって、各種ねじ要素の自動検査が
可能になりつつあり、この分野での自動化は@速に進歩
しつつある。しかしながら、このようなねじ要素の計測
に関する分野での自動化の進歩に化較して、ねじ切削仕
上げ面の品質検査の分野においては、適当な検査方法や
検査装置が開発又は実用イヒされておらず、その自動化
が著しく遅れており、依然として熟練を要する人間の目
視による外観検査に頼らざるを得ないという問題点を有
していた。
In addition, in recent years, thread element inspection, which conventionally relied on manual labor, has become possible to automatically inspect various thread elements by directly contacting the thread with a sensor probe and measuring the thread shape in three dimensions. , automation in this field is progressing rapidly. However, compared to the progress in automation in the field of measuring thread elements, no suitable testing method or testing device has been developed or put into practical use in the field of quality inspection of finished threaded surfaces. However, the automation of this process has been significantly delayed, and the process still has to rely on visual inspection by highly skilled people.

このような問題点を解潤覆る4うのとして、発明者の一
部は、既に特願昭58−167901にお=3− いて、切削加工面に、その切削むらの周期間隔より大き
tI゛スポット状の光線を照射し、前記切削加工面から
反IJ=1される散乱光の空間的な輝度の明暗を検出し
て、前記散乱光がおりな(縞状の濃淡模様の有無又は淵
淡強用の空間的な変化から、びびり等の品質欠陥の有無
又は程度を検出することを特徴と−4る切削加工面の性
状検査方法を提案している。
In order to solve these problems, some of the inventors have already proposed in Japanese Patent Application No. 58-167901 that the machined surface has a tI゛ which is larger than the periodic interval of the cutting unevenness. A spot-shaped light beam is irradiated, and the brightness and darkness of the spatial brightness of the scattered light that is inversely IJ = 1 from the cutting surface is detected. We have proposed a method for inspecting the properties of machined surfaces, which is characterized by detecting the presence or extent of quality defects such as chatter from spatial changes in strength.

このような切削加工面の性状検査方法によれば、切削加
−「面におけるびびり等の品質欠陥の有無又は程度を確
実に検出力ることができ、自動化も可能となるという優
れた効果を有−4るが、散乱光がおりな−づ縞状の濃淡
模様の有無又は濃淡強度の空間的な変化から、びびり等
の品質欠陥の有無又は程度を精度良く検出覆ることが、
必ずしも容易ではなかった。
According to this method of inspecting the properties of machined surfaces, it is possible to reliably detect the presence or extent of quality defects such as chatter on the cutting surface, and it has the excellent effect of being able to be automated. -4 However, it is possible to accurately detect and detect the presence or extent of quality defects such as chatter from the presence or absence of striped shading patterns or spatial changes in shading intensity caused by scattered light.
It wasn't always easy.

本発明は、前記従来の問題点を解消でるべくなされたも
ので、ねじ表面におけるびびり等の品質欠陥の有無又は
程度を高精度で検出でることができ、自動化も可能なね
じ表面の検査方法を提供す4− ることを第1の目的と覆る。
The present invention has been made in order to solve the above-mentioned conventional problems, and provides a method for inspecting a screw surface that can detect the presence or extent of quality defects such as chatter with high precision on the screw surface and can be automated. The primary purpose is to provide 4-.

本発明は、又、前記第1の目的に加えて、少ないメモリ
容隼で検査を迅速に行うことができるねじ表面の検査装
置を提供することを第2の目的と覆る。
In addition to the first object, a second object of the present invention is to provide a screw surface inspection device that can quickly perform an inspection with a small memory capacity.

本発明は、ねじ表面の検査方法において、ねじ表面に、
ねじ軸方向に広がりを有−4る少なくとも1本の帯状光
束を照射し、ねじ表面の照光された部分に発生覆る周期
的な反射パターンを、ねじ軸方向に走査してその画像信
号を得、該画像信号の自己相関演算を行って自己相関画
像信号を形成し、ねじの、ねじ軸を中心と覆る回転中に
該自己相関画像信号内に生ずる変化又は変化量を検出し
て、ねじ表面のびびり等の品質欠陥の有無又は程度を検
出4るようにして、前記第1の目的を達成したものであ
る。
The present invention provides a method for inspecting a thread surface, in which:
irradiating at least one band-shaped light beam that spreads in the direction of the screw axis, and scanning a periodic reflection pattern generated and covering the illuminated portion of the screw surface in the direction of the screw axis to obtain an image signal thereof; An autocorrelation calculation is performed on the image signal to form an autocorrelation image signal, and a change or amount of change that occurs in the autocorrelation image signal during rotation of the screw around the screw axis is detected to detect the change on the screw surface. The first object is achieved by detecting the presence or extent of quality defects such as chatter.

本発明は、又、ねじ表面の検査装置において、ねじ表面
に、ねじ軸方向に広がりを有する、複数の亙いに平行な
帯状光束を窯口・1する照光手段と、ねじ表面の照光さ
れた部分に発生する格子状の反Q]パターンを、ねじ軸
方向に走査してその1ilnfli日を得る陽像手段と
、該画像信号の自己相関演算を行って自己相関画像(,
413を形成でる画像相関手段と、ねじ軸を中心として
ねじを回転させるねじ同転手「9と、ねじの回転中に該
自己相関画像信号内に生ずる変化又は変化量を検出覆る
検出手段と、を備え、該検出手段による検出結果から、
ねじ表面のびびり等の品質欠陥の有無又は程度を検出−
4るようにして、前記第2の目的を)¥成したものであ
る。
The present invention also provides a screw surface inspection device including: an illumination means for projecting a plurality of parallel belt-shaped light beams onto the screw surface, extending in the screw axial direction; Positive image means scans the lattice-like anti-Q] pattern that occurs in the screw axis direction to obtain its 1ilnfri day, and performs an autocorrelation operation on the image signal to obtain an autocorrelation image (,
413, a screw co-rotator for rotating the screw about the screw axis; and detection means for detecting a change or amount of change that occurs in the autocorrelation image signal during rotation of the screw; and from the detection result by the detection means,
Detects the presence or extent of quality defects such as chatter on the screw surface.
In this way, the second objective was achieved.

以下、本発明の詳細な説明−づる。A detailed description of the present invention follows.

一般に、ねじのびびりは、その切削過程にお1プる工作
機械本体、切削1月もしくは被加工物の振動によって引
き起こされて発生することが解っている。即ち、びびり
の原因は、工作機械本体(切削1口)と被加工物間の相
対撮動であるが、びびりは、工作機械本体と被加工物系
の自励振動に1止置しているので、−目発生し始めると
1トめることができない。このようイン時、被加工物、
例えば油井用w4管には、ねじ山に沿ってねじ切削方向
に周期的な切削むらが発生し、その周期は、工作機械本
体と被加工物間の相対振動数と切削速度によって変化す
る。又、切削むらの大きさも、工作機械本体と被+10
 T物量の相対振動や(筋幅の大きさによって変化づる
。更に、びびり以外にも、ねじ切削仕上げ而の晶質に影
響を及ぼすものとして、切削下見の幾何学的形状と送り
yI勅から定まる仕上げ面の幾何学的形状や、切削工具
切刃の稜の持つ微妙な粗さや欠損により仕上げ面に形成
される粗さ曲線等もある。
In general, it is known that thread chatter is caused by vibrations of the machine tool itself, the cutting machine, or the workpiece during the cutting process. In other words, the cause of chatter is the relative motion between the machine tool body (one cutting hole) and the workpiece, but the chatter is caused by self-excited vibration between the machine tool body and the workpiece system. Therefore, once the -th mark begins to occur, it is impossible to make one tot. In this way, the workpiece,
For example, in a W4 pipe for an oil well, periodic cutting unevenness occurs along the thread in the thread cutting direction, and the period changes depending on the relative frequency and cutting speed between the machine tool body and the workpiece. In addition, the size of the cutting unevenness is also different from the machine tool body and the
The relative vibration of the T material (varies depending on the size of the thread width).Furthermore, in addition to chatter, there are other factors that affect the crystal quality of the thread cutting finish, which are determined from the geometrical shape of the cutting preview and the feed rate. There are also roughness curves formed on the finished surface due to the geometric shape of the finished surface and the subtle roughness and defects of the edge of the cutting tool.

従って、本発明においては、前駅のようなねじの切削加
丁面の品質欠陥の有無又は程度を検出するに際して、第
1図乃至第3図に示すような原理を用いている。即ち、
例えば片端もしくは両端に切削加工されI=ねじ切削部
を有する鋼管10のねじ切削部10△に対して、第1図
に示す如く、面光源20とスリット付フィルタ22を組
合わせたもの、あるいは、光源自体に帯状光栄を発生さ
せる機能を持たせたものから、ねl;刺IA方向(第1
図の横方向)に広がりを右する少なくとも1本の 7− 帯状光束を、ねじ軸Aにほぼ直角な方向から照射し、ね
じ切削部10Aでの反則パターンを、水平走査線の方向
がねじ@A力方向一牧】るように配設されたテレビカメ
ラ24によって岡影して、画@信号を胃る。この時、テ
レビカメラ24は、水平走査方向には移動してもよいが
、垂直方向位置は、ねじ切削部10Aに対して不変と覆
る。
Therefore, in the present invention, the principle as shown in FIGS. 1 to 3 is used when detecting the presence or extent of quality defects on the cutting surface of a thread such as a maze. That is,
For example, a surface light source 20 and a filter with slits 22 are combined as shown in FIG. From those whose light sources themselves have the function of generating band-shaped rays,
At least one band-shaped light beam spreading in the horizontal direction (in the figure) is irradiated from a direction substantially perpendicular to the screw axis A, and the irregular pattern in the thread cutting section 10A is detected by scanning the horizontal scanning line in the direction of the screw @. The TV camera 24, which is arranged so that the direction of the A force is on, captures the image and captures the signal. At this time, the television camera 24 may move in the horizontal scanning direction, but its vertical position remains unchanged with respect to the thread cutting section 10A.

このテレビカメラ24によって倣形される反射パターン
は、スリツl−何フィルタ22のスリットの数で決定さ
れる帯状光束の数が1本である場合には、ねじ軸へ方向
にねじ山のピッチで周期的に明暗が変化する縞状の反射
パターンとなる。又、帯状光束の数が複数本である場合
には、ねじ軸へ方向にねじ山のピッチを有し、ねじ軸A
と垂直な方向(第1図の縦方向)に帯状光束の間隔で定
まる周期で明暗が変化4る格子状の反射パターンとなる
。しかしながら、本発明においては、帯状光束の数は1
本であっても複数本であっても問題ではない1.従って
、以後は、帯状光束の数が複数本である場合を例にとっ
て説明づる。
When the number of band-shaped light beams determined by the number of slits in the slit filter 22 is one, the reflection pattern imitated by this television camera 24 is determined by the pitch of the thread in the direction toward the screw axis. The result is a striped reflection pattern whose brightness changes periodically. In addition, when the number of band-shaped light beams is plural, the pitch of the threads is in the direction toward the screw axis, and the screw axis A
The result is a lattice-like reflection pattern in which the brightness and darkness change in a direction perpendicular to (vertical direction in FIG. 1) at a period determined by the interval between the band-shaped light beams. However, in the present invention, the number of band-shaped light beams is 1
It doesn't matter if it's a book or multiple books.1. Therefore, hereinafter, the case where the number of band-shaped light beams is plural will be explained as an example.

8− 次に、この状態で、ねじ切削部10Aを、ねじ軸Aを中
心として矢印B方向に回転させると、反射パターンは、
ねじ+hのピッチに応じてねじ軸へ方向に移動すると共
に、ねじ面のびびりによって、縦方向に移動・変形でる
。従って、例えば第2図(びびりの成分Cを含む場合)
に示すような、テレビカメラ24で撮影された移動変形
中の反射パターンの画像信号を、画像相関手段によって
自己相関処理する。
8- Next, in this state, when the thread cutting part 10A is rotated in the direction of arrow B around the thread axis A, the reflection pattern becomes
It moves in the direction of the screw shaft according to the pitch of the screw +h, and also moves and deforms in the vertical direction due to the chatter of the thread surface. Therefore, for example, Fig. 2 (when chatter component C is included)
The image signal of the reflection pattern being moved and deformed, as shown in FIG.

ここで、両陳の自己相関処理を行っているのは、ねじの
回転中に発生する反射パターンの変化の中から、ねじ山
のピッチに応じた移動変化の影響を取除いて、ねじ面の
びびり等の周期的な品質欠陥による反射パターンの変化
のみを取出すためである。
Here, Ryochen's autocorrelation processing is performed by removing the influence of movement changes according to the pitch of the thread from among the changes in the reflection pattern that occur during the rotation of the screw. This is to extract only changes in the reflection pattern due to periodic quality defects such as chatter.

この@像信号の自己用8演鐸を行って自己相関画像信号
を形成する画像相関手段としては、例えば、従来から知
られている、超音波光変調器とフーリエ変検光学系を用
いた光学的相関演算を行い、ディスプレイ装置の画面中
央に入力画像の水平定前方向自己相関画像のみを表示層
るものを用いたり、父は、特開昭57−91 (11”
36で開示されているような、超音波光変調器を右する
光学的相関器によって各水平走査毎の画像出力信号の一
次元自己相関関数を検出し、ディスプレイ両面十で画像
に構成し表示するものを用いることができる。
As an image correlation means for forming an autocorrelation image signal by performing self-correlation of the @ image signal, for example, an optical system using a conventionally known ultrasonic light modulator and a Fourier modulation optical system is used. My father used a device that performs a correlation calculation and displays only the horizontal autocorrelation image of the input image in the center of the screen of the display device.
The one-dimensional autocorrelation function of the image output signal for each horizontal scan is detected by an optical correlator attached to the ultrasonic light modulator as disclosed in No. 36, and the one-dimensional autocorrelation function of the image output signal is detected on both sides of the display and displayed. can be used.

なお、画像相関手段の種類はこれらに限定されず、画像
の自己相関が可能であれば、その方式は特に問題でない
Note that the type of image correlation means is not limited to these, and the method does not particularly matter as long as image autocorrelation is possible.

この自己相関処理によって街られる自己相関画像の一例
は、第3図(第2図に対応)に示J如くであり、この自
己相関画像イ^月の特徴としては、画面の水平走査線方
向の移動は相関出力画像に現われイ)゛いこと、テレビ
カメラ24の画角内に入った入力画像の自己相関出力画
像は、入力画像が画角内のどの11′/置にあっても、
ディスプレイ画面の中央を中心とした![石対称形に現
われること等がある。3 このような特徴により、反則パターンの自己…関画像は
、ねじ山のピッチによる格子パターンの横移動がなくな
り、目つ、ディスプレイ画面の中央に常時表示される。
An example of an autocorrelation image created by this autocorrelation process is shown in Figure 3 (corresponding to Figure 2), and the characteristics of this autocorrelation image are that the horizontal scanning line direction of the screen is The movement does not appear in the correlation output image (b) The autocorrelation output image of the input image that falls within the field of view of the television camera 24 is
Centered on the center of the display screen! [Sometimes it appears in a symmetrical stone shape. 3. Due to these features, the self-contained image of the foul pattern is always displayed in the center of the display screen without the horizontal movement of the grid pattern due to the pitch of the screw threads.

ここで、ねじ而がびびり等の欠陥を持たない場合には、
ねじ10を回転しても帯状光束は一定条件で反則されて
、相関画像は静1−シだ格子パターンとなる。この良品
の相関画像を、以後基準パターンと称°づる。一方、h
じ面にびびりがある場合には、第3図に符号りで示づ如
く、基準パターンにびびりの自己相関パターンが小なっ
て表われ、この相関パターンは、ねじの回転によって、
ランダムな弯形や明暗の点滅を繰返4.、しかしながら
、この自己相関パターンわ基t■パターンと同様に、横
方向に移動することはない。
Here, if the screw has no defects such as chatter,
Even if the screw 10 is rotated, the band-shaped light beam is distorted under certain conditions, and the correlated image becomes a static lattice pattern. This correlation image of a non-defective product is hereinafter referred to as a reference pattern. On the other hand, h
If there is chatter on the same surface, a small autocorrelation pattern of chatter appears in the reference pattern as shown by the symbols in Fig. 3, and this correlation pattern is changed by the rotation of the screw.
4. Repeating random curved shapes and flashing light and dark. However, this autocorrelation pattern does not move laterally, similar to the base t pattern.

第3図に示した如く、基準パターンとびびりの相関パタ
ーンとは、ディスプレイ画面内の同一範囲内に表われる
ため、M?パターンが明確に表われるディスプレイ両面
範囲をフレームメモリ等で記憶しておぎ、各フレーム毎
に同一箇所のY4IIl¥を比較して、イの変化量の大
小によってびびりを検WJることが可能である。
As shown in FIG. 3, since the reference pattern and the chatter correlation pattern appear within the same range on the display screen, M? It is possible to memorize the range of both sides of the display where the pattern clearly appears in a frame memory, etc., and compare Y4IIl\ at the same location for each frame, and check for chatter based on the amount of change in A. .

−] 1− 前記相関パターンは横方向に不変であり、且つ、ねじの
ピッチで決まる周期的パターンとなっている。又、帯状
光束を複数本どした場合には、縦方向に6帯状光束の間
隔で繰返される格子状パターンとなるため、これらの繰
返しの周期で構成される二次元格子の各格子内のそれぞ
れ一定づつを測定し、びびりの検査を行うことも充分可
能である。
-] 1- The correlation pattern is unchanged in the lateral direction and is a periodic pattern determined by the pitch of the screw. In addition, when multiple strip-shaped light beams are used, a grid-like pattern is created that is repeated in the vertical direction at an interval of 6 strip-shaped light beams, so that each lattice in each lattice of a two-dimensional lattice constituted by the period of these repetitions is constant. It is also possible to measure each other and conduct a chatter test.

この場合には、が1記フレームメモリで画面全体を記憶
しておく必要がなく、メモリの減少化と検査の高速化が
同時に期待できる。
In this case, it is not necessary to store the entire screen in the frame memory, and it is possible to reduce the amount of memory and speed up the inspection at the same time.

更に又、ねじがテレビカメラの画角内を上下に動くよう
な場合には、相関画像も上下に変1II−dるので、輝
点検出場所の設定が困Iとなるが、基準パターンの輝点
位置とびびりの相関パターンとの相対lit置は殆ど変
わらないので、1!準パターンの輝点を)6跡(れば、
これをMlとして、びびりの検出が可能となる。
Furthermore, if the screw moves up and down within the field of view of the television camera, the correlated image will also change up and down, making it difficult to set the bright spot detection location. Since the relative lit position between the point position and the chatter correlation pattern is almost the same, it is 1! If there are 6 traces (of the bright spots of the quasi-pattern),
Using this as Ml, chatter can be detected.

本発明は、以トのような原理に基づいてなされたもので
ある。
The present invention has been made based on the following principles.

以下、図面を弁照して、本発明が採用されIC鋼12− 胃管端部のねじ検T1装置の実施例を詳細にル1明覆る
Hereinafter, with reference to the drawings, an embodiment of an IC steel 12 gastric tube end screw inspection T1 device to which the present invention is adopted will be described in detail.

本実施例は、第4図及び第5図に示づ如く、鋼管10の
ねじ切削部10Aの表面に、ねじ−11方向に広がりを
有(る複数の平行な帯状光束を照tJJ′するための面
光源20及びスリット付フィルタ22と、ねじ表面の照
光された部分に発生づる格子状の反則パターンを、ねじ
軸方向に走査してその画fil (;j Qを得るテレ
ビカメラ24と、検査時にねじ軸を中心として鋼管10
を所定の回転速度で回転させるためのターニングローラ
30と、前記テレビカメラ24を制御11″4るための
カメラコントローラ32を介して入力される画像イハ号
の自己相関画像を行って自己相関画像信号を形成し、ね
じの回転中に該自己相関画像信号内に生じる変化又は変
化量を検出層る画像信号処理装置34と、から+に構成
されている。
In this embodiment, as shown in FIGS. 4 and 5, the surface of the threaded portion 10A of the steel pipe 10 is illuminated with a plurality of parallel band-shaped light beams extending in the direction of the thread -11. A surface light source 20 and a filter with slits 22, a television camera 24 that scans in the direction of the screw axis a grid-like irregular pattern generated on the illuminated portion of the screw surface to obtain an image thereof, and an inspection At the same time, the steel pipe 10 is centered around the screw shaft.
A turning roller 30 for rotating at a predetermined rotational speed and a camera controller 32 for controlling the television camera 24 are used to perform an autocorrelation image of the image No. 11'' to generate an autocorrelation image signal. and an image signal processing device 34 for detecting a change or amount of change occurring in the autocorrelation image signal during rotation of the screw.

図において、36及び38は、前記ねじ切削部10A、
面光源20、スリット付フィルタ22及びテレビカメラ
24に外部光線が侵入するのを防If−4るための下側
暗箱及びト側暗箱、40は、Iii+記ト側暗箱38を
&gIlff1Qの外(¥の大小に応じてト下方向に移
動するだめの1−明暗′f?U昇降装岡、42は、検査
時に鋼管10先端のねじ切削部10Aを暗箱の中に挿入
覆るための入側テーブルローラ、44△、44F3及び
46A、46Bは、前駅暗箱内における鋼管10の先端
位置を検出して、前記入側テーブルローラ42を制御す
るたV)の、投受光Qllの2紺の位置検出センサであ
る。
In the figure, 36 and 38 are the thread cutting part 10A,
The lower dark box and the G side dark box 40 for preventing external light from entering the surface light source 20, the slit filter 22, and the television camera 24 are the Iiii+G side dark box 38 &gIlff1Q outside (\ 42 is an entrance table roller for inserting and covering the threaded part 10A at the tip of the steel pipe 10 into the dark box during inspection. , 44Δ, 44F3, 46A, and 46B are two dark blue position detection sensors for transmitting and receiving light Qll in V) that detect the tip position of the steel pipe 10 in the front station dark box and control the input side table roller 42. It is.

前記画像イi月処理装置34は、例えば第6図に詳細に
示づ如く、カメラ」ントローラ32から入力される画像
信号の自己相関処理を11つだめの、例えば特開昭57
−91086に開示されたようなテレビ画像アナログ相
関駅間34Aと、該テレビ画像アナログ相関装置34A
より出力されるテLノご画像信号を画像に変換−4るデ
ィスプレイ装置34′Bと、前記テレビ画像アナログ相
関装置34△から出力される萌出第3図に示したような
テレビ画@(r+号より、びびりによる相関値をM準パ
ターンから弁別するためのデータ演算装置34Gと、前
記びびりによる相関1直をねじ検査とほぼ同時に表示覆
ると共に、善報を出力するための表示警報装暇34r)
と、から構成されている。
The image processing device 34, as shown in detail in FIG.
-A television image analog correlation station 34A and the television image analog correlation device 34A as disclosed in US Pat.
A display device 34'B converts the image signal output from the TV image signal into an image, and a display device 34'B converts the image signal output from the TV image analog correlation device 34△ into an image. No. 3, a data calculation device 34G for distinguishing the correlation value due to chatter from the M quasi-pattern, and a display alarm device 34r for displaying and covering the first correlation due to chatter almost simultaneously with screw inspection, and outputting good news. )
It is composed of and.

前記ト側暗箱昇降装置40は、萌出第4図に詳細に示し
た如く、前記+側暗箱38の側面に固着されlニギャボ
ゝンクス40Aと、ト端が該ギヤボックス40A内のギ
ヤと噛合するようにされたスクリュ40Bと、該スクリ
140Bを回転づるためのギA7ボツクス40Cと、該
ギヤボックス40C内のギヤを回転駆a−4るための昼
時用モータ40Dと、から構成されている。従って、u
AAl2O外径の大小に応じて、ト側暗箱38が1下に
移動され、侵入光が極力減らされると共に、ねじ切削部
10△面ヒの被測定部と、面光源20、スリット付フィ
ルタ22及びテレビカメラ24との距離が調節可能なよ
うになっている。
As shown in detail in FIG. 4, the to-side dark box lifting device 40 is fixed to the side surface of the +-side dark box 38, and the to-end engages with a gear in the gear box 40A. It is composed of a screw 40B, a gear A7 box 40C for rotating the screw 140B, and a daytime motor 40D for rotating the gear A4 in the gear box 40C. . Therefore, u
Depending on the size of the outer diameter of AAl2O, the dark box 38 on the G side is moved downwards to reduce the intruding light as much as possible, and also to connect the measured part of the thread cutting part 10Δ surface H, the surface light source 20, the slit filter 22, and The distance from the television camera 24 can be adjusted.

以下作用を説明する。The action will be explained below.

すし検査装置の被検査体であるw4菅10は、ヒ流側搬
送装両(図示省略)によって、当該ねじ検査装置の入側
テーブルローラ42−ヒに搬入され、15− テーブルローラ駆動モータ(図示省略)によって、暗箱
の中に送り込まれる。暗箱の中には、鋼管10の先端部
を検出づる位置検出センサ44A、44B及び46 A
、46Bが配設されており、まず、位置検出センサ44
A、44Bによる先端部検出により、入側テーブルロー
ラ42が減速制御され、更に、(l”/ 四検出センサ
46A、46Bによる先端部検出によって、入側テーブ
ルローラ42が停止制御される。このようにして、tA
管10の最先端部が所定の位置にあるように鋼管10が
停止Fされると、鋼管10の下面が入側テーブルローラ
42に接触しない高ざまでターニングローラ30がト昇
して、tA管10を所定の回転速度で回転せしめるべく
、ターニングローラ30が回転する。又、M4管10の
外(¥に合わせて、」−側暗箱昇陣装置40によりト側
暗箱38が昇降され、面光11!20、スリット付フィ
ルタ22及びテレビカメラ24の位置も調整され、前記
画像イハ月処理装置34によりねじ表面の自動検査が行
われる。
The w4 pipe 10, which is the object to be inspected in the sushi inspection device, is carried to the entry side table roller 42-hi of the thread inspection device by a flow side conveyance device (not shown), (omitted) and is sent into a dark box. Inside the dark box are position detection sensors 44A, 44B and 46A that detect the tip of the steel pipe 10.
, 46B are arranged, and first, the position detection sensor 44
The entry side table roller 42 is controlled to decelerate due to the detection of the tip by the A and 44B, and furthermore, the entry side table roller 42 is controlled to be stopped by the tip detected by the (l''/4 detection sensors 46A and 46B. Then, tA
When the steel pipe 10 is stopped so that the tip end of the pipe 10 is at a predetermined position, the turning roller 30 is raised to a height where the lower surface of the steel pipe 10 does not come into contact with the entrance table roller 42, and Turning roller 30 rotates to rotate 10 at a predetermined rotational speed. In addition, outside the M4 tube 10 (according to ¥), the - side dark box raising device 40 raises and lowers the dark box 38 on the side, and the positions of the surface light 11! 20, filter with slit 22, and television camera 24 are also adjusted. The image processing device 34 automatically inspects the screw surface.

ねじ切削部10Aの表面検査が行われ、ねじ表 16− 面の合否判定が1テわれた後、鋼管10は、入用リテー
ブルローラ42の逆回転によって、暗箱の外側に搬出さ
れ、他の搬出Rib(図示省略)によって、入側テーブ
ルローラ42より下流側の搬送ラインに搬出される。
After the surface inspection of the thread cutting part 10A is performed and the pass/fail judgment of the thread surface is carried out once, the steel pipe 10 is carried out to the outside of the dark box by the reverse rotation of the retable roller 42, and is carried out to the outside of the dark box. By a carry-out Rib (not shown), the paper is carried out to a conveyance line downstream from the input table roller 42.

本実施例により得られたii[ii#信号の例を第7図
乃至第10図に示づ。第7図及び第8図は、びびり等の
品質欠陥のない18着のねじ部の画像信号を自己相関処
理した結果をディスプレイ装置34F3に写したものの
連続画像写真であり、格子状パターンの明暗模様が第7
図と第8図で変化していないことが明らかである。一方
第9図及び第10図は、ねじ切削面にびびりが発生した
鋼管のねじ部の画*tgqを自己相関処理した結果をデ
ィスプレイ装置3411に写したものの連続画像写真で
あり、ねじ山のピッチ間隔【よって、発生している格子
状の基本パターンは変化していないが、びびりによる相
関値が基本パターンに重ね合わされており、びびりにに
る相関パターンがねじの回転により変化していることが
明らかである。
Examples of the ii[ii# signal obtained in this embodiment are shown in FIGS. 7 to 10. FIGS. 7 and 8 are continuous image photographs of the results of autocorrelation processing of image signals of 18 threaded parts free of quality defects such as chatter, which are displayed on the display device 34F3, and show a light and dark pattern in a grid pattern. is the seventh
It is clear that there is no change between the figure and FIG. On the other hand, FIGS. 9 and 10 are continuous image photographs of the results of autocorrelation processing of the image *tgq of the threaded part of a steel pipe where chatter has occurred on the thread cutting surface, and are displayed on the display device 3411. Interval [Therefore, although the basic lattice pattern that is occurring has not changed, the correlation value due to chatter is superimposed on the basic pattern, and it can be seen that the correlation pattern due to chatter is changing due to the rotation of the screw. it is obvious.

本実施例においては、面光源20、スリット付フィルタ
22及びテレビカメラ24を固定し、鋼管10を回転せ
しめてねじ検査を行うようにしていたので、信号線等を
固定則することができ、構成が簡略である。なお、本発
明によるねじ検査装置の構成はこれに限定されず、鋼管
10を固定し・、相ηに一体化した面光源20、スリブ
トイ1フイルタ22及びテレビカメラ24を鋼管10の
回りに回転させるようにしたり、あるいは、鋼管10と
面光源20及びスリット付フィルタ22を固定配向し、
テレビカメラ24のみを移動させて、ねじ検査を行うよ
うに構成力ることも可能である。
In this embodiment, the surface light source 20, the slit filter 22, and the television camera 24 are fixed, and the steel pipe 10 is rotated to perform the screw inspection. Therefore, the signal line etc. can be fixed, and the configuration is simple. Note that the configuration of the thread inspection device according to the present invention is not limited to this, and the steel pipe 10 is fixed, and the surface light source 20 integrated with the phase η, the slit toy 1 filter 22, and the television camera 24 are rotated around the steel pipe 10. Alternatively, the steel pipe 10, the surface light source 20, and the filter with slits 22 are fixedly oriented,
It is also possible to perform a screw inspection by moving only the television camera 24.

前記実施例においては、本発明が、fA菅讐端部のねじ
仕トげ而のびびり等の性状検査に適用されていたが、本
発明の適用範囲はこれに限定されず、他の部材のねじ検
査にも同様に適用することができる。又、ねじ検査以外
の他の対象物の検査であってb、切削加工面上に周11
114のある欠陥が存在鱒るものであれば、その欠陥の
有無が検出可能であることは明らかである。
In the above embodiments, the present invention was applied to inspecting the properties of the threaded end of the fA, such as chatter, but the scope of application of the present invention is not limited to this, and is applicable to other members. It can be similarly applied to screw inspection. In addition, for inspection of other objects other than screw inspection, b.
It is clear that if a certain defect exists in 114, the presence or absence of that defect can be detected.

以上説明した通り、本発明によれば、ねじ表向における
びびり等の品質欠陥の有無又は程度を、高精度で検出て
ることができ、自動化も可能であるという優れた効果を
有力る。
As explained above, according to the present invention, the presence or extent of quality defects such as chatter on the surface of a screw can be detected with high precision, and automation is also possible.

【図面の簡単な説明】 第1図は、本発明に係るねじ表面の検査方法の原理を説
明づるための斜視図、第2図は、InIしく、びびりを
含む画像信号の一例を示1線図、第3図は、同じく、第
2図に対応−4る自己相関処理画像信号の一例を示J線
図、第4図は、本発明が採用されl=鋼管管端部のねじ
検査装置の実施例の構成を示−4断面図、第5図は、第
4図のv−v線に沿う断面図、第6図は、前記実施例で
用いられている画像イへ月処理装置の構成を示すブロッ
ク線図、第7図及び第8図は、びびり等の品質欠陥のな
い鋼管のねじ部の画像信号を自己相関処理した結果を示
A連続画際′4′真、第9図及び第10図は、ねじ表面
にびびりが発生し/、= uA管のねじ部の画lIj!
仇弓を自己H1関処即り、た結果を示′1連続画ti 
w Pfである1、  19− 10・・・!14晋、 10△・・・ねじ切削部、 20・・・面光源、 22・・・スリット付フィルタ、 A・・・ねし軸、 24・・・テレビカメラ、 30・・・ターーングローラ、 32・・・カメラ」ントローラ、 34・・・画像信号処理装貿。 34A・・・テレビ画像アナログ相関装置、34tl・
・・ディスプレイ装置、 340・・・データ演葬装置、 34 r)・・・表示警報装置。 代理人 高 矢 論 (ばか1名) −20− 第1図 第7図 第6図 第9図 第10図 昭和59年特許願第106234号 2、発明の名称 ねじ表面の検査方法及び検査装置 3、補正をする者 事件との関係 特許出願人 名 称 (125)川崎製鉄株式会社 (ほか1名) 4、代理人 〒160 住 所 東京都新宿区西新宿−丁目12番11号山 銀
 ビ ル 6、補正の対象 明細書の発明の詳細な説明の欄、明細書の図面の簡単な
説明の欄及び図面。 7、補正の内容 (1)明細書第18頁第6行から第20行の[本実施例
により・・・明らかである。」を1本実施例により、び
びり等の品質欠陥のない鋼管のねじ部の画像信号を自己
相関処理した結果、格子状パターンの明暗模様が変化し
ないことが確認できた。 一方、ねじ切削面にびびりが発生した鋼管のねじ部の画
像信号を自己相関処理した結果、ねじ山のピッチ間隔に
よって、発生している格子状の基本パターンは変化しな
いが、びびりによる相関値が基本パターンに重ね合わさ
れており、びびりによる相関パターンがねじの回転によ
り変化することが確認できた。」と改める。 (2)明細書第20頁第14行から第20行の「ブロッ
ク線図、・・・連続画像写真である。」をrブロック線
図である。」と改める。 (3)図面第7図乃至第10図を削除する。 広九
[Brief Description of the Drawings] Fig. 1 is a perspective view for explaining the principle of the thread surface inspection method according to the present invention, and Fig. 2 shows an example of an image signal that is InI and includes chatter. Similarly, FIG. 3 shows an example of the autocorrelation processed image signal corresponding to FIG. 2. Fig. 5 is a sectional view taken along line v-v in Fig. 4, and Fig. 6 is a sectional view of the image processing device used in the above embodiment. Block diagrams showing the configuration, Figures 7 and 8, show the results of autocorrelation processing of image signals of threaded parts of steel pipes that are free of quality defects such as chatter. And FIG. 10 shows that chatter occurs on the threaded surface.
I took revenge on myself at the H1 station and showed the result '1 continuous picture ti
w Pf is 1, 19-10...! 14 Jin, 10△... Thread cutting part, 20... Surface light source, 22... Filter with slit, A... Threaded shaft, 24... Television camera, 30... Turn roller, 32... Camera controller, 34... Image signal processing equipment. 34A...TV image analog correlation device, 34tl.
...display device, 340...data performance device, 34 r)...display alarm device. Agent Takaya Ron (1 idiot) -20- Fig. 1 Fig. 7 Fig. 6 Fig. 9 Fig. 10 Fig. 1982 Patent Application No. 106234 2 Title of Invention Method and Inspection Device for Thread Surface 3 , Relationship to the case of the person making the amendment Patent applicant name (125) Kawasaki Steel Corporation (and 1 other person) 4. Agent 160 Address Gin Building 6, Nishi-Shinjuku-chome-12-11 Yama, Shinjuku-ku, Tokyo , a column for a detailed explanation of the invention in the specification to be amended, a column for a brief explanation of the drawings in the specification, and the drawings. 7. Contents of the amendment (1) From page 18, line 6 to line 20 of the specification [This example makes it clear... According to this example, as a result of performing autocorrelation processing on an image signal of a threaded portion of a steel pipe without quality defects such as chatter, it was confirmed that the light and dark pattern of the lattice pattern did not change. On the other hand, as a result of autocorrelation processing of the image signal of the threaded part of a steel pipe where chatter has occurred on the thread cutting surface, the basic lattice pattern that is occurring does not change depending on the thread pitch interval, but the correlation value due to chatter It was confirmed that the correlation pattern due to chatter was superimposed on the basic pattern and changed as the screw rotated. ”. (2) "Block diagram, . . . is a continuous image photograph" in lines 14 to 20 of page 20 of the specification is an r block diagram. ”. (3) Delete drawings 7 to 10. Guangkyu

Claims (2)

【特許請求の範囲】[Claims] (1)ねじ表面に、ねじ軸方向に広がりを有づる少なく
とも1本の帯状光束を照射し、 ねじ表面の照光された部分に発生する周期的な反射パタ
ーンを、ねじ軸方向に走査してその画像信号を得、 該画像信号の自己相関演算を行って自己相関画像信号を
形成し、 ねじの、ねじ軸を中心とする回転中に該自己相関画像信
号内に生ずる変化又は変化量を検出して、ねじ表面のび
びり等の品質欠陥の有無又は程度を検出することを特徴
とするねじ表面の検査方法。
(1) The screw surface is irradiated with at least one band-shaped light beam that spreads in the screw axial direction, and the periodic reflection pattern generated on the illuminated part of the screw surface is scanned in the screw axial direction. Obtaining an image signal, performing an autocorrelation calculation on the image signal to form an autocorrelation image signal, and detecting a change or amount of change that occurs in the autocorrelation image signal during rotation of the screw about the screw shaft. A method for inspecting a screw surface, the method comprising: detecting the presence or extent of quality defects such as chatter on the screw surface.
(2)ねじ表面に、ねじ軸方向に広がりを有でる、複数
の互いに平行な帯状光束を照射する照光手段と、 ねじ表面の照光された部分に発生する格子状の反射パタ
ーンを、ねじ軸方向に走査してその画像 1− 1ハ号を得る搬像手段と、 該画像信号の自己相関演算を行って自己相関画像信号を
形成する両像相関手段と、 ねじ軸を中心としてねじを回転させるねじ回転手段と、 ねじの回転中に該自己相関画像信号内に生ずる変化又は
変化量を検出する検出手段と、を備え、該検出手段によ
る検出結果から、ねじ表面のびびり等の品質欠陥の有無
又は程度を検出−4るようにされていることを特徴とす
るねじ表面の検査装置。
(2) An illumination means that irradiates the screw surface with a plurality of mutually parallel belt-shaped light beams that spread in the screw axial direction; an image carrier means for scanning the image signal to obtain an image No. 1-1c; a double image correlation means for performing an autocorrelation calculation on the image signal to form an autocorrelation image signal; and a means for rotating the screw about the screw axis. A screw rotating means, and a detecting means for detecting a change or amount of change that occurs in the autocorrelation image signal during rotation of the screw, and detects the presence or absence of quality defects such as chatter on the screw surface from the detection result by the detecting means. 4. A screw surface inspection device, characterized in that it is configured to detect or detect the degree of the screw surface.
JP10623484A 1984-05-25 1984-05-25 Method and apparatus for inspecting thread surface Granted JPS60250235A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10623484A JPS60250235A (en) 1984-05-25 1984-05-25 Method and apparatus for inspecting thread surface

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10623484A JPS60250235A (en) 1984-05-25 1984-05-25 Method and apparatus for inspecting thread surface

Publications (2)

Publication Number Publication Date
JPS60250235A true JPS60250235A (en) 1985-12-10
JPH0258588B2 JPH0258588B2 (en) 1990-12-10

Family

ID=14428429

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10623484A Granted JPS60250235A (en) 1984-05-25 1984-05-25 Method and apparatus for inspecting thread surface

Country Status (1)

Country Link
JP (1) JPS60250235A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2606879A1 (en) * 1986-05-29 1988-05-20 Rengo Co Ltd DEVICE FOR DETECTING DEFECTS IN A SINGLE-SIDED INVERSE CARDBOARD
GB2407867A (en) * 2003-11-07 2005-05-11 Agilent Technologies Inc Detecting a homogenous surface by the autocorrelation of the optical images of the surface
JP2010014547A (en) * 2008-07-03 2010-01-21 Sumitomo Heavy Ind Ltd Surface-inspection method and mark-inspecting apparatus
JP2010523988A (en) * 2007-04-12 2010-07-15 ファウ・ウント・エム・ドイチュラント・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング Method and apparatus for optical measurement of external threads
WO2011093372A1 (en) * 2010-01-29 2011-08-04 住友金属工業株式会社 Defect inspection device
WO2021014645A1 (en) * 2019-07-25 2021-01-28 三菱電機株式会社 Inspection device and method, program, and recording medium

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2606879A1 (en) * 1986-05-29 1988-05-20 Rengo Co Ltd DEVICE FOR DETECTING DEFECTS IN A SINGLE-SIDED INVERSE CARDBOARD
GB2407867A (en) * 2003-11-07 2005-05-11 Agilent Technologies Inc Detecting a homogenous surface by the autocorrelation of the optical images of the surface
GB2407867B (en) * 2003-11-07 2006-08-16 Agilent Technologies Inc Homogeneous and plain surface detection in optical navigation systems
US7382935B2 (en) 2003-11-07 2008-06-03 Avago Technologies Ecbu Ip Pte Ltd Homogeneous and plain surface detection in optical navigation systems
JP2010523988A (en) * 2007-04-12 2010-07-15 ファウ・ウント・エム・ドイチュラント・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング Method and apparatus for optical measurement of external threads
JP2010014547A (en) * 2008-07-03 2010-01-21 Sumitomo Heavy Ind Ltd Surface-inspection method and mark-inspecting apparatus
WO2011093372A1 (en) * 2010-01-29 2011-08-04 住友金属工業株式会社 Defect inspection device
US9121833B2 (en) 2010-01-29 2015-09-01 Nippon Steel & Sumitomo Metal Corporation Defect inspecting apparatus
WO2021014645A1 (en) * 2019-07-25 2021-01-28 三菱電機株式会社 Inspection device and method, program, and recording medium
JPWO2021014645A1 (en) * 2019-07-25 2021-12-09 三菱電機株式会社 Inspection equipment and methods, as well as programs and recording media

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