JPS60242711A - Supporting structure of piezoelectric transducer - Google Patents

Supporting structure of piezoelectric transducer

Info

Publication number
JPS60242711A
JPS60242711A JP9913284A JP9913284A JPS60242711A JP S60242711 A JPS60242711 A JP S60242711A JP 9913284 A JP9913284 A JP 9913284A JP 9913284 A JP9913284 A JP 9913284A JP S60242711 A JPS60242711 A JP S60242711A
Authority
JP
Japan
Prior art keywords
base
tuning fork
piece
vibration
chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9913284A
Other languages
Japanese (ja)
Inventor
Hideo Endo
秀男 遠藤
Akira Ikeda
池田 章
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Matsushima Kogyo KK
Original Assignee
Matsushima Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushima Kogyo KK filed Critical Matsushima Kogyo KK
Priority to JP9913284A priority Critical patent/JPS60242711A/en
Publication of JPS60242711A publication Critical patent/JPS60242711A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders; Supports
    • H03H9/0504Holders; Supports for bulk acoustic wave devices
    • H03H9/0514Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps
    • H03H9/0519Holders; Supports for bulk acoustic wave devices consisting of mounting pads or bumps for cantilever

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To suppress leakage of vibration, to reduce man-hour and to obtain high performance and low cost piezoelectric transducer by bending the tip of two rod or plate terminal conductors in the center axis of an oscillator chip in the region of <=0.5L, where L is the length of the base of the oscillation chip and fitting the tip directly with a prescribed gap. CONSTITUTION:The raw material of the piezoelectric transducer is crystal or ceramic, the shape is tuning fork, rectangular or disc shape and the vibrating mode is bending, thickness-shear, longitudinal, torsional, width-slip or their combinations. For example, tips 17a, 18a of two parallel lead terminals 17, 18 in parallel with U-shaped plane prolonged along a branch 16a of one terminal tuning fork crystal oscillating chip 16 are turned in U-form to the base 16b so as to fix directly int with the base 16b. Thus, the leakage of the vibration is suppressed by supporting the center of the base of the oscillating chip having a small vibration displacement with the two lead terminals in this way, then the support between the oscillating chip and the lead terminals is made stable, the man-hour is decreased and the piezoelectric transducer with high performance and low cost is attained.

Description

【発明の詳細な説明】 〔技術分野〕 本発明は、水晶振動子、セラミック振動子等圧電振動子
の支持構造に関する。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field] The present invention relates to a support structure for a piezoelectric resonator such as a crystal resonator or a ceramic resonator.

〔従来技術〕[Prior art]

従来の圧電振動子の支持構造の一例として、音叉型水晶
振動子の支持構造を第1図に示す。同図(A)は平向断
面図、同図CB)は正面断面図である。同図において、
1は音叉型水晶発振片、2は該音叉型水晶発振片1の支
持を兼ねたリード端子、4は該リード端子2と該リード
端子2を固着するハーメチックガラス3とからなるステ
ム、二点鎖線で示す5はケースである。以下、ケースは
省略する。
As an example of a conventional support structure for a piezoelectric resonator, a support structure for a tuning fork type crystal resonator is shown in FIG. FIG. 3A is a plan cross-sectional view, and FIG. CB) is a front cross-sectional view. In the same figure,
1 is a tuning fork type crystal oscillator piece, 2 is a lead terminal which also serves as a support for the tuning fork type crystal oscillator piece 1, 4 is a stem consisting of the lead terminal 2 and a hermetic glass 3 for fixing the lead terminal 2, and a two-dot chain line 5 shown in is a case. The cases will be omitted below.

水晶振動子の性能を示す重要特性として周波数温度特性
および周波数経時変化特性がある。この周波数特性およ
び周波数経時変化特性に大きな影響を与える欠点に振動
モレがある。この振動モレは、第1図でいえば音叉型水
晶発振片1の振動がリード端子2.ステム4.ケース5
に伝わる現象をいう。この振動モレが大きくなれば振動
子に外力が加わった場合振動子の発振周波数は大きく変
化する。このために、従来の音叉型水晶振動子の構造は
同図に示すようにできる限り振動変位の小さな領域を選
んで支持する構造になっている。
Important characteristics that indicate the performance of a crystal resonator include frequency temperature characteristics and frequency change characteristics over time. A drawback that greatly affects the frequency characteristics and frequency change characteristics over time is vibration leakage. This vibration leakage is caused by the vibration of the tuning fork type crystal oscillator piece 1 in the lead terminal 2 in FIG. Stem 4. Case 5
A phenomenon that is transmitted to If this vibration leakage increases, the oscillation frequency of the vibrator changes greatly when external force is applied to the vibrator. For this reason, the structure of a conventional tuning fork type crystal resonator is such that a region with the smallest possible vibrational displacement is selected and supported, as shown in the figure.

前述の第1図は音叉型水晶発振片1の基部を2本のリー
ド端子2α、2bの側面で直接固着する構造を示し、第
2図(A)CB)は音叉型水晶発振片8の中心軸を含む
基部を2本のリード端子9α、9bで挾み直接固着する
構造を示している。さらに第3図は、一端音叉型水晶発
振片10の枝部に油って延長させたリード端子11α、
11hの先端を基部側にUターンさせ、該音叉型水晶発
振片の中心軸を含む基部と直接固着する構造を示してい
る。同図の構造は、屈曲振動と捩れ振動の弾性結合を利
用する音叉型水晶振動子に用いられている。この結合音
叉型水晶振動子は、その目的とするところが前述の周波
数温度特性の向上にあるため、とりわけ振動モレの少な
い支持構造を必要とし、同図のような特異な構造が選ば
れている。
The above-mentioned FIG. 1 shows a structure in which the base of the tuning fork type crystal oscillator piece 1 is directly fixed to the side surfaces of the two lead terminals 2α and 2b, and FIG. A structure is shown in which the base including the shaft is sandwiched between two lead terminals 9α and 9b and directly fixed. Furthermore, FIG. 3 shows a lead terminal 11α extended by applying oil to a branch of the tuning fork type crystal oscillator piece 10;
A structure is shown in which the tip of 11h is U-turned toward the base and is directly fixed to the base including the central axis of the tuning fork type crystal oscillator piece. The structure shown in the figure is used in a tuning fork type crystal resonator that utilizes elastic coupling of bending vibration and torsional vibration. Since the purpose of this coupled tuning fork type crystal resonator is to improve the frequency-temperature characteristics mentioned above, it requires a support structure with particularly little vibration leakage, and the unique structure shown in the figure was chosen.

第4図(A)はこの結合音叉型水晶振動子の振動変位を
示すもので、該振動子の基部A、Bを横軸に1、板れ振
動の変位量を縦軸にとったものである。同図によりもっ
とも変位置の少ない基部中心部を含み支持する支持構造
が正当化できる。
Figure 4 (A) shows the vibration displacement of this coupled tuning fork type crystal resonator, with the bases A and B of the vibrator taken as 1 on the horizontal axis, and the displacement of the plate vibration on the vertical axis. be. The figure justifies the support structure that includes and supports the central portion of the base that undergoes the least displacement.

第4図CB)はこの結合音叉型水晶振動子の振動変位を
示すもので、該振動子の中心軸上にある該振動子の基部
0.Dを横軸に、捩れ振動の変位量を縦軸にとったもの
である。ここで該振動子の基部0.D間の距離をLとす
れば、同図によりもつとも変位量の少ない該振動子の基
部は音叉中心軸上で、基部端Cより音叉腕に向って0.
5Lのところまでとなる。以上から該振動子の音叉中心
軸上で基部端Cより音叉腕に向かって0,5Lのところ
をEとおくと、同図により音叉中心軸上でもつとも変化
量の少ない基部端CからEまでを支持する支持構造が選
ばれる。
FIG. 4 CB) shows the vibrational displacement of this coupled tuning fork type crystal resonator, and shows the vibration displacement of the base 0. The horizontal axis is D and the vertical axis is the amount of displacement due to torsional vibration. Here, the base of the vibrator 0. If the distance between D is L, then the base of the vibrator, which has a small amount of displacement according to the same figure, is on the central axis of the tuning fork, and the distance between the base end C and the tuning fork arm is 0.
It goes up to 5L. From the above, if the point 0.5L from the base end C toward the tuning fork arm on the central axis of the tuning fork of the vibrator is set as E, then from the same figure, from the base end C to E where the amount of change is small on the central axis of the tuning fork. A support structure is selected that supports .

先の従来例についていえば第2図と第6南の支持構造は
振動モレについては解消できるが、音叉型水晶発振片の
U牢乎面をリード端子で垂直に挾み固着する構造のため
多くの工数を要し低価格に適さないという欠点を有して
いる。反対にまた1第1図の支持構造は、音叉型水晶発
振片の基部中心部をはずした支持構造であるため、未だ
振動モレについて充分解消されないという欠点を有して
いる。
Regarding the conventional examples mentioned above, the support structures shown in Figures 2 and 6 South can eliminate vibration leakage, but the structure in which the U surface of the tuning fork-shaped crystal oscillator piece is vertically sandwiched and fixed with lead terminals causes a lot of problems. It has the disadvantage that it requires many man-hours and is not suitable for low cost. On the other hand, since the support structure shown in FIG. 1 is a support structure in which the center of the base of the tuning fork type crystal oscillation piece is removed, it still has the drawback that vibration leakage has not been sufficiently eliminated.

〔目的〕〔the purpose〕

本発明は、以上従来の欠点を解消するものであり、振動
モレの抑制され、工数低減の図れる、高性能、低価格な
圧電振動子の支持構造を提供することである。
The present invention eliminates the above-mentioned conventional drawbacks, and provides a high-performance, low-cost support structure for a piezoelectric vibrator that suppresses vibration leakage and reduces the number of man-hours.

〔概要〕〔overview〕

本発明の圧電振動子の支持構造は鈍振片がそのU牢乎向
上の底端に近くかつ両側端に達しない発振片の中心軸を
含む部分において、前記発振片の底端のさらに下方に位
置するハーメチック端子を貫通し、かつ前記U牢乎面に
平行させて設けた2本の棒状會たは板状の端子導体の先
端が、該発振片の基部長さをLとしたときに、0.5L
以下の領域で該発振片の中心軸方向に屈曲し、一定の間
隙を有し直接固着されていることを特徴とする。
The supporting structure of the piezoelectric vibrator of the present invention is such that the blunt oscillating piece is located further below the bottom end of the oscillating piece in a portion including the central axis of the oscillating piece that is close to the bottom end of the U cell and does not reach both ends. When the tips of two rod-shaped or plate-shaped terminal conductors that penetrate through the located hermetic terminal and are parallel to the U-shaped surface, the length of the base of the oscillating piece is L, 0.5L
It is characterized in that it is bent in the direction of the center axis of the oscillating piece in the following areas and is directly fixed with a certain gap.

〔実施例〕〔Example〕

本発明に関する圧電振動子は、素材では水晶。 The piezoelectric vibrator according to the present invention is made of crystal.

セラミック、ニオブ酸リチウム、タンタル酸リチウム等
、形状では、音叉型、矩形型1円板型等、振動形態では
屈曲、厚みすべり、縦、捩り9幅すべり、またはそれら
の結合等、以上の組合せから成っている。
Ceramic, lithium niobate, lithium tantalate, etc. Shapes include tuning fork, rectangular, 1-disk, etc. Vibration forms include bending, thickness sliding, vertical, torsional, 9 width sliding, or combinations of these. It has become.

本例はその一例として音叉型水晶振動子の支持構造につ
いて説明する。
In this example, a support structure for a tuning fork type crystal resonator will be explained as an example.

第5図(A)は本発明の実施例を示す正面図である。FIG. 5(A) is a front view showing an embodiment of the present invention.

同図において、本例の音叉型水晶振動子の支持構造は、
音叉−水晶発振片12(以下、発振片12)が、そのU
牢乎向12α上の底端12Cに近くかつ両側端12d’
、12d、“に達しない発振片12の中心軸Pを含む部
分において、前記発振片12のさらに下方に位置するハ
ーメチック端子13を貫通し、かつ前記U牢乎面121
Zに平行させて設けた2本の板状のリード端子14.1
5の先端14a、15αが、該発振片12の基部12h
の長さをLとしたときに0.5 L以下の領域で該発振
片12の中心軸P方向に屈曲し一定の間隙Sを有し直接
固着されていることを特徴とじている。リード端子14
,15は丸棒であってもよい。またリード端子の先端1
4α、15bは平行であわても傾斜していてもよい。第
5図(B)。
In the figure, the support structure of the tuning fork crystal resonator of this example is as follows:
The tuning fork-crystal oscillation piece 12 (hereinafter referred to as oscillation piece 12)
Close to the bottom end 12C on the prison facing 12α and both side ends 12d'
, 12d, penetrates the hermetic terminal 13 located further below the oscillating piece 12 in a portion including the central axis P of the oscillating piece 12 that does not reach ``, and the U-shaped surface 121
Two plate-shaped lead terminals 14.1 provided parallel to Z
The tips 14a and 15α of 5 are connected to the base 12h of the oscillating piece 12.
The oscillating piece 12 is bent in the direction of the central axis P of the oscillating piece 12 in an area of 0.5 L or less, where L is the length of the oscillating piece 12, and is directly fixed to the oscillating piece 12 with a certain gap S. Lead terminal 14
, 15 may be round bars. Also, the tip 1 of the lead terminal
4α and 15b may be parallel or inclined. Figure 5 (B).

(0)はリード端子の先端14α、15αの先端形状の
拡大図を示す。第6図は他の実施例を示す正面図で、一
端音叉型水晶発振片16の枝部16αに沿って延長させ
たU牢乎面に平行な2本のリード端子17.18の先端
17α、18αを基部16b側にUターンさせ該基部1
6hと直接固着した構造を示している。該リード端子1
7.18の先端形状は第5図(E)、(0)に準じてい
る〔効果〕 以上述べたように本発明によれば振動変位の、小さな発
振片の基部の中心を2本のリード端子で支持することに
より振動モレを抑えることができ、さらに同一平面内で
発振片と2本のリード端子が固着される支持構造のため
発振片とリード端子の支持が安定し工数低減が図られる
ため、高性能、低価格な圧電振動子を得ることができる
(0) shows an enlarged view of the shape of the tips 14α and 15α of the lead terminals. FIG. 6 is a front view showing another embodiment, in which tips 17α of two lead terminals 17 and 18 parallel to the U-shaped plane extended along the branch 16α of the tuning fork type crystal oscillator piece 16; 18α to the base 16b side and the base 1
6h shows a structure that is directly fixed. The lead terminal 1
7. The shape of the tip of 18 is similar to that shown in FIGS. 5(E) and (0). [Effect] As described above, according to the present invention, two leads are connected to the center of the base of the small oscillating piece for vibration displacement. By supporting with terminals, vibration leakage can be suppressed, and since the support structure fixes the oscillating piece and the two lead terminals in the same plane, the support of the oscillating piece and lead terminals is stable and the number of man-hours can be reduced. Therefore, a high-performance, low-cost piezoelectric vibrator can be obtained.

特に前述の屈曲振動と捩り振動を結合した圧電振動子に
おいて本例の効果は顕著である。
The effect of this example is particularly remarkable in the piezoelectric vibrator that combines the above-mentioned bending vibration and torsional vibration.

【図面の簡単な説明】[Brief explanation of drawings]

第1図〜第3図は圧電型振動子の支持構造を示す従来例
。 第4図は結合音叉型水晶振動子の振動変位を示す説明図
。 第5図、第6図は本発明の実施例。 12・・・・・・発振片 13・・・・・・ハーメチック端子 14・i・・1・5・・・・・・リード端子16・・・
・・・発振片 17.18・・・・・・リード端子 以上 牙1因 ? (A) (B)(。) +5因 牙6因
1 to 3 show conventional examples of support structures for piezoelectric vibrators. FIG. 4 is an explanatory diagram showing vibration displacement of a coupled tuning fork type crystal resonator. FIGS. 5 and 6 show embodiments of the present invention. 12... Oscillation piece 13... Hermetic terminal 14, i... 1, 5... Lead terminal 16...
...Oscillating piece 17.18...Is it more than the lead terminal? (A) (B) (.) +5 factor 6 factor

Claims (1)

【特許請求の範囲】[Claims] 発振片がそのU牢乎面上の底端に近くかつ両側に達しな
い発振片の中心軸を含む部分において、前記発振片の底
端のさらに下方に位置するハーメチック端子を貫通し、
かつ前He U牢乎面に平行させて設けた2本の棒状ま
たは板状の端子導体の先端が、該発振片の基部長さをL
としたときに、0.5L以下の領域で該発振片の中心軸
方向に屈曲し、一定の間隙を有し直接固着されているこ
とを特徴とする圧電振動子の支持構造。
Penetrating a hermetic terminal located further below the bottom end of the oscillating piece in a portion where the oscillating piece includes a central axis of the oscillating piece that is close to the bottom end on the U-shaped surface and does not reach both sides;
And the tips of the two rod-shaped or plate-shaped terminal conductors provided parallel to the front He U prison surface make the base length of the oscillating piece L.
1. A support structure for a piezoelectric vibrator, characterized in that the oscillation piece is bent in the direction of the center axis of the oscillation piece in an area of 0.5L or less, and is directly fixed to the oscillation piece with a certain gap.
JP9913284A 1984-05-17 1984-05-17 Supporting structure of piezoelectric transducer Pending JPS60242711A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9913284A JPS60242711A (en) 1984-05-17 1984-05-17 Supporting structure of piezoelectric transducer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9913284A JPS60242711A (en) 1984-05-17 1984-05-17 Supporting structure of piezoelectric transducer

Publications (1)

Publication Number Publication Date
JPS60242711A true JPS60242711A (en) 1985-12-02

Family

ID=14239211

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9913284A Pending JPS60242711A (en) 1984-05-17 1984-05-17 Supporting structure of piezoelectric transducer

Country Status (1)

Country Link
JP (1) JPS60242711A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114450976A (en) * 2020-02-03 2022-05-06 株式会社村田制作所 Piezoelectric sounding component

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114450976A (en) * 2020-02-03 2022-05-06 株式会社村田制作所 Piezoelectric sounding component

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