JPH03191607A - Thickness slip crystal resonator - Google Patents

Thickness slip crystal resonator

Info

Publication number
JPH03191607A
JPH03191607A JP33355989A JP33355989A JPH03191607A JP H03191607 A JPH03191607 A JP H03191607A JP 33355989 A JP33355989 A JP 33355989A JP 33355989 A JP33355989 A JP 33355989A JP H03191607 A JPH03191607 A JP H03191607A
Authority
JP
Japan
Prior art keywords
frame
crystal resonator
resonance
series resistance
equivalent series
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP33355989A
Other languages
Japanese (ja)
Inventor
Hirofumi Kawashima
宏文 川島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Electronic Components Ltd
Original Assignee
Seiko Electronic Components Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Electronic Components Ltd filed Critical Seiko Electronic Components Ltd
Priority to JP33355989A priority Critical patent/JPH03191607A/en
Publication of JPH03191607A publication Critical patent/JPH03191607A/en
Pending legal-status Critical Current

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  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To microminiaturize and thin the crystal resonator, to make the resonance leakage extremely small, to reduce an equivalent series resistance, and also, to enhance the Q value by providing a bridge part on a vibration part and connecting it through a frame, and providing a projecting part in the center part of the frame. CONSTITUTION:A resonator 1 is constituted of a resonating part 2, four bridge parts 3, two pieces of frames 4 and two pieces of projecting parts 5. Also, on the upper and the lower faces of the part 2, an excitation electrode 6 and 7 are placed, and by applying an alternating voltage between both the electrodes, thickness slip resonance can be caused. Subsequently, in four corners or the part 2, the part 3 is provided, respectively, the part extended in the same direction is connected through the frame 4, and also, in the center part of the frame 4, a projecting part 5 is provided. Accordingly, energy of the part 2 is not transmitted at all to the part 5, therefore, even if it is supported and fixed by the part 5, a satisfactory characteristic is obtained without causing the deterioration of an equivalent series resistance R1. In such a way, sprious resonance is suppressed, there is no resonance leakage, the equivalent series resistance R1 becomes smaller, a high Q value is obtained, and also, the crystal resonator is miniaturized and thinned with its shock resistance improved.

Description

【発明の詳細な説明】 [産業上の利用分野1 本発明は振動部と支持部をエツチング法によって一体に
形成された厚みすべり水晶振動子の形状に関する。特に
、超薄型、小型化の要求の強いICカード、ポケットベ
ルや移動無線等の携帯機器の基準信号源として最適な厚
みすべり水晶振動子に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field 1] The present invention relates to the shape of a thickness shear crystal resonator in which a vibrating part and a supporting part are integrally formed by an etching method. In particular, the present invention relates to a thickness-slip crystal oscillator that is optimal as a reference signal source for portable devices such as IC cards, pagers, and mobile radios, which have strong demands for ultra-thin and compact design.

〔発明の概要] 本発明は超小型、薄型で振動モレが非常に小さく、且つ
1等価直列抵抗R0の小さい、高いQ値を有する厚みす
べり水晶振動子を提供することにある0本発明の目的を
達成するために、振動部とブリッジ部、フレームと突出
部から構成される支持部をエツチング法によって化学的
に一体に形成される構造を成している。このように振動
子を形成することにより、本発明の目的を達成している
[Summary of the Invention] An object of the present invention is to provide a thickness-shear crystal resonator that is ultra-compact, thin, has very little vibration leakage, has a small equivalent series resistance R0, and has a high Q value. In order to achieve this, a support part consisting of a vibrating part, a bridge part, a frame and a protruding part is chemically formed integrally by an etching method. By forming the vibrator in this manner, the object of the present invention is achieved.

〔従来の技術〕[Conventional technology]

従来の厚みすべり水晶振動子は一般的に、機械加工によ
る方法が採られ、円板形状あるいは短冊形状をしている
。そして、円板形状の支持は振動方向とある角度を持っ
て、一方、短冊形状は振動方向と同方向に2本の支持線
によって支持固定されている。
Conventional thickness-shear crystal oscillators are generally machined and have a disk or strip shape. The disk-shaped support has a certain angle with the vibration direction, while the strip-shaped support is supported and fixed by two support lines in the same direction as the vibration direction.

[発明が解決しようとする課題] 従来の円板形状は円板であるので支持方法が比較的容易
であるが、円板である故に、小型化に難があった、一方
、従来の短冊形状では振動子の幅方向を小さ(できるが
、長さ方向の支持固定となるため、振動子の小型化には
自ら支持方法の点から限界があった。
[Problems to be solved by the invention] Since the conventional disc shape is a disc, it is relatively easy to support it, but because it is a disc, it is difficult to miniaturize it.On the other hand, the conventional rectangular shape In this case, it is possible to reduce the width of the vibrator, but since it is supported and fixed in the length direction, there is a limit to miniaturization of the vibrator due to the support method.

[課題を解決するための手段1 上記に対し1本発明は以下の方法で従来の間朋点を解決
するものである。すなわち、エツチング法によって振動
部と支持部を一体に形成した厚みすべり水晶振動子で、
振動部の4隅に各々ブリッジ部が設けられ、同一方向に
設けられたブリッジ部はフレームを介して接続され、そ
のフレームの中央部に突出部を設けた形状に振動子を構
成することにより、本発明の目的を達成するものである
[Means for Solving the Problems 1] In view of the above, the present invention solves the shortcomings of the conventional method by the following method. In other words, it is a thickness-shear crystal resonator in which the vibrating part and the supporting part are integrally formed using the etching method.
Bridge parts are provided at each of the four corners of the vibrating part, the bridge parts provided in the same direction are connected via a frame, and the vibrator is constructed in a shape with a protruding part provided in the center of the frame. This achieves the objectives of the invention.

[作用] このように本発明の厚みすべり水晶振動子は、振動部、
ブリッジ部、フレームと突出部から構成されている。そ
して、両端部に設けられた突出部でリード線あるいは台
座等に支持固定されるので、超小型、薄型で、耐衝撃性
に優れ、且つ、等個直列抵抗R,の小さい、高いQ値を
有する安価な厚みすべり水晶振動子を得ることができる
[Function] As described above, the thickness shear crystal resonator of the present invention has a vibrating part,
It consists of a bridge part, a frame and a protruding part. Since it is supported and fixed to lead wires or a pedestal by the protrusions provided on both ends, it is ultra-compact, thin, has excellent impact resistance, and has a high Q value with a small series resistance R. It is possible to obtain an inexpensive thickness-shear crystal resonator having the following characteristics.

〔実施例] 次に、本発明を実施例に基づいて具体的に述べる。第1
図は本発明の厚みすべり水晶振動子形状と励振電極配置
の一実施例の平面図(A)と側面図(B)を示す、振動
子lは振動部2.4つのブリッジ部3,2個のフレーム
4と2個の突出部5から構成されていて、エツチング法
によって一体に形成されている。また、振動部2の上下
面には励振電極6と7が配置され、両電極間に交番電圧
を印加することによって厚みすべり振動を引き起こすこ
とができる0次に、振動モレについて述べると1本振動
子は振動部2の4隅にブリッジ部3が各々設けられ、同
一方向に延びたブリッジ部3はフレーム4を介して接続
されている。更に、フレーム4の中央部には突出部5が
設けられている構造になっている。それ故、振動部2の
エネルギは突出部5には全く伝わらないので、突出部5
で支持固定しても等個直列抵抗R3の劣化をまねくこと
なく、良好な特性が得られる。
[Examples] Next, the present invention will be specifically described based on Examples. 1st
The figures show a plan view (A) and a side view (B) of an example of the thickness-shear crystal resonator shape and excitation electrode arrangement of the present invention.The resonator l has 2 vibrating parts, 4 bridge parts 3, and 2 It consists of a frame 4 and two protrusions 5, which are integrally formed by etching. In addition, excitation electrodes 6 and 7 are arranged on the upper and lower surfaces of the vibrating part 2, and by applying an alternating voltage between the two electrodes, thickness shear vibration can be caused. Bridge parts 3 are provided at each of the four corners of the vibrating part 2, and the bridge parts 3 extending in the same direction are connected via a frame 4. Further, the frame 4 has a structure in which a protrusion 5 is provided at the center. Therefore, the energy of the vibrating part 2 is not transmitted to the protruding part 5 at all, so the protruding part 5
Even if the resistor R3 is supported and fixed, good characteristics can be obtained without causing deterioration of the equal series resistor R3.

[発明の効果1 以上述べたように、本発明は振動部、ブリッジ部、フレ
ームと突出をエツチング法によって一体に形成する新形
状の厚みすべり水晶振動子を提案することにより、次の
著しい効果を有する。
[Effects of the Invention 1 As described above, the present invention achieves the following remarkable effects by proposing a thickness-shear crystal resonator with a new shape in which the vibrating part, bridge part, frame, and protrusion are integrally formed by an etching method. have

■ ブリッジ部を4隅に設け、各2個をフレームと接続
するので輪郭すべりモードを抑圧することができ、スプ
リアス振動を抑えることができる。
■ Since bridge parts are provided at the four corners and two of each are connected to the frame, contour slip mode can be suppressed and spurious vibrations can be suppressed.

■ ブリッジ部、フレームと突出部から構成される支持
部を振動部に付加接続することにより、振動モレがなく
、等個直列抵抗R1の小さい、高いQ値を有する厚みす
べり水晶振動子が得られる。
■ By additionally connecting the supporting part consisting of the bridge part, frame and protruding part to the vibrating part, a thickness-slip crystal resonator with no vibration leakage, low equal series resistance R1, and high Q value can be obtained. .

■ 同時に前記振動子はエツチング法によって形成され
るので、小型化、薄型化が可能である。
(2) At the same time, since the vibrator is formed by an etching method, it can be made smaller and thinner.

■ 両端部で支持固定されるので、耐衝撃性に優れる。■ Since it is supported and fixed at both ends, it has excellent impact resistance.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(A)、(B)は本発明の厚みすべり水晶振動子
形状と励振電極配置の一実施例の平面図(A)と上面図
(B)である。 ・振動子 ・振動部 ・ブリッジ部 ・フレーム ・突出部 ・励振電極 以 上
FIGS. 1A and 1B are a plan view (A) and a top view (B) of an embodiment of the thickness-shear crystal resonator shape and excitation electrode arrangement according to the present invention.・Vibrator, vibrating part, bridge part, frame, protruding part, excitation electrode and above

Claims (1)

【特許請求の範囲】[Claims]  エッチング法によって振動部と支持部を一体に形成し
た厚みすべり水晶振動子で、振動部の4隅に各々ブリッ
ジ部が設けられ、同一方向に設けられた前記ブリッジ部
はフレームを介して接続され、該フレームの中央部に突
出部を設けたことを特徴とする厚みすべり水晶振動子。
This is a thickness-slide crystal resonator in which a vibrating part and a support part are integrally formed by an etching method, and bridge parts are provided at each of the four corners of the vibrating part, and the bridge parts provided in the same direction are connected via a frame, A thickness shear crystal resonator characterized in that a protrusion is provided in the center of the frame.
JP33355989A 1989-12-21 1989-12-21 Thickness slip crystal resonator Pending JPH03191607A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP33355989A JPH03191607A (en) 1989-12-21 1989-12-21 Thickness slip crystal resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP33355989A JPH03191607A (en) 1989-12-21 1989-12-21 Thickness slip crystal resonator

Publications (1)

Publication Number Publication Date
JPH03191607A true JPH03191607A (en) 1991-08-21

Family

ID=18267399

Family Applications (1)

Application Number Title Priority Date Filing Date
JP33355989A Pending JPH03191607A (en) 1989-12-21 1989-12-21 Thickness slip crystal resonator

Country Status (1)

Country Link
JP (1) JPH03191607A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010147625A (en) * 2008-12-17 2010-07-01 Epson Toyocom Corp Piezoelectric vibrator
JP2013042425A (en) * 2011-08-18 2013-02-28 Seiko Epson Corp Piezoelectric vibration piece and piezoelectric module

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5253690A (en) * 1975-10-28 1977-04-30 Seiko Instr & Electronics Ltd Thickness sliding crystal vibrator
JPS53132988A (en) * 1977-04-25 1978-11-20 Seiko Instr & Electronics Ltd Piezo-vibrator
JPS58159014A (en) * 1982-03-16 1983-09-21 Seiko Instr & Electronics Ltd Coupling crystal oscillator
JPS60226205A (en) * 1984-04-25 1985-11-11 Kinseki Kk Long side longitudinal vibrator
JPS6210518B2 (en) * 1980-12-12 1987-03-06 Nippon Shinyaku Co Ltd

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5253690A (en) * 1975-10-28 1977-04-30 Seiko Instr & Electronics Ltd Thickness sliding crystal vibrator
JPS53132988A (en) * 1977-04-25 1978-11-20 Seiko Instr & Electronics Ltd Piezo-vibrator
JPS6210518B2 (en) * 1980-12-12 1987-03-06 Nippon Shinyaku Co Ltd
JPS58159014A (en) * 1982-03-16 1983-09-21 Seiko Instr & Electronics Ltd Coupling crystal oscillator
JPS60226205A (en) * 1984-04-25 1985-11-11 Kinseki Kk Long side longitudinal vibrator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010147625A (en) * 2008-12-17 2010-07-01 Epson Toyocom Corp Piezoelectric vibrator
JP2013042425A (en) * 2011-08-18 2013-02-28 Seiko Epson Corp Piezoelectric vibration piece and piezoelectric module

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