JPS58159014A - Coupling crystal oscillator - Google Patents

Abstract

PURPOSE:To improve temperature characteristics, impact resistance and workability, by forming as one body an oscillating part and a supporting part of an oscillator, by means of photolithography. CONSTITUTION:An oscillating part 1 and two supporting parts 2 placed on both its dies are formed as one body by etching from a GT-cut crystal substrate. Between the oscillating part 1 and a mount part 4, a groove 3 is provided, by which an effect for enclosing oscillation energy of the oscillating part 1 in the oscillating part is raised. As for the oscillator, resonance frequency of two modes is decided by width W and length L, and the temperature characteristic is nearly decided by return of both resonance frequencies. Therefore, this crystal oscillator is formed by a cut angle of IRE display YXlt (48 deg.-53 deg.)/ (45 deg.-55 deg.) , a side ratio W/L is selected within a range of 0.90-1.2, and also thickness is set to a range of 50mum-150mum.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a so-called coupled ink oscillator in which a plurality of longitudinal vibration modes are coupled, particularly G! Cut crystal oscillator Kll0
The purpose of the present invention is to provide a coupled crystal oscillator with excellent frequency-temperature characteristics (hereinafter referred to as 111% characteristics) of 41%.! The purpose of the present invention is to provide a cut crystal oscillator.
Small G of C0ryatal*pmdaxee]
! To provide cut crystal oscillators &! Another purpose of this work is to have excellent impact resistance! Our purpose is to provide cut crystal crystals.

A further object of the present invention is to provide a support structure that is easy to mount.

Excellent S chronotropy, and OX (○ryatatI
There are many consumer devices that require a small crystal oscillator, and these K have been using whip-cut crystal oscillators. However, recently, various consumer devices have been made smaller, and whip-cut crystal resonators have also been required to have smaller caps. The reality is that there are many 4kV numbers (ducks), making it difficult to make the lid smaller, and at the same time, if the temperature decreases by 1, the Ox will increase.
Since a whip-cut crystal oscillator is used as a child, it is necessary to make it into a phase bag (h), and when compared with a self-quartz crystal oscillator with a tuning fork amount of 1, it is not completely satisfactory in terms of size, so recently, For example, the method of forming a resonator using photolithography, which applied the technology of 0, was applied to the production of tuning fork layer crystal resonators, and as a result, it became difficult to provide extremely small resonators. Therefore, in the present invention, by applying this photo-ν nozzle to a GT-cut crystal resonator, it is compact, has excellent temperature characteristics, has a small OI, has excellent impact resistance, and is easy to perform i-rant work. The present invention will be described in detail below with reference to the drawings.

In Fig. 1) and @) are examples of the shape of the combined insulator of the present invention, which includes a vibrating part 1 and two supporting parts 2 disposed on both sides of the vibrating part 1.
This is an example of a 90T-cut crystal resonator integrally formed with Elatin.
FIG. 1) shows a sky view. A groove 3 is provided in both supporting parts 2 between the vibrating part 1 and the mount part 4. The provision of this groove 3 has the effect of confining the excitation energy of the vibrating part l inside the vibrating part by the groove 3. That is, the excitation energy of the vibrating section is not transmitted to the mount section 4. Therefore,
(Maun) KX has no energy loss (it is possible to provide a resonator with a small OI value, as shown in Fig. 2), (b) is another embodiment of the shape of the crystal resonator of the present invention, This is another example of a GT-cut crystal resonator in which a vibration 11s and two supporting parts 6 disposed on both sides are integrally formed into a shape M by etching. FIG. 2) shows a plan view, and FIG. The reason for providing this groove 7 is shown in Fig. 1), and the reasons mentioned in P) and the reason described in P) (by Jade Oka, shown in Fig. 3) are due to the logic of the shape of the coupled S-movement of the present invention. In the example,
The vibrating part 9 and the supporting parts 10 arranged on both sides of the vibrating part 9 are integrated by etching! This is another example of the GT Katsu F crystal resonator. Figure S (2) shows a plan view, and Figure 3 (B) shows a top view. A groove 11 is provided between the II moving part 9 and the mount part to support the leg 910K. The reason for providing this groove 11 is exactly the same as the reason stated in Part 1 (P). Also, Figure 1), Figure 2),
In the vibrator shown in Figure 3, the resonance frequencies of the two modes are determined by the width W and length L. The resonance frequency of the main vibration is determined by the width W, e/V, and the resonance frequency of the secondary vibration is determined by the length 'LK. When /L, the temperature characteristic is the difference between the two resonance local liquid numbers Δf=fso
- Tenabō is determined by LK. That is, the side ratio R=, W/
The temperature characteristics are determined by L.

#! Figure 4 shows the cutting direction of the GT cut crystal resonator of the present invention.
That is, the X-axis, Y-axis, and
The z-axes are the crystal axes of the crystal, and are the electric axis, mechanical axis, and optical axis. The crystal resonator 13 is XRM @ XX1g (ω/θ
).

Also, xI axis, Yl axis, zl, z@axis ij%*X,! ,z
After the shaft has rotated, the new shaft is used. FIG. 5 shows the relationship between the cutting force and the primary and secondary temperature coefficients α and l of the coupled crystal resonator of the present invention, that is, the zero-cut crystal resonator in which the vibrating part and the supporting part are integrally formed by etching. m Wit, which is the case where the transducer shape, that is, the side ratio R and the cut angle - are constant.
As is clear from the s diagram, as the size of the cut voice actor increases, the -order and quadratic temperature coefficients α and β move from negative values to positive values. Also, the change in angle 1 x Todoroki 9 - 1 β is smaller at -, and furthermore, at cut angle S 51 g,
It is easy to understand that both P and P exhibit excellent temperature characteristics. Figure 6 shows the relationship between the GT cup F crystal S zigzag side ratio R (W/I, ) of the present invention and the -order and quadratic temperature coefficients a and β, when the cut voice actor and - are constant. be. 6th
As is clear from the figure, as the side ratio l increases (as
It can be seen that the -order, quadratic temperature coefficient value, / changes from a negative value to a positive value. Also, the change in β of the unit side ratio of Tsuba 1 is smaller than α, and furthermore, α is 0.98 in the side ratio R.

It can be seen that both β and Knll are almost zero, and that this case also exhibits excellent temperature characteristics. FIG. 7 shows the relationship between the side ratio II (W/L) of the support part and the -order temperature coefficient @a when the dimensions and tube parameters of the support part of the 0-piece cut crystal resonator of the present invention are taken as the pipe parameters. The support part I11 is designed to suppress vibrations more than the support part M.The support part M and the support part 1 have different side ratios that make the directivity zero1).
Therefore, the GT cut crystal JII of the present invention has a good temperature [41 properties,
[The cut angle and side ratio are among the top combinations of these.]
In the present invention, the cut menstrual period, θ is -48° to 53°, respectively.
.

θ; ±(45°~55°), and side ratio RtiO, eO~
By selecting 1.2, good temperature characteristics can be provided. Figures 8) and 2) show an example of the coupled oscillator-shaped electrode arrangement of the present invention, 1vA and 1) show a plan view, and Figure 1) shows a top view. Vibration of the crystal oscillator 14 Excitation electrodes 16 and 17 are arranged uniformly over the entire surface of the upper and lower TIfJK parts 15, with the excitation electrode 16 extending to one support part and the excitation electrode 17 extending to the other support part. ing. That is, the electrode is arranged only on one side of the support part KFi, and the structure is such that no electric field is applied. FIGS. 9(g) and 9(c) show other embodiments of the coupled oscillator-shaped electrode arrangement of the present invention, and FIG. 9) is a plan view, and #! FIG. 9(c) shows a top view of an embodiment in which excitation electrodes 20 and 23 are arranged on the upper and lower surfaces of the vibrating part 19 of the crystal resonator 18, and are arranged in the center of the vibrating part. Figure 11g10 is another embodiment of the electrode arrangement in the form of a coupled resonator according to the present invention, and shows a plan view, in which an excitation electrode and a weight 5.26 for frequency adjustment are arranged in the vibrating part of the four crystal resonators. and the excitation electrode and f! The excitation electrodes are arranged over almost the entire surface of the vibrating part of the lifter, except for the position of the ferrule.

Although the back surface electrode is not shown, it may be applied to the entire surface of the vibrating section or to the excitation electrode. The excitation electrodes and the studs may be arranged symmetrically with respect to the crystal oscillator n. The vibrating section array has an excitation electric @4 and weights 30, 31, 32 for frequency adjustment.

This is an example in which the north side is placed at the four corners of the vibrating section. FIG. 12 shows another embodiment of the electrode arrangement of the coupled resonator shape of the present invention, and shows a plan view. In the vibration s34, @ D 36 , 37 , 38 , 39 for frequency adjustment are arranged after the excitation IE pole. ,
Excitation electricity 11 is distributed over the entire surface of one vibrating section except for the iiiu 91I. Fig. j113 is an embodiment of the electrode arrangement in the form of a coupled resonator according to the present invention, and shows a plan view. The vibration part has an ultimate excitation electrode 4o shown by diagonal lines and weights 41 to 50 for frequency adjustment. ing. FIG. 14 shows a plane WA of another embodiment of the coupled resonator-shaped electrode arrangement of the present invention, an excitation electrode 51
and older sisters 52 and 53 for frequency adjustment are arranged. FIG. 15 shows a plane 1gl of another embodiment of the coupled oscillator-shaped electrode arrangement of the present invention, in which an excitation electrode 54 and frequency adjustment weights J) 55 and 56 are arranged. FIG. 16 shows a plan view of another embodiment of the coupled oscillator-shaped electrode arrangement of the present invention. The vibrating part includes an excitation electrode 57 and a weight 5 for frequency adjustment.
8.59 and 60.61 are arranged. Figure 17 shows a plan view of another embodiment of the coupled oscillator-shaped electrode arrangement of the present invention, in which the vibrating part Kti excitation electrode 62 and weights 63 to 70 for frequency adjustment are arranged. shows a plan view of another embodiment of the coupled oscillator-shaped electrode arrangement of the present invention,
@j)'72 for vibration part and vibration excitation electrode 71 for frequency adjustment
FIG. 19 is a plan view of another embodiment of the coupled resonator-shaped electrode arrangement of the present invention. The excitation electrode 73 and @shifter 4 for frequency adjustment are arranged in the vibrating part.The back electrodes in Figs. 11 to 19 are not shown, but as described in Fig. 10, the entire surface of the contact part is However, it is also possible to arrange the excitation electrode and the weight P for frequency adjustment together so that they are symmetrical with respect to the thickness.
In Figure 1-17, a plurality of weights are arranged in the vibrating part, but it goes without saying that even if at least m units are installed, the same effect will be obtained although there will be a difference in the amount of frequency adjustment. Figure 20) shows a top view of the crystal resonator 7810110111km.
771F) Upper and lower surfaces KU excitation electric @7B, 7
tl are arranged on the entire surface, like this Kllll
By arranging the excitation electrodes in the k section and the support section, the electric field efficiency can be further increased, so that the Ox value can be further reduced. FIG. 21 shows a plan view of another embodiment of the coupled oscillator-shaped electrode arrangement and oscillator according to the present invention. 78.78' (not shown) are arranged uniformly over the entire surface, and furthermore, a weight 3180.81 having an electrode loading effect is arranged on the electrode 78 at the end of the vibrating part. 6g22m shows a plan view of another embodiment of the coupled oscillator-shaped electrode arrangement and Zhongyu of the present invention.

Similarly, excitation electrodes 82 and 821 (not shown) are arranged uniformly on the top and bottom surfaces (not shown) of the vibrating part of the crystal resonator, respectively. Weights 85, 86, 87, and 88 having an electrode loading effect are placed on the electrode 82 at the four corners of the section.

Furthermore, there are the following three types of electrode load effects.

(1) Increasing the thickness of the excitation electrode at the end of the vibrating section acts as a weight. Hence the resonant frequency! .

In addition, the temperature characteristics can be changed at the same time. (2) Due to the electrode load effect, reflection of elastic waves at the ends of the vibrating part can be reduced and spurious vibrations can be suppressed.

((To) Due to the electrode loading effect, the excitation energy can be trapped inside the vibrating part. Therefore, 0Xfl
t can be made even lower.

An example in which excitation electrodes are placed on the entire surface of the vibrating section and a plow having an electrode loading effect is placed on top of the excitation electrodes is shown in Figures 4 and n, but the details are also shown in Figures 1 to 18. It goes without saying that even if the peg 9 is placed on the excitation electrode, there will be an electrode loading effect, and the fact that the 0th order differs depending on the area of the excitation electrode of the vibrating section will be explained. Fig. n is a diagram 172 of a GT cut crystal oscillator in which the vibrating part and the support part of the quartz crystal oscillator of the present invention are integrally formed. The calculation of the relationship between the displacement and each position of the cross-sectional moom is shown. In other words, the displacement is zero at point -, and from p1 point C to point G, - (accordingly, the absolute value of displacement is large!).
- 1], Figure 1 shows the distortion and 7 strokes for each position. That is, at point C, the distortion is maximum and 131. It becomes smaller towards the end. Also, gzi! As is clear from lI, the end G.

At −, the ore strain number does not reach zero and distortion occurs. This means that the aX@ of the crystal resonator is different depending on whether the IIK excitation current electrode is placed at the end of the vibrating section or not. That is, OX@ is lower when the excitation type li is arranged up to the end of the vibrating section. Figure 6), to) to gang)#
When the excitation electrodes are placed on the top and bottom surfaces of the vibrating part, on both sides of the 1-metal gold plate, as shown in (to), and when they are placed on the K116 part (approximately 75 - of the vibrating part), as shown in Figure 9 (■), (to). This is a histogram of the distribution of ○1 values, which is the experimental value. Figure 5 ←) is
If the excitation electrode is placed in a part of the vibrating part, the number of turtles m-2
This is a histogram showing the distribution of OI for 00, and the average value 1 = x140 (4).On the other hand, Fig.
Q It is difficult to lower the value. In addition, as shown in Figs. 10 to 19, when the excitation electrode and the weight pt are set separately, the resonant same wave number and frequency temperature coefficient are adjusted by a laser, and one vibration is generated as shown in Figs. m and 4. When an excitation electrode is placed on the entire surface of the section and a weight is placed on top of the excitation electrode, a method is adopted in which the resonance frequency and frequency temperature coefficient are adjusted by vapor deposition. Give an example of the adjustment of Kw! , reveal.

Figure 1 is the 125th block of Figure 10. The relationship between the change Δa in the primary temperature coefficient a and the amount of weight 9 removed when the weight is scattered by a laser is shown. That is, as the amount of weight removed increases, the second temperature coefficient α moves to the positive side. Figure n shows the primary temperature coefficient α for the amount of weights removed when the weights 30, 31, 32, and 33 in Figure 11 are scattered by a laser.
The primary temperature coefficient a moves to the negative side as the amount of weight removed increases. As can be seen from these facts, in the case of the plow shown in Figure 10, by removing K, the primary temperature coefficient α becomes positive, and
In the arrangement of the peg 9 shown in FIG. 11, by removing the Fi weight, the primary temperature coefficient α moves to the negative side. That is, the first
Weight 25# addition in figure 0 and weight in figure 11; illusion, 31,
When the weight is placed at 32.330 and time t, it can be predicted that the -th temperature coefficient g does not change at all. FIG. 12 shows 90 examples of the above-mentioned pegs. Figure A is the weight area of Figure 3, 37.3.
The relationship between the change Δα in the primary Ill coefficient and the amount of weight removed when 8.39 is removed by laser is shown, and it can be seen that the primary temperature coefficient α does not change due to the removal of the weight. i@29 Figure 10 is the weight 6.26. Weights J in Figure 11) 30, 31, 32, 33. Weight 36 in Figure 12
, 37 , ah, 39 was removed with a laser and the turtle @
Figures 10 and 1 show the changes in the resonance frequency of the main vibration with respect to the amount of removal.
This corresponds to the cases shown in FIGS. 2 and 11. In either case, the resonant frequency of the main vibration increases depending on the amount of weight removed. I understand that. In addition, in this actual example, adjustment using one laser method was explained, but if the weight is layered due to unreasonable conditions,
It goes without saying that the above phenomenon will have a completely opposite relationship in the case of Fi 10th alt.

The explanation was given using the three cases of Fig. 11 and Fig. 12, but the case of Fig. 13
Even with the weights shown in FIG. 19, the resonant frequency and frequency temperature coefficient, or only the resonant frequency can be changed. Figures (Main)) and 2) e (') Fi, a-cut crystal resonator 90t are an embodiment of the present invention when mounted on the support pedestal 94. , jlK30 Figure (b) is the bottom view of Figure 1), Figure 0 is Figure 0
The support pedestal 94 has a concave shape, and both ends 95□ and 96 are flat, and electrodes 97 and 9 are placed on the support pedestal 94, which is shown in a bottom view.
8.99 is placed. The electrode 98 and the electrode 1199 are connected through side electrodes 100 and 101 and an electrode 102 arranged on the lower surface of the support base 94. The crystal resonator 90 is arranged at both ends 95 and 96 of the support base 94 with electrodes arranged in this way, and is supported and fixed at the ends of the resonator with a layering agent, solder, etc. 103 and 104. By this supporting solid layer, the excitation electrodes 112 and 93 of the crystal resonator 90 are connected to each other, and the electrode 92 is connected to the electrode 97, and the electrode 93 is connected to the electrode 99. Become. That is, by arranging the electrodes of the support base 94 as described above, a two-terminal structure of the electrodes 97 and 98 can be obtained. The electrodes 100, 101, and 102Fi are drawn thicker than they actually are to make it easier to separate them. By mounting the vibrator on the support base in this manner, the vibrator can have excellent impact resistance. Figure 31), to),
ρ) is another example of an actual vagina when the GT-cut crystal sensor 105 is mounted on the support pedestal 106 of the present invention in Fig. 31←)
is a plan view, Fig. 31 1: (to) is a bottom view of both Fig. 5131, Fig. 31 0 is a bottom view of Fig. 31
The support pedestal 106 shown in FIG.
09,110.111.112 are provided, and electrodes 113#114.115 are arranged thereon. Electrode 11
4 and the electrode 115 are connected through side electrodes 116 and 117 and an electrode 18t disposed on the lower surface of the support base 106. A crystal oscillator 105 is placed in #111 and 112 of the support pedestal 106 with electrodes arranged in this way,
Adhesive or solder etc. 119, 120 at the end of the vibrator
Supported by a solid layer.

Of the excitation electrodes 121 and 122 arranged on the crystal resonator 105, the electrode 121 is connected to the electrode 113, the electrode 122 is connected to the electrode 115, and the electrode 116,
118 and 17, it becomes the same polarity as JtAl14.

The vine for mounting the vibrator in the groove in this way not only provides excellent impact resistance, but also makes it easier to set the vibrator, and further improves workability.

The support base on which the vibrator is mounted is then mounted with 4C lead wires, and then sealed in a vacuum or N gas. Next, the thickness of the vibrator will be explained. In the production of vibrators, spurious vibration is a major factor in reducing the yield, but in the case of the present invention, depending on the selection of plate thickness, spurious vibration may occur near the main vibration, which is undesirable. Therefore, the present invention aims to eliminate spurious vibrations at a plate thickness IP between 50μ and 100P, and the reason why 6ff and 5011 were selected as the lower limit is that it is easy to handle and has the minimum plate thickness for mass production. The reason for setting the upper limit of the plate thickness to 1too, w is that the shape of the resonator of the present invention is complex and cannot be machined, so the upper limit is set to the plate thickness that can be etched by photolithography.Actually. The resonator is selected from this range of plate thickness, but in the case of the present invention, the plate thickness varies greatly depending on the frequency.The higher the resonant frequency, that is, the smaller the width W of the vibrator, the smaller the plate thickness can be. Fig. 32 shows an example of the temperature f characteristics obtained by the present invention.As is clear from Fig. 32, it can be seen that K exhibits excellent temperature characteristics.

As described above, the present invention integrally molds the moving part and the support part of the vibrator by photolithography, and in particular, improves the structure of the support part, cuts the vibrator, and selects the side ratio t-optimally. , by arranging an excitation electrode on the entire surface or part of the vibrating part of the vibrator, further providing a weight for adjusting the resonance frequency and frequency temperature characteristics in the vibrating part, and mounting the vibrator on a support pedestal. It is possible to provide a coupled crystal resonator with excellent frequency-temperature characteristics, a small OX value, excellent impact resistance, and easy mounting.
The vibrator of the present invention can be applied to various consumer devices, and its effects are significant.

[Brief explanation of the drawing]

Figures 1 (A) and (B) show an example of the shape of the coupled resonator of the present invention. )2g3) are other embodiments of the shape of the coupled resonator of the present invention, FIG. 2) is a plan view, and FIG. 2)
2g3) is another embodiment of the shape of the coupled resonator of the present invention, 7s3) is a top view, and FIG. 3(b) is a top view. 4 Cutting orientation diagram of the 0-cut crystal resonator of the present invention, 511i! 11 is the cut angle of the coupled crystal resonator of the present invention and i! 6 is a graph showing the relationship between the temperature coefficients α and β of the GT-cut crystal resonator of the present invention, and FIG. 7 is a graph showing the relationship between the side ratio and temperature coefficients α and β of the GT-cut crystal resonator of the present invention. Figure 8 is a graph showing the relationship between the side ratio and the temperature coefficient a when the size of the supporting part of the vibrator is used as a parameter), (to) the electrode of the coupled vibrator shape of the present invention! , t, in which FIG. 8) shows a plan view, FIG. 8(b) shows a top view, and FIG. 9),
(B) is another example of the coupled oscillator-shaped electrode arrangement of the present invention, #l, Figure 9 (g) is a plan view, 1I9i! ! [1)
1A shows a top view, and FIG. 1θ shows a plan view of another embodiment of the coupled oscillator-shaped electrode arrangement of the present invention. FIG. 11 shows a plan view of another embodiment of the coupled oscillator-shaped electrode arrangement of the present invention, and FIGS. 12 to 19 respectively show other embodiments of the coupled oscillator-shaped electrode arrangement of the present invention. FIG. "No."
Figure (A). 0 shows another example of the electrode arrangement of the coupled resonator shape of the present invention, No. 20111) shows a plan view, No. FIG. 7 is a plan view of another embodiment of the electrode arrangement and weight. Fig. n shows a plan view of another embodiment of the coupled resonator-shaped electrode arrangement and sill of the present invention, and the phantom figure shows that the vibrating part and the supporting part of the crystal resonator of the present invention are integrally formed. This is a 1/2 diagram of a GT cut crystal resonator. Figure A is a graph showing the relationship between strain and each position of the vibrator in Figure N, and Figure 5 is a histogram showing the distribution of ricI constants. #! Figure 5 (c) is another histogram showing the distribution of FiaI values. FIG. 3 is a graph showing the relationship between the amount of weight removed and the change Δa in the primary temperature coefficient a.
Figure n is a graph showing the relationship between the change Δa in the primary temperature coefficient α and the removal amount of other weights, and Figure U is a graph showing the relationship between the change Δα in the primary temperature coefficient and the removal amount of other weights. , Figure 3 is a graph showing the relationship between the amount of weight 9 removed and the change in the resonance frequency of the main vibration.
0 is an example when a GT-cut crystal resonator is mounted on the support base of the present invention, FIG.
(Figure 1) shows the bottom view of Figure 1N30 (bottom view of the slope, Figure 1 ρ) shows the bottom view of Figure 31), P, 0 ()
Another example when a T-cut crystal resonator is mounted on the support base of the present invention, W, Figure 31C! 31(k) is a plan view, FIG. 31(C) is a bottom view of FIG. 31(B), and FIG. 31(0) is a bottom view of FIG. 31(B). Figure 432 is a graph showing an example of temperature characteristics obtained by the present invention. 1, 5, 9.15.19, 23. '28, 34.7
6, sea vibration @ 2, 6, 10.7? , , support portions 3 , 7 , 11 , , grooves 4 , 8 , 12 . ,
Mount part 14, 18, 22, 27.75, 90
, , , crystal oscillator 20, 21, 24, 29,
35.40, 51, 54.57, 62, 71.73
,78,79,78°820. Excitation electrode '6, 26, 30, 31, 32, 33, 3
6, 37, 38, 39, 40.41-5G, 5
2.53.55, 56.5B. 59.6G, 61.63-70.72, 74, 80.8
1, 85, 86, 87, 88. , weight 994.106. ,
Support pedestal and above Applicant Daini Seigokusha Co., Ltd. Ge7 4' +9 svr/Q 93
Takiya'+) F) f (11) Fig. 6 θteθ 匈kan /, oo lnke /, /6, /
ls /2θθ'? o J,oo
/, Jθ /, 26LI:11-1 and A) Go121Jl Figure 74 Figure 1g Q Figure 20 CB
) Naka7 ts zo diagram (A) 927 figure 22 figure 23E #24 figure 29wJCB) $2! ;54 (A
) Figure 24 Figure 27 1Jzyt diagram (%C) 11iz? Figure 3I Figure CB) No. 311! iQ (c) Figure 3z

Claims (1)

[Claims] a) In a quartz crystal lifter in which a plurality of longitudinal vibration modes are coupled to each other, the crystal oscillator is IR]! DisplayYXttCC48
The crystal resonator is formed with a cut angle of 45' to 560 degrees, and the side ratio of the crystal resonator is 0.90.
The thickness of the crystal resonator is selected from the range of 504s to 150P, and the vibrating part and the support part of the ink resonator are integrally formed by etching, Excitation electrodes are arranged on the upper and lower surfaces of the crystal oscillator, and the crystal oscillator is mounted on a support base with -w
Combined ink oscillator that is mounted**.