JPH02261211A - Multiple mode type crystal oscillator - Google Patents
Multiple mode type crystal oscillatorInfo
- Publication number
- JPH02261211A JPH02261211A JP8300789A JP8300789A JPH02261211A JP H02261211 A JPH02261211 A JP H02261211A JP 8300789 A JP8300789 A JP 8300789A JP 8300789 A JP8300789 A JP 8300789A JP H02261211 A JPH02261211 A JP H02261211A
- Authority
- JP
- Japan
- Prior art keywords
- crystal
- holding
- crystal plate
- plate
- main surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 74
- 239000000853 adhesive Substances 0.000 claims abstract description 18
- 230000001070 adhesive effect Effects 0.000 claims abstract description 18
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims 1
- 230000008878 coupling Effects 0.000 abstract description 5
- 238000010168 coupling process Methods 0.000 abstract description 5
- 238000005859 coupling reaction Methods 0.000 abstract description 5
- 239000011800 void material Substances 0.000 abstract 1
- 239000002184 metal Substances 0.000 description 6
- 238000000605 extraction Methods 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 241000190020 Zelkova serrata Species 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明はＭ ＣＦ （Ｍｏｎｏｌｉｔｈｉｃ Ｃｒｙｓ
ｔａｌ Ｆｉｌｔｅｒ）として知られる多重モード型水
晶振動子（以下、多重モード振動子とする）を利用分野
とし、特に保、！ｉＥｇ衰量を高めた構造の多重モード
振動子に関する。DETAILED DESCRIPTION OF THE INVENTION (Industrial Field of Application) The present invention is based on MCF (Monolithic Crys
The field of application is multi-mode crystal resonators (hereinafter referred to as multi-mode resonators) known as tal filters, especially protection,! This invention relates to a multimode oscillator having a structure with increased iEg attenuation.
（発明の背景）
３重モード振動子は水晶板に形成した例えば二組の電極
対間の音響的結合を利用し、所定のフィル々特性（伝送
特性）を得るものとして通信８を器等に有用される。近
年では、高品位の情報を確保すべく、周波数温度特性を
良好として保ｒＥ減衰量の大きなものが望まれている。(Background of the Invention) A triple mode oscillator utilizes acoustic coupling between, for example, two pairs of electrodes formed on a quartz plate to obtain predetermined filter characteristics (transmission characteristics), and is used as a device for communication 8. Useful. In recent years, in order to ensure high-quality information, a device with good frequency temperature characteristics and a large amount of RE attenuation is desired.
例えば入出力電極間の電気的結合による漏れ信号を少な
くして保証減衰量を高めた本出願人による多重モード振
動子がある（参照：実願昭６０−１１８９９３号、圧電
共振子）（従来技術）
第３図はこの多重モード振動子を説明する図である。な
お、第３図（＆）は分解図、同図（ｂｌは鍔面図である
。For example, there is a multi-mode resonator proposed by the present applicant that increases guaranteed attenuation by reducing leakage signals due to electrical coupling between input and output electrodes (see Utility Model Application No. 118993/1983, piezoelectric resonator) (prior art) ) FIG. 3 is a diagram illustrating this multi-mode oscillator. In addition, FIG. 3 (&) is an exploded view, and the same figure (bl is a flange view).
多重モード振動子は水晶片１を金属容器２に封入してな
る。水晶片１は例えばＡＴカットとした厚みすべり振動
子からなる。一方の主面には分割された入出力電極３．
４、他方の主面には共通電極５が形成される。入出力電
極３．４及び共通電極５からはそれぞれの接続用ｒｉ極
６．７．８が両端外周部及びその中央部に延出して形成
される。The multimode resonator is made up of a crystal piece 1 enclosed in a metal container 2. The crystal blank 1 is made of, for example, an AT-cut thickness-shear resonator. One main surface has divided input/output electrodes 3.
4. A common electrode 5 is formed on the other main surface. From the input/output electrode 3.4 and the common electrode 5, respective connection ri poles 6.7.8 are formed extending to the outer periphery of both ends and the center thereof.
金属部Ｍ２はベース９とカバー１０とからなる。The metal part M2 consists of a base 9 and a cover 10.
ベース９は一対の入出力用リード線１１．１２がガラス
部１３を貫通してその先端をＬ字状に屈曲する。。そし
て、基準電位用リード′Ｒ１４がベース底面の金属部に
接続する。入出力用リード線１１．１２の先端には平板
状の保持具１５．１６を固着する。保持具１５．１６ば
板面を対向して立設置７、板面にスリット１７．１８を
形成する。そして、スリット１７．１８に水晶片１の両
端外周部を挿入１７、電気的・機械的に接続して保持す
る。但し、入出力ｒｉ％３．４の形成された一方の主面
をカバー側に接近させる。また、共通電極用の接続電極
８はペース表面の金属部に例えばワイヤー１９等により
接続されろ。金属カバー１０は例えば抵抗溶接等により
ベース９に封着される。In the base 9, a pair of input/output lead wires 11 and 12 pass through the glass portion 13 and have their tips bent into an L-shape. . Then, the reference potential lead 'R14 is connected to the metal part on the bottom surface of the base. A flat holder 15.16 is fixed to the tip of the input/output lead wire 11.12. The holders 15 and 16 are set upright 7 with the plate surfaces facing each other, and slits 17 and 18 are formed in the plate surfaces. Then, the outer peripheral portions of both ends of the crystal piece 1 are inserted 17 into the slits 17 and 18, and are electrically and mechanically connected and held. However, one main surface on which input/output ri% 3.4 is formed is brought closer to the cover side. Further, the connection electrode 8 for the common electrode is connected to the metal part on the surface of the paste by, for example, a wire 19 or the like. The metal cover 10 is sealed to the base 9 by, for example, resistance welding.
このようなものでは、水晶片１の一方の主面とカバー１
０とが接近して対面する。そ（〕て、入出力ｒ、極３．
４とカバー１０との間の静ｔ４結合を密にするので、入
出力電極３．４から漏洩する信号を基準電位となるカバ
ー１０に誘導する。ｌ、たがって、入出力電極間の直接
的な信号の伝播を防ｒＦし、こねによる保！ｆ減衰量の
低下を防止する。In such a case, one main surface of the crystal piece 1 and the cover 1 are
0 approaches and faces each other. Then, input/output r, pole 3.
Since the static t4 coupling between the input and output electrodes 3.4 and the cover 10 is made tight, signals leaking from the input/output electrodes 3.4 are guided to the cover 10, which serves as a reference potential. l, Therefore, direct signal propagation between the input and output electrodes is prevented, and the protection caused by kneading is prevented! Prevents a decrease in f attenuation.
（従来技術の問題点）
しかしながら、上記構成の多重モード振動子は、ベース
９に立設した保持共１５．１Ｇを要するとともに例えば
衝撃等によりｔ５ｉ勅してカバー１０と接触し極端には
水晶片１の破損する虞もある。したがって、水晶片１の
一方の主面をカバー１０に接近させるには、保持共１５
．１６の使用及びこれによる耐衝撃性等の点で制限があ
った。例えば一方の主面（入出力電極３．４）とカバー
１０との間隙は０．５ｍｍ程度が限度であった。(Problems with the Prior Art) However, the multi-mode vibrator with the above configuration requires 15.1 G to hold the base 9 upright, and is also forced to come into contact with the cover 10 due to an impact, etc. There is also a risk of damage to item 1. Therefore, in order to bring one main surface of the crystal piece 1 close to the cover 10, the holding and the 15
．． There were limitations in terms of the use of No. 16 and its impact resistance. For example, the maximum gap between one main surface (input/output electrode 3.4) and the cover 10 was about 0.5 mm.
また、このようなものでは、水晶片１の保持系となろ保
持具１５．１６やベース９が金属でそのｒＡ膨張係数を
水晶片１と異にするので、その差異により水晶片１にス
トレス（応力）を生ずる。そ１ノで、応力感ｅ特性に起
因して周波数澗度特を阻害する問題点等があった。In addition, in such a device, the holding system for the crystal blank 1, the naro holder 15, 16, and the base 9 are metal and have a different rA expansion coefficient from the crystal blank 1, so the difference causes stress on the crystal blank 1 ( stress). In part 1, there was a problem that the frequency and amplitude characteristics were inhibited due to the stress sensitivity characteristic.
（発明の目的）
本発明は水晶片の入出力電極を基準電位面に極力近接さ
せろ構造で保証減衰量を高め、しかも温度特性を良好と
した多重モード振動子を提供することを目的とする。(Objective of the Invention) An object of the present invention is to provide a multimode oscillator that has a structure in which the input and output electrodes of a crystal piece are brought as close as possible to a reference potential surface, thereby increasing the guaranteed attenuation amount and having good temperature characteristics.
（解決手段）
本発明は、水晶片の入出力電極の形成された一方の主面
側に対向してシールド用電極の形成された保持用水晶板
を配置し、前記保持用水晶板と水晶片の一方の主面との
間に空隙を存して外周端部を固着したことを解決手段と
する。以下、本発明の詳細な説明する。(Solution Means) In the present invention, a holding crystal plate on which a shielding electrode is formed is disposed facing one main surface side of a crystal blank on which an input/output electrode is formed, and the holding crystal plate and the crystal blank are The solution is to fix the outer peripheral end with a gap between the main surface and one main surface. The present invention will be explained in detail below.
（実施例）
第１図は本発明の一実施例を説明する多重モード振動子
の図である。(Embodiment) FIG. 1 is a diagram of a multimode oscillator illustrating an embodiment of the present invention.
多重モード振動子は、大略、基板２０と、保持用水晶板
２１と、水晶片２２とからなる。基板２０は例えば容器
の一部をなす底壁であってセラミ、ソクスからなる。保
持用水晶板２１と水晶片２２とは同一切断角度とした例
えばＡＴカット板からなる。保持用水晶板２１の一方の
主面にはシールド用電極２３が中央部分に、接続用電極
２４ （ｎ。The multi-mode vibrator roughly consists of a substrate 20, a holding crystal plate 21, and a crystal piece 22. The substrate 20 is, for example, a bottom wall forming a part of the container, and is made of ceramic or ceramic. The holding crystal plate 21 and the crystal piece 22 are made of, for example, AT-cut plates with the same cutting angle. On one main surface of the holding crystal plate 21, a shielding electrode 23 is provided in the center, and a connecting electrode 24 (n.
ｂ）が両端部分にメクライズされろ。水晶片２２は矩形
状として例えば長手方向を２′軸、短手方向をＸ軸、厚
み方向をｙ′軸とし、例えば長手方向５ｍｍ、短手方向
を２．５ｍｍとする。そして、一方の主面に入出力電極
２５．２６、他方の主面には共通型ｔｌＪｉ２７を形成
し、各引き出１７電極２８．２９．３’Ｏ（ｎ、ｂ）を
対称性を維持するように角隅部に延出する。b) is meklyzed on both ends. The crystal piece 22 has a rectangular shape, and has, for example, a 2'-axis in the longitudinal direction, an X-axis in the transverse direction, and a y'-axis in the thickness direction, and is, for example, 5 mm in the longitudinal direction and 2.5 mm in the transverse direction. Then, the input/output electrodes 25.26 are formed on one main surface, and the common type tlJi 27 is formed on the other main surface, and the symmetry of each extraction 17 electrode 28.29.3'O(n, b) is maintained. Extend to the corner so that
そして、保持用水晶板２１は短手方向の両端側であって
長手方向の中央部分（図中のＸ −Ｘ 線の両端部）を
基台２０に接着剤３１により固着する。Then, the holding crystal plate 21 is fixed to the base 20 at both end sides in the transverse direction and at the central portion in the longitudinal direction (both ends along the line X--X in the figure) using an adhesive 31.
また、水晶片２２は一方の主面の両端外周部（Ｚ＝７線
の両端部））を保持用水晶板２１の接続用電極２４に対
面させて導電性接着剤３２により固着する。そして、入
出力電極２５．２６の引き出しｒ４極２８．２９をそれ
ぞれ接続用電極２４に接続するとともに、導電性接着剤
の厚みにより対向面間に間隙を存するようにする。また
、共通電極２７の引き出し電極３０ａは図示しないワイ
ヤーのボンディングによりシールド？４１％２９、ある
いはシールド電極と導通して基台２０に形成される図示
しない導ｆｔｓ路に接続する。そして、基台（容器）表
面に例えば図示しないスルーホール加工によりシールド
電極２３及び接続電極２４を導出（７て外部端子を形成
し、さらにカバーを被せて表面実装用とする。Further, the crystal piece 22 is fixed with a conductive adhesive 32 so that both outer circumferential parts of one main surface (both ends of the Z=7 line) face the connection electrodes 24 of the holding crystal plate 21 . Then, the four r-poles 28 and 29 of the input/output electrodes 25 and 26 are respectively connected to the connection electrode 24, and a gap is left between the opposing surfaces depending on the thickness of the conductive adhesive. Also, the extraction electrode 30a of the common electrode 27 is shielded by wire bonding (not shown). 41% 29 or to a conductive fts path (not shown) formed on the base 20 by conducting with the shield electrode. Then, the shield electrode 23 and the connection electrode 24 are formed on the surface of the base (container) by, for example, through-hole processing (not shown) (7) to form external terminals, and a cover is further placed for surface mounting.
このようなものでは、保持用水晶板２１にシールド電極
２３を形成してしかも水晶片２２の一方の主面と導電性
接着剤３２の厚みにより空隙を存して対向させたので、
両者間の距離を０．５ｍ＋ｙ＋以下の空隙として入出力
ｒｉ極２５．２６間の静電結合による直接的な信号の漏
洩を防止する。In such a device, the shield electrode 23 is formed on the holding crystal plate 21 and is opposed to one main surface of the crystal piece 22 with a gap formed by the thickness of the conductive adhesive 32.
The distance between them is set as a gap of 0.5 m+y+ or less to prevent direct signal leakage due to capacitive coupling between the input and output ri poles 25 and 26.
また、保持用水晶板２１と水晶片２２とは同一切断角度
で熱膨張係数を等しくするので、２Ａ膨張係数の差によ
るストレスの発生を防止し、周波数温度特性を良好に維
持する。待に、この場合は、基台２０と保持用水晶板２
１の固着方向（図中のＸ −Ｘ 線１ と、保持用水晶
板２１と水晶板２２の固着方向（同７．− Ｚ線）とを
直交方向としたので、水晶片２２（及び保持用水晶板２
１）の両端外周部を自由端としてその効果を充分に発揮
する。Further, since the holding crystal plate 21 and the crystal piece 22 are cut at the same angle and have the same coefficient of thermal expansion, generation of stress due to a difference in the 2A expansion coefficient is prevented, and frequency-temperature characteristics are maintained favorably. Wait, in this case, the base 20 and the holding crystal plate 2
1 (the X-X line 1 in the figure and the direction in which the holding crystal plate 21 and the holding crystal plate 22 are fixed (line 7.-Z) are orthogonal directions, the crystal piece 22 (and Crystal plate 2
The effect of 1) is fully exhibited by using the outer periphery of both ends as free ends.
（他の事項）
なお、上記実施例では、保持用水晶板２１と水晶板２２
との間隙を導電性接着剤３１の厚みにより制御したが、
例えば第２図の断面図に示したようにしてもよ（ｖｏす
なわち、保持用水晶板２］に（，１−７１エツチングに
より凹部３３を設け、この四部の両脚上に水晶片２２の
一方の主面の両端外周部を図示しない導電性接着剤によ
り固着するようにしてもよい。(Other matters) In the above embodiment, the holding crystal plate 21 and the crystal plate 22
The gap between the conductive adhesive 31 was controlled by the thickness of the conductive adhesive 31, but
For example, as shown in the cross-sectional view of FIG. The outer periphery of both ends of the main surface may be fixed with a conductive adhesive (not shown).
また、保持用水晶板２１は短手方向の両端部を基台２０
に固着したが、この両端部を結ぶライン（Ｘ−Ｘ線）上
としても、更にこのラインを長手方向に移動させたとし
てもその効果は充分期待できる。要は、保持用水晶板２
１が基台２０の熱膨張による影響を受けることなく伸縮
すればよいので、極端には何れか一箇所を点（部分）的
に固着して他を自由端とすればよい。そして、このよう
な場合（実施例では端に接着剤を施したが）、接着剤の
塗布領域の周囲に溝を設けてその流出を防ｆ」二するよ
う（こしてもよい。In addition, the holding crystal plate 21 has both ends in the short direction connected to the base 20.
However, the effect can be fully expected even if it is placed on the line (X-X line) connecting both ends or if this line is further moved in the longitudinal direction. In short, holding crystal plate 2
1 needs only to expand and contract without being affected by the thermal expansion of the base 20, so in an extreme case, any one of them may be fixed at a point (partially) and the other ends may be left free. In such a case (in the embodiment, adhesive was applied to the edges), a groove may be provided around the area where the adhesive is applied to prevent the adhesive from flowing out.
また、水晶片２２と保持用水晶板２１との空隙は単に導
電性接着剤によるとしたが、例えば微粒径のガラス等を
フィラーとして混入すれば確実に空隙を得ることができ
る。Further, although the gap between the crystal piece 22 and the holding crystal plate 21 was simply formed by using a conductive adhesive, the gap can be reliably obtained by mixing fine particle size glass or the like as a filler.
また、共通ｒｉｌｉｉ２７の引き出し電極３０は、水晶
片２２の幅が２．５ｍｍと小さくてその作業性からボン
ディングによりシールド電極２３に接続したが、例えば
保持用水晶板２１にそれ用の導電路を形成して直接導電
性接着剤により接続することも可能である。In addition, the extraction electrode 30 of the common rilii 27 was connected to the shield electrode 23 by bonding because the width of the crystal piece 22 was as small as 2.5 mm, and for workability reasons, but a conductive path for it was formed on the holding crystal plate 21, for example. It is also possible to connect directly with a conductive adhesive.
また、水晶片２２はＺ゛軸方向に細長い矩形上としたが
、例えばＸ軸に細長くした矩形状であってもあるいは正
方形、円板状形であってもよく基本的にはその形状に左
右されずに実施できろ。また、基台２０はセラミック製
としたが、その他の絶縁材あるいは金属材としてもよい
ことは勿論である。そして、保持用水晶板２１は基台２
０に固着したが、例えば保持用水晶板２１をｉｆｆｆｆ
型容器部として基台２０を除去したとしてもよいもので
ある。In addition, although the crystal piece 22 has a rectangular shape elongated in the Z-axis direction, it may have a rectangular shape elongated in the X-axis direction, or may have a square or disc-like shape. It can be carried out without being affected. Further, although the base 20 is made of ceramic, it is of course possible to use other insulating materials or metal materials. The holding crystal plate 21 is attached to the base 2.
0, but for example, if the holding crystal plate 21 is
The base 20 may be removed as a mold container part.
（発明の効果）
本発明は、水晶片の入出力電極の形成された一方の主面
側に対向してシールド用電極の形成された保持用水晶板
を配ＷｊＩ、、前記保持用水晶板と水晶片の一方の主面
との間に微少の空隙を存して外周端部を固着したので、
入出力電極を基準電位面に極力近接させろ構造で保証減
衰量を高め、しかも温度特性を良好とした多重モード振
動子を提供でき、その実際上の価値を極めて大とする。(Effects of the Invention) The present invention provides a structure in which a holding crystal plate having a shielding electrode formed thereon is disposed opposite to one main surface side of the crystal blank on which an input/output electrode is formed, and the holding crystal plate and Since there was a small gap between the crystal blank and one main surface, the outer peripheral edge was fixed.
It is possible to provide a multi-mode oscillator with a structure in which the input and output electrodes are placed as close to the reference potential surface as possible to increase the guaranteed attenuation amount and to have good temperature characteristics, thereby greatly increasing its practical value.
第１図は本発明の一実施例を説明する図で、同図（ａ）
分解斜視図、同図（ｂ）は側面図である。
第２図は本発明の他の実施例を説明する側面図である。
第３図（ａｌは従来例を説明する分解図、同図（ｈ）は
側断面図である。
２０ 基台、２１ 保持用水晶板、２２・・水晶片、２
３ シールド電極、２４・・接続Ｍ欅、２５人力ｍ欅、
２６ 出力電極、２７−共通電極、２８．２９．３０・
・・引き出し電極、３１ 接着剤、３２ 導電性接着剤
、３３−・凹部。
第１ Ｗｉｔａ）FIG. 1 is a diagram illustrating an embodiment of the present invention, and FIG.
An exploded perspective view, and FIG. 3B is a side view. FIG. 2 is a side view illustrating another embodiment of the present invention. FIG. 3 (al is an exploded view explaining the conventional example, and the same figure (h) is a side sectional view. 20 Base, 21 Holding crystal plate, 22...Crystal piece, 2
3 Shield electrode, 24... connection M keyaki, 25 manual power m keyaki,
26 Output electrode, 27-Common electrode, 28.29.30・
...Extraction electrode, 31 adhesive, 32 conductive adhesive, 33--recess. 1st Wita)
Claims (3)
の形成された水晶片と、前記水晶片の一方の主面と対向
する板面にシールド用電極の形成された保持用水晶板と
、前記保持用水晶板と水晶片の一方の主面との間に微小
の空隙を存して外周端部を固着する保持手段とからなる
多重モード型水晶振動子。(1) A holding crystal piece with input/output electrodes formed on one main surface and a common electrode on the other main surface, and a shielding electrode formed on the plate surface opposite to one main surface of the crystal piece. A multi-mode crystal resonator comprising a crystal plate and a holding means for fixing an outer peripheral end of the crystal piece with a small gap between the holding crystal plate and one main surface of the crystal piece.
固着し、該接着剤の厚みを利用して前記保持用水晶板と
の間に微小の空隙を存したことを特徴とする特許請求の
範囲第１項記載の多重モード型水晶振動子。(2) A patent characterized in that the holding means fixes the outer peripheral end of the crystal piece with an adhesive, and uses the thickness of the adhesive to create a minute gap between it and the holding crystal plate. A multimode crystal resonator according to claim 1.
凹部を形成し、該凹部の脚上に水晶片の外周端部を接着
剤により固着するとともに該水晶片との間に微小の空隙
を存したことを特徴とする特許請求の範囲第１項記載の
記載の多重モード型水晶振動子。(3) The holding means forms a recessed part by etching on the holding crystal plate, and fixes the outer circumferential end of the crystal piece to the leg of the recessed part with an adhesive, and also leaves a minute gap between the crystal piece and the crystal piece. A multi-mode crystal resonator according to claim 1, characterized in that:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8300789A JPH02261211A (en) | 1989-03-31 | 1989-03-31 | Multiple mode type crystal oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8300789A JPH02261211A (en) | 1989-03-31 | 1989-03-31 | Multiple mode type crystal oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02261211A true JPH02261211A (en) | 1990-10-24 |
Family
ID=13790193
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8300789A Pending JPH02261211A (en) | 1989-03-31 | 1989-03-31 | Multiple mode type crystal oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02261211A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0480124U (en) * | 1990-11-27 | 1992-07-13 | ||
| JPH04293308A (en) * | 1991-03-22 | 1992-10-16 | Murata Mfg Co Ltd | Piezoelectric tuning fork type resonator |
| WO1998009377A1 (en) * | 1996-08-30 | 1998-03-05 | Daishinku Corporation | Surface mounting piezoelectric filter |
| JP2006262100A (en) * | 2005-03-17 | 2006-09-28 | Daishinku Corp | Piezoelectric vibrator |
| JP2006279871A (en) * | 2005-03-30 | 2006-10-12 | Kyocera Kinseki Corp | Support method of lame-mode quartz crystal oscillator |
| JP2006329931A (en) * | 2005-05-30 | 2006-12-07 | National Institute Of Advanced Industrial & Technology | Detection sensor and oscillator |
| JP2009253883A (en) * | 2008-04-10 | 2009-10-29 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrating device |
| CN108631749A (en) * | 2017-03-24 | 2018-10-09 | 精工爱普生株式会社 | Vibration device, oscillator, gyro sensor, electronic equipment and moving body |
| WO2019130773A1 (en) * | 2017-12-27 | 2019-07-04 | Tdk株式会社 | Vibration device |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5438791A (en) * | 1977-09-01 | 1979-03-23 | Seiko Instr & Electronics Ltd | Piezoelectroc vibrator containing case |
| JPS5871708A (en) * | 1981-10-23 | 1983-04-28 | Citizen Watch Co Ltd | Container of crystal oscillator |
| JPS6365707A (en) * | 1986-09-05 | 1988-03-24 | Toyo Commun Equip Co Ltd | Sealing for piezoelectric filter |
-
1989
- 1989-03-31 JP JP8300789A patent/JPH02261211A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5438791A (en) * | 1977-09-01 | 1979-03-23 | Seiko Instr & Electronics Ltd | Piezoelectroc vibrator containing case |
| JPS5871708A (en) * | 1981-10-23 | 1983-04-28 | Citizen Watch Co Ltd | Container of crystal oscillator |
| JPS6365707A (en) * | 1986-09-05 | 1988-03-24 | Toyo Commun Equip Co Ltd | Sealing for piezoelectric filter |
Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0480124U (en) * | 1990-11-27 | 1992-07-13 | ||
| JPH04293308A (en) * | 1991-03-22 | 1992-10-16 | Murata Mfg Co Ltd | Piezoelectric tuning fork type resonator |
| WO1998009377A1 (en) * | 1996-08-30 | 1998-03-05 | Daishinku Corporation | Surface mounting piezoelectric filter |
| US5952898A (en) * | 1996-08-30 | 1999-09-14 | Daishinku Corporation | Surface mounting piezoelectric filter with a shield electrode on a package partition wall |
| JP2006262100A (en) * | 2005-03-17 | 2006-09-28 | Daishinku Corp | Piezoelectric vibrator |
| JP4715252B2 (en) * | 2005-03-17 | 2011-07-06 | 株式会社大真空 | Piezoelectric vibrator |
| JP2006279871A (en) * | 2005-03-30 | 2006-10-12 | Kyocera Kinseki Corp | Support method of lame-mode quartz crystal oscillator |
| JP4638281B2 (en) * | 2005-05-30 | 2011-02-23 | 独立行政法人産業技術総合研究所 | Detection sensor, vibrator |
| JP2006329931A (en) * | 2005-05-30 | 2006-12-07 | National Institute Of Advanced Industrial & Technology | Detection sensor and oscillator |
| JP2009253883A (en) * | 2008-04-10 | 2009-10-29 | Nippon Dempa Kogyo Co Ltd | Piezoelectric vibrating device |
| CN108631749A (en) * | 2017-03-24 | 2018-10-09 | 精工爱普生株式会社 | Vibration device, oscillator, gyro sensor, electronic equipment and moving body |
| JP2018164126A (en) * | 2017-03-24 | 2018-10-18 | セイコーエプソン株式会社 | Vibration device, generator, gyro sensor, electronic apparatus and moving body |
| US11509288B2 (en) | 2017-03-24 | 2022-11-22 | Seiko Epson Corporation | Vibrator device, oscillator, gyro sensor, electronic apparatus, and vehicle |
| CN108631749B (en) * | 2017-03-24 | 2023-10-10 | 精工爱普生株式会社 | Vibration device, oscillator, gyro sensor, electronic apparatus, and moving body |
| WO2019130773A1 (en) * | 2017-12-27 | 2019-07-04 | Tdk株式会社 | Vibration device |
| JP2019118009A (en) * | 2017-12-27 | 2019-07-18 | Tdk株式会社 | Vibration device |
| CN111630777A (en) * | 2017-12-27 | 2020-09-04 | Tdk株式会社 | Vibration device |
| US11665967B2 (en) | 2017-12-27 | 2023-05-30 | Tdk Corporation | Vibration device |
| CN111630777B (en) * | 2017-12-27 | 2023-08-18 | Tdk株式会社 | Vibration device |
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