JPS60237310A - 微細形状測定器 - Google Patents

微細形状測定器

Info

Publication number
JPS60237310A
JPS60237310A JP9275884A JP9275884A JPS60237310A JP S60237310 A JPS60237310 A JP S60237310A JP 9275884 A JP9275884 A JP 9275884A JP 9275884 A JP9275884 A JP 9275884A JP S60237310 A JPS60237310 A JP S60237310A
Authority
JP
Japan
Prior art keywords
measured
stylus
measuring
measurement
probe needle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9275884A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0312687B2 (enrdf_load_stackoverflow
Inventor
Kozo Miyamoto
宮本　紘三
Kimio Ohashi
大橋　公男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kosaka Laboratory Ltd
Original Assignee
Kosaka Laboratory Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kosaka Laboratory Ltd filed Critical Kosaka Laboratory Ltd
Priority to JP9275884A priority Critical patent/JPS60237310A/ja
Publication of JPS60237310A publication Critical patent/JPS60237310A/ja
Publication of JPH0312687B2 publication Critical patent/JPH0312687B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
    • G01B5/285—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces for controlling eveness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP9275884A 1984-05-11 1984-05-11 微細形状測定器 Granted JPS60237310A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9275884A JPS60237310A (ja) 1984-05-11 1984-05-11 微細形状測定器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9275884A JPS60237310A (ja) 1984-05-11 1984-05-11 微細形状測定器

Publications (2)

Publication Number Publication Date
JPS60237310A true JPS60237310A (ja) 1985-11-26
JPH0312687B2 JPH0312687B2 (enrdf_load_stackoverflow) 1991-02-20

Family

ID=14063326

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9275884A Granted JPS60237310A (ja) 1984-05-11 1984-05-11 微細形状測定器

Country Status (1)

Country Link
JP (1) JPS60237310A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0312687B2 (enrdf_load_stackoverflow) 1991-02-20

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