JPH0312687B2 - - Google Patents
Info
- Publication number
- JPH0312687B2 JPH0312687B2 JP9275884A JP9275884A JPH0312687B2 JP H0312687 B2 JPH0312687 B2 JP H0312687B2 JP 9275884 A JP9275884 A JP 9275884A JP 9275884 A JP9275884 A JP 9275884A JP H0312687 B2 JPH0312687 B2 JP H0312687B2
- Authority
- JP
- Japan
- Prior art keywords
- stylus
- measured
- measurement
- shape measuring
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005259 measurement Methods 0.000 claims description 43
- 241001422033 Thestylus Species 0.000 claims description 40
- 230000003287 optical effect Effects 0.000 claims description 19
- 238000006073 displacement reaction Methods 0.000 claims description 16
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
- G01B5/285—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces for controlling eveness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9275884A JPS60237310A (ja) | 1984-05-11 | 1984-05-11 | 微細形状測定器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9275884A JPS60237310A (ja) | 1984-05-11 | 1984-05-11 | 微細形状測定器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60237310A JPS60237310A (ja) | 1985-11-26 |
| JPH0312687B2 true JPH0312687B2 (enrdf_load_stackoverflow) | 1991-02-20 |
Family
ID=14063326
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9275884A Granted JPS60237310A (ja) | 1984-05-11 | 1984-05-11 | 微細形状測定器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60237310A (enrdf_load_stackoverflow) |
-
1984
- 1984-05-11 JP JP9275884A patent/JPS60237310A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60237310A (ja) | 1985-11-26 |
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