JPS60230058A - ポータブルキャピラリーガスクロマトグラフ装置用シリコンウエハ - Google Patents
ポータブルキャピラリーガスクロマトグラフ装置用シリコンウエハInfo
- Publication number
- JPS60230058A JPS60230058A JP59085796A JP8579684A JPS60230058A JP S60230058 A JPS60230058 A JP S60230058A JP 59085796 A JP59085796 A JP 59085796A JP 8579684 A JP8579684 A JP 8579684A JP S60230058 A JPS60230058 A JP S60230058A
- Authority
- JP
- Japan
- Prior art keywords
- silicon wafer
- pressure
- gas
- carrier gas
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 28
- 229910052710 silicon Inorganic materials 0.000 title claims description 28
- 239000010703 silicon Substances 0.000 title claims description 28
- 239000007789 gas Substances 0.000 claims description 40
- 239000012159 carrier gas Substances 0.000 claims description 28
- 235000012431 wafers Nutrition 0.000 description 25
- 239000010408 film Substances 0.000 description 9
- 238000005530 etching Methods 0.000 description 7
- YCIMNLLNPGFGHC-UHFFFAOYSA-N catechol Chemical compound OC1=CC=CC=C1O YCIMNLLNPGFGHC-UHFFFAOYSA-N 0.000 description 6
- 238000002347 injection Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 6
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 5
- 238000004458 analytical method Methods 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 239000012670 alkaline solution Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000004817 gas chromatography Methods 0.000 description 3
- 229910052697 platinum Inorganic materials 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 2
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000005297 pyrex Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 206010021143 Hypoxia Diseases 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 238000004445 quantitative analysis Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
- G01N30/02—Column chromatography
- G01N30/60—Construction of the column
- G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Treatment Of Liquids With Adsorbents In General (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59085796A JPS60230058A (ja) | 1984-04-27 | 1984-04-27 | ポータブルキャピラリーガスクロマトグラフ装置用シリコンウエハ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59085796A JPS60230058A (ja) | 1984-04-27 | 1984-04-27 | ポータブルキャピラリーガスクロマトグラフ装置用シリコンウエハ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60230058A true JPS60230058A (ja) | 1985-11-15 |
| JPH0460219B2 JPH0460219B2 (enrdf_load_stackoverflow) | 1992-09-25 |
Family
ID=13868843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59085796A Granted JPS60230058A (ja) | 1984-04-27 | 1984-04-27 | ポータブルキャピラリーガスクロマトグラフ装置用シリコンウエハ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60230058A (enrdf_load_stackoverflow) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4891120A (en) * | 1986-06-06 | 1990-01-02 | Sethi Rajinder S | Chromatographic separation device |
| US5116495A (en) * | 1987-09-11 | 1992-05-26 | Ottosensors Corporation | Capillary chromatography device |
| US5132012A (en) * | 1988-06-24 | 1992-07-21 | Hitachi, Ltd. | Liquid chromatograph |
| US5500071A (en) * | 1994-10-19 | 1996-03-19 | Hewlett-Packard Company | Miniaturized planar columns in novel support media for liquid phase analysis |
| US5658413A (en) * | 1994-10-19 | 1997-08-19 | Hewlett-Packard Company | Miniaturized planar columns in novel support media for liquid phase analysis |
| JP2002228647A (ja) * | 2001-01-31 | 2002-08-14 | Shimadzu Corp | ガスクロマトグラフ |
| JP2008232799A (ja) * | 2007-03-20 | 2008-10-02 | Shimadzu Corp | 熱分解ガスクロマトグラフ装置 |
| JP2011524536A (ja) * | 2008-06-17 | 2011-09-01 | トライコーンテック コーポレイション | 医療用途のためのハンドヘルドガス分析システム |
| US9658196B2 (en) | 2009-07-31 | 2017-05-23 | Tricorntech Corporation | Gas collection and analysis system with front-end and back-end pre-concentrators and moisture removal |
| US9683974B2 (en) | 2009-07-07 | 2017-06-20 | Tricorntech Corporation | Cascaded gas chromatographs (CGCs) with individual temperature control and gas analysis systems using same |
| US9921192B2 (en) | 2010-04-23 | 2018-03-20 | Tricorntech Corporation | Gas analyte spectrum sharpening and separation with multi-dimensional micro-GC for gas chromatography analysis |
-
1984
- 1984-04-27 JP JP59085796A patent/JPS60230058A/ja active Granted
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4891120A (en) * | 1986-06-06 | 1990-01-02 | Sethi Rajinder S | Chromatographic separation device |
| US5116495A (en) * | 1987-09-11 | 1992-05-26 | Ottosensors Corporation | Capillary chromatography device |
| US5132012A (en) * | 1988-06-24 | 1992-07-21 | Hitachi, Ltd. | Liquid chromatograph |
| US5500071A (en) * | 1994-10-19 | 1996-03-19 | Hewlett-Packard Company | Miniaturized planar columns in novel support media for liquid phase analysis |
| US5658413A (en) * | 1994-10-19 | 1997-08-19 | Hewlett-Packard Company | Miniaturized planar columns in novel support media for liquid phase analysis |
| JP2002228647A (ja) * | 2001-01-31 | 2002-08-14 | Shimadzu Corp | ガスクロマトグラフ |
| JP2008232799A (ja) * | 2007-03-20 | 2008-10-02 | Shimadzu Corp | 熱分解ガスクロマトグラフ装置 |
| JP2011524536A (ja) * | 2008-06-17 | 2011-09-01 | トライコーンテック コーポレイション | 医療用途のためのハンドヘルドガス分析システム |
| JP2014232110A (ja) * | 2008-06-17 | 2014-12-11 | トライコーンテック コーポレイション | 医療用途のためのハンドヘルドガス分析システム |
| US9683974B2 (en) | 2009-07-07 | 2017-06-20 | Tricorntech Corporation | Cascaded gas chromatographs (CGCs) with individual temperature control and gas analysis systems using same |
| US9658196B2 (en) | 2009-07-31 | 2017-05-23 | Tricorntech Corporation | Gas collection and analysis system with front-end and back-end pre-concentrators and moisture removal |
| US9921192B2 (en) | 2010-04-23 | 2018-03-20 | Tricorntech Corporation | Gas analyte spectrum sharpening and separation with multi-dimensional micro-GC for gas chromatography analysis |
| US11035834B2 (en) | 2010-04-23 | 2021-06-15 | TricornTech Taiwan | Gas analyte spectrum sharpening and separation with multi-dimensional micro-GC for gas chromatography analysis |
| US11796515B2 (en) | 2010-04-23 | 2023-10-24 | Tricorntech Corporation | Gas analyte spectrum sharpening and separation with multi-dimensional micro-GC for gas chromatography analysis |
| US12265067B2 (en) | 2010-04-23 | 2025-04-01 | Tricorntech Corporation | Gas analyte spectrum sharpening and separation with multi-dimensional micro-GC for gas chromatography analysis |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0460219B2 (enrdf_load_stackoverflow) | 1992-09-25 |
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