JPS60230020A - 感熱抵抗型流量検出装置 - Google Patents
感熱抵抗型流量検出装置Info
- Publication number
- JPS60230020A JPS60230020A JP59085115A JP8511584A JPS60230020A JP S60230020 A JPS60230020 A JP S60230020A JP 59085115 A JP59085115 A JP 59085115A JP 8511584 A JP8511584 A JP 8511584A JP S60230020 A JPS60230020 A JP S60230020A
- Authority
- JP
- Japan
- Prior art keywords
- pipe
- detector
- chip
- flow rate
- resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims abstract description 21
- 239000010409 thin film Substances 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 9
- 239000010931 gold Substances 0.000 abstract description 6
- 229910052737 gold Inorganic materials 0.000 abstract description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract description 5
- 239000011810 insulating material Substances 0.000 abstract description 2
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 2
- 239000010935 stainless steel Substances 0.000 abstract description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 239000010408 film Substances 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 3
- 229910018487 Ni—Cr Inorganic materials 0.000 description 2
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
Landscapes
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Volume Flow (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59085115A JPS60230020A (ja) | 1984-04-28 | 1984-04-28 | 感熱抵抗型流量検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59085115A JPS60230020A (ja) | 1984-04-28 | 1984-04-28 | 感熱抵抗型流量検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60230020A true JPS60230020A (ja) | 1985-11-15 |
| JPH0522849B2 JPH0522849B2 (enrdf_load_stackoverflow) | 1993-03-30 |
Family
ID=13849626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59085115A Granted JPS60230020A (ja) | 1984-04-28 | 1984-04-28 | 感熱抵抗型流量検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60230020A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4912975A (en) * | 1985-02-14 | 1990-04-03 | Nippon Soken, Inc. | Direct-heated flow measuring apparatus having improved response characteristics |
| US5321382A (en) * | 1991-07-08 | 1994-06-14 | Nippondenso Co., Ltd. | Thermal type flow rate sensor |
| US6845661B2 (en) * | 2002-10-11 | 2005-01-25 | Visteon Global Technologies, Inc. | Lead frame for automotive electronics |
| JP2012507730A (ja) * | 2008-11-06 | 2012-03-29 | コンチネンタル オートモーティヴ ゲゼルシャフト ミット ベシュレンクテル ハフツング | マスフローセンサおよびマスフローセンサを備えた自動車 |
-
1984
- 1984-04-28 JP JP59085115A patent/JPS60230020A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4912975A (en) * | 1985-02-14 | 1990-04-03 | Nippon Soken, Inc. | Direct-heated flow measuring apparatus having improved response characteristics |
| US5321382A (en) * | 1991-07-08 | 1994-06-14 | Nippondenso Co., Ltd. | Thermal type flow rate sensor |
| US6845661B2 (en) * | 2002-10-11 | 2005-01-25 | Visteon Global Technologies, Inc. | Lead frame for automotive electronics |
| JP2012507730A (ja) * | 2008-11-06 | 2012-03-29 | コンチネンタル オートモーティヴ ゲゼルシャフト ミット ベシュレンクテル ハフツング | マスフローセンサおよびマスフローセンサを備えた自動車 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0522849B2 (enrdf_load_stackoverflow) | 1993-03-30 |
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