JPS60229215A - Manufacture of magnetic head - Google Patents

Manufacture of magnetic head

Info

Publication number
JPS60229215A
JPS60229215A JP8299284A JP8299284A JPS60229215A JP S60229215 A JPS60229215 A JP S60229215A JP 8299284 A JP8299284 A JP 8299284A JP 8299284 A JP8299284 A JP 8299284A JP S60229215 A JPS60229215 A JP S60229215A
Authority
JP
Japan
Prior art keywords
thin film
magnetic
block
magnetic thin
kerf
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8299284A
Other languages
Japanese (ja)
Inventor
Takahiro Yamamoto
隆洋 山本
Atsushi Nakamura
淳 中村
Akihiko Igarashi
昭彦 五十嵐
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP8299284A priority Critical patent/JPS60229215A/en
Publication of JPS60229215A publication Critical patent/JPS60229215A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3109Details
    • G11B5/313Disposition of layers
    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/31Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Magnetic Heads (AREA)

Abstract

PURPOSE:To manufacture a head suitable to high density recording with high accuracy by applying the 2nd cut slot after a metallic magnetic thin film, a gap layer and the 2nd metallic magnetic thin film to a block having a cut slot so as to bond the 2nd block. CONSTITUTION:The metallic magnetic thin film 4 with high magnetic flux density is formed on the surface of a nonmagnetic substance block 1 having the winding cut slot 2, and after the nonmagnetic substance gap layer 6 and the 2nd metallic magnetic thin film 7 are formed on the film 4, the 2nd cut slot 9 is provided. A low melting point crystallized glass 11 is put into the cut slot 9 and the 2nd nonmagnetic ceramic member 10 is bonded thereto. Then the head block 12 is cut off so as to manufacture head pieces. Thus, the amorphous magnetic thin film such as an amorphous having a sufficiently higher crystallized temperature is formed by using the thin film forming technology and the glass having a low melting point is used, then the magnetic head suitable for high density recording is manufactured with high accuracy.

Description

【発明の詳細な説明】 (技術分野) 本発明は、電子計算機等に使用される磁気ヘッドの贋造
方法に係り、狭トラツクで狭ギャップの^密度記録に適
合した磁気ヘッドを精度良くしかもパックギャップが空
かないように作製でかる磁気ヘッドの製造方法に関する
ものである。
Detailed Description of the Invention (Technical Field) The present invention relates to a method for counterfeiting magnetic heads used in electronic computers, etc. The present invention relates to a method for counterfeiting magnetic heads used in electronic computers, etc. The present invention relates to a method of manufacturing a magnetic head that can be manufactured so that no space is left unoccupied.

(発明の背景) 近年、電子計算機用磁気記録の方向は1615度化に向
かって進みつつある。記録媒体の開発も平行して行なわ
れているが、特に低価格化と高精度化への相反する要求
を満足させるために磁気ヘッドの開発が急務となり、各
方面で検討がなされている。現在までは、7エライトブ
ロツクから作り出されるものと、フェライトブロックと
非磁性セラミックとの複合型のものと、スライダ一部に
フルチックという高硬度材を用いた完全な薄膜ヘッドの
提案とがなされている。しかし、いずれも上記の要求を
完全に満足させ得る段階には至って−)ない、即ち、7
エライトブロツクのみで作られるヘッドではヘッド先端
飽和のため狭ギャップに対応できず、また、7エライト
と非磁性セラミックの複合ヘッドにおいてはその製造工
程が複雑になり高精度化が困難である。一方、完全なる
薄膜ヘッドは、半導体技術工程と、^硬度材の高精度加
工とが必要になる点から価格的に高価なものとなり、や
はり要求を満足させ得ないという欠点を有している。
(Background of the Invention) In recent years, the direction of magnetic recording for electronic computers has been moving toward 1615 degrees. The development of recording media is being carried out in parallel, and in particular the development of magnetic heads has become an urgent task in order to satisfy the conflicting demands of lower prices and higher precision, and studies are being carried out in various fields. Up to now, proposals have been made for heads made from 7-elite blocks, composite heads made of ferrite blocks and non-magnetic ceramics, and complete thin-film heads using a high-hardness material called Flutic for part of the slider. There is. However, none of them have reached the stage where they can completely satisfy the above requirements.
A head made only of elite blocks cannot accommodate a narrow gap due to head tip saturation, and a composite head made of 7 elite blocks and non-magnetic ceramics has a complicated manufacturing process, making it difficult to achieve high precision. On the other hand, a complete thin-film head is expensive because it requires semiconductor technology processes and high-precision machining of hard materials, and has the disadvantage that it cannot satisfy the requirements.

(発明の目的) 本発明は、上記の欠点を改善したもので、高磁束密度の
金属磁性薄膜として、十分結晶化温度T×の高い非晶質
磁性薄膜(アモルファス薄II)等を使用し、高密度記
録に適合するごとく狭トラツクで狭ギャップの磁気ヘッ
ドを精度良(しかもバックギャップが空かないように作
製可能な磁気ヘッドの製造方法を提供しよ)とするもの
である。
(Objective of the invention) The present invention improves the above-mentioned drawbacks, and uses an amorphous magnetic thin film (amorphous thin II) or the like with a sufficiently high crystallization temperature Tx as a metal magnetic thin film with high magnetic flux density. It is an object of the present invention to provide a method for manufacturing a magnetic head that has a narrow track and a narrow gap with high accuracy (and can be manufactured without leaving a back gap) so as to be suitable for high-density recording.

(発明の構成) 本発明の磁気ヘッドの製造方法の特徴は、非磁性体より
なる第1のブロックの一面に第1切溝を設け、その第1
切溝を含む面に高飽和磁束密度の第1の金属磁性薄膜を
形成する工程と、前記第1切溝を非磁性体で遮蔽して前
記第1の金属磁性薄膜の上部に非磁性体ギャップ層を形
成する工程と、その上部に重ねて高飽和磁束密度の第2
の金属磁性薄膜を形成する工程と、第1及び第2の金属
磁性薄膜の裏面に対し略垂直にかつ前記#S1切溝に達
しないように第2切溝を設け、非磁性体よりなる第2の
ブロックを前記第2切溝に接合剤を設けて前記第1のブ
ロックに接合してヘッドブロックを作製する工程とを備
えていて電子計算機用等に好適な狭トラツクで狭ギャッ
プの磁気ヘッドを製造可能としたことにある。
(Structure of the Invention) The method for manufacturing a magnetic head of the present invention is characterized in that a first kerf is provided on one surface of a first block made of a non-magnetic material;
forming a first metal magnetic thin film with a high saturation magnetic flux density on a surface including the kerf, and shielding the first kerf with a non-magnetic material to form a non-magnetic material gap above the first metal magnetic thin film; A process of forming a layer and a second layer with high saturation magnetic flux density on top of the layer.
A second kerf is provided substantially perpendicularly to the back surfaces of the first and second metal magnetic thin films and does not reach the #S1 kerf, and a second kerf made of a non-magnetic material is formed. a magnetic head with a narrow track and a narrow gap suitable for use in electronic computers, etc., comprising the step of bonding the second block to the first block by applying a bonding agent in the second kerf, and manufacturing a head block. The reason is that it has become possible to manufacture.

(発明の実施例) 以下、本発明に係る磁気ヘッドの製造方法の実施例を図
面に従って説明する。
(Embodiments of the Invention) Hereinafter, embodiments of a method for manufacturing a magnetic head according to the present invention will be described with reference to the drawings.

第1図ないし第9図は、本発明の製造工程の一実施例で
あり、第10図は完成状態の磁気ヘッドを示す。
1 to 9 show an embodiment of the manufacturing process of the present invention, and FIG. 10 shows a completed magnetic head.

まず、第1図のように、セラミック等の非磁性体の変形
長方形ブロック1の一面に、外周スライサー等を用いて
後工程で巻線を施す第1切溝2を設ける。このときブロ
ック1の残った70ント側乎面3A及びバック側平面3
Bは鏡面用ポリシングがなされているものとする。
First, as shown in FIG. 1, a first kerf 2 is provided on one surface of a deformed rectangular block 1 made of a non-magnetic material such as ceramic using a peripheral slicer or the like to form a winding wire in a later process. At this time, the remaining 70 side planes 3A and back side plane 3 of block 1
B is assumed to have been mirror polished.

次に、第2図に示すように、第1切溝2と鏡面となった
平面3A、3Bの全域に金属磁性薄膜4(たとえばCo
−Zn系非晶質磁性薄膜やセンダスト、パーマロイ等の
高硬度、高透磁率薄膜)を所定の厚みに薄膜形成技術(
たとえばスパッタリング、蒸着、メッキ、CVD法等)
を用いて形成する。
Next, as shown in FIG. 2, a metal magnetic thin film 4 (for example, Co
- Thin film formation technology (Zn-based amorphous magnetic thin film, high hardness, high magnetic permeability thin film such as sendust, permalloy, etc.) to a predetermined thickness (
For example, sputtering, vapor deposition, plating, CVD method, etc.)
Form using.

それから、第3図に示すように第1切溝2の上面を非磁
性体からなる板5で遮蔽し、鉄板5をブロック1に接着
剤等で固定する。
Then, as shown in FIG. 3, the upper surface of the first kerf 2 is covered with a plate 5 made of a non-magnetic material, and the iron plate 5 is fixed to the block 1 with adhesive or the like.

次に、第4図に示すようにギャップ長を決定する非磁性
体ギャップ層6(たとえばS i O2、Al2O,、
Ti、Cu等)を、所定の膜厚にフロント側平面3A上
の金属磁性薄膜4及び板5の一部の上(ギヤンブディブ
ス部)に薄膜形成技術で形成する。
Next, as shown in FIG. 4, a non-magnetic gap layer 6 (for example, SiO2, Al2O,...
Ti, Cu, etc.) are formed to a predetermined film thickness on the metal magnetic thin film 4 on the front side plane 3A and on a part of the plate 5 (the gap portion) using a thin film forming technique.

そして、第5図に示すように、ギャップ層6、板5の残
りの部分及びバック側平面3B上の金属磁性薄lI4の
上部に金属磁性薄膜7(前記金属磁性薄膜4と同質のも
の)を薄膜形成技術で形成後、全域に保護1I8(たと
えばA I 203.5iOz、5iNSTiN等)を
薄膜形成技術でつける。
Then, as shown in FIG. 5, a metal magnetic thin film 7 (of the same quality as the metal magnetic thin film 4) is formed on the gap layer 6, the remaining portion of the plate 5, and the upper part of the metal magnetic thin film 4 on the back side plane 3B. After formation using a thin film formation technique, a protection 1I8 (for example, A I 203.5iOz, 5iNSTiN, etc.) is applied over the entire area using a thin film formation technique.

その後、第6図及び第7図に示すように、第2切溝9を
複数個その開隔がトラック中W0を満足するように形成
する。該第2切溝9は、金属磁性薄膜4,7、ギャップ
層6及び保護膜8の先端縁を略垂直に横断して前記ブロ
ック1の先端面15に達するように形成されている。こ
のとき第1切溝2にまで達しないようにする。
Thereafter, as shown in FIGS. 6 and 7, a plurality of second kerfs 9 are formed so that the opening distance thereof satisfies W0 in the track. The second kerf 9 is formed to cross the tip edges of the metal magnetic thin films 4 and 7, the gap layer 6, and the protective film 8 substantially perpendicularly to reach the tip surface 15 of the block 1. At this time, make sure that it does not reach the first kerf 2.

次に、第8図に示すように、保護膜8の上部に非磁性セ
ラミック材10を合わせ、第2切溝9内に低融点結晶化
ガラス11を入れ、ブロック1911に対し溶着してヘ
ッドブロック12を作る。
Next, as shown in FIG. 8, a non-magnetic ceramic material 10 is placed on top of the protective film 8, a low melting point crystallized glass 11 is placed in the second kerf 9, and welded to the block 1911 to form a head block. Make 12.

その後、第8図中1点鎖線で示したように、ヘッドブロ
ック12から複数個のへッドビースを切断し、第9図に
示すようなヘッドピース13を作る。
Thereafter, a plurality of head beads are cut from the head block 12 as shown by the dashed line in FIG. 8, thereby producing a head piece 13 as shown in FIG. 9.

こうしてできたヘッドピース13は、バック側で接合さ
れた金属磁性薄膜4,7からなる磁気回路と、ギャップ
層6で構成されたギャップとを俯え、所定のトラック中
を有するものである。
The thus produced head piece 13 has a magnetic circuit consisting of the metal magnetic thin films 4 and 7 joined on the back side and a gap formed by the gap layer 6, and has a predetermined track.

そして、前記へラドピース13を、第10図に示すよう
なディスク上をフローティングする電子計算機用非磁性
スライダー14にやはり低融点ガラス16を用いて接合
することにより、電子計算機用磁気ヘッドを製造するこ
とができる。
Then, a magnetic head for an electronic computer is manufactured by bonding the helad piece 13 to a non-magnetic slider 14 for an electronic computer floating on a disk as shown in FIG. 10, also using a low melting point glass 16. I can do it.

以上説明したように、上記実施例によれば、薄膜形成技
術を用いて磁性体ヘッド部を形成しているので、そのギ
ャップ長、トラック中を従来に比して十分高精度に形成
でき、さらにパックギャップを形成しない特徴を有して
いる。また、ガラス接合に関しては、非晶質材を用いて
も十分その結晶化温度より低い温度で溶着可能な結晶化
ガラスを用いるため、溶着後の硬度や再加熱時の再溶解
も生ぜず高精度を保持で終る。また、スライダー13と
へラドピース13との非磁性体材料として同種類のもの
が使用可能なことから、最後の接合時にこれまで生じて
いた熱膨張係数(a値)の差によるクラックや不適合が
生ぜず、極めて高精度で^品質のヘッドを製作できる。
As explained above, according to the above embodiment, since the magnetic head section is formed using thin film formation technology, the gap length and the inside of the track can be formed with sufficiently high precision compared to the conventional method. It has the feature of not forming a pack gap. In addition, regarding glass bonding, we use crystallized glass that can be welded at a temperature sufficiently lower than the crystallization temperature of amorphous materials, so there is no hardness after welding or remelting during reheating, resulting in high precision. Ends with holding. In addition, since the same type of non-magnetic material can be used for the slider 13 and the helad piece 13, cracks and mismatches due to the difference in thermal expansion coefficient (a value) that have previously occurred during the final joining can be avoided. It is possible to manufacture heads of extremely high precision and quality.

さらに上部金属磁性薄1j17または下部金属磁性11
14のトラック中W0をす7トオ7等の7オトリングラ
フイ法を用いて形成すれば、本実施例で示した機械加工
による第2切溝9の精度が不必要になりヘッドのトラッ
ク中W0の精度を非常に向上させ得る。
Furthermore, upper metal magnetic thin 1j17 or lower metal magnetic thin 11
If W0 in the 14 tracks is formed using a 7-to-to-7 method, the accuracy of the second kerf 9 by machining as shown in this embodiment is unnecessary, and the accuracy of W0 in the track of the head is improved. can be greatly improved.

(発明の効果) 以上説明したように、本発明に係る磁気ヘッドの製造方
法によれば、高磁束密度の金属磁性薄膜として、十分結
晶化温度T×の高い非晶質磁性薄膜(アモル77ス薄I
lり等を使用し、111i密度記鋒に適合するごとく狭
トラツクで狭ギャップの磁気ヘッドを精度良くしかもパ
ックギャップが空かないように作製可能であり、その効
果は極めて大きいものがある。
(Effects of the Invention) As explained above, according to the method of manufacturing a magnetic head according to the present invention, an amorphous magnetic thin film (Amol 77S) with a sufficiently high crystallization temperature T Thin I
It is possible to manufacture a magnetic head with a narrow track and a narrow gap in accordance with the 111i density recorder with high accuracy and with no gap in the pack by using a magnetic head such as a 111i density recorder, and the effect thereof is extremely large.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の実施例において用いる非磁性体のブロ
ックを示す斜視図、第2図ないし第5図はブロックに金
属磁性薄膜等を形成する工程を示す正面図、第6図は第
2切溝を設けた工程を示す斜視図、第7図は同拡大側面
図、第8図はヘッドブロックを示す斜視図、第9図はへ
ラドピースを示す斜視図、第10図は完成状態の電子計
算機用磁気ヘッドを示す斜視図である。 1・・・変形長方形ブロック、2・・・第1切溝、3A
。 3B・・・平面、4.7・・・金属磁性薄膜、5・・・
板、6・・・ギャップ層、8・・・保護膜、9・・・第
2切溝、10・・・非磁性セラミック材、11・・・低
融点結晶化ガラス、12・・・ヘッドブロック、13・
・・ヘッドピー人、14・・・非磁性スライダー。 特許出願人 ティーディーケイ株式会社 代理人 弁理士 村井 隆
FIG. 1 is a perspective view showing a non-magnetic block used in an embodiment of the present invention, FIGS. 2 to 5 are front views showing the process of forming a metal magnetic thin film etc. on the block, and FIG. FIG. 7 is an enlarged side view of the same, FIG. 8 is a perspective view of the head block, FIG. 9 is a perspective view of the helad piece, and FIG. 10 is the finished electronics. FIG. 2 is a perspective view showing a magnetic head for a computer. 1... Deformed rectangular block, 2... First kerf, 3A
. 3B...Plane, 4.7...Metal magnetic thin film, 5...
Plate, 6... Gap layer, 8... Protective film, 9... Second kerf, 10... Non-magnetic ceramic material, 11... Low melting point crystallized glass, 12... Head block , 13・
...Headpie person, 14...Non-magnetic slider. Takashi Murai, patent attorney and agent for patent applicant TDC Co., Ltd.

Claims (1)

【特許請求の範囲】[Claims] (1)非磁性体よりなる第1のブロックの一面に第1切
溝を設け、その第1切溝を含む面に亮飽和電束密度の第
1の金属磁性薄膜を形成する工程と、前記第1切溝を非
磁性体で遮蔽して前記第1の金属磁性薄膜の上部に非磁
性体ギャップ層を形成する工程と、その上部に重ねて鳥
飽和磁束密度の第2の金属磁性薄膜を形成する工程と、
第1及び第2の金属磁性薄膜の裏面に対し略垂直にかつ
前記第1切溝に達しないように第2切溝を設け、非磁性
体よりなる第2のブロックを前記第2切溝に接合剤を設
けて前記第1のブロックに接合してヘラ−ドブロックを
作製する工程とを備えたことを特徴とする磁気ヘッドの
製造方法。
(1) A step of providing a first kerf on one surface of a first block made of a non-magnetic material and forming a first metal magnetic thin film with a high saturation electric flux density on the surface including the first kerf; a step of shielding the first kerf with a non-magnetic material to form a non-magnetic material gap layer on top of the first metal magnetic thin film, and forming a second metal magnetic thin film having a bird's saturation magnetic flux density on top of the non-magnetic material gap layer; a step of forming;
A second kerf is provided substantially perpendicular to the back surfaces of the first and second metal magnetic thin films and does not reach the first kerf, and a second block made of a non-magnetic material is placed in the second kerf. A method of manufacturing a magnetic head, comprising the step of providing a bonding agent and bonding it to the first block to produce a herald block.
JP8299284A 1984-04-26 1984-04-26 Manufacture of magnetic head Pending JPS60229215A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8299284A JPS60229215A (en) 1984-04-26 1984-04-26 Manufacture of magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8299284A JPS60229215A (en) 1984-04-26 1984-04-26 Manufacture of magnetic head

Publications (1)

Publication Number Publication Date
JPS60229215A true JPS60229215A (en) 1985-11-14

Family

ID=13789713

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8299284A Pending JPS60229215A (en) 1984-04-26 1984-04-26 Manufacture of magnetic head

Country Status (1)

Country Link
JP (1) JPS60229215A (en)

Similar Documents

Publication Publication Date Title
JPS5930227A (en) Manufacture of magnetic head
KR920006124B1 (en) Magnetic head having an integrated recording and playback head and an erasure head
JPS61129716A (en) Magnetic head
JPH03269809A (en) Production of magnetic head
JPH0786967B2 (en) Magnetic head and manufacturing method thereof
JPS60205808A (en) Magnetic head
JPS60229215A (en) Manufacture of magnetic head
JPS60231903A (en) Composite type magnetic head and its production
JPH0256707A (en) Floating type magnetic head and its manufacture
KR930006583B1 (en) Production of magnetic head
JPS59203210A (en) Magnetic core and its production
JPS61280009A (en) Magnetic head
JPS62271213A (en) Manufacture of composite type magnetic head
JPH0648527B2 (en) Magnetic head manufacturing method
JPS6074112A (en) Magnetic head
JPS63288407A (en) Production of magnetic head
JPS62125509A (en) Magnetic head
JPS6251009A (en) Magnetic core and its production
JPH0476168B2 (en)
JPS61145712A (en) Magnetic head
JPS6323208A (en) Composite magnetic head
JPS6394422A (en) Magnetic head
JPH0795364B2 (en) Magnetic head
JPS62141613A (en) Magnetic head
JPH01277305A (en) Magnetic head