JPS60228915A - Angular velocity sensor - Google Patents
Angular velocity sensorInfo
- Publication number
- JPS60228915A JPS60228915A JP59085419A JP8541984A JPS60228915A JP S60228915 A JPS60228915 A JP S60228915A JP 59085419 A JP59085419 A JP 59085419A JP 8541984 A JP8541984 A JP 8541984A JP S60228915 A JPS60228915 A JP S60228915A
- Authority
- JP
- Japan
- Prior art keywords
- drive
- detection
- bimorph element
- piezoelectric bimorph
- signal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Gyroscopes (AREA)
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明はジャイロスコープに用いる角速度センサーに関
するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to an angular velocity sensor used in a gyroscope.
従来例の構成とその問題点
近年、コンピューター技術が発展し、多くの機能を有し
た製品が商品化されるようになり、そのだめの各種セン
サーの要求が犬きくなってきている。角速度センサーの
応用も電装品におけるナビゲーションシステム、ロボッ
トの方向検知、駆動装置のスタビライザー装置彦どかあ
り、いずれも小型で高性能なものがこれから必要となっ
てくる。Conventional configurations and their problems In recent years, with the development of computer technology, products with many functions have been commercialized, and the demand for various types of sensors has become more and more important. Angular velocity sensors can be applied to electrical equipment such as navigation systems, direction detection for robots, and stabilizer devices for drive devices, all of which will require compact, high-performance sensors.
従来、ジャイロスコープを用いた慣性航法装置として、
飛行機・船舶のような移動する物体の方位を知る方法が
主に使われている。これは安定した方位が得られるが、
機械式であることから装置が犬がかシであり、コストも
高く、小型化が望まれる民生用機器への応用は困難であ
る。Conventionally, as an inertial navigation device using a gyroscope,
It is mainly used to determine the direction of moving objects such as airplanes and ships. This provides a stable orientation, but
Since it is mechanical, the device is bulky and expensive, making it difficult to apply it to consumer devices where miniaturization is desired.
一方、回転力を使わずに物体を振動させて、角速度が発
生した時に起こるコリオリの力から角速度を検出する振
動ジャイロ（特開昭５８−１７４８５４号）が提案され
ている。この振動ジャイロは音叉構造を有した振動セン
サーと考えることができる。On the other hand, a vibrating gyroscope (Japanese Patent Laid-Open No. 174854/1983) has been proposed that detects angular velocity from the Coriolis force that occurs when an angular velocity is generated by vibrating an object without using rotational force. This vibration gyroscope can be considered as a vibration sensor with a tuning fork structure.
この構造の原型は米国特許第２５４４６４６号にみるこ
とができる。これＫよれば駆動用弾性体（励振用）と検
知用弾性体の矩形板を直線的かつ直交接合させたもので
、速度（ｖ）を持った検知用弾性体に働らくコリオリの
力を検出するものである。The prototype of this structure can be found in US Pat. No. 2,544,646. According to this K, rectangular plates of a driving elastic body (for excitation) and a detection elastic body are connected linearly and orthogonally, and the Coriolis force acting on the detection elastic body with velocity (v) is detected. It is something to do.
特開昭５８−１７４８５４号の発明内容はこの米国特許
第２５４４６４６号に示されている振動素子を２本平行
に、検知軸に沿って駆動用振動素子の自由端にて接合し
たものと考えられる。この方法では実際の振動体の振動
情報が得られないために大振幅駆動時の位相情報、振幅
情報が正確に得られないために駆動用圧電バイモルフに
て励振される検知用圧電バイモルフから得られるコリオ
リカの情報が不正確となシゼロ点ドリフトが発生し実用
上ＤＣ領域での使用に限界があった。The content of the invention in JP-A-58-174854 is thought to be that two vibrating elements shown in US Pat. No. 2,544,646 are joined in parallel along the detection axis at the free end of the driving vibrating element. . With this method, it is not possible to obtain vibration information of the actual vibrating body, so phase information and amplitude information cannot be obtained accurately during large amplitude driving. Inaccuracy of Coriolis information causes a schizero point drift, which limits its practical use in the DC region.
発明の目的
本発明の目的は検出精度が高く、外部雑音に影響が少な
く、ゼロ点ドリフトの少ない、量産性の高い角速度セン
サーを提供することである。OBJECTS OF THE INVENTION An object of the present invention is to provide an angular velocity sensor that has high detection accuracy, is less affected by external noise, has less zero point drift, and is highly mass-producible.
発明の構成
本発明の角速度センサーは駆動用圧電バイモルフ素子と
検知用圧電バイモルフ素子とが検知軸に平行でかつ互い
に直交接合されたセンサー素子があり、このセンサー素
子の一対を駆動用圧電バイモルフ素子の自由端にて接合
した振動素子とし、前記振動素子とベース部材の間を一
本の金属弾性部材にて支持接合し、一方の駆動用圧電バ
イモルフ素子にて駆動し、他方の駆動圧電バイモルフ素
子を駆動検知用圧電バイモルフ素子として振動の基準信
号として取り出すように構成したものである。これによ
り、左右のセンサー素子が正確に整合された状態にて振
動し、検出回路にとって重要である振動の位相信号、振
幅信号が駆動検知用圧電バイモルフ素子から得られるた
めにゼロ点ドリフトが少なく、検出精度を高くすること
ができ、外部雑音に強いセンサーとなる。Structure of the Invention The angular velocity sensor of the present invention has a sensor element in which a drive piezoelectric bimorph element and a detection piezoelectric bimorph element are connected parallel to the detection axis and orthogonally to each other. A vibrating element is connected at its free end, the vibrating element and the base member are supported and connected by a single metal elastic member, one driving piezoelectric bimorph element is driven, and the other driving piezoelectric bimorph element is driven. The piezoelectric bimorph element for drive detection is configured to be extracted as a vibration reference signal. As a result, the left and right sensor elements vibrate in a precisely matched state, and the vibration phase and amplitude signals, which are important for the detection circuit, are obtained from the piezoelectric bimorph element for drive detection, so there is little zero point drift. Detection accuracy can be increased, making the sensor resistant to external noise.
実施例の説明
以下本発明の一実施例について図面を参照しながら説明
する。DESCRIPTION OF EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.
第１図は本発明の一実施例における角速度センサの平面
図を示し、第２図は側面図を示す。第３図は回路ブロッ
ク図を示す。FIG. 1 shows a plan view of an angular velocity sensor according to an embodiment of the present invention, and FIG. 2 shows a side view. FIG. 3 shows a circuit block diagram.
第１．第２図において１は検知用圧電バイモルフ素子、
２は駆動用圧電バイモルフ素子、３は駆動検知用圧電バ
イモルフ素子、４は導電部材、６は金属弾性部材、６は
ペース、７は接合部材を示す。1st. In Fig. 2, 1 is a piezoelectric bimorph element for detection;
2 is a drive piezoelectric bimorph element, 3 is a drive detection piezoelectric bimorph element, 4 is a conductive member, 6 is a metal elastic member, 6 is a paste, and 7 is a bonding member.
以上のように構成された本実施例の角速度センサーにつ
いて以下その動作を説明する。The operation of the angular velocity sensor of this embodiment configured as described above will be explained below.
まず駆動用圧電バイモルフ２を駆動するにはバイモルフ
２の両面に駆動信号（共振周波数）を印加する。その時
のリード線はできる限シ細い導線を用いて振動に影響を
与えにくい導電部材４付近にハンダ付される。マリード
線を用いないでこれにかわる手段を用いてもよい。振動
を始めた駆動用圧電バイモルフ素子２と検知用圧電バイ
モルフ素子１とからなるセンサー素子は導電部材４を介
して１秒以内の起動時間にて他方に接合されている駆動
検知用圧電バイモルフ素子３と検知用圧電バイモルフ素
子１とからなるセンサー素子と共振し、音叉振動を開始
する。First, to drive the drive piezoelectric bimorph 2, a drive signal (resonant frequency) is applied to both sides of the bimorph 2. At this time, the lead wire is made as thin as possible and is soldered near the conductive member 4, which is less susceptible to vibration. Alternative means may be used without using married wires. The sensor element consisting of the drive piezoelectric bimorph element 2 and the detection piezoelectric bimorph element 1 that have started to vibrate is connected to the drive detection piezoelectric bimorph element 3 via the conductive member 4 in a starting time of less than 1 second. and the sensing piezoelectric bimorph element 1, and the tuning fork starts to vibrate.
正確な音叉振動をさせるために、金属弾性部材５が左右
の組立精度による不整合をなくすると左右対称の振動モ
ードを得ることができ、重要である。駆動検知用圧電バ
イモルフ素子３からは圧電材料の変換特性すなわち、機
械エネルギーを電気エネルギーとしてとりだすために、
実際の振動状態を電気信号としてとシだすことができる
。この時の信号は位相信号と振幅信号である。この信号
が振動式角速度センサーにとって非常に重要な役割を果
たす。役割については回路関係のところで詳述する。In order to make the tuning fork vibrate accurately, it is important to eliminate the misalignment caused by the precision of assembling the left and right sides of the metal elastic member 5, since it is possible to obtain a symmetrical vibration mode. The piezoelectric bimorph element 3 for drive detection uses the conversion characteristics of the piezoelectric material, that is, in order to extract mechanical energy as electrical energy,
The actual vibration state can be output as an electrical signal. The signals at this time are a phase signal and an amplitude signal. This signal plays a very important role in the vibration type angular velocity sensor. The role will be explained in detail in the section related to circuits.
駆動用圧電バイモルフ素子２と駆動検知用圧電バイモル
フ素子３の機械インピーダンスを整合させるために、両
者は同一寸法形状、同一圧電材料が好ましい。In order to match the mechanical impedances of the drive piezoelectric bimorph element 2 and the drive detection piezoelectric bimorph element 3, it is preferable that they have the same size, shape, and the same piezoelectric material.
検知用圧電バイモルフ素子１は整合された音叉振動をし
ているために加速度に対するキャンセル効果と外乱ノイ
ズに対するキャンセル効果も高く検出感度の直線性もよ
くなることが分った６本実施例では音叉の共振周波数は
３００Ｈｚ付近に設計してあり、駆動回路もこれに合わ
せて設計する。次に第３図のブロック図を用いて回路動
作について詳述する。Since the piezoelectric bimorph element 1 for detection has matched tuning fork vibration, it has been found that the canceling effect against acceleration and the canceling effect against disturbance noise is high, and the linearity of detection sensitivity is also improved.6 In this example, the tuning fork resonance The frequency is designed around 300Hz, and the drive circuit is designed accordingly. Next, the circuit operation will be described in detail using the block diagram shown in FIG.
駆動回路８は、前記共振系を励振するための電力を、前
記駆動用圧電バイモルフ素子に供給するだめのものであ
り、その供給電力は後述の駆動情報抽出回路からの信号
により制御され、角速度センサとして常に一定の感度を
得るように、共振系の振動状態を保つ。The drive circuit 8 is for supplying power for exciting the resonance system to the driving piezoelectric bimorph element, and the supplied power is controlled by a signal from a drive information extraction circuit, which will be described later, to drive the angular velocity sensor. The vibration state of the resonant system is maintained so as to always obtain a constant sensitivity.
ここで、駆動効率を最大にするだめに、共振系の共振周
波数で駆動する必要があるが、そのために、駆動回路は
駆動用バイモルフ素子を周波数選択素子として含む発振
ループで構成し、そのループ中に利得可変増幅器を挿入
して、後述の制御メカニズムによって、ループ中のＧａ
１ｎ配分を調整することで所定振幅に保つことができる
。Here, in order to maximize drive efficiency, it is necessary to drive at the resonant frequency of the resonant system. For this purpose, the drive circuit is configured with an oscillation loop that includes a drive bimorph element as a frequency selection element, and By inserting a variable gain amplifier into the Ga
By adjusting the 1n distribution, it is possible to maintain a predetermined amplitude.
駆動情報抽出回路１０は、駆動検知用バイモルフ素子の
出力信号（以後モニタ信号とする）をうけて、駆動振幅
信号と駆動位相信号を発生するもので、具体的には、モ
ニタ信号を整流、平滑、増幅して物理釣力振動振幅に応
じたＤＣ電圧（駆動振幅信号）を発生する機能と、モニ
タ信号に適当彦移相をほどこして、後述する位相検波に
おける基準位相となる駆動位相信号を発生する機能を有
する。The drive information extraction circuit 10 receives the output signal of the bimorph element for drive detection (hereinafter referred to as a monitor signal) and generates a drive amplitude signal and a drive phase signal. Specifically, the drive information extraction circuit 10 rectifies and smoothes the monitor signal. , a function to amplify and generate a DC voltage (drive amplitude signal) according to the physical fishing force vibration amplitude, and a function to apply an appropriate phase shift to the monitor signal to generate a drive phase signal that will be the reference phase in phase detection described later. It has the function of
自動利得調整回路９は、前記駆動振幅信号と、基準電圧
を比較して、その差が零となるように前記利得可変増幅
器の利得を調整する。The automatic gain adjustment circuit 9 compares the drive amplitude signal with a reference voltage and adjusts the gain of the variable gain amplifier so that the difference between them becomes zero.
検波回路１１は、検知用圧電バイモルフ素子の出力（以
後センス出力とする）から、不要成分を除去して角速度
に対応した成分を抽出するもので、前記駆動位相信号を
基準位相とした同期検波回路である。The detection circuit 11 removes unnecessary components from the output of the detection piezoelectric bimorph element (hereinafter referred to as sense output) and extracts a component corresponding to the angular velocity, and is a synchronous detection circuit using the drive phase signal as a reference phase. It is.
フィルタ回路１２は、前記検波出力を平滑して角速度に
応じた出力を発生するだめのものである。The filter circuit 12 is for smoothing the detected output and generating an output according to the angular velocity.
以上の構成の中で、駆動用圧電バイモーフ素子、 ｌ駆
動検知用圧電バイモルフ素子、及び検知用圧電バイモル
フ素子に同一の材料を用いることで、単に左右対称の理
想的共振系を得るのみならず、温度等による素子の特性
変化を吸収して、常に安定した出力を得ることができる
。In the above configuration, by using the same material for the piezoelectric bimorph element for drive, the piezoelectric bimorph element for drive detection, and the piezoelectric bimorph element for detection, it is possible to not only obtain a bilaterally symmetrical ideal resonance system, but also It is possible to absorb changes in element characteristics due to temperature, etc., and always obtain stable output.
例えば、駆動振幅信号は、物理的振動振幅を反映するも
のであるが、その係数として、圧電バイモルフ素子の機
械−電気変換効率を含んでおシ、それを一定に制御する
ことで、コリオリの力をセンス出力に変換する際の、検
知用圧電バイモルフの機械−電気変換における変換効率
の変化を吸収して、結果的に、角速度とセンス出力を結
ぶ係数関係を、常に一定に保つことができる。For example, the drive amplitude signal reflects the physical vibration amplitude, but it also includes the mechanical-electrical conversion efficiency of the piezoelectric bimorph element as a coefficient, and by controlling it to a constant value, the Coriolis force can be reduced. By absorbing changes in the conversion efficiency in the mechanical-electrical conversion of the sensing piezoelectric bimorph when converting the angular velocity into the sense output, it is possible to keep the coefficient relationship between the angular velocity and the sense output constant at all times.
これは、単に駆動用バイモルフ素子を定電流、あるいは
定電圧駆動をするといった方法では決して実現し得ない
。This cannot be achieved simply by driving the driving bimorph element with constant current or constant voltage.
また、センス出力から角速度成分を抽出するための位相
検波においても、検知用素子の機械−電気変換の際に生
ずる、作用する力とセンス出力の間の相対的位相変化を
吸収して、常に角速度成分と同期した理想的な基準を得
ることができ、角速度成分の完全な抽出と、駆動慣性力
成分の完全な除去が可能となる。In addition, in phase detection for extracting the angular velocity component from the sense output, the relative phase change between the acting force and the sense output, which occurs during mechanical-electrical conversion of the sensing element, is absorbed, and the angular velocity is always detected. An ideal reference that is synchronized with the components can be obtained, making it possible to completely extract the angular velocity component and completely remove the drive inertia component.
発明の効果
以上の説明から明らかなように本発明は駆動用圧電バイ
モルフ素子と検知用圧電バイモルフ素子を検知軸に平行
でかつ互いに直交接合されたセンサー素子があシ、この
一対を駆動用圧電バイモルフ素子の自由端にて接合した
振動素子とする。そして前記振動素子とペース部材の間
を一本の金属弾性部材にて支持接合し、一方の駆動用圧
電バイモルフ素子にて駆動し、他方の駆動圧電バイモル
フ素子を駆動検知用圧電バイモルフ素子として振動の基
準信号として取シ出すように構成したものでありＤＣド
リフトの少ない、外乱ノイズに影響されない角速度セン
サーが実現できる。又、圧電部品であることから小型、
軽量で消費電力の少ないセンサーとして重要である。Effects of the Invention As is clear from the above description, the present invention has a sensor element in which a drive piezoelectric bimorph element and a detection piezoelectric bimorph element are connected parallel to the detection axis and orthogonally to each other, and this pair is combined into a drive piezoelectric bimorph element. The vibration element is connected at the free end of the element. Then, the vibration element and the pace member are supported and joined by one metal elastic member, one driving piezoelectric bimorph element is driven, and the other driving piezoelectric bimorph element is used as a drive detection piezoelectric bimorph element to suppress vibration. The signal is configured to be extracted as a reference signal, and an angular velocity sensor with little DC drift and unaffected by disturbance noise can be realized. Also, since it is a piezoelectric component, it is small and
It is important as a lightweight sensor with low power consumption.
さらに圧電材料を同じ材料とすると６．とによって温度
特性についてもキャンセルする効果が得られる。Furthermore, if the piezoelectric material is the same material, 6. By this, the effect of canceling the temperature characteristics can also be obtained.
第１図は本発明の一実施例における角速度センサーの正
面図、第２図は本発明の一実施例における角速度センサ
ーの側面図、第３図は本発明の一実施例圧おける角速度
センサーの回路ブロック図である。
１・・・・・・検知用圧電バイモルフ素子、２・・・・
・・駆動用圧電バイモルフ素子、３・・・・・・駆動検
知用圧電バイモルフ素子、４・・・・・・導電部材、５
・・・・・・金属弾性部材、６・・・・・・ペース、７
・・・・・・接合部材、８・・・・・・駆動回路、９・
・・・・・自動利得調整回路、１０・・・・・・駆動情
報抽出回路、１１・・・・・・検波回路、１２・・・・
・・フィルタ。
代理人の氏名 弁理士 中 尾 敏 男 ほか１名第１
図
第２図
第３図FIG. 1 is a front view of an angular velocity sensor according to an embodiment of the present invention, FIG. 2 is a side view of an angular velocity sensor according to an embodiment of the present invention, and FIG. 3 is a circuit of an angular velocity sensor according to an embodiment of the present invention. It is a block diagram. 1...Piezoelectric bimorph element for detection, 2...
... Piezoelectric bimorph element for drive, 3... Piezoelectric bimorph element for drive detection, 4... Conductive member, 5
...Metal elastic member, 6...Pace, 7
...Joining member, 8...Drive circuit, 9.
... Automatic gain adjustment circuit, 10 ... Drive information extraction circuit, 11 ... Detection circuit, 12 ...
··filter. Name of agent: Patent attorney Toshio Nakao and 1 other person No. 1
Figure 2 Figure 3
Claims (2)
子とが検知軸に平行でかつ互いに直交接合されたセンサ
ー素子があシ、このセンサー素子の一対を駆動用圧電バ
イモルフ素子の自由端にて接合した振動素子とし、前記
振動素子とベース部材の間を一本の金属弾性部材にて支
持接合し、一方の駆動用圧電バイモルフ素子にて駆動し
、他方の駆動圧電バイモルフ素子を駆動検知用圧電バイ
モルフ素子から振動の基準信号として取り出すことを特
徴とする角速度センサー。(1) A sensor element has a structure in which a drive piezoelectric bimorph element and a detection bimorph element are connected parallel to the detection axis and perpendicular to each other, and the pair of sensor elements are joined at the free end of the drive piezoelectric bimorph element. A vibrating element, the vibrating element and the base member are supported and joined by one metal elastic member, one of the driving piezoelectric bimorph elements is driven, and the other driving piezoelectric bimorph element is a drive detection piezoelectric bimorph element. An angular velocity sensor that extracts vibration as a reference signal from.
フ素子、及び駆動検知用圧電バイモルフ素子が同一圧電
材料にて構成されていることを特徴とする特許請求の範
囲第１項記載の角速度センサー。(2) The angular velocity sensor according to claim 1, wherein the piezoelectric bimorph element for detection, the piezoelectric bimorph element for drive, and the piezoelectric bimorph element for drive detection are made of the same piezoelectric material.
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8541984A JPH0752105B2 (en) | 1984-04-26 | 1984-04-26 | Angular velocity sensor |
| CA000476995A CA1234705A (en) | 1984-03-22 | 1985-03-20 | Angular velocity sensor |
| EP85301975A EP0161049B1 (en) | 1984-03-22 | 1985-03-21 | Angular velocity sensor |
| AU40207/85A AU565176B2 (en) | 1984-03-22 | 1985-03-21 | Tuning fork gyro angular velocity sensor |
| US06/714,682 US4671112A (en) | 1984-03-22 | 1985-03-21 | Angular velocity sensor |
| DE8585301975T DE3576085D1 (en) | 1984-03-22 | 1985-03-21 | SPEED SENSOR. |
| KR1019850001884A KR900008300B1 (en) | 1984-03-22 | 1985-03-22 | Angular velocity sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8541984A JPH0752105B2 (en) | 1984-04-26 | 1984-04-26 | Angular velocity sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60228915A true JPS60228915A (en) | 1985-11-14 |
| JPH0752105B2 JPH0752105B2 (en) | 1995-06-05 |
Family
ID=13858290
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8541984A Expired - Lifetime JPH0752105B2 (en) | 1984-03-22 | 1984-04-26 | Angular velocity sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0752105B2 (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61204516A (en) * | 1985-03-07 | 1986-09-10 | Nippon Denso Co Ltd | Angular velocity sensor |
| JPS6252410A (en) * | 1985-09-02 | 1987-03-07 | Nippon Denso Co Ltd | Vibration type angular velocity detector |
| JPS6326528A (en) * | 1986-07-18 | 1988-02-04 | Matsushita Electric Ind Co Ltd | Manufacture of angular velocity sensor |
| JPH01142477A (en) * | 1987-11-30 | 1989-06-05 | Tohoku Tokushuko Kk | Vibrator for detection of magnetization |
| JPH02201217A (en) * | 1989-01-31 | 1990-08-09 | Nec Home Electron Ltd | Vibration gyrocompass |
| JPH0348712U (en) * | 1989-09-19 | 1991-05-10 | ||
| JPH04269621A (en) * | 1991-02-25 | 1992-09-25 | Matsushita Electric Ind Co Ltd | Angular-velocity sensor |
| EP0656525A1 (en) * | 1993-12-03 | 1995-06-07 | Murata Manufacturing Co., Ltd. | Vibrating gyroscope |
| US5426970A (en) * | 1993-08-02 | 1995-06-27 | New Sd, Inc. | Rotation rate sensor with built in test circuit |
| CN114454166A (en) * | 2022-02-11 | 2022-05-10 | 苏州艾利特机器人有限公司 | Impedance control method and device for mechanical arm |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58174854A (en) * | 1982-01-21 | 1983-10-13 | ワトソン・インダストリ−ズ・インコ−ポレ−テツド | Angle rate sensor device |
| JPS58221109A (en) * | 1982-06-17 | 1983-12-22 | Tokyo Keiki Co Ltd | Gyro device |
-
1984
- 1984-04-26 JP JP8541984A patent/JPH0752105B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58174854A (en) * | 1982-01-21 | 1983-10-13 | ワトソン・インダストリ−ズ・インコ−ポレ−テツド | Angle rate sensor device |
| JPS58221109A (en) * | 1982-06-17 | 1983-12-22 | Tokyo Keiki Co Ltd | Gyro device |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61204516A (en) * | 1985-03-07 | 1986-09-10 | Nippon Denso Co Ltd | Angular velocity sensor |
| JPS6252410A (en) * | 1985-09-02 | 1987-03-07 | Nippon Denso Co Ltd | Vibration type angular velocity detector |
| JPS6326528A (en) * | 1986-07-18 | 1988-02-04 | Matsushita Electric Ind Co Ltd | Manufacture of angular velocity sensor |
| JPH01142477A (en) * | 1987-11-30 | 1989-06-05 | Tohoku Tokushuko Kk | Vibrator for detection of magnetization |
| JPH02201217A (en) * | 1989-01-31 | 1990-08-09 | Nec Home Electron Ltd | Vibration gyrocompass |
| JPH0348712U (en) * | 1989-09-19 | 1991-05-10 | ||
| JPH04269621A (en) * | 1991-02-25 | 1992-09-25 | Matsushita Electric Ind Co Ltd | Angular-velocity sensor |
| US5426970A (en) * | 1993-08-02 | 1995-06-27 | New Sd, Inc. | Rotation rate sensor with built in test circuit |
| EP0656525A1 (en) * | 1993-12-03 | 1995-06-07 | Murata Manufacturing Co., Ltd. | Vibrating gyroscope |
| CN114454166A (en) * | 2022-02-11 | 2022-05-10 | 苏州艾利特机器人有限公司 | Impedance control method and device for mechanical arm |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0752105B2 (en) | 1995-06-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |