JPS60227140A - Load cell - Google Patents

Load cell

Info

Publication number
JPS60227140A
JPS60227140A JP8480884A JP8480884A JPS60227140A JP S60227140 A JPS60227140 A JP S60227140A JP 8480884 A JP8480884 A JP 8480884A JP 8480884 A JP8480884 A JP 8480884A JP S60227140 A JPS60227140 A JP S60227140A
Authority
JP
Japan
Prior art keywords
layer
strain
moisture
resistance wire
strain gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8480884A
Other languages
Japanese (ja)
Inventor
Tomio Hasegawa
長谷川 富雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yamato Scale Co Ltd
Original Assignee
Yamato Scale Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yamato Scale Co Ltd filed Critical Yamato Scale Co Ltd
Priority to JP8480884A priority Critical patent/JPS60227140A/en
Publication of JPS60227140A publication Critical patent/JPS60227140A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00Measuring force or stress, in general
    • G01L1/20Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges

Abstract

PURPOSE:To obtain sufficient dampproofing effect even when a dampproofing insulator layer by adhering a protection layer consisting of the dampproofing insulator layer and a metallic layer on a strain inducing part so that the resistance wire part of a strain gauge is covered double with the protection layer. CONSTITUTION:The strain gauge 14 has the resistance wire part 18 and a lead wire connection part 20 formed by, for example, etching thin metallic foil adhered on a base 16 made of resin. Then, the rectangular protection layer 23 is stuck on the plane part and grid part 18 of the strain inducing part 12 so that the resistance wire part 18 is covered. This load cell has the resistance wire part 18 of the strain gauge 14 covered with the protection layers 23 consisting of two layers, i.e. resin layer 24 and metallic layer 26 that moisture is hard to penetrate, so the penetration of moisture in the atmosphere from the top surface of the resistance wire part 18 is prevented completely and sufficient dampproofing effect is obtained even when the damppoofing insulator layer is thin.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 この発明は、ロードセルに関し、特にその防水構造に関
する。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a load cell, and particularly to its waterproof structure.

〈従来の技術〉 ロードセルでは、これの起歪部に貼着しているストレイ
ンゲージが湿潤すると、ストレインゲージの抵抗線部の
各素線間の沿面の絶縁抵抗値及び起歪部間の絶縁抵抗値
が変化し、ロードセルの零点変化や出力スパン値の変化
等のロードセル性能の劣化を生じる。そのため、従来第
3図に示すように、起歪弾性体1の各起歪部2にそれぞ
れ貼着したストレインゲージ3をシリコンRTV等の防
湿絶縁材4で被ったものがある。
<Prior art> In a load cell, when the strain gauge attached to the strain-generating part of the load cell gets wet, the creeping insulation resistance value between each strand of the resistance wire part of the strain gauge and the insulation resistance between the strain-generating parts decrease. The value changes, causing deterioration of load cell performance such as a change in the zero point of the load cell or a change in the output span value. Therefore, as shown in FIG. 3, there is a conventional strain gauge 3 attached to each strain-generating portion 2 of a strain-generating elastic body 1, which is covered with a moisture-proof insulating material 4 such as silicon RTV.

〈発明が解決しようとする問題点〉 しかし、このようなロードセルでは、防湿絶縁材4は、
ロードセルの定格容量、起歪弾性体1の形状や寸法等の
制限を受けて、余り厚くすることができない。そのため
、液相の水分は成る程度阻止できるが、大気中の気相の
水分が徐々に防湿絶縁材4を浸透し、ロードセルの性能
劣化を生じていた。この発明は、防湿絶縁材が薄くても
大気中の水分が浸透するという問題点を解決しようとす
るものである。
<Problems to be solved by the invention> However, in such a load cell, the moisture-proof insulating material 4 is
Due to limitations such as the rated capacity of the load cell and the shape and dimensions of the strain elastic body 1, it cannot be made too thick. Therefore, although moisture in the liquid phase can be prevented to some extent, moisture in the gas phase in the atmosphere gradually penetrates the moisture-proof insulating material 4, causing deterioration in the performance of the load cell. This invention attempts to solve the problem that moisture in the atmosphere permeates even if the moisture-proof insulating material is thin.

〈問題点を解決するだめの手段〉 この問題点を解決するだめの手段は、起歪部を有する起
歪弾性体と、上記起歪部に貼着したストレインゲージと
、防湿絶縁材層及びこれの」二面に被着した金属層とを
有し上記ストレインゲージの少なくとも抵抗線部に上記
絶縁材層が接するように上記起歪部に接着された保護層
とを備えたものである。
<Means to solve the problem> The only way to solve this problem is to use a strain elastic body having a strain-generating portion, a strain gauge attached to the strain-generating portion, a moisture-proof insulating material layer, and a strain gauge attached to the strain-generating portion. and a protective layer adhered to the strain-generating portion such that the insulating material layer is in contact with at least the resistance wire portion of the strain gauge.

く作 用〉 この手段では、ストレインゲージの少なくとも抵抗線部
は、防湿絶縁材層だけでなく水分が浸透しにくい金属層
でも被われているので、ストレインゲージの上面側から
の大気中の水分の浸透は完全に阻止される。なお、防湿
絶縁材層の周縁から水分が浸透する可能性はあるが、防
湿絶縁材層の厚さは薄く、これに比べて防湿絶縁材層の
周縁からストレインゲージの4Thj/f、#&部寸で
の距離は長いので、周縁から水分が奏゛jも抗謀部まで
浸透する可能性11−1:なく、問題点を解決できる。
With this method, at least the resistance wire portion of the strain gauge is covered not only with a moisture-proof insulating material layer but also with a metal layer that is difficult for moisture to penetrate. Penetration is completely prevented. Although there is a possibility that moisture may penetrate from the periphery of the moisture-proof insulation material layer, the thickness of the moisture-proof insulation material layer is thin, and compared to this, the 4Thj/f, #& part of the strain gauge is Since the distance in terms of dimensions is long, there is no possibility that moisture will penetrate from the periphery to the counterattack part, and the problem can be solved.

〈実 施 例〉 この実施例のロードセ/l/は、第1図及び第2図に示
すように起歪弾性体10を有する。この起歪弾性体10
は、第3図に示した従来のものと同様に4ケ所に起歪部
12を有する。これら起歪部12の平面部にそれぞれス
トレインゲージ14が貼着されている。これらストレイ
ンゲージ14は、樹脂製のベース」6上に被着した薄い
金属箔を例えばエツチングすることによって抵抗線部1
8とリード線接続部20とを形成したものである。これ
らリード線接続部20にはリード線22が接続されてい
る。
<Example> The load cell /l/ of this example has a strain elastic body 10 as shown in FIGS. 1 and 2. This strain elastic body 10
This has strain generating portions 12 at four locations, similar to the conventional one shown in FIG. Strain gauges 14 are attached to the flat surfaces of these strain generating parts 12, respectively. These strain gauges 14 are constructed by, for example, etching a thin metal foil coated on a resin base 6.
8 and a lead wire connection portion 20 are formed. Lead wires 22 are connected to these lead wire connection portions 20 .

この抵抗線部18を被うように矩形の保護層25が起歪
部12の平面部及びグリッド部18に貼着されている。
A rectangular protective layer 25 is attached to the plane part of the strain generating part 12 and the grid part 18 so as to cover the resistance wire part 18 .

この保護層23は、樹脂層24とこの樹脂層24の上面
に被着された薄い金属層26からなり、樹脂層24が抵
抗線部18に接している。樹脂層24は、例えば厚さが
20乃至3011m 程度であり、金属層26は厚さが
2乃至3μm程度のもので、ストレインゲージの抵抗線
部」8を上側から完全に被っている。樹脂層24及び金
属層26としては、例えばエツチングする以前のストレ
インゲージの原版を用いる。これは、樹脂層24、金属
層26が一体で形成されており、かつ二層全体の厚さが
微小であるため、好都合である。また、ストレインゲー
ジ14のリード線接続部20及びその周囲には、 シリコンRTV等の防湿絶縁樹脂層28が被着されてい
る。
The protective layer 23 is composed of a resin layer 24 and a thin metal layer 26 deposited on the upper surface of the resin layer 24, and the resin layer 24 is in contact with the resistance wire portion 18. The resin layer 24 has a thickness of, for example, about 20 to 3011 m, and the metal layer 26 has a thickness of about 2 to 3 μm, and completely covers the resistance wire portion 8 of the strain gauge from above. As the resin layer 24 and the metal layer 26, for example, a strain gauge original plate before etching is used. This is advantageous because the resin layer 24 and the metal layer 26 are integrally formed and the total thickness of the two layers is minute. Further, a moisture-proof insulating resin layer 28 such as silicon RTV is applied to the lead wire connection portion 20 of the strain gauge 14 and its surroundings.

このようなロードセルでは、ストレインゲージ14の抵
抗線部18は、樹脂層24及び水分が侵透しにくい金属
層26の二層からなる保護層23によって被われている
ので、突゛ネfJL&1部18の上面からの大気中の水
分の浸透は完全に防止できる。また、樹脂層24の厚さ
は20乃至30μm であるのに対し、樹脂層24の周
縁部から抵抗線部18までの距離は数#Imで、厚さに
比べて充分に長いので、周縁部から大気中たのは、リー
ド線接続部20.20間の沿面距離も比較的大きく、こ
の部分の絶縁抵抗値が多少低くなってもロードセルの性
能に余シ影響を与えないからである。
In such a load cell, the resistance wire portion 18 of the strain gauge 14 is covered with a protective layer 23 consisting of two layers: a resin layer 24 and a metal layer 26 that is difficult for moisture to penetrate. Penetration of atmospheric moisture from the top surface of the can be completely prevented. Further, while the thickness of the resin layer 24 is 20 to 30 μm, the distance from the peripheral edge of the resin layer 24 to the resistance wire portion 18 is several #Im, which is sufficiently long compared to the thickness. The reason for this is that the creepage distance between the lead wire connection portions 20 and 20 is relatively large, and even if the insulation resistance value of this portion is somewhat lowered, it will not have any significant effect on the performance of the load cell.

上記の実施例では、抵抗線部18のみを樹脂層24及び
金属層26で被ったが、抵抗線部18及びリード線接続
部20双方を樹脂層24及び金属層26からなる二層の
保護層23によって被ってもよい。また、ストレインゲ
ージ14を既に樹脂層で被った形式のものでは、その樹
脂層上に金属層を被着してもよい3゜寸だ、エツチング
する以前のストレインゲージの原版を樹脂層24及び金
属層26として使用したが、樹脂層に金属層をスパッタ
リングや真空蒸着法によって被着させものを用いてもよ
い。また、金属層の上にさらに樹脂層をもう一層設けて
もよい。
In the above embodiment, only the resistance wire section 18 was covered with the resin layer 24 and the metal layer 26, but both the resistance wire section 18 and the lead wire connection section 20 were covered with a two-layer protective layer consisting of the resin layer 24 and the metal layer 26. It may be covered by 23. In addition, if the strain gauge 14 is already covered with a resin layer, a metal layer may be applied on top of the resin layer. Although the layer 26 is used as the layer 26, a metal layer may be deposited on the resin layer by sputtering or vacuum evaporation. Furthermore, another resin layer may be provided on the metal layer.

さらに、防湿性をよシ高める場合には、上述した実施例
において、起歪部の周囲をベローズで被い、その中に不
活性ガスを封入してもよい。
Furthermore, in order to further improve the moisture resistance, in the above-described embodiment, the strain-generating portion may be surrounded by a bellows, and an inert gas may be filled in the bellows.

〈効 果〉 この発明によれば、防湿絶縁材層(実施例では樹脂層2
4)と金属層とからなる保護層でストレインゲージの抵
抗線部を二重に被うように保護層を起歪部に接着してい
るので、防湿絶縁材層が薄くても充分な防湿効果が得ら
れる。ところで、充分な防湿効果を得るだけなら、スト
レインゲージの周囲を金属層で被い、その中に不活性ガ
ヌを封入するだけでもよい。しかし、これでは製造が面
倒であるばかシでなく、価格が高くなる。これに対し、
この発明では、防湿絶縁材層の」二に金属層を被着した
保護層を接着するだけでよく、製造が容易であるばかり
でなく、価格も安価にできる。また、特に、エツチング
する以前のストレインゲージの原版や樹脂層の上にスパ
ッタリングや真空蒸着法で金属層を被着したもの、すな
わち金属層と樹脂層とを一体に形成したものを用いてい
るので、金属層を薄くできるので、金属層の剛性によっ
てロードセルに生じる負荷特性への影響を微少にするこ
とができる。
<Effects> According to the present invention, the moisture-proof insulating material layer (in the embodiment, the resin layer 2
4) A protective layer consisting of a metal layer and a metal layer is bonded to the strain generating part so as to double cover the resistance wire part of the strain gauge, so even if the moisture-proof insulating material layer is thin, there is sufficient moisture-proofing effect. is obtained. By the way, if only a sufficient moisture-proofing effect is to be obtained, it is sufficient to simply cover the strain gauge with a metal layer and enclose an inert GANU therein. However, this is not foolproof as it is troublesome to manufacture, and the price is high. In contrast,
In this invention, it is only necessary to adhere the protective layer, which is a metal layer, to the second layer of the moisture-proof insulating material layer, which is not only easy to manufacture but also inexpensive. In addition, in particular, we use a material in which a metal layer is deposited by sputtering or vacuum evaporation on the strain gauge original or resin layer before etching, that is, a material in which the metal layer and the resin layer are integrally formed. Since the metal layer can be made thinner, the influence of the rigidity of the metal layer on the load characteristics of the load cell can be minimized.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発朝によるロードセルの1実施例の部分省
略側面図、第2図は同実施例の部分省略平面図、第3図
は従来のロードセ/しの側面図である。 10・・・起歪弾性体、12・・・起歪部、14・・・
ストレインゲージ、18・・・グリッド部、24・・・
防湿絶縁材層、26・・・金属層。 特許出願人 大和製衡株式会社 代 理 人 清 水 哲 ほか′2名 オフ図
FIG. 1 is a partially omitted side view of one embodiment of the load cell manufactured by this company, FIG. 2 is a partially omitted plan view of the same embodiment, and FIG. 3 is a side view of a conventional load cell. 10... Strain elastic body, 12... Strain part, 14...
Strain gauge, 18... Grid section, 24...
Moisture-proof insulation material layer, 26...metal layer. Patent applicant Yamato Seiko Co., Ltd. Representative Tetsu Shimizu and 2 others Off-line drawing

Claims (1)

【特許請求の範囲】[Claims] (1)起歪部を有する起歪弾性体と、上記起歪部に貼着
したストレインゲージと、防湿絶縁材層及びこの上面に
被着した金属層とを有し上記ストレインゲージの少な、
くとも抵抗線部に上記防湿絶縁相層が接するように上記
起歪部に接着した保護層とを備えるロードセル。
(1) A strain gauge having a strain elastic body having a strain-generating portion, a strain gauge attached to the strain-generating portion, a moisture-proof insulating material layer, and a metal layer adhered to the upper surface of the strain gauge;
A load cell further comprising: a protective layer adhered to the strain-generating portion such that the moisture-proof insulating phase layer is in contact with the resistance wire portion.
JP8480884A 1984-04-25 1984-04-25 Load cell Pending JPS60227140A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8480884A JPS60227140A (en) 1984-04-25 1984-04-25 Load cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8480884A JPS60227140A (en) 1984-04-25 1984-04-25 Load cell

Publications (1)

Publication Number Publication Date
JPS60227140A true JPS60227140A (en) 1985-11-12

Family

ID=13841016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8480884A Pending JPS60227140A (en) 1984-04-25 1984-04-25 Load cell

Country Status (1)

Country Link
JP (1) JPS60227140A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1560011A1 (en) * 2004-01-27 2005-08-03 Mettler-Toledo GmbH Strain gauge with moisture protection by an inhomogeneous inorganic layer upon a smoothing polymer layer (ORMOCER) and an arrangement of slits
JP2009175148A (en) * 2008-01-25 2009-08-06 Linde Material Handling Gmbh Fork lift truck equipped with force measuring apparatus
JP2012063307A (en) * 2010-09-17 2012-03-29 Yamato Scale Co Ltd Load cell
US8153913B2 (en) * 2008-05-15 2012-04-10 Mettler-Toledo Ag Encapsulated weighing cell with eccentric load error adjustment
CN102788068A (en) * 2011-05-18 2012-11-21 厦门市宏业工程建设技术有限公司 Sticking method of strain gauge
EP4006480A1 (en) * 2020-11-30 2022-06-01 ISHIDA CO., Ltd. Strain gauge and method for manufacturing strain gauge
EP4083456A4 (en) * 2019-12-23 2024-03-27 Ntn Toyo Bearing Co Ltd Bearing device, spindle device, bearing and spacer

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1560011A1 (en) * 2004-01-27 2005-08-03 Mettler-Toledo GmbH Strain gauge with moisture protection by an inhomogeneous inorganic layer upon a smoothing polymer layer (ORMOCER) and an arrangement of slits
US7215870B2 (en) 2004-01-27 2007-05-08 Mettler-Toledo Ag Moisture protection for an electromechanical transducer
JP2009175148A (en) * 2008-01-25 2009-08-06 Linde Material Handling Gmbh Fork lift truck equipped with force measuring apparatus
US8153913B2 (en) * 2008-05-15 2012-04-10 Mettler-Toledo Ag Encapsulated weighing cell with eccentric load error adjustment
JP2012063307A (en) * 2010-09-17 2012-03-29 Yamato Scale Co Ltd Load cell
CN102788068A (en) * 2011-05-18 2012-11-21 厦门市宏业工程建设技术有限公司 Sticking method of strain gauge
EP4083456A4 (en) * 2019-12-23 2024-03-27 Ntn Toyo Bearing Co Ltd Bearing device, spindle device, bearing and spacer
EP4006480A1 (en) * 2020-11-30 2022-06-01 ISHIDA CO., Ltd. Strain gauge and method for manufacturing strain gauge
US20220170803A1 (en) * 2020-11-30 2022-06-02 Ishida Co., Ltd. Strain gauge and method for manufacturing strain gauge
CN114577107A (en) * 2020-11-30 2022-06-03 株式会社石田 Strain gauge and method for manufacturing strain gauge
US11815413B2 (en) 2020-11-30 2023-11-14 Ishida Co., Ltd. Insulated strain gauge that reduces error-causing moisture incursion

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