JPS60222572A - クライオポンプ - Google Patents

クライオポンプ

Info

Publication number
JPS60222572A
JPS60222572A JP7789784A JP7789784A JPS60222572A JP S60222572 A JPS60222572 A JP S60222572A JP 7789784 A JP7789784 A JP 7789784A JP 7789784 A JP7789784 A JP 7789784A JP S60222572 A JPS60222572 A JP S60222572A
Authority
JP
Japan
Prior art keywords
cryopanel
cryopump
opening
gas
exhaust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7789784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0261629B2 (en, 2012
Inventor
Katsunao Morimoto
森本　勝直
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp, Anelva Corp filed Critical Canon Anelva Corp
Priority to JP7789784A priority Critical patent/JPS60222572A/ja
Publication of JPS60222572A publication Critical patent/JPS60222572A/ja
Publication of JPH0261629B2 publication Critical patent/JPH0261629B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP7789784A 1984-04-18 1984-04-18 クライオポンプ Granted JPS60222572A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7789784A JPS60222572A (ja) 1984-04-18 1984-04-18 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7789784A JPS60222572A (ja) 1984-04-18 1984-04-18 クライオポンプ

Publications (2)

Publication Number Publication Date
JPS60222572A true JPS60222572A (ja) 1985-11-07
JPH0261629B2 JPH0261629B2 (en, 2012) 1990-12-20

Family

ID=13646864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7789784A Granted JPS60222572A (ja) 1984-04-18 1984-04-18 クライオポンプ

Country Status (1)

Country Link
JP (1) JPS60222572A (en, 2012)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04103885A (ja) * 1990-08-24 1992-04-06 Daikin Ind Ltd クライオポンプにおけるクライオパネル
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
EP0693626A1 (en) * 1994-07-20 1996-01-24 Applied Materials, Inc. Vacuum chamber for ultra high vacuum processing at high temperatures
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US5997255A (en) * 1994-10-31 1999-12-07 Saes Getters S.P.A. Method for pumping a chamber using an in situ getter pump
US6077404A (en) * 1998-02-17 2000-06-20 Applied Material, Inc. Reflow chamber and process
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US6361618B1 (en) 1994-07-20 2002-03-26 Applied Materials, Inc. Methods and apparatus for forming and maintaining high vacuum environments
WO2005050018A1 (ja) * 2003-11-20 2005-06-02 Sumitomo Heavy Industries, Ltd. クライオポンプ
WO2008003724A3 (de) * 2006-07-05 2008-02-28 Ardenne Anlagentech Gmbh Getterpumpe und vakuumbeschichtungsanlage mit einer getterpumpe
GB2596832A (en) * 2020-07-08 2022-01-12 Edwards Vacuum Llc Cryopump
US12140130B2 (en) 2020-07-08 2024-11-12 Edwards Vacuum Llc Cryopanel structure for a cryopump

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178982A (ja) * 1984-02-27 1985-09-12 Toshiba Corp クライオポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60178982A (ja) * 1984-02-27 1985-09-12 Toshiba Corp クライオポンプ

Cited By (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04103885A (ja) * 1990-08-24 1992-04-06 Daikin Ind Ltd クライオポンプにおけるクライオパネル
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
EP0693626A1 (en) * 1994-07-20 1996-01-24 Applied Materials, Inc. Vacuum chamber for ultra high vacuum processing at high temperatures
US6361618B1 (en) 1994-07-20 2002-03-26 Applied Materials, Inc. Methods and apparatus for forming and maintaining high vacuum environments
US6109880A (en) * 1994-10-31 2000-08-29 Saes Pure Gas, Inc. Getter pump module and system including focus shields
US5911560A (en) * 1994-10-31 1999-06-15 Saes Pure Gas, Inc. Getter pump module and system
US5993165A (en) * 1994-10-31 1999-11-30 Saes Pure Gas, Inc. In Situ getter pump system and method
US5997255A (en) * 1994-10-31 1999-12-07 Saes Getters S.P.A. Method for pumping a chamber using an in situ getter pump
US6043137A (en) * 1994-10-31 2000-03-28 Saes Getters S.P.A. Getter pump module and system
US5685963A (en) * 1994-10-31 1997-11-11 Saes Pure Gas, Inc. In situ getter pump system and method
US5879134A (en) * 1994-10-31 1999-03-09 Saes Pure Gas, Inc. In situ getter pump system and method
US6142742A (en) * 1994-10-31 2000-11-07 Saes Pure Gas, Inc. Getter pump module and system
US6165328A (en) * 1994-10-31 2000-12-26 Saes Getters S.P.A. Method for processing wafers with in situ gettering
US6299689B1 (en) 1998-02-17 2001-10-09 Applied Materials, Inc. Reflow chamber and process
US6077404A (en) * 1998-02-17 2000-06-20 Applied Material, Inc. Reflow chamber and process
WO2005050018A1 (ja) * 2003-11-20 2005-06-02 Sumitomo Heavy Industries, Ltd. クライオポンプ
US7523618B2 (en) 2003-11-20 2009-04-28 Sumitomo Heavy Industries, Ltd. Cryo pump
WO2008003724A3 (de) * 2006-07-05 2008-02-28 Ardenne Anlagentech Gmbh Getterpumpe und vakuumbeschichtungsanlage mit einer getterpumpe
US8197222B2 (en) 2006-07-05 2012-06-12 Von Ardenne Anlagentechnik Gmbh Getter pump and vacuum coating installation comprising a getter pump
GB2596832A (en) * 2020-07-08 2022-01-12 Edwards Vacuum Llc Cryopump
US12049882B2 (en) 2020-07-08 2024-07-30 Edwards Vacuum Llc Cryopanel structure for a cryopump
US12140130B2 (en) 2020-07-08 2024-11-12 Edwards Vacuum Llc Cryopanel structure for a cryopump

Also Published As

Publication number Publication date
JPH0261629B2 (en, 2012) 1990-12-20

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees