JPS60216988A - High-output laser beam machining device - Google Patents

Abstract

PURPOSE:To improve positioning accuracy and to shorten set time by focusing laser light for machining which is non-visible light and laser light which is visible light to the same spot so that the focus position of the laser light for machining on a work can be checked. CONSTITUTION:The annular laser beam 6b oscillated from an unstable resonance type laser device is folded and reflected by a plane mirror 13 opened with a hole. The reflected light 6c which is the non-visible light passes through a condenser lens 15 and is thereby made into the condensed beam 6d which is irradiated on the material 16 to be worked. The material 16 is thus machined by leser beam. On the other hand, the laser light 17a oscillated from a visible light laser oscillator 10 fixed by a support 11 passes through the hole part 13b of said mirror 13 and passes through the lens 15, by which the laser light is made into the condensed beam 17b. The condensed beam is irradiated on the material 16 at the focus coinciding with the above-described beam 6d which is the non-visible light.

Description

[Detailed Description of the Invention] [Field of Application of the Invention] The present invention relates to a laser processing device equipped with an unstable resonator, and particularly to a laser processing device suitable for monitoring the optical axis of a laser beam and positioning a workpiece. Regarding.

[Background of the invention]

In recent years, a laser oscillation device having an unstable resonator has been developed as a device capable of generating a high-output laser beam with relatively good focusability.

In a conventional laser oscillator with a stable valve oscillator, the laser beam light is 14!2. It was released,
It is used for processing, etc., but in the case of an unstable resonator, the laser beam becomes a ring-shaped beam.

This point is the major difference between stable valve resonators and unstable resonators. With conventional stabilized oscillator mirrors and condensing mirrors, the use of apertured mirrors was not possible due to the solid nature of the laser beam.

In addition, when monitoring the optical axis of a non-visible laser beam such as a CO2 laser beam, in order to check the beam position and focal position on the workpiece, the optical axis of the CO2 laser beam must be cut off. When the HeNe laser beam, which is visible light, is arranged so as to coincide with the optical axis of the CO2 laser beam, a problem arises in that a beam splitter must be arranged.

[Purpose of the invention]

An object of the present invention is to provide a high-power laser processing device that can confirm the beam position and focal position of a processing laser beam on a workpiece surface without interrupting the processing laser beam path, which is invisible light. It is on offer.

[Summary of the invention]

Since the laser beam oscillated from the unstable resonator laser device is a ring-shaped laser beam, the folding mirror and the condensing mirror can be perforated mirrors. The key point of the present invention is to make use of the hole to allow visible light to enter coaxially with the ring-shaped laser beam from the back side of the folding mirror and the condensing mirror.

[Implementation sequence of the invention]

FIG. 1 schematically shows a laser device with an unstable resonator. In the figure, 4 is an unstable resonator convex mirror, and in front of this convex mirror 4, an unstable resonator convex mirror 5 for taking out the laser beam and an irregular resonator concave mirror 3 for reflecting the laser beam are arranged. , each attached to two outer walls of the resonator. Laser light 6 is amplified in the excited laser medium 1 (CO2 laser, C'021N21 He, etc.) between the convex mirror 4 and the concave mirror 3 through the hole 7 of the coupling*5, and the mirror surface of the coupling mirror 5 is amplified. The laser beam incident on 8 is
The beam becomes a ring-shaped beam 6a, passes through an output extractor 9 attached to the outer wall 2B, and is outputted to the outside as a ring-shaped beam 6b. A complete diagram of the shape of the ring-shaped laser beam at that time is shown in FIG.

An embodiment of the present invention in which a ring-shaped laser beam is used for laser processing will be described with reference to FIG.

The ring-shaped laser beam 6b is attached to the support 11 by the stopper 12.
Therefore, the reflected light 6C enters the reflecting surface 13a of the fixed perforated plane mirror 13, passes through the condensing lens 15 fixed to the condensing lens holder 14, becomes a condensed beam 6d, and hits the workpiece 16. The laser beam irradiates the workpiece 16 and performs laser processing such as cutting and welding. The support 11 is equipped with visible light H.
The eN e laser oscillator 10 is fixed and arranged so that its optical axis is coaxial with the ring-shaped laser beam 6C that is reflected back by the apertured plane mirror 13.
H e N e laser beam 1 emitted from the e laser oscillator 10
7a, it passes through the hole 13b of the perforated plane mirror 13, passes through the condensing lens, becomes a condensed beam 17b, and emits the workpiece 1.
6 is irradiated.

In this configuration, a lens for condensing the processing laser beam 6c and a He
Since the lens for condensing the Ne laser beam 17a can be shared by one condensing lens 15, it is possible to use an inexpensive method when the divergence angle of the processing laser beam 6d and the laser beam of the HeNe laser oscillator 10 is large. For this purpose, a collimator that can arbitrarily change the beam diameter and divergence angle is installed in HeNe.
By equipping the laser 10, it becomes possible to confirm the focal position with even higher accuracy. In this implementation column, we will explain the case where the present invention is applied to laser processing using a condensing lens. The present invention can also be applied to a structure using a condensing concave mirror or a condensing discharge mirror, and an example thereof is shown in FIG. The ring-shaped laser beam 6b is attached to the fixture 2 by the support 18.
The light enters the concave concave mirror 21 with a hole for focusing, which is attached by the lens 2, is focused on the reflecting surface 21a, and is irradiated onto the workpiece 16 as a focused beam 6d. On the other hand, a H
The H e Ne laser beam 17a emitted from the eNe laser beam oscillator 10 is passed through a HeNe laser beam condensing lens that is placed in the support 18 by a fixing fitting 20 so that the focal position is the same as that of the condensed beam 6d. 19 through hole 2
1b through the focused beam 17bJ-4:t, 2f)
``1 r l-Iff F h +n FE <h Special J t-4 and the HeNe focused beam 17b are focused at the same point.

In this configuration, the HeNeL'-the generator 10, the HeNe
Since the V-za focusing lens 19 and the apertured concave mirror 21 for processing laser focusing are integrally fixed to the support 18, the focal positions of the processing focused beam 6d and the HeNe focused beam 17b are always at the same point. can do.

〔Effect of the invention〕

According to the present invention, processing laser light, which is invisible light,
Since the focal position of the HeNe laser light, which is visible light, can be set to the same point, it is possible to check the beam position and focal position of the processing laser light on the workpiece using the HeNe laser light. The accuracy of positioning the object is high, and the setting time for the workpiece can be shortened.

[Brief explanation of drawings]

Figure 1 is a schematic diagram of a laser oscillator with an unstable resonator.
Fig. 2 is a diagram showing the shape of a ring-shaped laser beam oscillated by an unstable resonator, Fig. 3 is a longitudinal cross-sectional view of an embodiment of the present invention, and Fig. 4 is a longitudinal cross-sectional view of an application example of the present invention. be. 6b...link-shaped laser beam, 1o...HeNe
Laser light, 13... Folded hole-opening plane mirror, 19...
- HeNe laser condensing lens, 21... concave mirror with a hole for condensing light. Agent Patent Attorney Akio Takahashi Figure 1 Prefecture Figure 2, Figure 3, Figure 4

Claims (1)

[Claims] 1. In a laser processing device equipped with an apertured mirror that folds back a ring-shaped laser beam taken out from a laser processing device equipped with an unstable resonator, the folding A high-output laser processing apparatus characterized by comprising a visible laser beam generating device that is incident on the same optical axis as the optical axis of the ring-shaped laser beam reflected by the perforated mirror. 2. A high-output laser according to claim 1, wherein the folded folded aperture v# is the folded folded mirror for condensing the ring-shaped laser beam. Processing equipment. 3. In claim 2, a lens for condensing visible laser light is provided between the ring-shaped laser beam and the visible laser light generator disposed so as to pass on the same optical axis. High-power laser processing equipment characterized by: A high-power laser processing apparatus characterized by comprising a collimator that can arbitrarily change the divergence and convergence angle of the visible laser beam, as well as the diameter and diameter of the visible laser beam.