JPS60216428A - Manufacture of gas sealed electron tube - Google Patents
Manufacture of gas sealed electron tubeInfo
- Publication number
- JPS60216428A JPS60216428A JP59074276A JP7427684A JPS60216428A JP S60216428 A JPS60216428 A JP S60216428A JP 59074276 A JP59074276 A JP 59074276A JP 7427684 A JP7427684 A JP 7427684A JP S60216428 A JPS60216428 A JP S60216428A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- electron tube
- valve
- predetermined
- tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/38—Exhausting, degassing, filling, or cleaning vessels
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Measurement Of Radiation (AREA)
- Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
この発明け、ガス封入型電子管の製造方法、例えば中性
子検出器のガス封入に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a method of manufacturing a gas-filled electron tube, for example, gas filling of a neutron detector.
従来のガス封入型電子管の製造方法、即ち排気。 Conventional method for manufacturing gas-filled electron tubes, namely evacuation.
ガス封入の工程を図面を用いて説明する。図Ｖｃおいて
、ｆｉｌは真空排気装置、（２）はガス充てん装置、（
３）は排気及びガス充てんの行なわれる電子管、（４）
はこれらを結合する配管、（５ａ）＋ （５１））、
（５ｃ） ｉｊそれぞｈ排気装置と配管との間、ガス充
てん装置と配管との間、ガス充てん装置と配管との間お
よび電子管と配管との間に設けられたパルプである。The gas filling process will be explained using drawings. In Figure Vc, fil is a vacuum evacuation device, (2) is a gas filling device, (
3) is an electron tube that is evacuated and filled with gas; (4)
is the piping that connects these, (5a) + (51)),
(5c) ij are the pulps provided between the exhaust device and the piping, between the gas filling device and the piping, between the gas filling device and the piping, and between the electron tube and the piping.
次にガス封入型電子管の排気及びガス充てんの手順は、
先ず、排気・ガス封入を行なおうとする電子管を図のよ
うに、この装置にとりつけ、パルプ（５ａ） （５Ｃ）
は開にし、パルプ（５ｂ）け閉にして一真空排気装置全
作動させると、電子管の内部は排気される。続いて、パ
ルプ（５ａ）を閉にした後、パルプ（５ｂ） １ｒ−開
にしガス充てん装置から電子管に所定のガスを所定圧力
だけ尋人し電子管とパルプ（５ｃ）との配電部を封止し
、電子管を切り離せば排気・ガス充てんの工程は完了す
る。Next, the procedure for evacuation and gas filling of a gas-filled electron tube is as follows.
First, as shown in the figure, attach the electron tube that is to be evacuated and filled with gas to this device, and extract the pulp (5a) (5C).
When the valve (5b) is opened, the pulp (5b) is closed, and the vacuum evacuation device is fully activated, the inside of the electron tube is evacuated. Subsequently, after closing the pulp (5a), the pulp (5b) 1r is opened and a predetermined gas is supplied from the gas filling device to the electron tube at a predetermined pressure to seal the power distribution part between the electron tube and the pulp (5c). However, once the electron tube is separated, the exhaust and gas filling process is completed.
ところが、真空排気装置の排気能力ＶＣは限度があるの
で電子管の到達真空度には限界がある。即ち、いくら長
時間真空排気装置を作動させても電子管の中にはガスが
残留し、これば所定のガスを封入したとき不純物ガスと
なり、電子管の動作に対して好ましくない作用をするこ
とが多い。However, since the evacuation capacity VC of the evacuation device is limited, there is a limit to the degree of vacuum that the electron tube can reach. In other words, no matter how long the vacuum evacuation device is operated, gas remains inside the electron tube, and this gas becomes an impurity gas when the specified gas is filled in, often having an undesirable effect on the operation of the electron tube. .
従来のガス封入型電子管の排気及びガス封入は以Ｅのよ
うな手順で行なわれているので、不純物ガスの残留は避
けられず、これが成子管の特性に悪影響を及ぼすことが
多かった。逆に悪影響を及ぼさない程度に十分残留ガス
の量を少なくするためには、排気能力の優れた画側な排
気装置を使わざるを得ないという欠点があった。Since conventional gas-filled electron tubes are evacuated and gas-filled according to the following procedure, it is inevitable that impurity gases remain, which often has an adverse effect on the characteristics of the adult tube. On the other hand, in order to reduce the amount of residual gas to a level that does not cause any adverse effects, it is necessary to use an exhaust system with excellent exhaust capacity.
この発明け、上記のような従来の製法の欠点を除去する
ためになされたもので、電子管内部を排気した後、その
螺子管内部に所定ガス又は所定ガスに組成の似たガスを
導入し排気する導入排気作業を１回以上行ない、その後
上記電子管内部に上記所定ガスを所定圧力導入後封止す
ることにより、排気能力の特に優れた排気装置を用いず
とも、不純物ガスの残留の少ない、そしてその為に不純
物ガスによる悪影響の少ないガス封入型電子管の製造方
法を提供することを目的としている。This invention was made to eliminate the drawbacks of the conventional manufacturing method as described above. After the inside of the electron tube is evacuated, a predetermined gas or a gas having a composition similar to the predetermined gas is introduced into the screw tube and then evacuated. By carrying out the introduction/evacuation operation at least once, and then sealing the predetermined gas at a predetermined pressure inside the electron tube, it is possible to reduce the residual amount of impurity gas without using an evacuation device with particularly excellent evacuation ability. Therefore, it is an object of the present invention to provide a method for manufacturing a gas-filled electron tube with less adverse effects caused by impurity gases.
この発明の一実施例を図面を用いて説明するうこの実施
例Ｖｃおいて使用する装置の構成は従来と同じでよい。An embodiment of the present invention will be described with reference to the drawings.The configuration of the device used in this embodiment Vc may be the same as the conventional one.
先ず、パルプ（５′ｂ）は閉、（５ａ） （５ｃ）は開
にして′電子管の排気を行なう。続いてパルプ（５ａ）
’を閉にした後、パルプ（５１）） ｋ開にし、ガス充
てん装置から所定ガスＷ＝子菅Ｖｃ４人する。その後、
パルプ（５ｂ）は閉にし、パルプ（５ａ） （５０）
’に再び開にして、排気装置で１子管の排気を行なう。First, the pulp (5'b) is closed and (5a) and (5c) are opened to exhaust the electron tube. Next, pulp (5a)
After closing the pulp (51)), open the pulp (51), and fill the gas filling device with the specified gas W = 4 small pipes Vc. after that,
Pulp (5b) is closed, pulp (5a) (50)
', then open again and evacuate one tube with the exhaust system.
その後、パルプ（５ａ） ｋ閉にし、パルプ（５ｂ）
ｋ開にして所定ガスを所定圧力だけ電子管ＶＣ導入し、
電子管とパルプ（５Ｃ）との配管部を封止して成子管を
切り離す。After that, close the pulp (5a) and pulp (5b)
K is opened and a predetermined gas is introduced into the electron tube VC at a predetermined pressure,
The piping between the electron tube and the pulp (5C) is sealed and the adult tube is separated.
以上のようにしてガス封入型電子管を製造すると、最初
、所定ガスを導入したときの残留ガスは、所定ガスと混
ざり、その分圧は非常に小さく容易Ｋ ＩＣｒ’〜１０
−６とできる。さらに、これを排気すると残留ガスと所
定ガスは混ざり合って排気されるので、このときの電子
管の残留ガスは所定ガスが主成分のものとなる。従って
残留ガス圧がある程度毘くとも、不純物ガスの量は最初
の残留ガス中に含まねていたものに比べ非常に小さくな
り、最終的に所定ガスを所定圧力封入した時点での不純
物ガスの置は非常に少なく、電子管の動作等に悪影響を
及ぼすことが非常に少なくなる。When a gas-filled electron tube is manufactured as described above, the residual gas when the specified gas is first introduced mixes with the specified gas, and its partial pressure is very small and easily K ICr' ~ 10
-6 can be done. Furthermore, when this is exhausted, the residual gas and the predetermined gas are mixed and exhausted, so that the residual gas in the electron tube at this time is mainly composed of the predetermined gas. Therefore, even if the residual gas pressure remains to some extent, the amount of impurity gas will be very small compared to what was not included in the initial residual gas, and the impurity gas will be is very small, and there is very little negative effect on the operation of the electron tube.
以上の例では、最終的に成子管内部に所定ガスを導入す
る＠に、１回所定ガスを尋人、排気したが、ガスの種類
は所定ガスが混合ガスの場合これと同一でなくとも組成
がほぼ同じであれば艮い。In the above example, the predetermined gas was exhausted once before finally introducing it into the inner tube, but if the predetermined gas is a mixed gas, the composition may not be the same. It's okay if they are almost the same.
また、ガスの導入、排気の回数全２回以上にしても良い
。Further, the total number of gas introduction and exhaust operations may be two or more times.
以上のようにこの発明によれば、電子管内部を排気した
後、その電子管内部に所定ガス又は所定ガスに組成の似
たガスを導入し排気する導入排気作業を１回以上行ない
、その後り配電子管内部に上記所定ガスを所定圧力導入
後封止するようにしてガス封入型電子管を製造するよう
にしたので、特に能力の優れた排気装置を使用しなくと
も、不純物ガスとして電子管に残留するガスの量を少な
くすることができ、不純物ガスによる悪影響の少ないガ
ス封入型電子管を得ら名るという効果がある。As described above, according to the present invention, after the inside of the electron tube is evacuated, the introduction and exhaust operation of introducing and exhausting a predetermined gas or a gas similar in composition to the predetermined gas into the electron tube is performed one or more times, and then the electron tube Since the gas-filled electron tube is manufactured by introducing the specified gas into the interior at a specified pressure and then sealing it, the gas remaining in the electron tube as an impurity gas can be removed without using a particularly efficient exhaust device. This has the effect of making it possible to reduce the amount of impurity gas and to obtain a gas-filled electron tube with less adverse effects from impurity gases.
図面は、一般的なガス封入型電子管の排気・ガス充てん
方法を示すブロック図である。
（１）・・・排気装置、（２）・・・ガス充てん装置、
（３）・・・′電子管、＋４１．、、配管、（５ａ）、
（５ｂ）、 （５ｃ） −・・パルプ代理人 大岩増
雄The drawing is a block diagram showing a general method for evacuation and gas filling of a gas-filled electron tube. (1)...Exhaust device, (2)...Gas filling device,
(3)...'electron tube, +41. ,, Piping, (5a),
(5b), (5c) ---Pulp agent Masuo Oiwa
Claims (1)
は所定ガスに組成の似たガスを導入し排気する導入排気
作業を１回以上行ない、その後り配電子管内部に上記所
定ガスを所定圧力導入後封止するガス封入型′電子管の
製造方法。After evacuating the inside of the electron tube, an introduction/exhaust operation of introducing and exhausting a predetermined gas or a gas having a composition similar to the predetermined gas into the electron tube is performed at least once, and then after introducing the predetermined gas into the electron tube at a predetermined pressure. A method for manufacturing a sealed gas-filled electron tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59074276A JPS60216428A (en) | 1984-04-11 | 1984-04-11 | Manufacture of gas sealed electron tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59074276A JPS60216428A (en) | 1984-04-11 | 1984-04-11 | Manufacture of gas sealed electron tube |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60216428A true JPS60216428A (en) | 1985-10-29 |
Family
ID=13542424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59074276A Pending JPS60216428A (en) | 1984-04-11 | 1984-04-11 | Manufacture of gas sealed electron tube |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60216428A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2719943A1 (en) * | 1994-05-10 | 1995-11-17 | Futaba Denshi Kogyo Kk | Method of manufacturing a display device. |
-
1984
- 1984-04-11 JP JP59074276A patent/JPS60216428A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2719943A1 (en) * | 1994-05-10 | 1995-11-17 | Futaba Denshi Kogyo Kk | Method of manufacturing a display device. |
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