JPS60216225A - 薄膜よりなる液面計の検出部 - Google Patents
薄膜よりなる液面計の検出部Info
- Publication number
- JPS60216225A JPS60216225A JP7439084A JP7439084A JPS60216225A JP S60216225 A JPS60216225 A JP S60216225A JP 7439084 A JP7439084 A JP 7439084A JP 7439084 A JP7439084 A JP 7439084A JP S60216225 A JPS60216225 A JP S60216225A
- Authority
- JP
- Japan
- Prior art keywords
- resistance element
- thin film
- liquid level
- electric resistance
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 239000011521 glass Substances 0.000 claims abstract description 7
- 229910000808 amorphous metal alloy Inorganic materials 0.000 claims abstract description 6
- 238000004544 sputter deposition Methods 0.000 claims abstract description 3
- 239000007788 liquid Substances 0.000 claims description 34
- 229910052734 helium Inorganic materials 0.000 claims description 20
- 239000001307 helium Substances 0.000 claims description 20
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 20
- 238000001514 detection method Methods 0.000 claims description 15
- 239000000919 ceramic Substances 0.000 claims description 4
- 229910001281 superconducting alloy Inorganic materials 0.000 claims description 3
- 238000005516 engineering process Methods 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims description 2
- 230000007704 transition Effects 0.000 abstract description 12
- 229910052703 rhodium Inorganic materials 0.000 abstract description 4
- 229910052726 zirconium Inorganic materials 0.000 abstract description 3
- 229910045601 alloy Inorganic materials 0.000 abstract 1
- 239000000956 alloy Substances 0.000 abstract 1
- 238000010276 construction Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 16
- 239000010955 niobium Substances 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 239000010948 rhodium Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052758 niobium Inorganic materials 0.000 description 3
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical group [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000001815 facial effect Effects 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
- G01F23/22—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water
- G01F23/24—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm by measuring physical variables, other than linear dimensions, pressure or weight, dependent on the level to be measured, e.g. by difference of heat transfer of steam or water by measuring variations of resistance of resistors due to contact with conductor fluid
Landscapes
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7439084A JPS60216225A (ja) | 1984-04-12 | 1984-04-12 | 薄膜よりなる液面計の検出部 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7439084A JPS60216225A (ja) | 1984-04-12 | 1984-04-12 | 薄膜よりなる液面計の検出部 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60216225A true JPS60216225A (ja) | 1985-10-29 |
| JPH0555808B2 JPH0555808B2 (enrdf_load_html_response) | 1993-08-18 |
Family
ID=13545799
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7439084A Granted JPS60216225A (ja) | 1984-04-12 | 1984-04-12 | 薄膜よりなる液面計の検出部 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60216225A (enrdf_load_html_response) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5630620A (en) * | 1979-08-21 | 1981-03-27 | Toshiba Corp | Element of continuous liquid level meter |
| JPS58166220A (ja) * | 1982-03-26 | 1983-10-01 | Aisin Seiki Co Ltd | 液体ヘリウム液面計 |
-
1984
- 1984-04-12 JP JP7439084A patent/JPS60216225A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5630620A (en) * | 1979-08-21 | 1981-03-27 | Toshiba Corp | Element of continuous liquid level meter |
| JPS58166220A (ja) * | 1982-03-26 | 1983-10-01 | Aisin Seiki Co Ltd | 液体ヘリウム液面計 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0555808B2 (enrdf_load_html_response) | 1993-08-18 |
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