JPS60213201A - Load conveying facility - Google Patents

Abstract

PURPOSE:To reduce the production of powder dusts by making a rolling contact of a roller brush with power supply rails and a signal rail arranged laterally on the inside face of duct type rail device to collect a current or communicate a signal. CONSTITUTION:A duct type rail device 40 has a bottom plate 40A for forming a traveling guide 41, side plates 40B, 40C for forming control guide faces 42A, 42B for preventing a lateral displacement, ceiling plates 40D, 40E, and side plates 40F, 40G for forming floating preventing faces 44A, 44B. Power supply rails 47A, 47B and a signal rail 48 are laterally arranged on the upper position on the inside of the side plate 40B, and current collecting roller brushes 87A, 87B and a signal communication roller brush 88 are provided to be able to freely contact with the rails 47A, 47B and 48 at the side of a self-traveling vehicle 58 side. Powder dusts are attracted into a suction duct 50 or a suction tube 53.

Description

DETAILED DESCRIPTION OF THE INVENTION FIELD OF INDUSTRIAL APPLICATION The present invention relates to load conveying equipment employed for conveying loads, particularly in clean rooms.

Conventional configurations and their problems Recently, there are objects to be transported, such as wafers, which are sensitive to dirt and dust. In this case, the interior of the factory where the cargo transport equipment is installed is kept clean. 1 and 2 show conventional load conveying equipment. In other words, (1) is a self-propelled vehicle, with a pair of left and right first wheels (4) that are freely rotatable via a machine frame (2) and a K axle (3), and a driving path (a fixed path). (5) A pair of left and right second wheels (7) rotatably attached to the machine frame (2) via an axle (6) at a position apart in either direction, and both axles t3) (6) A rotating wheel for propulsion (friction rotating wheel) attached via a drive shaft (9) to the machine frame (2) near the first wheel (4); and the motor 11 attached to the machine frame holder (a) to drive this propulsion rotating wheel 110'f, and the motor a1).
and the drive shaft A9), and the front kE
It consists of a code magnet (141) for setting the destination attached to the side of the a-frame (2), a plastic V-, etc. tlG is a connection part that is attached to the KU on the machine frame (2), and it is attached directly above the machine frame (2). It consists of a narrow part un located at ) is mounted so as to be relatively rotatable around it.The transported object υ, such as a wafer, is stored in the transported object storage part al.(2)
is a guiding device for guiding the self-propelled vehicle (1);
m 141 from the upper side, a travel guide surface @ which contacts the second wheel (7) and the propulsion concave widening wheel uO from the side, and the lateral movement regulating wheel 181 K
The running teal inner surface Cn1C has a guide surface 1111 (toward) and a guide surface 1111 to prevent slippage that comes into contact from the 'I' side.
Recording brush (19 brushes for painting purposes and trust /l/
(b) will be provided. tJ'dri Self-propelled vehicle (Sto rail device (support) is 1!! [! fix in the duct (to). On the bottom plate of this duct?Qf9, there is a support V- in the travel route +5) direction. A pair of left and right support rails are provided, and a support frame body 1311 is installed around these support rails via a bullet support body (7).
A plurality of V-ru devices d(2) are provided in the direction of the running route (5), and the V-ru device d(2) is attached to these support frames via the force of the support 13. The top plate of the duct (branch) has a number of running routes (5
) is formed, and an elastic sealing material (2) is provided from the left and right sides to seal the slit part 13.
It is formed into υ. And this seal type slit part l3
0Vc, Ic is configured so that the narrow part α force of the 1IiJ connection part LIG is located. A suction duct (to) is provided on the side of the duct @, and both are connected to a suction port 137).
It communicates with

Self-propelled 5(1) travels by reducing the power of the motor %u
3- Transmit the propulsion rotation -aU via the td1 driving shaft (9), and transfer this propulsion rotation -〇〇 to L on the travel guide surface (to).
I: By moving the inoculation, it becomes iJ ability, and further I'C
Tilt of the second wheel (7) with respect to the running i guideway (to);
The rolling of the first wheel (4) against the anti-float surface (to) and the tilting of the lateral movement regulating wheel (8) with respect to the regulation guide surface (to) cause vibrations and rattles on the travel path (5). It is done by doweling without any attachment. During such running, powder orchids die from VC such as the transfer of JhL wheel +41 i71181-Se propulsion recycle transport Ua, but this powder is sucked into the suction duct can by bending the suction port C. will be done. The Idt transport equipment having the above configuration is installed in a clean room λ.

By the way, according to the conventional cargo transport system with the above-mentioned configuration, the brush L9 comes into sliding contact with the rail (to), so the dust from the single column becomes dead, and as mentioned above, the suction duct (
Even though it is a suction removal type using 361, it is not able to deal with the problem sufficiently, and as a result, it is drawn out from the slit part 3G and causes damage to the load and the clean room.

Purpose of the Invention The purpose of the present invention is to install a freight transfer system that can minimize the loss of life and death in items 131 and 131, which eliminates the transfer and reception of 100 items.
IIIf.

4i4 Formation of the Invention In order to achieve the above-mentioned purpose, in the present invention, before the cargo conveyance installation, there is a duct type strainer and a duct type strainer bag u.
It consists of a self-propelled vehicle that can run freely guided by a pipe, and is supplied to the 1st surface of the duct type rail technical center.
Arrange the VC of the number rail and the number of rollers corresponding to the rail +6 rail and the rail of 1 HυV-.
．． I packed up the V3 edge case and took it to my self-propelled car.

Example and Function An example of VC Honkomei will be explained in detail with reference to Figs. 3 to 5. The song is a duct type rail device 1ti, with an upward traveling guide surface 1411? Mr. 1 board that cuts shape 1 (4QA
) and - a pair of left and right Fl formed on the lower inner surface, respectively
l treatment (40B) (40C), central t, 'Is ic
A pair of left and right top plates with a slit that spans the entire length (
40D) (2 on 40) and form a n upward prevention m (44A) < 44B) in the middle part facing 4F (44A) < 1jj
l KQ UNI <M (40B) (40C) protruding plate (40F) inserted inward from 1ul1 part in the vertical direction
It consists of (40G) and the nu book board < 4OL+ ) (
40E) is attached and detached via a screw 14υ, but this may be an integral part. One side plate (40B
), above the protruding plate (1oF), insulators are installed at appropriate intervals in the rail length direction, and these insulators (c) are connected to a pair of upper and lower supply rails (47A
) (47B), and one No. As shown on the right side of FIG. 4, a large number of suction holes 149) are formed in the bottom plate (4QA).

ic If so as to face these suction holes 1491 (
A suction duct is disposed on the bottom side of 40A). (5
1) Remove the cover. On the F side of the bottom plate (40A),
As shown in the left half of No. 41A, the arrangement is empty 1ijl (52')
may be formed. In this case, as shown in the imaginary line, the suction tube (53) connected to the side plate (40C) is arranged 6.
By throwing it, it becomes Kuchi J Noh. Dovetail grooves (54) opening downward are formed on both sides of the bottom plate (40A), and these 1
A plurality of supports (56) having retaining portions (55) that engage with MA grooves (54) allow the duct type rail device t 1
4111 is supported and constructed, for example, horizontally within the clean room (57).

(58) is a self-propelled vehicle that is supported and guided by the duct-type tunnel device and can run freely on a fixed path (59), and is a long plate-shaped machine +i! '(60) have vertical shafts (62) (60) at the front and rear ends, respectively.
3) is installation. And, on both Fusuke (62) and (63), support plates (64 and 65) which are Hi7: shaped in plan view are attached to the VCJu which can be moved freely around the vertical axis (62a') and (63a).
l can be added.

On the Il and Il1 sides of both support plates (64) and (65), nd
A pair of left and right regulating wheels (66A) (66B), (67A) (6) that can be freely attached to the inner surface (42A) (42a)
7B) f Husband A@(&-HM and these regulation wheels (66
A) (66B) + (67A) (67B) is the rigid axle (6
8A) (68B), (69A/) (69B)? It can be freely rotated through.

[Between the regulation wheels after j11, the uil support plate (6
4M65) are provided with running wheels (70A) (70B) - (71A) (71
B) are attached, and these running wheels (70A) (70B
) + (71AM71B) is the horizontal wheel support (72A) (72
B), (73AM73B) allows for free rotation.

In addition, running vehicles - (70A) (70B), (71A) r7
113) is attached to the upper end of the floating prevention surface (44A1 (located in the lower part of 44B1. Front vertical axis C62)).
The front end of C74) is attached, and the rocking plate C74) becomes a swinging mark around the vertical axis (62a). In the other side plate (40C), the inner surface above the firing plate (40G) is formed into a horizontal friction surface C75), and an M vibrating part driving wheel (76) that can freely come into contact with this kIk gravel surface (75) is formed. Rocking plate (
74) is attached to the rear end. The dust drive wheel (76) is attached to the vertical drive shaft (77) and the vertical shaft, 0 (7
There is a rotating mark around 7a), and the swing of the machine frame (60) & the spring (78) installed in 1ml with (741) force 11 forces to hit the auxiliary lug (75). .-Ha
4 Moving plate (74) IC is 1g flow motor (79): A
(The output of this DC motor (79) is attached to the belt transmission, % (go) and the hypoid gear device f (81
) and rJ'd,,IC! It is linked to the drive shaft (77). A connecting portion (82) passing through the slot I-(43) is connected to the frame (60), and a load supporting portion (83) is provided at the upper end of this connecting portion (82).

This load support part (83) is in the form of a load device or a storage type, and also includes support plates (64) and (65) in which a control unit such as a microcomputer may be stored.
Insulating cases (84) (85) facing one side plate (4Qj3) are attached on top.

The front insulation case (84) has four parts (86) with open sides.
are formed in three places on the top and bottom, and the rear insulation case (85)
Similar four parts (86) are formed in three places on the top and bottom. In the front insulation case (84), the upper and middle four parts (
An assembly roller brush (87AM87B) that can freely contact the direction and feed rails (47A) (47B) is installed inside the lower four parts (86), and a signal rail 14 (to) is installed inside the lower four parts (86).
A No. 1g transfer roller brush (88) with a contact point is provided. Also, the four parts (86) of the rear insulation case (85)
Inside, roller brushes (89A) (89B) for both power supply rails (47A) (47B) and contactable roller brushes (89A) (89B) are arranged.

Each roller brush (87A) (87B), (88), (
89A) (89B) tma・sono brush 1111b (90
) are vertically supported by bearings (91)&C, and the exposed outer surface of the myopia can freely contact and roll on the corresponding rails (47A)C478)C4B). A dust receptacle (93) is formed below the brush shaft (9o) in both insulating cases (84) and (85). This dust pan is 0Ut in part (93).
A carbon brush (94) is in contact with the outer periphery of the lower end of the a-plan shaft (90) via a rib (92). (95)
The spring holder is fully shown.

Next, the traveling work will be explained. By driving the DC motor (79), the elastic force of the spring (78) causes the Ri friction surface (75) to
By rotating the M vibrating drive wheel (76) which is pressed into contact with the M vibration part driving wheel (76), it becomes possible for the self-propelled vehicle (58) to travel on a fixed route (59). At that time, the traveling guide surface (traveling wheels for the four illusions (70A) (70B1, (71A) (71B)
, the rolling of the regulation wheels (66AM66B), (67A) (67B) against the regulation guide surfaces (42A) (42B), and the prevention of levitation 9 by the levitation 1 + prevention surfaces (44A) (44B). The vehicle runs stably on the fixed route (59) without wobbling or rattling. During such driving, each Jg #ti (66A) (66B)
, (67A) (67B) , C70k) (70B)
, (71A), (71B) and the transfer of the M vibrating wheel (76), etc., and this dust is sucked into the suction duct and suction pipe (53) through the suction hole 4. Further, there is no fear that dust will come out into the clean room (57) due to the inward suction force acting on the slit Aj. Furthermore, each rail (47A)
(47B), roller brush for v+8 (87A)
(87Bχ (88), (B9A) (89B)) Since it is performed by the Buddha motion, the occurrence of dust from the shore (mouth) is greatly reduced compared to conventional sliding contact.Furthermore, the contact rolling position is between the car and the guide. Since it is higher up and facing sideways, small amounts of dust generated at the contact rolling position quickly fall off, and large dust generated on the traveling guide side is removed from each rail (47A) (
47B) J81 kCM influence r! without having to worry about
Therefore, payments, In Q, and L exchanges are always made into Yen ld. Like this roller brush (87j') (87B)
+ By using (88), (89A) (89B), bearings (91), carbon brushes (94), etc.
Dust is generated in the El rolling support machine Nq section, but here the roller brushes (87A) (87B) + (88), (89A)
(89B) is an insulating case (89B) that only partially exposes for contact, but most of the parts including all four parts of the one-rotation support machine are insulated (89B).
4) Since the dust is stored in (85), the generated dust can be discharged into the duct type rail device frame, and the dust receptacle (93) is further stored.

Advantageous Effects (According to the load transfer equipment of the present invention by Isei, the following effects can be expected. Namely, the corresponding roller pushers will not collide with the ore supply rail or signal rail facing the cypress. 1auf, which performs this current collection and signal exchange
Dust generation at + can be greatly reduced.

Also, when using a roller brush, dust is generated in the rotation support mechanism, but most of the roller brush is housed in an insulating case, with only a part exposed for contact. Therefore, it is possible to prevent dust generated in the M section of the rotary support machine from leaking into the duct type rail device. As described above, according to the present invention, it is possible to prevent the generation of dust in the collection area and the signal transmission/reception area, and it is particularly suitable for transportation in a clean room.

[Brief explanation of the drawing]

1 and 2 show a conventional example, FIG. 4 is a longitudinal sectional side view, FIG. 4 is a longitudinal sectional front view, and FIG. 5 is a transverse plan view. Frame...Duct type rail device, +43...Slit-
(47A) (47B)...Feed d rail, 14N...
・No. 13 Les I, (58)... own, j2 car, (82
)...s% knot, (83)...load support part, (84
) (85)... Insulation case, (86)... Four parts, (
H7A) (87B)...Ii! Id roller brush, (88)...+No. 1 delivery/reception o--9 ywoshi+ (
89A) (89B)...Rollab eagle for ditch preparation, (90
)...Brain shaft, (9'')...Bearing, (92)...
Spring, (93)...1〉] Uke is part, (94)...
・Carbon brush agent Yoshihiro Kagi

Claims (1)

[Claims] 1. Consists of a f-duct type rail device d and a self-propelled vehicle that is guided by the duct-type rail device, and a supply rail and a signal rail are arranged horizontally on the inner surface of the duct-type rail device. and a plurality of roller brushes corresponding to these feed rails and fg second rails are attached to a self-propelled vehicle via an insulating case.