JPS6124663A - Cargo carrying facility - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION FIELD OF INDUSTRIAL APPLICATION The present invention relates to load conveying equipment employed for conveying loads, particularly in clean rooms.

Conventional configurations and their problems Recently, there are objects to be transported, such as wafers, which are sensitive to dirt and dust. In this case, the inside of the factory (room) where the load transport equipment is installed is kept clean. As shown in Figs. 11 and 12, conventional load conveyance equipment
A self-propelled vehicle (c) that can freely travel on a fixed route (c) guided by a rail device, a load support part Q4 attached to the upper part of the self-propelled vehicle 0 via a connecting part, and the connecting part (To) passes through) (7i1G has 1. and the constant route (2)
91 is provided. In order to prevent the dust generated in the duct fQ from leaking into the clean room through the slit qQ, this slit ff! 9 is provided with elastic sealing materials (rubber plates, etc.) from the left and right sides. According to this conventional configuration, in a place where the self-propelled vehicle (2) is not traveling, both elastic sealing materials (78 have their tips brought into relative contact with each other to seal) close the f6, and when the self-propelled vehicle (2) is not traveling, (to the car) moves forward while the connecting portion I7 elastically deforms both elastic sealing materials () upward. At that time, since the elastic sealing material q is in strong pressure contact with the connecting part (to) and is in relative sliding contact, both elastic sealing materials (
7. Abrasion occurs on the pass, generating dust and contaminating the clean room. Furthermore, when the load supporting part q4 side is used for heavy loads, the width of the connecting part Q3 must be increased, and the larger the width, the greater the elastic deformation of the elastic sealing material Q frame, increasing the generation of dust, and increasing the width of the connecting part Q3. The contact resistance prevents the vehicle from running smoothly as expected.

Purpose of the Invention The object of the present invention is to automatically close the slit, but the sliding contact of the connecting portion due to the running of the self-propelled vehicle is small regardless of the width of the connecting portion. The object of the present invention is to provide load conveyance equipment that can carry out work under sliding resistance.

Structure and operation of the invention In order to achieve the above-mentioned object, the load conveyance equipment of the present invention comprises: - a self-propelled vehicle that can freely run on a light road; and a load support section attached to the upper part of the self-propelled vehicle via a connecting section. and a duct having a slit through which the connecting portion passes and is disposed surrounding the ashigaru path, and a slit cover that allows the slit to move freely between the slits and is biased to close is installed laterally in the slit portion. The slit cover is provided so as to be movable in a direction, and a cam surface is formed on the slit cover to which the moving connecting portion can freely come into contact.

According to this structure, the slit is normally closed by a slit cover that is biased to close, and when a self-propelled vehicle runs, the connecting part contacts the cam surface and pushes the slit cover outward. It will be moved to.

EXAMPLE An example of the present invention will be described below with reference to FIGS. 1 to 5. (1) is a duct type rail device, which includes a bottom plate (IA) that forms an upward travel guide surface (2), and a pair of left and right side plates that form regulation guide surfaces (8A) and (8B) to prevent lateral slippage on the inner surface of the lower part, respectively. (IBMIC) and a pair of left and right top plates (ID) with a slit (4) extending the entire length in the center.
(IE) and a downward floating prevention surface (5A) in the middle part.
) (5B) of the side plates (IB) (IC).
A projecting plate (IF) (I
G), and the top plate (ID) (IF) has screws (
6), but this may be an integral part. The protruding plate (I) is located on the inner surface of one side plate (IB).
Insulators (7) are installed at appropriate intervals in the rail length direction above F), and between these insulators (7),
A pair of upper and lower power supply rails (8A) (8B) and a single signal rail (9) below these are arranged with their working surfaces facing inward and facing toward each other. As shown in the left half of FIG. 2, a large number of suction holes Ql are formed in the bottom plate (IA), and the bottom plate (I
A suction duct 0 is arranged on the bottom side of A). @ indicates a cover. A wiring space αj may be formed below the bottom plate (IA) as shown in the left half of FIG. In this case, suction is controlled by a plurality of supports aη, which are controlled by arranging a suction pipe α4 that communicates with the side plate (IC) as shown in the imaginary line.
Accordingly, the duct type rail device (1) is supported and constructed, for example, horizontally within a clean room. 01 is a self-propelled vehicle that is supported and guided by the duct type rail device (1) and can run freely on the light road.The longitudinal axis @ (c) is located at the front and rear ends of the long plate-shaped machine frame Qυ. Installation. and both vertical axes (2
) (C), a support plate (C) having an H-shape in plan view is attached to the support plate (C) so as to be freely movable around the vertical axes (22a) and (28a). On both sides of both support plates (C) and (C), a pair of left and right regulation wheels (
26A) (26B), (27A) (27B), respectively, and these regulating wheels (26A) (26B,
), (27A) and (27B) can freely rotate via the vertical axle. Between the front and rear regulation wheels, the support plate (c) (
On both sides of C) are running wheels (28A, ) (28B), (29A) (29B) that can freely come into contact with the running guide surface (2) marked 1.
) are attached, and these running wheels (28A) (28B
), (29A) and (29B) can freely rotate via the horizontal axle. In addition, running wheels (28A) (2813), (2
9A) (29B) are located below the floating prevention surfaces (5A) (5B). At the upper end of the front vertical axis (A) is a rocking plate (
When the front end of (to) is attached tL, this rocking plate (7) can swing left and right on the chest of the vertical axis (22a).

On the other side plate (IC), the protruding inner surface above 1 (tG) is formed into a horizontal friction surface C3]), and is a friction drive wheel that can freely come into contact with this friction surface G]). is attached to the rear end of the rocking plate (to). The friction drive wheel C32 is attached to the vertical drive shaft (to) and is rotatable around the vertical axis (83a), and also has a spring installed between the machine frame (a) and the rocking plate (to). It is urged to come into contact with the friction surface (, 31) by (2).

A DC motor (to) is attached to the swing plate (7),
The output shaft of this DC motor (2) is connected to the drive shaft (2) via a belt transmission mechanism (2) and a hypoid gear device (2).
). A connecting portion (to) that passes through the slit (4) is connected to the machine frame frame, and a load support portion (to) is provided at the upper end of this connecting portion (to). This load support section is in the form of a load device or a load storage type, and may house a control unit such as a microcomputer inside. On both support plates (C) (C), one side plate (
The insulating case frame (6) facing IB) is attached.

The front insulating case (G) has four parts (C) with open sides formed in three places on the top and bottom, and the rear insulating case 01) has similar four parts (A) in three places in the top and bottom. In the front insulating case 00, current collecting roller brushes (43A) (43B) that can freely contact both power supply rails (8A) (8B) are arranged in the upper and middle recesses, and the lower recess □ □
A roller brush (b) for transmitting and receiving signals that can freely contact the signal rail (9) is disposed within the square. Also, the rear insulation case (
In the recess θa of 6), both power supply rails (8A) (8B>
Current collection roller brush (45A) (45B) that can be contacted freely
will be placed. Each roller brush (48A) (43B)
, Mouse (45A) (45B), the brush shaft (G) is supported by a bearing (B) in the vertical direction, and a small amount of exposed outer surface can be moved freely by contact on the corresponding rail (8A) (8B) (9). becomes. A dust receptacle is formed below the brush shaft (6) on both line edge cases. In this dust receiver, a carbon brush member is in contact with the outer circumference of the lower end of the brush shaft (to) via a spring at part (3). (2) indicates a spring receiver.

A pair of left and right slit covers, which can open and close the slit (4) and are urged to close, are provided at the slit (4) so as to be movable in the lateral direction. That is, blocks (54A) (64
B) is attached via fixing tools (55A) (55B), and the slit cover Q is placed between the left and right pins (56A) (56B) supported by these blocks (54A) (54B). Can be mounted to swing freely. Therefore, the slit cover ring is divided into many parts and arranged in the direction of the fixed path (1). The six wheels of both slit covers are rotated inward to open the tips (52a).
(58a) can freely come into contact with each other, and are automatically biased toward closing (abutting) by forming eccentric positions in the weight portions (52b) and (53b). Further, at both ends of both slit covers (A) in the fixed path (1) direction, cam surfaces (52
c) (58c) is formed.

Next, the traveling work will be explained. Driven by the DC motor (2), the elastic force of the spring rotates the friction drive wheels (which are in pressure contact with the three friction surfaces c), allowing the self-propelled vehicle 09 to move on the light path ψ. It becomes possible to run.

At that time, the traveling wheels (28A
) (28B), (29A) (29B) transfer and % regulation guide surface (8A) regulation wheel (26A) for (8B)
Due to the transfer of (26B), (27A) and (27B) and the prevention of floating by the floating prevention surfaces (5A) and (5B), the running on a fixed path (E) is stable without shaking or rattling. It is done as follows. During a stressful run,
Each wheel (26A) (26B), (27A) (27B),
' (28A) (28B).

(29A) (29B) and the transfer of the friction drive wheels (2) generate dust, but this dust is sucked into the suction duct αD and suction pipe u4 through the suction hole αQ, and also through the slit (4). ) also acts on the inward attraction force.

Furthermore, power supply and signal exchange are performed on each rail (8A) (8B).
+9) roller brush (48A) (48B),
Since this is done by transferring the mats (45A) and (45B), the generation of dust due to wear and tear is greatly reduced compared to conventional sliding contact. Furthermore, since the contact transfer position is above the wheel guide and faces sideways, a small amount of dust generated at the contact transfer position quickly falls, and large pieces of dust generated on the travel guide side are removed from each rail (8A ) (8B) and (9), and therefore power supply and signal exchange are always performed smoothly. Like this roller brush (48A
) (48B), M, (45A) (45B), dust is generated in the rotation support mechanism parts such as bearings and carbon brushes.
A) (43B), ■, (45A) (45B) is only partially exposed for contact, but most of it, including all of the rotation support mechanism, is housed in the insulating case (G) pronation. Therefore, the generated dust is removed from the duct type rail equipment (1).
In addition, the dust can be stored in the dust pan (inside the dust pan).

While traveling on the 1' port route 4 as described above, the virtual line in Fig. 2 and the 4
As shown in the figure, both slit covers (5) are automatically closed by weight bias, and the tips (52a) (5)
3a) are made to correspond to each other. Therefore, most of the slits (4) are blocked in the non-running section, and the dust generated inside the duct type rail device (1) is transferred to the clean room (towards the clean room).
It can be prevented from going inside. In addition, at the location where the self-propelled vehicle 09 is traveling, the connecting portion (to) located at the location of the imaginary line (a) in Fig.
c) (53c), and by the action of the cam, both slit covers e; a63 swing downward against the weight bias and move to the position (c), as shown by the solid line in Figure 2. The connecting portion (to) moves with the tips (52a) and (58a) in contact with both sides.

According to the above embodiment, since the slit cover (2) wheel swings downward, the slit cover (62) may be removed due to some reason.
Larger debris accumulated on the 61 can be automatically dropped into the duct type rail device (1).

6 and 7 show another embodiment of the invention.

In other words, the slit cover 6 piers are connected to a parallel four-speed linkage structure (
Block (54A) (57A) (57B) via block (57A) (57B)
54B) so that it can move laterally, and is automatically biased to close by the unbalanced load due to the arrangement of the parallel four-speed linkage mechanism (57A) (57B).

In addition, on both the above-mentioned actual flow sides, the slit cover 6 may be biased via a spring or the like for the closing and closing movement of the slit cover 6.

FIGS. 8 to 10 show yet another embodiment in a curved path section. In other words, a curved slit cover (corresponding to the curved slit (4)) is provided, and one end is attached to a vertical pin member I so that it can swing left and right, and a spring Iυ is attached so as to come into contact with the stopper. It is energized to close at . This curved slit cover has a connection part (to) that acts on the cam surfaces (58a) (58a), so that
It is opened (moved laterally) against the spring 6p.

Effects of the Invention According to the load conveying equipment of the present invention having the above configuration,
□Normally, the slit can be closed by a slit cover that is biased to close, reducing the area of this slit to reduce the leakage of dust into the clean room and reducing the exhaust capacity from inside the duct. Therefore, the cost of the entire equipment can be reduced. Then, when the self-propelled vehicle is running, the connecting part comes into contact with the cam surface and can be moved to the outside of the slit cover.At this time, since it is a lateral movement, the connecting part to the tip of the slit cover The sliding contact can be carried out smoothly under small sliding resistance regardless of the width of the connecting portion.

[Brief explanation of drawings]

1 to 5 show an embodiment of the present invention, in which FIG. 1 is a vertical side view, FIG. 2 is a vertical front view, and FIG. 3 is a cross-sectional plan view.
Fig. 4 is a plan view of the main part, Fig. 5 is a side view of the same, Figs. 6 and 7 show other embodiments of the present invention, Fig. 6 is a longitudinal sectional front view of the main part, and Fig. 7 is a front view of the main part. 8 to 10 show still another embodiment, FIG. 8 is a plan view of the main part, FIG. 9 is a side view, FIG. 10 is a longitudinal sectional front view, and FIG. 12 shows a conventional example, FIG. 4 and FIG. 11 are a vertical side view, and FIG. 12 is a vertical front view. (1)...Ducted rail device, (2)...Traveling guide surface. (8A) (8B)...Regulation guide surface, (4)...Slit, (5A) (5B)...Floating prevention surface, α1...
・Self-propelled vehicle, (a)...-ashigaru road, (26A) (26B
), (27A) (27B)... Regulation wheel, (28A
) (28B), (29A) (29B)...Traveling wheel, Wta-...Slit cover, (52a) (53a)
-Tip, (52b) (68b)...Weight part, (5
2c) (58c) - cam surface, (54A) (54
B)...Block, (56A) (56B)...Pin, (57A) (57B)...Four speed link mechanism, branch Curved slit cover, (58a)...Cam surface, branch... ,・Vertical pin, In)...Spring agent Yoshi Morimoto I No. 1/Fig. 12

Claims (1)

[Claims] 1. A self-propelled vehicle that can travel freely on a fixed route, a load support part attached to the upper part of the self-propelled vehicle via a connecting part, and a slit that the connecting part passes through and is arranged around the fixed route. a slit cover which can freely open and close the slit and which is biased to close the slit is provided in the slit portion so as to be movable in the lateral direction; Load conveyance equipment characterized by having a surface formed thereon.