JPS60213022A - Vertical supporting tool - Google Patents

Abstract

PURPOSE:To obtain a vertical supporting tool enabled to be used stably for a long period, and enabled to exchange damaged parts locally by a method wherein a wafer supporting means is incorporated into the supporting tool main body detachment freely, and moreover displacement in the vertical direction freely. CONSTITUTION:A vertical supporting tool consists of a supporting tool main body 2, and supporting rods 32a, 32b, 32c of three pieces to support a semiconductor wafer or the similar article thereof. One edge part of the supporting rod 32a is supported stably and detachment freely by a holder member 44 positioning on the upper side. Another edge part of the supporting rod 32a is supported displacement in the vertical direction freely in relation to a holder member 44 positioning on the under side, and moreover detachment freely nearly similarly with the other edge part thereof. Both the edge parts of the supporting rod 32b are incorporated into the supporting tool main body 2 displacement in the vertical direction freely through holders 52 equipped detachment freely to edge members 6a, 6b. Accordingly, thermal stress is not generated between the supporting rods and the supporting tool main body 2 even when exposed to a high temperature in a diffusion furnace, and local damage is not generated. Moreover, even when damage is generated, use can be continued by exchanging to a new parts.

Description

DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to a vertical support for supporting semiconductor wafers or the like.

BACKGROUND ART As is well known to those skilled in the art, in the diffusion process of semiconductor wafers, a plurality of semiconductor wafers are placed on a support and housed in a diffusion furnace. Up until now, diffusion furnaces with a structure that extends substantially horizontally have been generally used, but in recent years, vertical diffusion furnaces that extend across the top of the lead have also been developed. Also, so-called vertical type supports have come to be used for supporting semiconductor wafers. (a) In order to prevent adverse effects such as adhesion or diffusion of foreign matter to the semiconductor 9 wafers to be subjected to the diffusion process, they are made of materials that are substantially stronger than the semiconductor wafers or that do not substantially react with the semiconductor wafers. being formed,
(b) The VCTcll in the diffusion furnace has high heat resistance that is compatible with the Q degree; (C) After the diffusion process, the support tool is cleaned and reused, but during this cleaning process, the cleaning solution can easily remove the VCTcll.
It is important that the material satisfies the requirements such as C deterioration and not melting.

In view of the strict requirements, the supports are generally made of silicon or quartz glass.

Only 1. However, when conventional supports are made of silicone,
Because silicone is hard and brittle, and cannot be fused, it is possible to create a single piece or multiple machined parts by applying relatively simple machining processes such as cutting and creating grooves to the silicone block material. It was produced in combination. On the other hand, in the case of quartz glass, since it is possible to fuse parts together, it is generally manufactured by fusing a plurality of parts to form a single body.

However, conventional supports made of cryon or quartz glass have the following problems to be solved.

Particularly in the case of a support made of silicone, firstly, the manufacturing cost is high because the silicone silicone itself is a fairly expensive material. Second, since silicon is hard and brittle, there is a risk that it will break if subjected to impact or the like, and in particular, if it breaks while holding a semiconductor wafer, the held wafer will fall 17 and be damaged. On the other hand, in the case of a support made of quartz glass, since it is a one-piece product that is fused together, when exposed to high temperatures in a diffusion furnace, the fused portion softens and becomes teardrop-shaped and deformed. This makes it difficult to hold the semiconductor wafer in the required alignment.Furthermore, VC and quartz glass are slightly altered in quality by the cleaning solution (generally, hexachloric acid is used as the cleaning solution) during the cleaning process after the diffusion process. !￥
Therefore, in the case of a structure in which the semiconductor wafer is held by the holding grooves, the interval between the holding grooves becomes slightly larger during the cleaning process, making it difficult to use the semiconductor wafer for a long time. If this happens, it will be difficult to hold the semiconductor wafer in the required alignment, making it unusable as a whole.

Therefore, in order to solve the above-mentioned 17 problems, the member in which the holding groove for holding the semiconductor wafer is carved is made of silicon, and the other members are made of quartz glass.1.
It is also conceivable to manufacture the above-mentioned support in such a way that the two are fixed together. However, in such cases, the difference in thermal expansion coefficient between silicon and quartz glass (quartz glass heats up more than silicon (low expansion coefficient), there is a risk that both fixing parts may be locally damaged by thermal stress.

<Object of the Invention> The main object of the present invention is to provide an improved vertical support that can be stably used for a long period of time by preventing damage caused by temperature changes, and is inexpensive to manufacture. That's true.

Another object of the invention is to provide an improved vertical support that can be continued in use by replacing some parts in case of local damage.

<Summary of the Invention> According to the present invention, in order to achieve the above-mentioned 17 objects, two end paulownia parts arranged at intervals, a plurality of connecting rods fixed between the end members, and and a support means for supporting the semiconductor wafer or its bm product, one side of the support means is removably supported by one of the end members, and the other side is vertically displaced. The special point is that it is free.
A vertical support is provided.

<Preferred Specific Examples of the Invention> Hereinafter, specific examples of the vertical support constructed according to the present invention will be described with reference to the accompanying drawings.

First, with reference to FIGS. 1 to 7, the first part of the vertical support
A specific example will be explained. Mainly refer to Figures 1 and 4.1. The illustrated vertical support comprises a support body 2 made of quartz gas and support means 4 made of silicon for supporting a semiconductor wafer or the like.1. ing.

The support main bodies 2 are arranged at intervals in the vertical direction.
end portions 1'5a and 6b, and end members 6a and 6b.
It includes a plurality of (four in the specific example) connecting rods 8a, 8b, 8c and 8d't- fixed therebetween. Edge cutting 6
Each of 8 and 6b may have an appropriate shape, but in the illustrated example, as is clear from FIGS. 2 to 4, the outer shape is circular. Each of the end portions @6a and 6b is formed by fusing a plurality of rod-shaped members made of quartz glass, and is formed by fusion bonding a plurality of rod-shaped members made of quartz glass. Two rod portions 12 and 1 are arranged, extend in a predetermined direction substantially parallel to each other, and have both ends fused to the annular rod portion 10.
4, and three rods extending substantially parallel to each other at intervals on the inside of the annular rod portion lO in a direction substantially perpendicular to the predetermined direction, and having both ends fused to the annular rod portion 10. rod portions 16, 18 and 20, and rod portion 18
and 20 in the predetermined direction II (the short rod portion 2 extends and has both ends fused to the rod portions 18 and 20).
2 and 24. Since this is the general rule,
Each of the illustrated end members 6a and 6b is configured in a lattice shape. Connecting rod 8a.

Each of 8b, 8c and 8d is also composed of a rod-shaped member made of quartz glass, and each of the rods 8a, sb,
An end member 6 in which one end (upper end) of Bc and 8d is located on the upper side
The annular rod portion 101c of a is fused, and the other end (lower end) of each of them is fused to the annular rod portion 10 of the end member 6b located on the lower side. These connecting rods 8a, 8b, 8
c and 8d extend vertically substantially parallel to each other.

Suspension means 26 is provided approximately at the center of the end member 6a described above. The illustrated suspension means 26 is composed of a pair of suspension members 28 made of quartz glass having a substantially U-shaped suspension portion, and one end of each suspension member 28 is fused to the rod portions 12 and 14 of the end member 6a. It is. An auxiliary rod member 30 is fused between the pair of suspension members 28.Next, the support means 1c will be explained.The illustrated support means 4 includes three holding rods 32a, 32b and 34c. There is. Three retaining rods 3 made of silicone
2a, 32b, and 32c may have an appropriate cross-sectional shape such as circular or polygonal, but from the viewpoint of ease of manufacture, rectangular shapes, especially those having a square cross-sectional shape as shown in the figure are preferred. It is preferable that Holding rod 32a, 3
A locking notch is formed in one end IC of each of 2b and 32c, and a guide notch is formed in the other end of each of them. Referring to FIG. 4 and FIG. 5 together with FIG. IIJ1, one end (upper end) of the holding rod 32a includes:
Two diagonally opposite corners, namely FIGS. 1 and 4.
In the figure, two locking notches 34a are formed at two corners located on both sides in the direction perpendicular to the plane of the drawing. (See also I want to vomit). In addition, the other end (lower end) of the holding rod 32a is also provided with two diagonally opposite corners, that is, the two corners where the locking notches 34a are formed, and the corners are cut out so that the corners are diagonally opposite each other. Two guide notches 36a are formed in substantially perpendicular planes (only one is shown in FIG. 4). Further, one end of each of the holding rods 32b and 32c has two corner portions diagonally opposite to each other, that is, two corner portions located on both sides in the left and right direction in FIGS. Locking notches 34b and 34c, which are substantially similar to the locking notch 34a, are formed by cutting out the locking notch 34a, and the other end of each of them has two diagonally opposite corners, i.e., the locking notch 34a. At the two corners where the notches 34b and 34c are formed, guide/notches 36b and 36c, which are substantially similar to the guide notch 36a, are formed by cutting out the corners. Each of the holding rods 32a, 32b and 32c is further formed with several V holding grooves 38 at intervals in the longitudinal direction (the holding grooves formed on the holding rod 32b are (not shown). As can be seen from FIGS. 1 and 4, each retaining rod 32a.

In 32b and 32c, the corners located inside when assembled into the support main body 2! IS (i.e. 1st
In the drawings and FIG. 4, the corner of the holding rod 32a is located on the right side, the corner of the holding rod 32b is located on the rear side in the direction perpendicular to the paper, and the holding rod 32clC
In the figure, a holding groove 38 is carved in a corner located on the front side in the direction perpendicular to the plane of the paper. In the specific example, as can be easily understood from FIG. 11, three holding rods 32a, 3
2b and 32c are assembled to the support main body 2, the holding groove 38 of the holding rod 32b and the holding #1 of the holding rod 32c
38 are located in laterally aligned position, and the retaining groove 38 of the retaining rod 32a is located in horizontal alignment with the retaining groove 38 of the retaining rods 32b and 32c.
It is located slightly below 38 in the vertical direction. Instead, when assembled to the support main body 2, the holding rod 32a, the holding WII 38 of the holding rod 32b, and the holding rod 32c holding #138 are configured to be aligned in the lateral direction. Good too. 1 (In such case, the IC is held substantially horizontally, as will be easily understood from the description below), as described above 1. Three holding rods 32a m 3 in nine ways
2b and 32c, as seen in FIGS. 1 and 4, the retaining rod 32a is connected to the other retaining rods 32b and 32c when viewed in the direction of the apparatus of the conductor or the like as indicated by arrow 40 (FIG. 1). It is detachably assembled to the support main body 2 so as to be located rearward than 32c.

Next, please mainly refer to FIG. 6 along with FIGS. 2 to 4. 1. Now, a method of assembling the holding rods 32a, 32b, and 32c to the support main body 2 will be explained. Both ends of the holding rod 32a are assembled to the support main body 2 via first holders that are detachably attached to the end members 6a and 6b. Referring to FIG. 6-A, the illustrated first holder 42
is a substantially rectangular holder member 44 made of silicon.
A central notch 46 extending inward is formed at approximately the center of the holder member 44 in the longitudinal direction. The width of this central notch 460 is the width of the portion of the holding rod 32a where the locking notch 34a is formed, that is, the residual thickness r+ (FIG. 5) between the two locking notches 34c, and the guide notch. 3
The width of the part where 6a is formed, that is, the two locking notches 36
- or slightly larger than the residual thickness between c and c. A channel 48 that extends substantially perpendicularly to the central notch 46 and intersects with the central notch 46 is formed in the upper surface of the holder member 44 in the horizontally medium-sized portion. Bottom surface 48a defines a shoulder for supporting one end of retaining rod 32a.

Furthermore, a substantially rectangular protrusion 50 is provided at the center of the bottom surface of the holder member 44 . The holding rod 32a is assembled to the support main body 2 in the following manner. That is,
First, the holder member 44 is mounted from above into the space defined by the annular rod portion IO and the rod portions 12, 14 and 16 of the end member 6b. When mounted in this manner, the bottom peripheral edge of the holder member 44 rests on the annular rod portion 10 and rod portions 12, 14 and 16, as shown in FIG.

The protrusion 50 of the holder member 44 is positioned within the space, so that the holder member 44 can be removably assembled as desired. Next, one end of the holding rod 32a is caused to protrude upward through the space defined by the annular rod portion IO of the end member 6a and the rod portions 12, 14, and 16, and the locking notch formed at the one end is Place the center notch 46 of the other holder member 44 in the notch 34a, and then insert the other end of the holding rod 32a into the center notch 46 of the holder member 44 attached to the end 4ttib and the channel 48.
The upper holder member 44t is positioned at the intersection of the upper holder member 44t and mounted in the space of the one end member 6a from above. When mounted in this manner, as shown in FIG.
14 and 16 and the protrusion 50 of the holder member 44
is positioned within the space, and thus the other holder member 44 is also detachably assembled as required. Furthermore,
When mounted in this manner, the notch in which the locking notch 34a is formed is located at the one end of the holding rod 32a.
As shown in the figure, the central notch 46 of the holder member 44 is arranged such that the locking notch 34& is opposite to the side surface of the central notch 46 of the holder member 44.
The non-notched portion located within I2 and located immediately outside the notched portion I2 is located adjacent to the locking notch 34a and located immediately outside of the notched portion 34a, as shown in FIGS. 7-8. channel 4 so that the corner is located within channel 48.
8 and the central notch 46. The corner portion of the upper non-cutout portion adjacent 12 to the outside of the locking notch 34a rests on the shoulder defined by the bottom surface 48a of the channel 48.

Thus, as can be seen from FIGS. 7-A and 7-B, one end of the retaining rod 32a is prevented from falling downwardly by the shoulder of the channel 48 and the central notch f! Lateral movement is prevented by the corners defined by 46, and it is removably supported by the holder member 44 located on the upper side with sufficient stability. In addition, at the other end of the holding rod 32a, a notch in which a guide notch 36a is formed is formed so that the guide notch 36a is formed on the side surface of the center notch 46 of the holder member 44 attached to the end member 6b. The other end is located in the central notch 46 so as to be opposite, and the non-notched portion is located adjacent to and immediately inside the notched portion -1 and is located adjacent to and inside the guide notch 36a. The end thereof is located at the intersection of the channel 48 and the central notch 46 so that the corner thereof is located within the channel 48 (more specifically, as can be seen from FIG. The upper part of the notch is located at the upper part of the notch, and the lower end of the upper non-notched part is located at the upper part of the intersection. As such, the other end of the retaining rod 32a is prevented from moving laterally by the corner defined by the channel 48 and the central notch 46, in substantially the same manner as the one end thereof, and the lower end of the retaining rod 32a is It is detachably held by the holder member 44 so as to be freely displaceable in the vertical direction with respect to the holder member 44 located at the holder member 44 .

Further, both ends of the holding rod 32b are connected to end members 6a and 6.
It is assembled to the support main body 2 via a second holder that is detachably attached to the support body 2.b. Referring to FIG. 6-B, the illustrated second holder 52 is composed of a substantially rectangular holder member 54 made of silicon, and a substantially rectangular holder member 54 has a central portion extending inwardly. A notch 56 is formed and machined. The width of this central notch 560 is the width of the retaining rod 32.
The width of the portion where the locking notch 34b of b is formed is substantially greater than the width of the portion where the guide notch 36b is formed, or is slightly wider than them. One corner of this holder member 54 is cut out in a rectangular shape, and a lateral force-internal center portion of the upper surface of the holder member 54 is provided with a pair of 1. A channel 5B is formed which extends substantially vertically and intersects this central notch 56. The bottom surface 58a of this channel 58 defines a shoulder for supporting one end of the retaining rod 32b. 19. A substantially rectangular projection 60 is provided at the center of the bottom surface of the holder member 54. The holding rod 32b is assembled to the support main body 2 at 17 as follows. That is, first, the holder member 54 is attached to the annular rod portion 10° of the end member 6b and the rod portions 18 and 2.
0 and the short rod portion 22 from above. When mounted in this manner, as shown in FIG.
0 is positioned within the space, and the holder member 54 is removably assembled as required. Next, one end of the holding rod 32b is made to protrude upward through the space defined by the annular rod portion lO, the rod portions 18 and 20, and the short rod portion 22 of the end member 6b, and the engagement formed at the one end thereof is The center notch 46 of the other holder member 54 is placed in the stop notch 34b, and then the other end of the holding rod 32b is inserted into the intersection of the center notch 56 of the holder member 54 attached to the end member 6b and the channel 58. The holder member 54 is mounted in the space of the end member 6a from above. When mounted in this manner, the protrusion 60 of the other holder member 54 is positioned within the space of the end member 6a, as shown in FIG.
4 can also be removably assembled as required. Furthermore, when mounted in this manner, at one end of the holding rod 32b, the notch in which the trap and locking notch 34b are formed, similar to the one end of the holding rod 32a, is positioned within the central notch 56 of the holder member 54. The non-notched portions adjacent to and immediately outside the notched portion are the channel 58 and the central notch 4.
60 intersection, and the corner located on the outside of the retention notch 34bK of the non-notched portion 34bK rests on the shoulder defined by the bottom surface 58aK of the channel 58. Or<1. One end of the retaining rod 32b is prevented from falling downward by the shoulder of the channel 58, and is prevented from moving laterally by the corner defined by the channel 58 and the central notch 56, and is It is removably supported by a holder member 54 that is stably placed in a lateral pressure position. Also, the other end of the holding rod 32b has a K similar to the other end of the holding rod 32a.

A part of the notch in which the guide notch 36b is formed is positioned within the central notch 56 of the holder member 54 attached to the end member 6blK, and the remaining part of the notch and the part adjacent to the notch are The end of the non-notched portion immediately within is located at the intersection of the channel 58 and the central notch 56. With such a through hole, the other end of the holding rod 32b is prevented from moving in the lateral direction by the angle ViA&'C defined by the channel 58 and the central notch 156;
It is detachably held by the holder member 54 located on the F side so as to be freely displaceable in the vertical direction.

Further, both ends of the holding rod 32c are assembled to the support main body 2VC via a third boulder 17 which is detachably attached to the members 14i 6a and 6b. Referring to FIG. m6-C, the illustrated third holder 62 is composed of a substantially rectangular holder portion 64 made of silicon. This holder member 64 has substantially the same structure as the upper F5 holder member 54, and only the portions cut into a rectangular shape are dJ14. The holding rod 32c is assembled with substantially the same pressure as the holding rod 32b, and the lower holder member 64 is attached to the annular rod portion 10, rod portions 18 and 2 of the end member 6b.
0, and a space defined by the short rod part 24 where a removable crimping IC is introduced and a holder part vf located on the upper side.
64 is the annular rod portion 10° rod portion 1B of the end member 6a.
and 20. The space VC defined by the short rod portion 24 is attached and detachably assembled. Then, when the required thread Vc & is attached, a locking notch 34c is formed at one end of the holding rod 32c, substantially similar to the holding rod 32b.
The notch in which is formed is positioned within the center notch 66 of the holder 64 attached to the end member 6aVCIkM, and the non-notch portion present immediately outside the instant contact 17 is connected to the channel 68 and the center notch. The locking notch 34c [ljl
The abutting and outward corner rests on the shoulder defined by the bottom surface 68aK of the channel 68. te, at the other end of the holding rod 32c, a guide notch 36c
A part of the notch formed and leaked is positioned within the central notch 66 of the boulder member 64 attached to the end @'6b,
Connect to the remaining part of the notch and the notch 1. The end of the non-notched portion just inside the lever is channel 68.
and the central notch 66.

As described above, the retaining rods 32a, 32b and 32c
When the support body HCN is attached, as can be easily understood from FIG. 1, the holding rod 32a.

32b and 32c extend substantially parallel to each other in the vertical direction VC from the end members 6a and 6brlJ'l. So, the second
As is clear from the figures and FIGS. 3, the retaining rod 32a is located intermediate between the retaining rods 321) and 32c when viewed in the direction of mounting the semiconductor wafer or the like as indicated by the arrow 40 (FIGS. 1-3). Holding ronds 32a and 32b are also located at the rear. Furthermore, the holding groove 38 formed with the holding rod 32bK and the holding groove 38 formed with the holding rod 32cK
and are lateral isobaric matching 1. The holding grooves 38 formed with the holding grooves 32aK are located slightly below the holding grooves 38 of the holding rods 32b and 32c in the vertical direction.

When performing a diffusion process on a plurality of semiconductor wafers using the vertical support, the holding rods 32 a, 32 b, and 32
The semiconductor wafer P is inserted into the holding groove 38 in which the ClC is formed. The holding grooves that hold the semiconductor wafer P constitute a set of holding grooves 12 with the holding rods 32a, 32b, and 32c holding #ll38, and in the specific example, the holding grooves 12 are formed by holding rods 32a, 32b, and 32c.
and the holding groove 38 of 32c and the holding WII3 of the holding rod 32a located slightly below the above-mentioned holding groove 38 in the vertical direction.
A set of holding grooves is constructed from BK. When inserting the semiconductor wafer P, the semiconductor wafer P is inserted in the direction shown by the arrow 40 in the I/C of FIG. When it is done, the first
As shown by two-dot chain lines in the drawings and FIG. 3, the peripheral edge of each substantially disk-shaped semiconductor wafer P is supported at three positions with inner corners placed in the circumferential direction. In this supported state, each semiconductor wafer P is held in such a state that its free end (insertion side end) is inclined upwardly, as is clear from FIG. Accidental omission due to busy work is sufficiently prevented.

Next, the suspension part of the suspension means 26 provided on the one end member 6a is locked by a suspension device (not shown) which is known per se, and the support is lifted up and vertically maintained in the suspended state. It is housed in a type diffusion furnace. Inside the diffusion furnace, the support holding the semiconductor wafer 6 is maintained in a suspended state.

When the diffusion process in the diffusion furnace is completed, the support is taken out from the diffusion furnace, and then the semiconductor wafer P is removed from the support.
is taken out. The semiconductor wafer P can be taken out by moving the semiconductor wafer P by 1° in a direction half opposite to its insertion direction.

When cleaning or transporting the support after the diffusion process, the support may be separated from the support main body 2 and the holding rod 32a as necessary.
, 32b and 32c and holder members 44, 54 and 64.

Such disassembly can be accomplished by performing the assembly procedure described above under reverse pressure.

The support of the first specific example described above provides the following advantages. First, since the holding rods 32a, 32b, and 32c constituting the support means 4 are removably attached to the support body 2, even if they are damaged by a large thermal change or impact, only the damaged parts can be damaged. You can continue using the product by replacing it with a new part. Also, a holding rod 32a.

Since one end side of 32b and 32c is removably supported by one end member 6aK, and each of the other end sides thereof is held so as to be removably attached to the other end member 6bK and freely in the vertical direction KK, they are exposed to high temperatures in the diffusion furnace. Even if the holding rods 32a, 32
b and 32c and the support body 2, and especially the retaining rods 32a, 32b and 32c as in the specific example.
Even if the materials of the support main body 2 are different and have different coefficients of thermal expansion, this can prevent local damage to the workpiece. Further, in a specific example, the support main body 2 is formed of quartz glass, and the holding rods 32 a, 32 b, and 32 c
Furthermore, since the holder members 44, 54 and 64 are made of silicon, the amount of relatively expensive silicon used can be reduced, and they can be manufactured at relatively low cost. Further, holding rods 32a, 3 made of silicone
Because the holding grooves 38 are formed in 2b and 32C, the holding groove 38 is prevented from changing in quality or melting during the cleaning process and expanding its width (silicon is the main component of the cleaning solution). It does not react with acids) and can be used stably for a long period of time. Furthermore, since the support main body 2, which is easily subjected to impact, is made of quartz glass, it is possible to provide a support that is 17 resistant to impact.

The above is a description of the vertical support of the first specific example.
Such a support can be modified or modified as follows. For example, in the illustrated embodiment, the support means 4 is composed of three retaining rods 32a, 32b and 32c that are detachably assembled to the support body 2, but if desired, two retaining rods 32a, 32b and 32c may be used. It can also consist of four or more retaining rods. In addition, in the illustrated example, each holder member 44, 54 and 64VC center cut 46 is assembled to the end member 6b where the lower button is located.
．． 56 and 66 and channels 48, 58 and 68
t-formation 1. Lever central notches 46.56 and 66 and central notches 46.56 and 66 and channel 48.5
Retaining rods 32a, 32b and 3 at the intersection S of 8 and 68
2c, but if desired, the holder members 44, 54 and 64 may alternatively hold the
Through holes corresponding to the cross sections of 2a, 32b, and 32c may be provided, and the other ends of the holding rods 32a, 32b, and 32c may be positioned within the through holes.

In such a case, retaining rods 32a, 32b and 320
The guide notches 36a, 36b and 36 at the other end can be omitted. In addition, in the illustrated example, each holding rod 3
Configuration 1. One end side (upper end side) of 2a, 32b and 32c is supported by the end member 6alC located on the upper side. However, instead of this, each holding rod 32a, 32b and 3
End member 6bK where the other end side (lower end side) of 2c is located on the lower side
VC configuration 1. is detachably supported and one end side (upper end side) thereof is held by an end member 68 located above so as to be freely displaceable in the vertical direction. It's okay. In such a case, for example, the holder member 44a to which the end member 6blC is attached.

54a and 64aK retaining rods 32a, 32b and 32
form a recess in which the other end of c is positioned, and the other end member 6
aK Holder member 44, 54 and 64 to be attached 0
It is sufficient to form through holes corresponding to the cross-sectional shapes of the seven rods 32a, 32b, and 32c (at this time, each holding rod 32
a, locking notch 34a on one end side of 32b and 32C,
34b and 34c can be omitted). Further, in the illustrated example VC, the end members 6a and 6b are configured in a substantially lattice shape, and the holder member 44.
54 and 64 are detachably assembled, but instead of this, the end member is formed into a plate-like VC@ of an appropriate shape such as a circle, and the plate-like end member is provided with appropriate notches and recesses. Form 1. ″
In the specific example shown in the drawings, the CC holding lands 32a, 32b and 32C, the holding rods 32g+32b and 32a and the holder members 44, 54 and 64 are made of silicon, but instead of this, the holding rods 32a, 32b and 32c are made of silicon. and boulder member 44. Both or one of 54 and 64 are formed from quartz glass or silicon carbide.
It's okay.

Next, a second specific example of a vertical support constructed in accordance with the present invention will be described with reference to FIGS. 8 and 9. In the second specific example VC, only one end of the holding rod is connected to the holder member 1. It is assembled into the main body of the support. In the following description, the same members as in the first specific example are given the same reference numbers.

8 and 9, the illustrated vertical support includes a support main body 2' made of quartz glass and three holding rods 32a'.
It is provided with support means 4' consisting of 32b' and 32C'. The support main body 2' has two end members 6a and 6.
b, and a plurality of pieces fixed between the end members 6a and 6b (
In the specific example, there are four connecting rods 8a, 8b, 8c, and 8.
Contains d. The end members 6a and 6b may have any suitable shape, but in the second specific example, they are formed into a disk shape. The end member 5alC located on the upper side has square through holes 80a, 80b and 80 at three locations spaced apart in the circumferential direction of the periphery.
c is formed, and each through hole 80a is formed on the upper surface thereof.

Rectangular recesses 82a are provided at the openings of 80b and 80c.

82b and 82c are formed. A suspension member 2 having a substantially U-shaped suspension portion is located approximately at the center of the upper surface of this end member 6a.
Suspension means 26 consisting of 8 are fixed. Further, the end member 6b located on the lower side is also formed with square through holes 84a, 84b, and 84c at three locations spaced apart in the circumferential direction of the peripheral edge. The rest of the structure of the support body 2' is substantially the same as the support body of the first specific example.

Three holding rods 32aZ32 made of silicone
b' and 32C' are each of substantially identical construction, and in the specific example have a square cross-sectional shape.

The cross-sectional shape of this holding o7 door 32&'#32b' and 32C' is the through hole 80a, 8 formed in the end member 6aVC.
It corresponds to the cross-sectional shape of 0b and 80c and the cross-sectional shape of the through holes 84a, 84b and 84c formed in the end member 6bVC, and is substantially upwardly or slightly smaller than these cross-sectional shapes. These holding rods 32a', 32b'
and one end of 32c' (steps 86a, 86b and 86
c is formed, and this stepped portion 86a.

86b and 86c have a square cross-sectional shape, and are intermediate parts (main parts) [4
It's getting thinner. Each of these holding rods 32 B'132b
' and 32 c' have the -angle! R1Vc Holding grooves 38 are formed at intervals in the longitudinal direction (the holding grooves formed in the holding rods 3'lbK are not shown).
) Explain how to assemble it to the support main body 2'.

The holding rods 32a', 32b' and 32C' are assembled to the support main body 2 via a holder 88 made of silicone and removably attached to the end member 6avC9Il. The boulder 88 has two block-shaped holder members 90
It consists of Each holder member 90 has substantially the same configuration, and as shown in FIG. 9, a 7-shaped notch 92 is formed on the lower side thereof.

The thickness of this holder member 90 is equal to that of each holding rod 32a'.

Step portions 86a and 86b formed in 32b' and 32c'
and 86c width. Then, as shown in FIG. 9, two holder members 90 are attached so that the notches 92 face each other.
When combined, the cross-sectional shape of the opening defined by the two notches 1!92 is the same as that of each holding rod 32a', 32b'
and 32C' steps! A holder 8 consisting of two holder members 90 corresponding to the cross-sectional shapes of B86a, 86b and 86c.
8 is the recess 82a, 82b, and 82c of the end member 6a.
corresponds to the cross-sectional shape of The holding rod 32a' is assembled to the support main body 2' as follows. That is, first, a pair of holder members 9 are attached to the stepped portion 86a of the holding rod 32a'.
0 as shown in FIG. 9, and then insert the other end of the holding rod 32a' into the through hole 80a of the end member 6a from above.
is passed through, and the other end is inserted into the through hole 84a of the end member 6b, and then the holder member 90 is positioned within the recess 82a of the end member 6a.

In this way, the holder 88 consisting of the pair of holder members 90
is placed on the bottom surface of the recess 82a, and its lateral movement is prevented by the side surface of the recess 82a, and the holder 88 is removably attached to the end member 6alC in a required hole. Furthermore, since the step portion 86aK holder member 90 is positioned B+j on the one end side of the holding rod 32a', the peripheral edge of the portion adjacent to and immediately outside the step portion 86a is the holder member. The end member 6aK is placed on the step 900 to prevent it from falling downward, is prevented from moving in the lateral direction by the surface defining the notch 92, and is supported in a sufficiently stable manner via the holder 88 so that the end member 6aK can be attached and detached. be done.

Further, on the other end side of the holding rod 32a, since the other end portion is located in the through hole 84a of the end member 6b, its lateral movement is prevented by the side surface defining one through hole 84a, and the end member 6bK is prevented from moving in the lateral direction. I2 is held so as to be vertically displaceable and detachable.

Holding rods 32b' and 320' are also holding rods 32a'.
The support main body 2' is detachably assembled in the same manner. That is, the holding rod 32b' is detachably attached to the end member 6aK via the holder 88 attached to the recess 82b on one end side, and is inserted upward into the through hole 84b of the end member 6b on the other end side. The holding rod 320' is held movably.
Also, one end side is removably assembled to one end member 6a via a holder 88 which is attached to the recess 82CVc, and the other end side is held movably in the vertical direction in the through hole 84c of the end member 6b.

#) K and holding rod 32 a' + 32
When b' and 32c' are assembled to the support main body 2',
As can be easily understood from FIGS. 8 and 9, the retaining grooves 38 formed at the corners of the retaining rods "32a', 32b' and 32c' are located inside the support, and the retaining rods 32
8' is located rearward of the other holding rods 32b' and 320' and intermediately between these holding rods 32b' and 320', as viewed in the direction of mounting a semiconductor wafer or the like as indicated by arrow 94 (FIG. 8). To position. Furthermore, the holding port 7 do 32"
532b' and 320' extend vertically through end members 6a and 6b substantially parallel to each other, and are positioned in lateral alignment with retaining grooves 38 of retaining rod 32b' and retaining rod 32c'. , retention rod 328' retention #1J3
8 is located slightly below the holding grooves 38 of the holding rods 32b' and 320' in the vertical direction.

Even if the support T/C is on, the semiconductor wafer P remains at the arrow 94.
The IIC is inserted in the direction shown by (specifically, the direction slightly inclined from the upper right to the lower left in FIG. 8), and when it is inserted in this way, the semiconductor wafer P moves around the periphery as shown by the two-dot chain line in FIG. Three locations with inner corners in the direction are supported within the retaining grooves 38 of each retaining rod 32a', 32b' and 320' so that the free ends of the rods are retained in an upwardly inclined position. As described above, the support of the second specific example achieves substantially the same effect as the support of the eleventh specific example.

Above, we have discussed the vertical support of the second specific example.
Such a specific example can also be modified or modified as follows. For example, in the second specific example as well, the support means 4' is composed of the support main body 2' (three holding rods 32a', 32b' and 32c' which are detachably assembled, but if desired, For example, it may consist of two holding rods or four or more holding rods.

In the second specific example, each supine rod 32 is
a'.

One end (upper end) of 32b' and 320' is connected to the end member 6&
However, instead of this, the end member 6
aK Each holding rod 32 a' is formed with an appropriate cutout, recess, etc., and is inserted into the cutout, recess, etc. through a holder of an appropriate form that can be detachably inserted.

32b' and 320' can also be detachably assembled to the end member 6a. In the second specific example, one end side of each of the holding rods 32a', 32b', and 32C' is always supported by the end member 6aK via the holder 88, but if desired, only the holding rod 32a' may be supported. The support body 2 is configured to be movable over a predetermined range in the vertical direction.
When the support is mounted on the holding table, the other end of the holding rod 32a' is supported by the holding table, and when the support is suspended, the holding rod 32a' is attached to the holding rod 32a.
It is also possible to form a Vc beak so that one end side of ' is supported by the end member 6a. In such a case, each holding rod 32a'+32b' and 32C
'The holding IW38 of the holding rod 328' is aligned with the lateral vc in the lateral direction, and in the suspended state, the holding IW38 of the holding rod 328' is aligned with the holding rod 3
2b2 and 32c' is preferably located slightly below the holding #I38 in the vertical direction. Moreover, in the second specific example, each holding rod 32 a'.

One end side (upper end side) of 32b' and 32C' is the holder 88.
The end member 6aK is supported via the end member 6aK, and the other end (lower end side) of the end member 6aK is supported by the end member 6b [ICW! However, instead of this, the other end side of each holding rod 32a', 32b' and 32c' or the end member 6b
K is detachably supported, and each one end thereof is an end member 6a.
The configuration 17 may be such that it is held movably in the vertical direction. In such a case, for example, a recess in which the other end of each of the holding rods 32a', 32b', and 32C' is positioned is formed on the upper surface of the end member 6b, and each of the holding rods 32a'+32b' and What is necessary is to form a through hole corresponding to the cross-sectional shape of 32c' (at this time, the holder supporting the holding rods 32a', 32b' and 32c' and the respective holding rods 32a', 32b' and 32c'
Step N86a on one end side.

86b and 86c can be omitted). Moreover, in the second specific example, the holding rod 32 a'.

32b' and 32c' and the holder 88 are made of silicone 17, but instead of this, the retaining rod 32''
+ 32b' and 32C' and holder 88 may each be formed from quartz glass or silicon carbide.

Next, a third specific example of the vertical support constructed according to the present invention will be described with reference to FIGS. 11 to 18. Please mainly refer to FIGS. 10 to 13. The vertical support shown in the figure is a support made of quartz glass! A support means 4' made of silicone is provided which is detachably attached to the support body 2#. As shown in FIG. 13, the support main body 2' includes two end members 6a and 6b arranged at intervals, and a plurality of end members 6a and 6 brsiic fixed to each other (in the specific example, four connecting rods 8a, 8b
, gc and 8d. The end members 6a and 6b may have any suitable shape, but in the third specific example, they are formed into a substantially disk shape. On the upper surface of the end member 6b located on the lower side, a first
As shown in FIG. 2-B and FIG.
A protrusion 102 is provided at the rear portion when viewed in the mounting direction shown by . Approximately at the center of the inner surface of this protruding portion 102
A letter-shaped recess 104 is formed, and a side surface 104 of the recess 104 is formed.
a and 104b define a positioning surface. A pair of short rods 106a and 106b are further provided at an interval from each other approximately at the center of the upper surface of the end member 6b. short rod 106
a and 106b are formed from quartz glass, and the end member 6b
is fused to the top surface of the Also, on the lower surface of the end member 6a located on the upper side, there is an edge.

In particular, a protrusion lO8 is provided in the rear part of the semiconductor wafer or the like as seen in the mounting direction indicated by the arrow 100. The protrusion 1 is also located at the approximate center of the inner surface of the protrusion 108.
Similar to 02, a generally V-shaped recess (not shown) is formed, and the sides of the recess define positioning surfaces. As shown in FIG. 12-A, approximately in the center of the end member 6a, there is an elongated hole 11.
0 is formed, and a suspension means 26 having a U-shaped cross section is fixed to the outside of the oblong hole 110. The N depth means is composed of a suspension member 28 made of quartz glass, and the I
I! ! The frame member end 8 is fused to the upper surface of the member 6a. In the support main body 2 as described above, 1'c+'z,w
JlO diagram, ml1 diagram, 1llz-B diagram and 71413
As can be understood from the figure, one end side (upper end side) of the connecting rods 8a and 8b is fused to the lower surface of the protruding part 108 of the end member 6a, and their other ends @ (lower end side) are attached to the protruding part of the end member 6b. 102 and is also fused to the top surface of connecting rods 8c and 8.
One end side (upper end @) of d is fused to the lower surface of the end portion t14'aa, and their other end side (lower end @) is fused to the upper surface of the end member 6b.

Next, mainly refer to FIGS. 10, 11, and 12-B.1. Now, to explain the support means 4# which is removably attached to the support main body 2', the illustrated support means 4'
7'c two end supports 11 arranged at intervals.
2& and 112b, and the end supports 112a and 11
Three support rods 114a, 114 installed between 2b
b and 114C.

The end supports L12a and 112b are of substantially the same construction and are assembled together with the first member 116. Second @l
x l 8, including a third member 120 and a fourth member 122 (see also FIGS. 14 and 16, which show lower end support 112b).

Mainly referring to FIGS. 14 and 16, t41. x
The member 116 has a rectangular notch 124 (one end of the first member 116 is shown in FIG. 14, and the other end is shown in FIG. 16) at both ends of the outer surface located on the outside. )
is formed, and a recess 126 is formed at one end of the lower surface, extending over the entire width to the outer end of the notch 124 (in the end support 112a, the recess 126 is located in the first member 1).
16). The second member 118 also has rectangular notches 128 (one end of the second member 118 is shown in FIG. 14, the other end is shown in FIG. 14, and the other end is shown in FIG. 16) is formed, and a recess 130 that exists at the outer end at of the notch 128 is formed over the entire width at one end of the upper surface (for the end support 112aK, the recess is 2 member 11B
(formed at one end of the bottom surface). This second member 11
8 is substantially equal to or slightly less than the width of the recess 126 formed in the first member 116, and the width of the recess 130 formed in the second member 118 is substantially equal to or slightly less than the width of the recess 126 formed in the first member 116. The width of the member 1160 is larger than that of the member 1160. Further, sloped surfaces are formed at both end corners of the third member 120 (see FIG. 16), and a rectangular notch 132 extending inward is formed in each of the sloped surfaces on one side of both ends. This third member 120
Further, recesses 134 and 136 are formed in the lower surface of the end support 11 over the entire width at both ends and the center.
2a, the recesses are formed at both ends and the center of the upper surface of the third member). Furthermore, the fourth member 12
2, a through hole 138 having a square cross section is formed at one end (see FIG. 14), a recess 140 spanning the entire width is formed at one end of the lower surface, and the other end of the upper surface (16th reference)
A recess 142 is formed over the entire width (in the end support 112a, the recess at one end is formed in the fourth member 12
14 member 122 is formed on the upper surface of 2, and the recess at the other end is 122
). The width of the fourth member 122 is
The width of the recess 136 formed at the center of the third member 120 is substantially equal to or slightly smaller than this, and the width of the four recesses 142 formed at the other end of the fourth member 122 is substantially equal to or slightly smaller than the width of the recess 136 formed at the center of the third member 120. The width is substantially equal to or slightly wider than the width of the intermediate portion of the member 120 of No. 3 in which the recess 137 is formed. Both corner traps at one end of this fourth member 122 are formed with inclined surfaces, and the shape of this one end corresponds to the shape of the recess of the protrusion 108 of the end member 6a and the recess 104 of the protrusion 104 of the end member 6b.゜It's there.

Referring to FIGS. 1O, 11, 14, and 16, the holding rods 114a, 114b, and 114C assembled to the end supports 112a and 112b will be described. may have an appropriate cross-sectional shape such as circular or polygonal, but preferably has a square cross-sectional shape as shown. Retaining rods 114a, 114b and 1
Locking notches are formed at both ends of 14c. First, to explain the holding rod 114a, two adjacent side surfaces (the 12th-B
A locking notch 144 is formed by cutting out the two side surfaces located on the left side in FIGS. 14 and 45 to form a substantially defined plane (in FIGS. 114a). The cross-sectional shape of the portion where this stop notch @ 144 is formed is square, as shown in FIG. The size of the notch 128 formed in one end of the member 118 is substantially equal to or slightly smaller than the size of the notch 128 formed at one end of the member 118. Further, the length of the retaining notch 144 in the longitudinal direction is equal to the length of the recess 126 of the first member 116.
, the thickness of the portion where the recess 140 of the fourth member 122 is formed, or the thickness of the portion where the recess 140 of the fourth member 122 is overlapped. The thickness is also a little thick. Furthermore, the cross section of this holding rod 114a is substantially equal to or slightly smaller than the size of the through hole 138 formed in the member 122 of wJ4.

The holding rod 114a of this through hole has a plurality of rods arranged at intervals in the longitudinal direction at one corner of the intermediate part (the corner located on the right side in Figures 12-B, 14, and 15). A retainer 1146 is formed. To explain the holding rod 114b, at both ends of the holding rod 114b,
- A locking cutout 148 is formed by cutting out a side surface (the side surface located on the left side and facing inward in FIGS. 12-B, 16, and 17) to form a substantially vertical surface surface. (In FIGS. 16 and 17, the holding rod 114b
(showing a locking notch 148 formed in the lower end of the holder). The cross-sectional shape of the portion where this retaining notch 148 is formed is rectangular, as shown in FIG. It's practically the same size as the squid, but slightly smaller than the squid. Further, the length of the locking notch 148 in the longitudinal direction is the same as that of the second member 118.
The thickness is substantially equal to or slightly larger than the thickness of the other end portion of the third member 120 by 1° when the portion where the recess 134 is formed on the one end side of the third member 120 is overlapped. Further, one side of this holding rod 114b17) is substantially equal to or slightly smaller than the width of the notch 1320 formed at one end of the third member 120, and is also smaller than the depth to the bottom of the notch 132. Retaining rod 114b as shown
Also, a plurality of retaining grooves 146 are formed at intervals in the longitudinal direction at one corner of the intermediate portion (the corner located on the upper side in FIG. 12-B and FIG. 17) (FIG. 11). reference)
. Furthermore, to explain the construction of the holding rod 114C, both ends of the holding rod 114C have negative sides (Fig. 12-B,
In Figures 16 and 17, the left side is 1'1. A locking notch 150 is formed in a substantially vertical plane (see FIGS. 16 and 9).
A locking notch l5 (l shown) formed in the lower end of the retaining rod 1140 in FIG. This hold is long 150
The cross-sectional shape of the portion where is formed is rectangular, as shown in FIG. Or this one is slightly smaller. Further, the length in the longitudinal direction of the locking notch 150 is the length when the other end of the first member 116 and the part where the recess 134 is formed at the other end of the third member 120 are overlapped. Thickness and substantially equal 1. Squid or slightly larger than these. Furthermore, one of the holding rods 114c
The side is a notch 13 formed at the other end of the third member 120.
2 or slightly smaller than this, and also smaller than the depth to the bottom of the notch 132. Also in the holding rod 114c of this through hole, there is a corner l of the middle part! 1ll
A plurality of holding grooves 146 are formed at intervals in the longitudinal direction (at the lower corner in FIGS. 12-B and 18) (see FIG. 11).

The holding rods 114B, 114b and 114ct, the first member 116, the second member 118, and the member 12 of the bush 3
0 and the fourth member 122 are removably assembled to form the support means 4' as follows. Referring to FIGS. 14 and 16 together with FIG. 12, to explain how to attach the lower part of the support means 4#, first, place the fourth member 122 on an assembly table (not shown). Then, the third member 120 is introduced to the other end of the fourth member 122 as shown in FIG. 12-B. In this way, the recess 136 formed on the lower surface of the third S member 120 is fitted into the recess 142 formed on the upper surface of the wJ4 member 122, and the third member 120 is assembled into the required hole. It will be done. Next, the holding rod 114a is inserted into the through hole 138 formed at one end of the 40th member 122.
At the same time, insert the lower end of the holding rod 114b into the notch 132 formed at one end of the third member 120, and then assemble the VC second member 118 between the holding rods 1/4a and 114b. wear. The second member 118 is assembled by engaging the notch 128f formed at one end with the portion of the holding rod 114a where the locking notch 144 is formed, and by engaging the notch 128 formed at the other end. This is achieved by merging the retaining rod 114b into the portion where the locking notch 148 is formed.

Next, a notch 132 formed at the other end of the third member
The lower end of the holding rod 114c is inserted into the holding rod 114c, and then the first member 116 is assembled between the holding rods 114a and 114c. This first member 1160 is assembled by engaging the notch 124 formed at one end with the portion of the holding rod 114a where the locking notch 144 is formed, and the notch formed at the other end of the trap. 124 is engaged with the portion of the holding rod 114c in which the locking notch 150 is formed. ] A required through hole vr-IIU is attached to a recess 130 formed on the upper surface of 18.

When assembled in this way, the first part It116, the second member 118, and the fourth member 122 are positioned in the locking notch 144 from the upper side 11j at the lower end of the holding rod 114&, and are engaged. The downward movement of the holding rod 114a is prevented by the inner surface (upper surface) that defines the locking notch 144 and the upper surface of the 1iBIJ 116, and the outer surface (lower surface) that defines the locking notch and the upper surface of the fourth @122
The lower surface of the holding rod 114a prevents the holding rod 114a from moving upward (in such a state, the holding rod 114a
is held in such a state that the two outer side surfaces of the portion where the retaining notch 144 is formed, that is, the bottom surface of the retaining notch 144 are in contact with the two outer side surfaces defining the through hole 138 of the fourth member 1220. ). Further, at the lower end of the holding rod 114b, the second member 11 is inserted into the locking notch 148 from above.
8 and the third member 120 are positioned, and the locking notch 1
48 and the upper surface of the second member 118 prevent the holding rod 114b from moving downward, and the outer surface (lower surface) defining the locking notch 14B and the third member 120 prevents the holding rod 114b from moving upward (in this state, the holding rod 114b has the inner side surface of the portion where the locking notch 148 is formed, that is, the bottom surface of the locking notch 148 is held in contact with the bottom surface of the third #AAl2O2 notch 132). Furthermore, the first member 11 is inserted from above at the lower end of the holding rod 114C or into the locking notch 150.
6 and the third member 120 are positioned, and the locking notch 1
50 and the upper surface of the first member 116 prevent the holding rod 114c from moving downward, and the outer surface (lower surface) defining the locking notch 150 and the third member 120 prevents the holding rod 114C from moving upward (in such a state, the holding rod 114c has the side surface of the portion where the locking notch 150 is formed, that is, the bottom surface of the locking notch 148 Third member 1
20 of the notches 132 are held in contact with each other). Thus, retaining rods 114a, 114b and 11
4C! As shown in FIG. 12-B, the lower end side of the
and a fourth &1115t122 end support 11
2bK can be attached and detached as required.

The manner of assembling the upper part of the support means 4' is as described in 1. above. It is almost the same as the assembly method for the lower part, and can be done as follows. That is, the third part It12 is located between the holding rod 114b assembled as described above and the upper end of 1]4C.
0, and then the fourth
Position the through hole (not shown) of the TiIl shield 1220 and assemble the other end into the center of the third member 120 from above. Thereafter, the second member 118 is assembled from below between the holding rods 114a and 114c, and the first member 116 is further assembled from below between the holding rods 114a and 114b.

Thus, at the upper end of the holding rod 14a,
The IC fourth member 122 and the second IC member 1 are held in a locking notch (not shown) in order from the upper side.
18 and the first part @'l16 are positioned, and the relative downward movement of the holding rod 14a is prevented by the outer surface (upper surface) defining the locking notch and the upper surface of the fourth member 122, The inner surface (lower surface) defining the locking notch and the lower surface of the first lB 1116 prevent the holding rod 114a from moving relative to the upper end. Also, holding rod 1
The upper end 1fB of the 14b is held in substantially the same way as the lower end thereof, and the third
member 120 and the first member 116 are positioned, and the outer surface (upper surface) defining the locking notch and the third member 12
The upper surface of the holding rod 114b prevents relative downward movement of the holding rod 114b, and the inner surface (lower surface) that defines the locking notch and the lower surface of the first member 116 (therefore, the holding rod 1]4
The relative upward movement of b is prevented. Further, at the upper end of the holding rod 114c, the third member 120 and the second S member 118 are held in substantially the same manner as the lower end thereof, and are positioned from above in a locking notch (not shown).・i
The outer surface (upper surface) defining the stop notch and the third portion vf1
The upper surface of the holding rod 114c prevents the holding rod 114c from moving relative downward, and the holding rod 11 is prevented from moving relative downwardly by the upper surface of the holding rod 114c.
Relative movement upwards of 41 m is stopped.

As described above (in the assembled support means 4'tC, each of the holding rods 114a, 114b and 114e is parallel to each other in the upper and lower blade direction between the end supports 112a and 112b.
extending, each retaining rod 114B, 114b and 114
(!) The retaining rods 114b and 114b are positioned so as to face inward.
The retaining grooves 146 formed in 4C are aligned in the lateral direction, and the retainer #1146 formed in the retainer rod 114a is located slightly below the aligned retainer 111146 in the vertical direction.

The above-described support means 4' is detachably attached to the support body i, as shown in FIGS. 10 to 12. To explain further, in order to install the support means 4', first tilt the support means 4' slightly so that the connecting rod 8 of the support body 2'
a8b+8c and 8d and then the lower 111 part support 1 of the support means 4'
12b is placed on the upper surface of the end member 6b as shown in 12th-B@. When placed in this manner, on the lower end side of the support means 4', one side is placed in the space defined by the second member 8, the third member 120, and the fourth member 122 of the end support 112b. short rod 106a is received, and the first member 116, the third member 120 and the fourth member 12
2 within the space defined by the other short rod 106b.
is received, thus placing the end support 112b in position on the end member 6b.

In this placed state, as can be easily understood from FIG. 12-B, the second member 1 is moved by the short rod 106aK.
28 is prevented from moving in the direction in which it comes off (upper right in FIG. 12-B), and movement of the first member 116 in the direction in which it comes out (lower left in FIG. 12-B) is prevented by the short rod 106bK. The end support 112b is reliably held in the assembled state described above. In addition, in this mounting state tC, the fourth member 122 has one end surface defined in the recess 1041 of the protrusion 102 of the end member 6b, and both side surfaces 104 & 1
04b and the bottom surface 104 (!),
The first member 1164''!, -J[2>! is located at a position where it abuts the side surface 104& of the recess 104 of the protrusion 102, and the second member 118 has one end surface protruding from the recess 10 of the recess 102.
It is located at a position where it comes into contact with the side surface 104b of No. 4. Then,
Both ends of a substantially U-shaped locking rod 1520 protrude inward through the long hole 110 from above the end member 6a of the support main body 2', and both ends are connected to the first member i of the end support 112a.
16, the space defined by the third member 120 and the fourth member 122, the second member 118, and the third part 1t12
0 and the fourth member 122. When inserted in this manner, the upper end support 112aK as well as the lower end support 1]2b also move to one end f of the locking rod 152. llIc prevents the first member 116 from moving in the disengaged direction, and the other end of the locking rod 152 prevents the second member 11B from moving in the disengaged direction, and the end support 1'' 2a is also prevented from moving in the disengaged direction. It is reliably maintained in the assembled state. In such a state, the end support 1
12aKk, one end surface of the fourth portion 1122 is located in a contact position with both side surfaces and the bottom surface that define the recess (not shown) of the protruding portion 108 of the end member 6a, and the second member 118 is in contact with the bottom surface. The end surface of the first 81 material 116 is located at a position where it abuts one side of the recess of the protrusion 108 , and one side of the first 81 material 116 is in contact with the protrusion 108 .
It is located in a position that abuts the other side of the recess. When the support means 4' is removably attached to the support main body 2' in this way, the support means 4' is placed as shown in FIGS. By means of the stop rod 152, the king is also fixed on the lower side.
The support means 4' are held securely by the short rods 106& and 106b.

When the support means 41 is installed in this way, the holding rod 11
4a is another holding rod 114b viewed in the direction of mounting a semiconductor wafer or the like as indicated by arrow 100 (FIG. 10).
and 114e and behind this retaining rod 114.
It is located between b and 114c.

Then, the semiconductor wafer is inserted in the direction not shown by the arrow 100 (in detail, in the direction slightly inclined from the upper right to the lower left in FIG. The position of each holding rod Lla, 1
14b and 114c are supported within the retaining grooves 146, and the free ends thereof are held in an upwardly inclined state.

In the above-mentioned support device, the support means 4 is connected from the support device main body 21.
To remove ', just reverse the installation procedure above. tf
In order to disassemble the support means 4' into its respective component parts, the assembly procedure described above can be reversed.

Also in the third specific example described above, the end support 112b of the support means 4' is supported on the end member 6b, and the end support 112a is vertically displaceable. And the same effects as the second specific example are achieved.

The third specific example of the vertical support has been described above, but
This third specific example can also be modified or modified as follows. For example, in the third specific example,
The first Wi 416, the second member 118, and the third member 1 in which the end supports 112a and 112b are removably combined
20 and the fourth member 122, but instead of this, it can also be constructed from a plate-shaped material having an appropriate shape.

In a third embodiment, the support means 4' are also combined with end supports 112a and 112b and three retaining rods]]4a
, ]14b and 1]]4C, but if desired, end supports 112a and ]]2b and two retaining ronds extending between the end supports ]]2a and ]]2b. Alternatively, it can also consist of four or more retaining rods. Furthermore, in the third embodiment, the support means 4'
, i.e. the end supports ]]2a and ]]2b and the holding o7
Do l] 4a, 11'! b and 1]4C are made of silicon, but instead of this, end supports 1]2a and 112b and retaining rods]]4a, ]]4b and ]]4C
One of the two may be made of quartz glass or silicon carbide.

[Brief explanation of the drawing]

FIG. 1 is a side view showing a first embodiment of a vertical support constructed according to the present invention. 2 is a plan view showing the support of FIG. 1; FIG. FIG. 3 is a sectional view taken along line m-III in FIG. 1. 4 is an exploded perspective view showing the support body and holding rod of the support shown in FIG. 1; FIG. FIG. 5 is a sectional view taken along the line V-■ in FIG. 4. 6-A to 6-C are perspective views showing each holder of the support of FIG. 1. 7-A and 7-B are sectional views showing a state in which one end side of the holding rod is assembled to the holder of FIG. 6-A. FIG. 8 shows a second vertical support constructed in accordance with the present invention.
FIG. FIG. 9 is an exploded perspective view showing the support shown in FIG. 8 in an exploded manner; FIG. 10 is a side view showing a third specific example of a vertical support constructed according to the present invention. 1] FIG. 1 is a front view showing the support shown in FIG. 10. Figure 12-A and Figure 12-B are a cross-sectional view taken along Δ-ARK in Figure 10 and n-n in Figure 10, respectively.
, $I. FIG. 13 is a perspective view showing the support main body of the support shown in FIG. 10. 14 is an exploded perspective view showing one end side of the lower end of the support means in the support tool of FIG. 10; FIG. FIG. 15 is a sectional view taken along line bXV-XV in FIG. 14. 16 is an exploded perspective view showing the other end side of the lower end of the support means in the support tool of FIG. 0; FIG. FIG. 17 is a sectional view taken along the line II-XVII in FIG. 16. Figure 18 shows the XVI I I -XV in Figure 16.
Sectional view taken along line III. 2.2' and 2'... Support main bodies 4.4' and 4'... Support means 6a and 6b... End member 32 a * 32 b 132 c * 32 a'
I32 b' and 32c'...Retaining rod 38...Retaining groove l]2&and]]2b...End support]]4a, 1]
4b and] 24 c--Retaining rod 146--Retaining groove P--Semiconductor wafer patent applicant Terinis Co., Ltd.
Figure 1 Figure 7-A Figure 6-C Figure 7-B Knee Figure 10 Figure 11 Figure 12-A Figure 12-8 Figure 13 Figure 14 Figure Qin 15 Figure 17 Old figure

Claims (1)

[Claims] 1. A support body including two end members spaced apart and a plurality of connecting rods fixed between the end members, and a semiconductor wafer or its similar. 1. A vertical support, comprising: support means for supporting the support means; one side of the support means is removably supported by one of the end members, and the other side is movable in the vertical direction. 2. The support means includes at least two support rods;
2. The vertical support device of claim 1, wherein each of the support rods is formed with a plurality of holding grooves spaced apart along its length for supporting semiconductor wafers or the like. 3. The support means comprises at least three support rods arranged substantially parallel to each other, and when viewed in the direction of mounting the semiconductor wafer or the like, at least one of the support rods overlaps the other support rod. Located behind the support rod,
A vertical support according to claim 2. 4. The support means comprises at least three support rods extending between the end members, one side of each of the support rods being removably supported by one of the end members, and the other end of each of the support rods being removably supported by one of the end members. 4. The vertical support according to claim 3, wherein the side is held by the other end member so as to be vertically displaceable. 5. Each of the cough end members is configured in a lattice shape, and one side of each of the support rods is removably supported via a holder that is detachably attached to the lattice-shaped space of one of the end members. The other side of each of them is connected to the other end member through a holder detachably attached to the grid-like space of the other end member. 5. The vertical support according to claim 4, which is held movably in the vertical direction. 6. The support means comprises two end supports disposed at intervals and at least three support rods mounted between the end supports, one of the end supports 4. The vertical support according to claim 3, wherein the body is detachably supported by one of the end members. 7. The vertical support according to claim 6, wherein each of the at least three support rods is removably associated with the end support. 8. The support body is made of quartz glass, and the support means is made of silicon or silicon carbide, especially i'f
A vertical support according to any one of claims 1 to 7.