JPH05500117A - A device that positions the center of an optical fiber along a predetermined reference axis - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] Cross related application for device for positioning the center of an optical fiber along a predetermined reference axis reference The subject matter disclosed herein is co-pending application no. 07/388,548, filed on the same date as this application. "Optoelectronics with combined and positioned optical fibers" Disclosed and requested by FF1FJ.

Position the center of a cylindrical member along a predetermined reference axis, independent of variations in the outer diameter of the member The present invention relates to a positioning device.

Description of the prior art An optical fiber is used to position the central axis of the fiber with respect to the reference axis. Devices for positioning fibers are known. Standards used for such devices Typical means are generally V-shaped grooves formed in the substrate material that are positioned Acts as a cradle for receiving fibers. A typical example of such a device is the U.S. No. 4,756,591 (Fisher et al.), in which the V-groove is An elastic member is formed on the recon board and presses against the fiber to hold it in the groove. hold Deeper grooves allow the groove to retain the jacket of the fiber within the device. It can be stepped to form sections.

U.S. Pat. No. 4,756,591 (Seam) describes a groove having a pair of intersecting V-grooves. A silicon substrate is disclosed. The fiber to be positioned is placed on one side of the groove. , and at the same time a gym is arranged in the other groove. Shims are tapered or eccentric fibers which is slid or rotated under the first fiber. When the shim is rotated, it acts to lift the shim so that its axis is aligned with the reference axis.

Place the cover over the substrate to ensure gripping of the first fiber in the correct position be able to.

U.S. Pat. No. 4,802,727 (Stanley) also applies to optical elements using V-groove structure. An apparatus for positioning a waveguide and a waveguide is disclosed. U.S. Patent No. 4,826,272 (Pym Vinella et al.) and U.S. Pat. No. 4,830,450 (Cornell et al.) disclose a truncated conical penetration A positioning arrangement utilizing a member having holes is disclosed.

In single-crystal silicon, the silicon crystal is corroded exactly along the crystal plane, so the photo Micro-machining technology creates precise grooves or structural features, making it ideal for the above-mentioned devices. It is believed that the material is Corrosion occurs when a selected crystal face is different from the adjacent face. It acts with a certain degree of control, giving you the precise control you need. In practice, ■ grooves have a controlled width and Can corrode to the depth of the flattened tip. Under conditions of You can eat it. Photographic microfabrication methods are generally used in Proddy and Muray's The Physics of Boo? Iklov Application (The Physic s of Microfabrication) J (1982), Plenum Publishing. Company, New York.

Optical fibers have an inner core with a predetermined refractive index surrounded by a coating layer with a small refractive index. Ru. The inner core is the medium through which the light energy is guided, while the covering layer is in contact with the core. Define the refractive index boundary. The outer diameter of the fiber varies around the planned nominal size. It's possible. For example, two fibers with the same nominal size from the same manufacturer have an outer diameter of changes with a magnitude of 4μI, whether positive or negative. External diameter saw between fibers Variations in the fiber make it difficult to accurately position the central axis of the fiber's core with respect to the planned reference axis. make it difficult.

In view of the above, long and common fibers or other small-sized (such as capillary) to form a positioning device for accurately positioning the center of the cylindrical member. The ability of microfabrication technology is used to create precise structures, channels and/or surfaces in crystalline materials. It is believed that it is advantageous to use Furthermore, it requires great skill, expensive equipment, and (based on a predetermined point on a fiber or other cylindrical member without the need for an alignment procedure) It is believed to be advantageous to provide a positioning device that is consistently aligned with the quasi-axis.

Summary of the invention The present invention is directed to the geometrical center of the end face of a cylindrical member such as an optical fiber. A positioning device for positioning a predetermined point along a predetermined reference central axis. Ru. In a preferred case, the positioning device has first and second arms; each has first and second sidewalls that cooperate to define a groove therein. preferred In particular, the groove of each arm is the leading groove, and when the arms are stacked, the leading groove is such that the groove forms a funnel-shaped passageway over at least a predetermined portion of its length. act together.

The passageway has an inlet end and an outlet end, and a reference axis extending therebetween. of fiber A fiber introduced at the entrance end of a passageway with its axis away from the reference axis is Due to contact with one side wall, the planned point of the end face of the member is aligned with the reference axis. and held there by contact with the first and second arms. Can be displaced. A first and a second Each of the arms of has a trough therein, each trough extending a predetermined distance behind the groove in the arm. disposed on the arm at a distance so that in the closed position the trough defines a guideway. synergistically.

The arm having the predetermined groove is preferably moved from the first closed position to the second central position. It can be moved to any position. At this time, the stacked arms form a cantilever beam on the base material. can be attached to. each of the arms with a substantially equal and oppositely oriented force; Means are provided for forcing it towards the position.

In a preferred embodiment, the forcing means has a reduced thickness on each of the first and second arms. a thin section, and this thin section is such that when each arm is deflected by contact with the cylindrical member, , generates a force on each arm that pushes each arm toward the closed position.

As long as each arm is movable and pushed toward the closed position, the grooves formed in it will It should be understood that it is not necessary to be a pre-emptive ditch.

Therefore, other shapes in which the arms are movable but the grooves in each arm are not predetermined grooves. positioning devices can be constructed as are within the contemplation of the present invention.

Briefly, the present invention provides that the grooves of each arm may be in the form of a predetermined groove or Any movable positioning device of the arm is included, even if it is a shaped groove. or , the present invention provides that the grooves in each arm are predetermined, whether the arms are movable or fixed relative to each other. including any positioning device in the form of a

In another aspect, the invention is formed from a pair of opposing positioning devices. This invention relates to a pair of fiber series connectors.

In any embodiment, the positioning device uses microfabrication techniques to Preferably, it is made of a crystalline material such as RICON. Each structural element of the positioning device ( That is, each arm and each substrate) is made from a chunk of silicon wafer. Finish et al. The wafers are aligned, stacked, and bonded, and the bonded wafers are finished. Each of the resulting positioning devices is cut from the assembled assembly. Alignment of stacked wafers selected and combined alignment grooves for each of the wafers. This is ensured by using fibers with precise diameters.

Brief description of the drawing The invention lies in the following detailed description, which refers to the accompanying drawings which form a part of this application. will be more fully understood than in the light.

Figure 1 shows the present invention for positioning a predetermined point on one end of an optical fiber with respect to a predetermined reference axis. FIG. 2 is an exploded perspective view of a positioning device according to the present invention.

FIG. 2 is a perspective view of the positioning device of FIG. 1 in a fully assembled state.

FIG. 3 shows the assembled positioning device of FIGS. 1 and 2 taken along line 3-3 of FIG. FIG.

FIG. 4 is an elevational cross-section of the assembled positioning device of FIG. 2 taken along line 4--4. Figure 2 shows an internal flattened V-groove.

FIG. 4A is a view generally similar to FIG. 4, in which the positioning device has a complete A V-groove is formed, whereas FIG. 4B is a view generally similar to FIG. In this case, both a full-circle groove and a flattened V-groove are formed.

Figure 5 shows the arm of the positioning device in Figure 1, showing the relationship between the central axis of the groove and the central axis of the guideway. FIG.

6A and 6B, 7A and 7B, and 8A and 8B represent the positioning shown in FIGS. 1 and 2. The effect of the clip placed on the arm of the device as the optical fiber is introduced inside. FIG.

Figures 9 and 10 show that the arm has a groove without a leading edge and that the arm is along only one axis. 1 and 2 of another embodiment of a positioning device according to the invention articulated with respect to each other; 2A and 2B are generally similar exploded and assembled perspective views;

11 and 12 are cross-sectional views taken along lines 11-11 and 12-12 in FIG. It is.

Figures 13 and 14 show that only one arm has a non-contingent groove and both arms 1 and 2 of a further embodiment of a positioning device according to the invention which can be articulated with respect to each other; FIG. 1 is an exploded perspective view and an assembled perspective view generally similar to FIG.

15 and 16 are cross-sectional views taken along lines 15-15 and 16-16 of FIG. It is.

Figures 17 and 18 show the present invention in which the arms have predetermined grooves and the arms are fixed to each other. An exploded perspective view and assembly generally similar to FIGS. 1 and 2 of another embodiment of a positioning device according to It is a vertical perspective view.

FIG. 19 is a cross-sectional view taken along line 18-18 of FIG.

FIG. 20 shows the flap in the groove of the positioning device according to another embodiment of the invention shown in FIG. 19 is a side cross-sectional view taken along line 18-18 of FIG. 18 showing the location of the fiber; FIG. .

FIG. 21 shows the fibers shown in FIG. 1 forming a pair of fibers in accordance with the present invention. 22 is an exploded isometric view showing a pair of positioning devices as shown in FIG. 22, while FIG. FIG. 22 is an isometric view of the coupling of FIG. 21 taken up;

23 and 24, respectively, illustrate the configuration of a pair of fiber series fittings according to the present invention. A pair of positioning devices according to an embodiment of the present invention as shown in FIG. FIG. 2 is a plan sectional view and a side sectional view.

Figures 25 and 26 show Figures 21 and 2 in open and partially closed positions, respectively. 2 is an isometric view of the housing used in the fiber pair fiber chain fitting shown in Figure 2. 27, whereas FIG. 27 shows the fully closed position obtained along section line 27-27 of FIG. FIG. 26 is a cross-sectional view of the housing of FIG. 25 in FIG.

Figure 28 shows a housing used in the fiber pair fiber series connector shown in Figure 24. FIG. 27 is a cross-sectional view generally similar to FIG. 27 of FIG.

FIG. 29 shows another example for a pair of fiber series ties formed by a pair of positioning devices. FIG. 3 is an isometric view of the housing.

Figures 30 and 31 respectively illustrate surface-mounted edge-active devices. Use of a positioning device according to the invention for positioning an optical fiber with respect to a central axis FIG.

FIG. 31A shows the present invention positioning a lens with respect to an optoelectronic element. FIG. 32 is a side elevational view generally similar to FIG. 31 illustrating the positioning device according to the present invention;

32 and 33 each have an edge-mounted surface active device. Isometric exploded view similar to positioning the optical fiber with respect to the central axis of the device and an assembly diagram.

FIG. 34 shows a method for manufacturing multiple arms or substrates used in a positioning device according to the present invention. FIG.

FIG. 35 shows a photographic process for manufacturing multiple arms or substrates for a positioning device according to the invention. FIG. 2 is a perspective view of a mask used for medical treatment.

Figure 36 shows a portion of the mask used to create multiple arms of way/134. This is an enlarged view.

Figures 37A-37E are schematic representations of processing steps performed during wafer fabrication. Ru.

FIG. 38 is an enlarged view of a portion of a mask used for manufacturing wafer solder masks. .

FIG. 39 is an enlarged view of a portion of the mask used to create the substrate on the wafer.

40A-40D show composites from stacked wafers with arms and substrates. is a schematic representation of the steps used to form a pair-fiber chain of several fibers. .

FIG. 41 is a definitional drawing illustrating predetermined groove as the term is used in this application. Ru. and 42A-42F each include a cylindrical section along at least three contact points according to the present invention. FIG. 7 is an end view showing another arrangement of movable arms holding material;

Detailed description of the invention Throughout the following detailed description, like numbers refer to like elements in all drawings. It will be done.

With reference to FIGS. 1 and 2, a positioning device according to the present invention, designated generally at 20. is shown in disassembled and fully assembled states. As unfolded here, In a preferred example, the positioning device 120 is made of monocrystalline silicon or other corrosive material. Microfabricated from possible single crystal materials. These materials are mounted using differential corrosion methods. This is preferred because it allows for accurate formation of the structural features of the structure 20.

The positioning device 20 locates a predetermined point on the end face of the cylindrical member, typically on the central axis of the member. Useful for accurately locating points along reference axes. Typically, this part of the member The reference axis is another axis, such as the working axis of a device that is functionally combined with the cylindrical member. is collinear with itself with respect to Description of cylindrical members throughout this application belongs to the terminology of optical fibers, but the present invention relates to a suitable optical fiber having a cylindrical shape with a small diameter. It should be understood that it can be effectively used for other components. non-limiting example As described above, the positioning device of the present invention is capable of positioning a point on the end face of a capillary tube or tube of length. It can be used for Small diameter is usually 0.020 inch or less, but generally 0.0 It means 4 inches (1 ml) or less. Furthermore, the term cylindrical refers to a completely circular outer It is not strictly limited to objects that have a lateral shape, and whose outer contours are symmetrical about their central axis. It should be further understood that the term is applicable to any suitable symmetry.

Thus, again by way of non-limiting example, the positioning device of the invention may be a polygonal member or an elliptical member. It can be used at a point on the end face of a circular member.

As mentioned, the cylindrical member preferably takes the form of an optical fiber. present invention In practice, the positioning device moves the scheduled point P on the end face R of the optical fiber F to the scheduled position. It is placed along the reference axis R. In fact, point P is the geometric center and on axis A of core C of fiber F (FIGS. 6A and 6B). Core C is the outer coating layer surrounded by A jacket J is provided around the coating layer, but this It is peeled off from the fiber F prior to insertion of the fiber into the determining device 20. Ja The jacket J can have a single layer or multiple layers. As discussed earlier, fiber The outer diameter dimension of the coating layer C of -F may vary from fiber to fiber. typically The variation in this dimension from fiber to fiber is on the order of 3 μm. This situation corresponds to the conventional technology. This makes it difficult to position the point P along the reference axis R using a positioning device.

The fiber can be a single mode or multimode fiber. You can clearly see it below Sea urchin, positioning device! 20 positioning capabilities from single mode fiber to other fibers. to effectively transmit the light emitted to the fiber or optical device. single-mode fiber within the precise tolerances required to position the fiber. It is particularly suitable for positioning point P of

1 and 2, the positioning device 20 includes a first arm 22A and a second arm 22A. 22B. Preferably, each of arms 22A, 22B is are made identically shaped in the manner described, so that only one arm, e.g. arm 2 Details of the structure of 2A will be explained.

However, the details of each structure of the arm 22A are as follows: One thing is clear. Therefore, the correspondence with appropriate alphabetic subscripts The numbers will indicate details of the corresponding structure of arm 22B. Or, for example, Figure 13 16 to 16 and the embodiments of FIG. 42) where the arms are not substantially the same. If so, adjustments must be made to apply the necessary force to maintain point P on reference axis R. Must be.

The arm 22A has a base having a first main surface 26A and an opposite second main surface 28A. It includes a portion 24A. The base portion 24A extends along the entire length of the arm 22A and The dimensions of the center portion 25A of the base portion 24A define the basic dimensions of the arm 22A. general A clip, designated 30A, is defined on the first end of arm 22A. nine Lip 30A is a relatively thick cradle portion on first surface 26A of arm 22A. 32A. The receiver base 32A preferably has a first main surface 26A on it. It has a flat surface 34A parallel to . to give a sense of the physical dimensions it has. To explain, the arm 22A has a total length of about 2800 μm and a width of about 350 μm. . In the central portion 25A, the arm 22A has a thickness of approximately 50 μm, and the arm 22A has a thickness of approximately 50 μm. The remaining portion of 22A is approximately 125 μm thick.

As best seen with reference to FIGS. 3 and 4, the generally leading V-shaped groove 36A is generally Flat first side wall 38A, second side wall 40A and first surface 26A of base 24A The front end of the clip 30A is defined by the cradle 32A of the clip 30A. The side wall 38A is The sidewall 40A has a top edge 39A thereon (FIG. 1), while the sidewall 40A has a top edge 39A thereon (FIG. 1); It has 41A. The term "flat" refers to microscopic steps formed in single crystal materials by corrosion. It should be understood that this includes planes necessarily created by the crystal lattice structure. It is.

Referring now to Figure 41 for definitions, in the groove (using the reference letters from Figures 1 and 2) The meaning of the formed term ``sakudetsu'' becomes clearer. “Destination” as used here. The groove at the end is defined and enlarged by at least two flat side walls 38.40. The groove 36 has a narrow entrance end 42A and a narrow exit end 43A. Side wall 3 of groove 36 The upper edge 39.41 of each of 8.40 is a reference plane with reference axis R inside. It is in RP. Flat surface 34 is also within reference plane RP. Reference axis R is within reference plane RP extends from the inlet end 42 of the groove 36 to the outlet end 43. Each point on the reference axis R is 8.40 from each upper edge 39.41 at equal intervals within the reference plane RP. It is placed in the opposite direction. The distance between the top edges of the side walls is It decreases toward the mouth end 43.

The surfaces of the side walls 38 and 40 are equal and base at an angle greater than 0° and less than 90'. tilted in the opposite direction with respect to the quasi-plane. The angle of inclination A is determined by the crystal lattice structure. In the case of (100) silicon, it is 54.74°. Projection of side walls 38.40 intersect at the line, which itself is the reference passing forward through the outlet end 43 of the groove 36. Intersects axis R. The line is set at the reference plane at an angle B greater than O'' and less than 90°. Tilt with respect to RP.

At the reference plane RP, each of the upper edges 39.41 of the side walls 38.40 is approximately 2,5' narrowing towards the reference axis R at an angle C of 5° from , most preferably about 3°. Become. Angle B depends on the values of angles A and C; typically angle B ranges from 4° to 56°. in range. The [fully flattened] passageway used here is A passage defined by a cooperative combination of individual grooves. [The tip may be partially flattened.] A passage defined by one predetermined groove and a surface.

From the above, the "constant width" passage is poisonous as it progresses from the entrance end 42 to the exit end 43 of the groove 36. , each point on the reference axis R is at the edge 39.41 of the side wall 38.40 in the reference plane RP. It will be readily appreciated that they are spaced a uniform distance apart. uniform width The side walls of the groove can be inclined with respect to the reference plane RP, or if desired It can also extend perpendicular to the surface. A passage formed by one or two grooves of uniform width. The path is called a "uniform width" path.

If the side walls of the groove are not inclined, such a passage will be can have a rectangular cross section in a perpendicular plane.

A tapered groove is one in which the flat sidewalls are perpendicular to the reference plane, but the flat sidewalls are The length is the reference axis between the reference axis and the edge of the side wall so that it intersects on a line perpendicular to the reference axis. This is a groove in which the distance on the surface decreases as the distance progresses from the entrance to the exit of the groove.

In the preferred embodiment seen in FIGS. 3 and 4, groove 36 is a predetermined groove; preferably a third section defined by a portion of the main surface 26 of the arm 22 on which it is disposed. ■It is a groove whose tip is flattened due to the presence of side walls.

The V-groove with the flattened tip extends directly to the surface 34A of the pedestal 32A in the direction toward the main surface 26. When measured along the dimension line at the corner, the depth is the same throughout the entire length of the groove. .

The V-shape of the 436A can take other forms and this remains within the intent of the invention. You should understand that. For example, as shown in FIG. and second side wall 38A, 4. Can be determined by OA only, in this case groove 36A A complete V-shape appears throughout its length. Therefore, the apex 42A of the groove 36A is located at the groove 3. It appears over the entire length of 6A.

FIG. 4B shows the structure shown in FIG. The flattened V-groove extends the predetermined axial distance and simultaneously (the first a second sidewall 38A and a second sidewall 40A) comprising a complete V-groove); Indicates an alternative arrangement that would extend the planned distance.

Therefore, as seen in FIG. 4B, the surface of the pedestal 32A in the direction toward the main surface 26A. When measured along the dimension line perpendicular to 34A, the receiver is in the groove 3 leading to the base 32A. 6 is deeper than at its outlet end 42 (indicated by dimensional arrow 46A). The depth at its entrance end 42 (indicated by dimensional arrow 44A) is greater. stomach.

The fully flattened ■ groove shown in FIG. 4 is preferred. To facilitate manufacturing As disclosed herein, groove 36A extends an axial distance through cradle 32A. It is preferable that all of the above are not decided first. The receivers are located near the ends of the stands 32A and 32B. The installation of formed tabs 48A, 48B (FIGS. 1 and 5) defines groove 36A. The side walls 38A, 40A do not extend along the entire length of the groove, but instead extend over the leading portion of the groove 36A. Immediately after passing, define a short uniform width section. (both the predetermined part and the uniform width part) The total length of the groove 36 in the axial direction (including The length of one width portion in the axial direction is 0.1 mm. I think it is best seen in Figure 5. As shown in FIG. It has a common shaft 50A.

Referring again to FIG. The base portion 2 of the arm 22A is spaced a predetermined axial distance 58A behind A. It's on 4A. The distance 58A is approximately 1 mm. Surface 56A is on the same plane as surface 34A be. The enlarged portion 54A includes inclined side walls 62A, 64A and a base portion 24A. A uniform width end defined by a portion near the second end of the main surface 26A of the A flattened V-shaped trough 60A is provided. In the embodiment shown in Figures 1 and 2 In this case, the tiger 760A is oriented perpendicularly to the surface 56A toward the main surface 26. The depth measured in a line is uniform along its axial length. Trough 60A is It is connected to the predetermined introduction part 68A. 4A and 4 for groove 36A, if desired. Similar to the situation shown in connection with B, if the trough 60A is in a full V-shape or a partial V-shape, Walls 62A, 64A can be tilted relative to each other so that Or trough The walls 62A, 64A defining 60A, 60B are or are not parallel to each other. You can decide the direction ahead of time. As best seen in Figure 5, the trough 60A and introduction section 68A have a common axis 70A. Trough 60A and combination etc. The length of the introduced portion 68A is approximately 1.59 mm.

FIG. 5 is a plan view of one of the arms 22A. In a preferred embodiment, (that The axes 50A, 70A are They differ by a predetermined distance 72 in the quasi-plane RP (the plane of FIG. 5). Preferably, The discrepancy is between the expected maximum and minimum diameter of the fiber being positioned. The difference is at least one-half. As will be apparent herein, structure 36A , 60A/68B, the discrepancy between the axes 50A and 70A is due to the fact that the fiber is guided into the device 20. When inserted, the fibers pass through the side walls 38A, 40A (and Similarly, make sure to hit one side of the side walls 38B and 40B that form 41t36B. This facilitates the centering action of the positioning device 20. this is , ensuring that the wall contacts the fiber in at least two spaced locations. Ru. However, the existence of discrepancy 72 requires further manufacturing considerations as explained. be. In the method to be considered, forcing the fiber The force applied to the fiber (or the force exerted on the fiber due to gravity) is centered on the fiber on the reference axis. It should be noted that the magnitude is smaller than the forcing force of the arm acting on the force.

When the arms 22A, 22B are combined, one is on top of the other. are arranged in an overlapping relationship, and at this time the groove 36A1 of one arm 22A and the trough 6 0A and the introduction part 68A are connected to the corresponding groove 36B and trough 60B of the other arm 22B. and is aligned with the introduction section 68B. The receiver is placed first when tables 32A and 32B are aligned. Grooves 36A, 36B cooperate to form an inlet end 94 (FIG. 4) and an outlet end 96 (FIG. 4). and 5). (If tab 48 is provided, , the passageway 92 thus defined has a portion of uniform width preceding the outlet end 96 thereof. Please note that ) The reference axis R extends axially through the center of the passage 92. . Preferably, the reference axis R is a reference plane RP (including the joined surfaces 34A, 34B). and a plane including the axes 50A, 50B of the predetermined grooves 36A, 36B.

The aligned trough 60 and introduction section 68 work together to define a guide path 98. (Figure 2). Similarly, the axis R° passing through the guide path 98 is the joining surface of the enlarged portions 54A, 54B. 56A, 56B (reference surface in preferred case) and trough/introduction section 6 0A/68A, 60B/68B axis 70B, surface including 70B (Fig. 5) It is on the intersection line. Both axes R and R' are on the reference plane R20 plane 34A, 34B, 56A, 5 6B), but the axes R and R" have a planned discrepancy within this reference plane. They diverge from each other laterally at a distance of 100. For fibers, the stagger distance is 1 00 is typically about 5 μm.

The entrance end 94 of the complete funnel-shaped passageway 92 (best seen in FIGS. 4 and 5) is The coating layer L (or outer surface) circumscribes the fiber F having the maximum expected outer diameter dimension, This will size it to accept the fiber. The outlet end 96 of the 2T circuit 92 is , the coating layer L (or outer surface) is somewhat smaller than the minimum expected outer diameter dimension of the fiber F. circumscribes a fiber F with a large dimension, thereby accepting this fiber F. The dimensions are as follows. In practice, positioning an optical fiber with a nominal outer diameter of 125 μm To do this, the maximum expected outside diameter is approximately 129 μm, and the minimum expected outside diameter is approximately 121 μm. It is a μ country.

The dimensions of each of the troughs 60A and 60B are determined by the aligned troughs 60A and 60B. The guiding path 98 formed as shown in FIG. The dimensions are such that it accepts the fiber F. The guide path 98 is Despite its dimensions, it aids in the insertion of the fiber into the positioning device 20, and It is advantageous.

In the embodiment shown in FIGS. 1-5, each of the arms 22A, 22B Surfaces 34A, 34B are in contact with each other or in contact with each other in the first closed position. Either within a predetermined proximity of each other, if desired. optical fiber For example, the intended proximity distance is typically 5 to 25 μm. In this example The flat surfaces 34A, 34 of the holders 32A, 32B of the clips 30A, 30B B are not fixed to each other and can be moved to a second centered position as described. can. The respective flat surfaces 56A and 56B of the arms 22A and 22B are welded or Conventional attachment means, such as by soldering, secure them to each other. Surface 56A 156B to each other using any other suitable mechanical fastening method to hold them together. It should be understood that it can be used.

The positioning device 20, in a preferred case, further comprises a mounting base 74. (Figures 1 and 2). A flat mounting surface 76 is provided on the base material 74 for mounting. I get kicked. The step 78 of the base material 74 for mounting is arranged so that the mounting surface 76 is separated from the second surface 82. It acts to create a spacing by a predetermined gap distance of 80. Opposite the top of arm 22A The mating major surface, e.g. surface 28A, is formed on the flat surface of substrate 74, such as by welding or soldering. A flat mount is secured to surface 76. Of course, here too, the second main surface of the arm is connected to the base material 7. 4. Use any suitable mechanical attachment method to attach or hold the You should understand that.

The second side of the substrate is shown in the drawings as being generally flat in the preferred example. However, it should be understood that this surface 82 can take any desired shape. Updated here The opposing surface 28A of the arm 22A fixed to the substrate 74 is fully visible in FIG. is, at least in the region of the clip 30A (if the surface 82 is parallel to the surface 76). the description so long as it is spaced from the second surface 82 by at least a predetermined gap. The clip of the arm 22A attached to the base material as in (Clip 3 in the figure) 0A) movement is not hindered.

When assembled, the respective clips located at the ends of arms 22A, 22B The arms 30A, 30B are cantilevered from the joined extensions 54A, 54B at each end of the arm. Supported by Chi Liang Cheng. Arms 22A, 22B are defined by the coordinate axes shown in FIG. It is strong in the defined x-y plane. Furthermore, each of the arms 22A and 22B A base portion located axially intermediate between the cradle 32A, 32B and the enlarged portion 54A, 54B. The relatively thin central portions 25A and 25B of the portions 24A and 24B are flexible portions. Each arm 22 acts like a railroad crossing board in the direction of arrow 88 in the y-x plane. Allow it to bend. As used herein, a flexible portion is The spring member must be strong and flexible in the plane perpendicular to it. should be recognized.

Clips 30A, 30B are bent in their respective directions 88A, 88B. A thin central portion 25A of the bases 24A, 24B acts as a flexure when , 25B causes the clips 30A, 30B to move towards the first closed position. It should be recognized that the means of enforcement must be established. The force is in the direction of arm movement 8 Clip 30A3 in the direction shown by arrows 90A, 90B opposite to 8A, 88B. Acts on 0B. The forcing forces are substantially equal and opposite in direction. In general, positioning Regardless of the number of arms used in the fixing device, the force in each arm passes through the reference axis. , the sum of the forces is substantially equal to zero when in the centered position. as a bending part The means of forcing using the thin central portion of the base 24 can be achieved simply by using microfabrication techniques. It is preferred when realized in a crystalline material because precise control of the forcing force can be achieved. typical Specifically, the forcing force on each arm is approximately 5 g.

When the force on each arm passes through the reference axis and the arms are in the centered position, As long as the sum of the forces on the arm is substantially equal to zero, the arm is forced to Any other convenient mechanism may be used as appropriate to provide a means for directing the 0 to the closed position. You should understand that. Regardless of the type of coercive means selected, coercive force is If the structure of the positioning device 20 is determined as long as it does not increase with the deformation of the The operation of positioning the point P on the end face E of the optical fiber F along the quasi-axis R is shown in Fig. 5 to 7 can be easily understood.

In operation, fiber F is inserted into positioning device 20 in the direction of arrow 102. (Figure 6A). The introduction portions 68A, 68B (FIG. 1) act together to provide the expansion portion 54A, Guideway 98 defined by aligned troughs 60A, 60B of 54B (FIG. 1) (Fig. 2). The axis R′ of the passageway 98 is a perfect funnel-shaped passageway. 92, the guideway 98 directs the plane E of the fiber F with respect to the axis R. and guide it toward the entrance end 94 of the passageway 92 in a predetermined orientation.

As a result, the end face E of the fiber F enters the passage 92 and the clips 30A, 30B side wall 38A or 38B, 40A or 40B (or Major surface 2 when used to define grooves 36A, 36B as in FIG. 6A, 26B), and the planned point of the end face E of the fiber F. P is initially displaced by the distance required to align with reference axis R.

As end E of fiber F moves toward exit end 96, the fiber hardens into passageway 92. At some point on the axial insertion path of fiber F, the outer diameter of the coating layer of fiber F 92 dimensions. 8A from the first closed position shown in FIGS. 7A and 7B. , 8B by moving against the forcing force to the second centering position shown in FIG. The arms 22A and 22B are affected by the forces in the directions 88A and 88B applied by the respond. In the centered position, the clips 30A, 30B Due to the force acting in the directions 90A and 90B caused by the deflection of 2A and 22B, They open oppositely and separate the upper surfaces 34A, 34B. However, from the first position to the second This movement of the arms 22A, 22B towards the position P is maintained on the reference axis R. In this way, the end face E of the fiber F has a point P in FIG. 8A. , 8B, the shape is accurately aligned with the reference axis R (i.e., within 1 μm). exit through the outlet end 96 of the complete funnel-shaped passageway 92. Fiber F is the side wall It is held in this position by contact with 38A, 38B, 4OA and 40B.

If tabs 48A and 48B are formed on the bases 32A and 32B, these tabs are , connected to the outlet of the funnel-shaped passage and jointly defining a passage of uniform width along the axial direction. act. The fiber F is in a state where the point P on the end face of the fiber F is still along the reference axis R. It passes through such a conduit and emerges from this.

The movement of the arm is possible by means other than its deflection as explained so far. You should be careful. Therefore, for example, a bottle joint or joint (joint) in an appropriate manner. It is within the contemplation of the invention to move the arm in other ways, such as by a motion of the formula. be.

-o-Q-o- Referring now to FIGS. 9 to 12, another embodiment 20 of a positioning device according to the invention ° is indicated. In this example, an arm 2 similar to the previously described example is used. 2' is reciprocated against the force of the flexure defined by its central part 25'. Can be articulated in a cantilevered manner.

However, the groove 36'' formed in the arm 22' is not a predetermined groove, but a groove of uniform width. be. Therefore, the joint action of the arms 22 when one is stacked on top of the other is The passageway 92' formed by the combination is a passageway of uniform width. Perpendicular to reference axis R The maximum dimension of such passageway 92' in the plane is the minimum expected outer diameter dimension of fiber F. smaller.

A further modification of the positioning device 20° can be seen in FIG. trough 60' flat It is first noted that the walls 62', 64' are not tilted to each other, but are parallel. Furthermore , the discrepancy between axes R and R'' is a lateral discrepancy (i.e., a plane containing plane 56') (within) is in a vertical plane, i.e., in a plane containing the axis 70' of the tiger 760''.Introduction Although the portions 68'A and 68'B are omitted here, they may also be provided.

During work, the fiber F is inserted into the positioning hole 20゜ and aligned. It is guided by a passage 98' defined by troughs 60'A, 60'B. aisle Since the axis R° of 98° is vertically offset from the axis R of passage 92°, passage 9 The surface 26'B of the arm 22'B bounding the fiber F enters the passage 92°. It acts so as to guide it toward the 94° end of the entrance. Fiber F has a path of 92° and contacts the edges of side walls 38'A, 38'B, 40'A and 40'B. groove Due to the dimensions of 36'A and 36'B, fiber F is attached to arms 22'A and 22'B. It does not come into contact with the main surfaces 26'A and 26'B. To insert the fiber into passageway 92' The fibers may be chamfered or tapered or otherwise cut using mechanical equipment. can be done.

Since fiber F is larger than the dimension of passage 92°, clip 30°A130゛B is moved from a first closed position to a second centered position. Clip 30°A, This movement of 30'B maintains the point P of the end face E of the fiber F on the reference axis R. child In this way, the end face E of the fiber F passes through the passage with the point P accurately aligned with the reference axis P. 92' exit end 96'.

Fiber F is connected to sidewalls 38'A, 38'B, 40'A and 4 designated by the letters LC. It is held in this position by contact with the 0'B edge.

The embodiment of FIGS. 9-12 can be further modified as seen in FIGS. 13-16.

In this modification, the arm 22''B is different from what has been shown heretofore; There are no grooves in the part. In this example, if the groove is a predetermined groove, A partially flattened passageway is defined. Fiber F is connected to main surface 26”B. contact with the main surface 26"B and the side wall 3 indicated by the letters LC. It is held in place by contact with the 8"A138"B edge.

-o-Q-o- FIGS. 17 and 8 show a further embodiment 20'' of a positioning device according to the invention in FIGS. 1 and 8. FIG. 19 is an exploded view and an assembled perspective view generally similar to FIG. . In this embodiment, unlike the articulated arms described earlier, the The frames are fixed together. Each of the arms 22''A and 22''B has a predetermined groove. , the cooperative combination of arms 22'' when one is stacked on top of the other. The passageway 92''° formed by this is completely funnel-shaped. 2''' is the minimum dimension in the plane perpendicular to the reference axis R, i.e., the filament near its exit end. Determine the dimension smaller than the expected minimum outer diameter of bar F.

During operation, the fiber F is inserted into the positioning device 20" and the path 92" It is guided through a passageway 92'' toward an entrance end 94''°. Fiber F leaks Entering the funnel shaped passageway 92"', side walls 38"A, 38"°B, 40"A and 40"'B and/or the main surfaces 26"A, 26"B. The point P of the bar F is guided to be placed on the axis R.

However, since the arms 22''' are fixed together, the fiber F is - passageway 92''' to an axial position where the outside diameter of F is equal to the local dimension of passageway 92''; move forward within. At this axial position within the passageway, the fiber F and each of the side walls 38"°A, 38"'B, 40"'A and 40"B It is held in this position by a minimum of four points of contact (indicated by C). The dimensions of the passage are When the fiber is held along the reference axis R, the fiber is The dimensions are such that it cannot come into contact with the Figure 20 shows that the fiber is held within the passageway 92'''. Show the place. The axis between the end face E of the fiber F and the exit end 96'' of the passageway 92'' The directional spacing 104 varies depending on the outer diameter of the fiber F.

-o-Q-o1 A positioning device according to any of the above-described embodiments of the invention may be used to locate an end of a fiber F. Various devices require accurate positioning of point P on surface R along reference axis R. Can be used for

21 and 22, a pair of positioning devices 20-1.2O-2 (FIGS. 1 and 22) 2) is a pair of fibers designated generally by the number 120. The fiber chain is arranged to define a tether. In this arrangement, the device 20- 1.20-2 are arranged opposite each other so that the outlet ends of the respective passages 92 96 is the planned distance 1 when the respective reference axes R passing through these are the same straight line. They are placed 22 apart.

To obtain such an arrangement, the substrate 74 extends axially and has a flat recess at its axial end. A surface 76 for attachment is provided. Each positioning device 20-1, 20-2 is This attachment is attached to surface 76.

The fibers F-1 and F-2 to be connected are connected to each positioning device 20-1.2. It is inserted into the introduction section 68 of 0-2. Each positioning device operating in the manner described above 1i'20-1.20-2 is the end face E of each fiber F-1 or F-2. It operates to position the upper point P along the axis R' arranged on the same straight line.

Fibers F-1 and F-2 are loaded until their end faces E and E' touch each other. It is inserted into f20-1.20-2. The ends E of fibers F-1 and F-2 are It is fixed by the above-mentioned holding action of the positioning device. If you wish, Electrolyte Corporation (Electro-1i, Danbury, Texas) Manufactured by Te Corporation as number 82001ELC4480 Use a suitable refractive index-matched adhesive such as a commercially available UV-curing adhesive. can.

The fiber-pair fiber series tie can be used in any of the various embodiments described above of the positioning device. This can be achieved using either. A pair of positioning devices as shown in FIG. If a positioning device is used (see FIGS. 23 and 24), the positioning device 20"'-1, 2 The opposite ends of 0"'-2 are preferably abutted and fixed and have a Alternatively, a pair of positioning devices are formed integrally with each other. Fiber F-2, F-2 In this example, the gap 122 between the end faces E' of ．． Determined by the sum of -2. Gap 122 is the glue-like refraction defined above. Filled with rate compatible material. Therefore, the fibers F-1 and F-2 are located opposite each other. There is an access hole 124 through which index-matched material can be introduced into the area between the mating surfaces. provided.

Before inserting the fiber F-2 into the positioning device (in any form), The jacket J is stripped away from its free end over its entire length by a predetermined distance. Phi The exposed parts of the bar are cleaned with alcohol. The fibers form an end face E. Sea urchins are separated. If desired, grind the end face E to a medium-high height to create a point. Or it can be made into a lens shape. If desired, the fiber pair fiber series connector 120 can be mounted in a suitable housing 13. It can be placed within 0 (Fig. 25). A preferred form of housing 130 is a Same as disclosed in commonly assigned U.S. Pat. No. 4,784,456 (Smith) Generally the same. This patent is herein incorporated by reference. Housing 1 30 includes a base 132 and a cover 134. In all cases, the base 132 has A recess 136 is provided that is dimensioned to closely receive coupling 120. Linking If tool 120 is implemented using any type of articulated positioning device, To allow articulation of the arms of the positioning device used to form the linkage In addition, the cover 134 must be provided with a corresponding recess 138.

Connector 120 is implemented using a positioning device of the type shown in FIGS. 23 and 24. If so, there is no need to provide a recess. Such a housing 130 is shown in FIG. be done.

The cover 134 is divided into three parts 140A, 140B, and 140C, each of which has a It is pivotally attached to the base 132. Base 1:32 has each of the recesses 136 Adjacent to the end, there are V-shaped groove portions 42A and 142B. Top end part 1 40A, 140B each have a generally tapered runt portion 143A, 143B included. Each of the land parts has serrations 145A, 1 on it, respectively. Has 45B.

In use, the coupling is inserted into the recess 136 of the housing 130.

It is held in place by friction, but can be secured by other means if desired. can be done. The central portion 140C of the cover can be closed if desired. . The intended length of the jacket J has been removed and the cleaned optical fiber is placed in the V-shaped groove area. 142A and 142B, and the fiber ends are connected. It is arranged in the tool 120. The area of the groove guides the fiber into the coupling 120 within the recess 136. act to properly orient and position with respect to. combined peak The end portion 140A of the section.

140B is closed and locked in a corresponding position on the base 132, like a case ( Figure 25, fibers omitted for clarity). When the top is fixed to the base, The serrations 45 push or force the fibers toward the coupler. It acts to push the jacket of the bar. A second fiber is housed in a similar manner. correspondingly introduced into the fittings and couplings. If you haven't done so already, then The central portion 140C of the bar is closed. Housing 130 is formed by injection molding It is preferable that

In another form, as seen in FIG. 29, housing 130 is defined above. This can be accomplished using a mass 160 of index-matching material such as the one shown in FIG. Lump 160 is the connector 120 (which is buried inside) and the fibers F-1 and F-2. The reference axis R with the point P of the fiber F spread out on both sides of the planned part where the jacket J is located. is positioned so as to extend on its own in line with the axis X of the various appropriate devices. It will be done. Therefore, the positioning device 20 is configured to It can be used to accurately position the point P on the end face E of the fiber F. Figure 30 , 31 and 32.33 for placing the fiber F along the axis X of the device 170. Some examples of the use of the positioning device 20 are shown. Device 170 may be, for example, a solid state. by suitable active optical elements such as lasers, photodiodes, light emitting diodes, etc. , these devices are edge-active devices or surface-active devices. This is possible regardless of the deviation.

In this description the number 20 has been used to indicate the positioning device; It should be understood that any suitable of the described positioning device embodiments may be used. be.

30 and 3 when used in conjunction with edge active device 170. 1 is preferred. In this embodiment, the base material 74 is located at its axial end. axially extending to define a pedestal 174. Above pedestal 174 A flat mounting surface 176 defines a surface. Surface 176 is planned to be installed above surface 76. spaced apart by a distance, or active optical elements 170 are attached to surface 176. When the device 170 is placed such that the axis X and the reference axis R are aligned. Axis X and R are in line, so the positioning of point P of fiber F along axis This point P will be automatically positioned in the same relationship. The device 170 has its axis It must be mounted precisely on surface 176 so that X is aligned with axis R.

A layer of solder, such as gold/tin solder, on surface 176 to attach device 176. layers can be provided. Device 170 has corresponding layers of the same material. . The device 170 can be can be placed on surface 176. The device is aligned to the edge and the solder joint is formed. To achieve this, the solder is heated above its melting point and then cooled.

When used with surface active devices, as seen in FIGS. 32 and 33, An active surface of device 170 is secured to a front surface 178 of pedestal 174.

Attachment of the device to the front surface 178 secures the device 170 to the positioning device 20. It is believed that this provides sufficient solder area for Face 17 of pedestal 174 6 is the interference between the active area of the device 170 and the end face E of the fiber F. Avoid evasion.

As shown in FIG. 31A, the position according to any of the embodiments described so far The determining device is capable of attaching a lens such as a ball or rod lens L (where the device device 170 (whether an active device or a surface active device). It can be configured for precise positioning with respect to axis X. The positioning device is the lens L. modified to provide a sheet 31S of clips 30 dimensioned to receive Will.

-o-Q-o- The photographic microfabrication technique used to manufacture the positioning device 20 is shown in FIGS. 34 to 40. This will be understood from the following explanation. The explanation is as shown in Figure 22. Detailed Description of the Fiber-Paired Fiber Series Connection Using the Preferred Embodiment of the Positioning Device 20 Although directed to manufacturing, this technique is compatible with any embodiment of the positioning device described so far. as well as its use in a variety of other applications previously described. can be easily extended.

A silicon wafer 200 with an appropriately predetermined crystal orientation is positioned according to the present invention. This is the starting point for manufacturing the arm 22 of the fitting device 20. Other monomers like germanium Crystalline substrates may also be suitably used, and alternative etchants and other etchants compatible with the selected alternative substrates may also be used. It should be understood that different materials are used. 200 wafers are located in New Sha Nis.E.A., a subsidiary of Shin-Etsu Semiconductor Co., Ltd. of Sparta, Sea State, Tokyo, Japan. Available from SEHAmerica, Inc. way It is understood that Ha200 can be made of “mouth type”, “mouth type”, or intrinsic silicone. should be understood.

(100) plane silicon easily acts on the (100) crystal plane, but (111) This substrate material is preferred because surfaces can be corroded by virtually noncorrosive anisotropic etchants. It's a beautiful thing. As a result, the grooves 36A, 36B preferably have flattened tips. , troughs 60A, 60B1 introduction parts 68A, 68B and arms 22A, 22B Central portions 25A, 25 between the cradle 32A, 32B and the enlarged portion 54A, 54B B is easily formed. The width and depth of such features will depend on the opening of the photographic mask used. Depends on the preselected width of the mouth and the duration of the corrosion. The corrosive liquid is completely groove-shaped. acts on 100 planes/recon in an essentially self-limiting manner with properties useful for do.

Those skilled in the art will appreciate that other intended crystal orientations of silicon are available if other cross-sectional shapes are required. You will realize that you can use For example, if a square cross-sectional feature is desired For example, a (110) plane solicon wafer can be used. However, different cross-sectional shapes of features fibers that correspond to the V-groove feature, as will be discussed below. A more complex shape is required to achieve the centering effect.

FIG. 34 is a plan view of the wafer 200. Way/1200 is based on SEMI standard. It has a peripheral flat surface 201 and 202 as specified by the figure. The flat surfaces 201 and 202 are Indicates the direction of the crystal structure of silicon, and is also used to identify waves and match masks. be done. The longer flat surface 201 indicates the direction of the crystal plane (110). short flat Surface 202 is placed at a predetermined angle around the wafer with respect to flat surface 201, and the magnitude of the angle is The value depends on the doping of the crystal.

To be unfolded, the peripheral region 203 of the wafer 200, when prepared, is in position. The central region 204 of the wafer 200 may have a mating groove, while the central region 204 of the wafer 200 may have an alignment groove. , with structural features of the positioning device arm or substrate formed thereon.

FIG. 35 shows a mask 210 with a pattern 212 of straight, aligned grooves. each The grooves in pattern 212 accept aligned fibers of crystal of various dimensions (diameters). The edges are set equal to the dimensions shown. Groove 212 has a width of approximately 0.004825 inches (0.04825 inches). 123+am) to 0.005000 inches (0.127mm) ．． Accepts tail fibers distributed in 039370 inch (0,1u+) increments It has a V-shaped cross section, and five grooves 212 are shown. (At the grooved top The groove width is larger than the fiber diameter, so the fibers When placed in a groove with a Become the same surface. Therefore, for 0°123 fibers, the groove area is 1506 m. m is formed. Similarly, for a 0.124 mm fiber, the groove opening The top dimension is 0.1518 mm. About 0.12510m fiber The opening top dimension of the groove is 0.1531 mm, and the 0.126 mm fiber is The opening top dimension of the groove is 0.1543 mm, and the diameter is 0.127 mm. -, the opening top dimension of the groove is 0.1555 mm.

The central portion 214 of the mask 210 includes a predetermined number of structural features (i.e. a repeating pattern 220 (one of which is shown in FIG. 36). ) is formed. A typical wedge is approximately 3.9381 inches in diameter. (101,028 mo+), and the dimensions of a typical connector 120 are at its widest portion. has a length of approximately 350 μm and a length of approximately 2800 μm, and the central portion 20 of the wafer 200 Structural features for 4 to about 1000 connectors 120 can be formed.

FIG. 36 shows a portion 220 of the pattern provided in the central region 214 of the mask 210. This is an enlarged view. In FIG. 36, the illustrated pattern is applied to coupling 120 (FIG. 2) used to form the plurality of connected arms 22 used; pa The turns 220 are made using known process steps and repeating methods to cover the entire area. It is formed on the surface of the central region 214 of the mask 210.

The repeating pattern 220 shown in FIG. Column 22 defined between the column and the first separation line 227A and the second separation line 227B Consists of a large number of 4. Each column 224 has 10 independent bands 227A. 227E, which are symmetrical within column 224 with respect to cutting line 230. It is.

Two arms 22 whose front ends are connected are placed between two adjacent scratch lines. You can see the shape. Between the three adjacent keki lines, there is a line between the sides in the longitudinal direction. The shape of two connected arms 22 can be seen. Band 228A is the lead of arm 22. This corresponds to the feature that defines the area of the entry portion 68A. Band 228B is the top of arm 22A. This corresponds to the characteristics that define the rough 60A. Similarly, band 228C is in arm 22A. corresponds to the central portion 25A, while the zone 228D corresponds to the predetermined groove 36A of the arm 22A. Corresponds to the characteristics that define the area. The shaft 50A of the leading groove 36A is the shaft 7 of the trough 60A. There is a discrepancy from 0A by a discrepancy distance of 100. Finally, band 228E is connected to arm 22 This corresponds to the feature that defines the tab 48A of A. Mask odor shown in Figure 36 Although this arrangement is not always necessary, if The position of 100 discrepancies on the side is the position of 100 discrepancies on the opposite side of the cutting line. Note that it is reversed.

The repeating pattern of the mask for arm 22B is that the stagger distance of arm 22B is 1. 00 direction is a mirror image of the pattern of arm 22A. It is similar to that. As revealed here, the mirror image relationship between the discrepancies is Arms 22A, 22B obtained when one is turned inside out and stacked on top of the other is necessary for the characteristics of to match. Of course, if there is no discrepancy of 100, The mask of arm 22A and the mask of arm 22B are the same. Hatching in Figure 36 The area corresponding to the area of the central portion of the arm 200) protected by a layer of etching material, while areas shown without hatching are protected by a layer of etching material. During the printing stage, a negative cast is used, which will not be protected, but the It is clear that the positions of the hatched and unhatched areas can be reversed if desired.

This will change the next step slightly, but this is a method well known to those skilled in the art. Ru.

FIGS. 37A-37E show a wafer 200 of crystalline silicon in the map of FIGS. 35 and 36. Figure 2 shows processing steps forming an array of arms 22A corresponding to the array shown in the figure. . As seen in FIG. 37A, wafer 200 is made of a material that acts similarly to a mask. Pre-coated with layer 232. Silicon nitride (Si3N4) is preferred, which As is well known, a silicon nitride layer is formed thermally in an oxygen atmosphere at a high temperature (approximately 750°C). Coat on the polished active surface of the recon wafer 200. shown As such, the etchants available to corrode silicon are known to corrode photoresists. Silicon nitride is used because it has no effect on silicon nitride. suitable nitrogen The layer is based on the CVC Day System in Acre Town, Bennurbania. and Service Incorporated (CVD System and 5 ervies, Inc.) on a wafer.

The silicon nitride layer is then coated with photoresist 234. The resist is 2- Ethoxylacetate, N-butyl acetate and “Microposit Photores” Gist (Microposit Photoresist) 1400-37 Shipley Company of Massachusetts, Inc. as J. ・Shipley Company of Newton Positive-tone resists such as the χylene mixture sold by the company are preferred. stomach. The resist is manufactured by Headway Research Incorporated in Texas. of Garland (Headway Re5earch I nport ed of Garlanc using standard equipment. Apple Microelectronic Products Brochure + (the 5h ipley MicroelectronjcP products Broc (1,984) on the surface of silicon nitride. Spin applied.

Mask 210 is mounted on wafer 200 and aligned using alignment bar 235. The planes 201 and 202 of the wafer 200 are aligned using the same method. Therefore, the finish For edged wafers, the use of alignment bars 213 in the mask The alignment groove 212 is accurately positioned with respect to the plane of the wafer. . Wafer 200 is exposed to ultraviolet light through a mask and then developed.

Since a positive resist was used, it was exposed and cured as shown in Figure 37B. Resist 234, silica nitride 232 and wafer 200t - remaining resist Unexposed areas are cleaned using ultrapure water.

Next, the pattern of mask 210 is etched into the silica layer. Phosphoric acid is preferred. child The steps of 2 and 3 result in the arrangement shown in FIG. 37C. A person skilled in the art will understand, for example, concentration, time and temperature. to obtain optimal results in all of the wet processing steps described. You will realize that it is adjusted to

Next, a second Differential corrosion treatment is performed. Ethylene diamine (ED), pyrocatechol The use of anisotropic etchants such as (P) and water is preferred. ED750ml, P12 A mixture of 0 g and 240 ml of water is preferred. If desired, potassium hydroxide (K Two-stage corrosion using OH) can also be used. Due to this corrosion, 236 appears in Figure 37D. A schematically illustrated structural feature of the silicon surface is created. The depth of feature 236 is public As is well known, it is controlled by controlling the corrosion time. Of course, differential corrosion occurs inside the structure. Because of the angle, even if progress continues, it is self-limiting.

The silicon nitride layer 232 is then etched away with phosphoric acid and the silica, i.e. A layer of silicon is grown on the surface. Next, resist is deposited on the surface of the wafer, and the The image is projected through the mask as shown at 38. As a result, the wafer bonding schedule (see FIG. 36 corresponding to bands 228C to 228E and trough 60)) , resulting in a layer 238 of resist that is formed and cured.

The silicon layer is then etched using hydrofluoric acid (HF) to prevent corrosion in areas that should not be bonded. eaten. For bonding, resist layer 238 is coated with acetone, leaving the completed wafer. used and removed.

This completes the manufacture of the first wafer having the array of arms 22A.

-o-Q-o- As noted earlier, the axis of the guide path 98A is at odds with the axis of the groove 92A, so The mask for arm 22B is not the same mask used to form arm 22A. do not have. Accordingly, a second wafer having an arrangement of arms 22B is shown in FIG. Must be prepared according to the process. Finished second wafer (especially shown) (not shown as 200' from now on) are all the same except for the discrepancy at 100'. It is.

A third mask 200”° is made using the mask for the substrate, a portion of which is shown in FIG. Made. Figure 39 shows a mask for the substrate (similar to the mask for the arms shown in Figure 36). It is an enlarged view of a part of the pattern 220° provided in the central part of the mask. Repeat The barb pattern 220' includes a row of adjacent parallel scratch lines 246 and a first separation line 2 48A, and a number of columns 244 defined between the second separation line 248B.

Each column 244 includes four independent bands 250, which are connected to column 244. It is symmetrical within the center line 252. In the band 250A, the base material 74 is attached to the surface 7. 6.

Zone 250B corresponds to surface 82 provided on the base material. Wafer containing base material 74 200” is similar to that shown in FIG. 37 except that no solder mask exposure is performed. exposed in a manner similar to that of However, the silica layer is on the surface of the wafer 200° be removed from

Wafer 200 for arm 22A, wafer 200' for arm 22B, and base material Once the wafer 200”° for 74 is made, the final assembly of the connector 120 is shown in FIG. It is done as shown in.

Wafer 200' is placed on top of wafer 200. Features and features of wafer 200 A match with the wafer 200' feature is based on at least two, preferably four, separated beams. Appropriate grooves are aligned corresponding to the optical fibers in each row of fibers and grooves 212. It is preferable to use The diameter of each optical fiber is measured in micrometers. It is measured more accurately to plus/minus 0.5 μm. Each fiber has a row of grooves 212, is placed in the groove that most closely corresponds to the measured diameter. aligned Each fiber was partially protruded from the surface of the wafer 200. with the fiber axes within the surface of the wafer 200 and the selected alignment sit in a ditch.

The wafer 200 is turned over and placed on top of the wafer 200. ’ corresponding groove receives the protruding portion of the fiber, thereby separating the two wafers. Align the pattern accurately. Alignment grooves on each wafer are formed simultaneously with the formation of wafer features. The mask on each wafer is formed optically from one side to the other, so Accurate wafer-to-wafer matching is achieved. In Figures 40A and 40B, the figures are Note that for clarity, only one fiber 245 and groove 121 are shown. be done.

The assembly of stacked wafers 200, 200' shown in FIG. Shimbo et al.'s report "Silicon-to-silicon direct bonding method" n (o-silicon direct bonding method) J, Journal of Applied Physics, October 1986, and Laski (L. asky) other report port bonding and etchback on the insulator (Si 1.1con on I n5ulator (So1) By Bondi ng and Etchback)) according to the method described in IEDM85. and bonded in a wet atmosphere controlled furnace. As shown in FIG. 40B, the wafer The outer surface 256' of 200' has a thickness ranging from an initial thickness (typically about 17 μm) to The film is then wrapped to reduce the final thickness to 5 μm.

The resulting bonded structure is turned over so that the outer surface 256 of the wafer 200' is The alignment of these wafers is Using a jig with a crystal block 260 pressed against the planes 201 and 202 of It is done. The wafer 200' is then bonded to the wafer 200'. Wari Wallis and Pomerantz's “Glass-Metal Series” Field As5isted Glass-MetalS ealing) J, Journal of Applied Physics, September 69 It is recognized that other bonding techniques, such as those considered in the report, could be used for wafer bonding. You should understand. Still other bonding techniques may include metal or glass bonding.

Next, the wafer 200 is rotated until the dimensions of the wafer 200 become the dimensions of the wafer 200°. The outer surface 256 of 00 is wrapped. Now the force due to substantially equal deflection Power is provided.

The resulting stack of three bonded wafers shown in Figure 40D is then cut. be done. The top two wafers 200.200' of the bonded stack (that arms 22-IB, 22-2B and arm 22-IA, respectively.

22-2A, only in FIG. 22), first, cut line 230. A cut is made along a line in the wafer corresponding to 0° (FIG. 36).

This cut should be made with the blade at approximately 0.003 inch to create distance 122 in Figure 22. It is done using The bonded stack is then cut into 0.015-inch thick brazes. Separation lines 227A, 227B1 of the wafer 200 using the separation lines 227A', 227B' and separation lines 248A, 2 of the wafer 200'' 48B and (of wafers 200, 200' and 200'') scribe lines 226. Cuts are made along lines 226' and 246. These lines all coincide with each other and this This results in a stack of approximately 1000 fiber pairs 120 connected together. rice is produced.

-o-Q-o- Those skilled in the art having the benefit of the teachings of the invention as described above will be able to make many modifications thereto. can be done.

For example, as seen in FIG. In addition to various embodiments of the shape of two arms 22, it is important to note that more than one arm 22 is shown. It is within the contemplation of the invention with respect to the positioning device. In this regard, FIGS. 42C indicates a positioning device having three arms 22A, 22B and 22C; On the other hand, FIGS. 42D to 42F show four arms 22A, 22B, 22C and 22D. 1 shows a positioning device having a Expansion to even larger numbers of arms is straightforward for those skilled in the art. It will be done easily.

In FIG. 42A, each arm is shaped similar to the shape of the arms described above. next Although this is not considered necessary, if desired, the arm could be provided with a groove. can be done. In Figures 42B and 42E, the arms are formed by rods. . Although the rod is shown as having a circular cross-section, it may have any other cross-section as desired. You should understand that. In Figures 420 and 42F, the arms are generally flat. It is formed into a round rod shape. In Figure 42D, the The upper arm and the lower arm (22 in FIGS. 1-4) A, 22B), you can find four arms.

However, in FIGS. 42A-42F, the arms formed are The working masses are shown angularly juxtaposed surrounding a defined passageway 92. The above circumstances Similarly, the elasticity of the arm provides a forcing means to force the arm toward the closed position. stipulate. However, the force of each arm passes through the reference axis and the arms are in the centered position. As long as the sum of the forces in the arms when present is substantially equal to O, the means of forcing is You should understand that there are scales to form. Whenever choosing the shape of the enforcement means, The forcing force must increase with the deflection of the arm. The arm is shown in Figure 42. Pushing the fiber F inserted into the passage along various contact lines LC The planned point of is maintained on the reference axis R.

Such modifications and others as described herein are within the spirit of the invention as defined in the claims. It should be understood that it consists of

international search report

Claims (85)

[Claims] 1. at least first and second arms, each arm moving from the first closed position to the second center; It is movable to the alignment position, In the closed position, the arms cooperate to define a passageway having a reference axis of passage; has an inlet end and an outlet end such that the force of each arm passes through the reference axis and is centered. The arm is in a first closed position such that the sum of the arm forces is substantially equal to zero in the means of enforcing each of the Each of the arms is positioned at the entry end of the passageway with the member axis spaced from the reference axis. The introduced cylindrical member initially pre-adjusts the member by contact with at least one arm. displaceably arranged so that the fixed point is placed in line with the reference axis; The arm moves through the passageway by moving against a forcing force toward the centered position. maintain the point of the member on the reference axis in response to further axial movement of the member A positioning device for positioning. 2. at least a first arm, a second arm and a third arm, each arm in a first closed position; movable from the center to a second centering position, in which the arms cooperate in the closed position. defines a passageway having a passage reference axis, the passageway having an inlet end and an outlet end, with each arc When the force of the arm passes through the reference axis and at the centered position, the sum of the arm forces is substantially means for forcing each of the arms into a first closed position equal to zero; Each of the arms is positioned at the entry end of the passageway with the member axis spaced from the reference axis. The introduced cylindrical member is directly connected to the cylindrical member by contact with at least one arm. Regardless of the diameter, it is possible to initially displace the planned point of the member so that it is aligned with the reference axis. , and the arm moves against a forcing force toward the centering position. The point of the member on the reference axis in response to further axial movement of the member through the passageway maintain, A positioning device for positioning a cylindrical member having a certain outer diameter. 3. the first and second arms, at least the first arm cooperating to define a groove; at least a first sidewall and a second sidewall, the arm having an overlapping mutual relationship. each arm is movable from a first closed position to a second centered position. the law of nature, forcing each of the arms with substantially equal and opposite forcing forces toward the first closed position; means to control In the closed position, the arms cooperate to define a passageway having a reference axis of passage; has an inlet end and an outlet end, and each of the arms has an axis of the member spaced apart from a reference axis. A cylindrical member introduced into the entrance end of the passage in a state in which at least one arm initially so that the intended point of the end face of the member is aligned with the reference axis by contact with arranged to be displaceable; The arm moves through the passageway by moving against a forcing force toward the centered position. In response to further axial movement of the member, the member and the first and second arms are rotated. Positioning of a cylindrical member with maintaining the point of the member on the reference axis by contact between the two positioning device for. 4. the first and second sidewalls of the first arm cooperate to define a tapered groove therein; , the passageway is at least partially funnel-shaped over at least a predetermined portion of its axial length; The positioning device according to Claim 3. 5. 5. The positioning device of claim 4, wherein the second arm has a flat surface thereon. 6. a second arm having at least first and second sidewalls disposed thereon; The first and second side walls of the arm cooperate to define a tapered groove therein, and the first and second side walls of the arm cooperate to define a tapered groove therein. The narrowed groove of the arm and the narrowed groove of the second arm cooperate to define a passage, and the passage is Claim 4 is completely funnel-shaped in shape over at least a predetermined portion of its axial length. positioning device. 7. the first arm has at least first and second sidewalls disposed thereon; The first and second sidewalls of the arm cooperate to have a uniform width dimension along their entire length. The passage has a rectangular cross-sectional shape over at least a predetermined portion of its axial length. The positioning device according to claim 3, which has a shape. 8. a second arm having at least first and second sidewalls disposed thereon; The first and second side walls of the arm cooperate to define a uniform width dimension therein over its entire length. the uniform groove of the first arm and the uniform groove of the second arm cooperate; defining a passageway, the passageway having a rectangular cross-section over at least a predetermined portion of its axial length; The positioning device according to claim 7. 9. Each arm has a trough disposed thereon, and the troughs of the arm act together to The positioning device according to claim 3, which defines a guide path for guiding the fiber between the positions. 10. The guideway has an axis within it, and the axis of the guideway is offset from the axis of the passage by a predetermined distance. The positioning device according to Claim 9. 11. The forcing means includes a thinned portion on each of the first and second arms, the forcing means having a thinned portion on each of the first and second arms; The thin section defines the flexure in each arm, which means that each arm makes contact with the member. exerts a force on each arm that forces each arm toward the closed position when bent by The positioning device according to claim 3 that generates 12. Each of the first and second arms has a trough therein, each trough in the arm placed on the arm at a predetermined distance behind the trough, in the closed position the trough is A claim that defines a guide path for guiding a cylindrical member toward the entrance end of a passageway using 40 positioning devices. 13. Claim 3 further comprising a base material, the first arm being attached to the base material. Positioning device. 14. The positioning of claim 6, wherein each of the first and second arms is manufactured from a crystalline material. Device. 15. Positioning according to claim 3, wherein each of the first and second arms is manufactured from a crystalline material. Device. 16. first and second arms, each arm having at least a first and second arm disposed therein; two sidewalls, the first and second sidewalls cooperating to define a tapered groove in each arm; , The arm is shaped by cooperating narrow grooves over at least a predetermined portion of its length. The shapes are arranged in superimposed relation to each other so as to define a funnel-shaped passageway, and the passageway is having an inlet end and an outlet end and a reference axis extending therethrough; The arm was introduced at the entrance end of the passageway with the axis spaced from the reference axis. The cylindrical member has an end face of the member due to contact with one side wall of at least one arm. The planned point is placed in line with the reference axis and maintained there by contact with the first and second arms. the first and second arms each having a trough therein; and each trough is positioned on the arm at a predetermined distance behind the groove in the arm and closed. In the chain position, the troughs cooperate to move the cylindrical member toward the entrance end of the passageway. Determine the guide route to guide A positioning device for positioning a cylindrical member. 17. each of the first and second arms from the first closed position to the second centered position; movable; The device further directs each of the arms toward the first closed position with substantially equal and opposite forces. have the means to coerce The arm moves through the passageway by moving against a forcing force toward the centered position. In response to further axial movement of the member, the member and both the first and second arms The positioning device according to claim 16, which holds the point of the member on the reference axis by contact between the two sides. . 18. The forcing means includes a thinned portion on each of the first and second arms, the forcing means having a thinned portion on each of the first and second arms; The thin section defines the flexure in each arm, which means that each arm makes contact with the member. A restoring force on each arm that forces each arm toward the closed position when bent by The positioning device according to claim 17, which generates. 19. 17. The positioning device of claim 16, wherein the arms are fixed to each other. 20. Each arm has a trough disposed thereon, and the troughs of the arms act together to The positioning device according to claim 19, which defines a guide path for guiding the fiber therebetween. 21. The guideway has an axis within it, and the axis of the guideway is offset from the axis of the passage by a predetermined distance. The positioning device according to Claim 20. 22. The positioning method of claim 16, wherein each of the first and second arms is manufactured from a crystalline material. device. 23. first and second arms, each arm having at least a first and second arm disposed therein; 2 sidewalls, the sidewalls of each arm cooperating to define a narrowing groove in each arm; The grooves cooperate to define a perfectly funnel-shaped passageway with a reference axis passing through it. The fully funnel-shaped passageway is fixed in superimposed relation to the entrance end. and an outlet end, the arm is connected to the first funnel with the axis spaced from the reference axis. A cylindrical member introduced into the entrance end of the shaped passageway is connected to the member by at least one arm. The predetermined point of the end face of the arm is placed in alignment with the reference axis, and the first and second side walls of both arms are aligned therewith. each of the first and second arms is displaceably arranged to be held by contact with the further has troughs therein, each trough extending from the arm at a predetermined distance behind the groove in the arm. in the closed position the troughs cooperate to move the cylindrical member into the passageway. Establish a guide route that will guide you towards the end of the entrance. A positioning device for positioning a cylindrical member. 24. Each of the arms has a major surface thereon, a portion of the major surface connecting the first and second sidewalls. and working together to define a groove here, with the narrow end of each arm thus defined. 24. The positioning device of claim 23, wherein the groove has a V-shape with a flattened tip. 25. 25. The positioning device of claim 24, wherein the first arm is attached to the substrate. 26. 24. The positioning device of claim 23, wherein the first arm is attached to the base material. 27. Claim 26: Each of the first and second arms and the base material are made of crystalline material. positioning device. 28. The positioning device of claim 24, wherein each of the first and second arms is made of a crystalline material. device. 29. The positioning device according to claim 23, wherein each of the first and second arms is made of a crystalline material. device. 30. first and second arms, each arm having at least a first and second arm disposed therein; two sidewalls, the first and second sidewalls cooperating to define a tapered groove in each arm; , the arms have grooves that cooperate to define a leading groove in each arm, and the arms are overlapped. the arms are arranged in mutual relation, each arm moving from a first closed position to a second centered position. movable and forcing each of the arms to move with substantially equal and oppositely directed forcing forces. means for forcing towards the closed position of 1; In the closed position the arms cooperate to form a first fully funnel-shaped structure having a passing reference axis. defining a passageway, the first completely funnel-shaped passageway having an inlet end and an outlet end. Each of the arms has a first complete funnel-like passageway with the axis spaced from the reference axis. a cylindrical member introduced into the inlet end of the Begin by making contact so that the intended point of the fiber end face is aligned with the reference axis. The arms are arranged to be displaceable, with the first and second arms of both arms centering position to maintain the point of the surface of the member on the reference axis by contact with the side wall of the further axial movement of the member through the passageway by moving against a forcing force toward A positioning device for positioning a cylindrical member with a responsive 31. Each of the arms has a major surface thereon, a portion of the major surface connecting the first and second sidewalls. and working together to define a groove here, with the narrow end of each arm thus defined. 31. The positioning device of claim 30, wherein the groove has a flattened V-shape. 32. The forcing means includes a thinned portion on each of the first and second arms, the forcing means having a thinned portion on each of the first and second arms; The thin section defines the flexure in each arm, which means that each arm makes contact with the member. exerts a force on each arm that forces each arm toward the closed position when bent by The positioning device according to claim 31, which 33. The forcing means includes a thinned portion on each of the first and second arms, the forcing means having a thinned portion on each of the first and second arms; The thin section defines the flexure in each arm, which means that each arm makes contact with the member. exerts a force on each arm that forces each arm toward the closed position when bent by 30. The positioning device according to claim 30. 34. 33. The positioning device of claim 32, wherein the first arm is attached to the substrate. 35. 32. The positioning device of claim 31, wherein the first arm is attached to the substrate. 36. 31. The positioning device of claim 30, wherein the first arm is attached to the substrate. 37. The positioning method of claim 34, wherein each of the first and second arms is made of a crystalline material. device. 38. The positioning device of claim 32, wherein each of the first and second arms is manufactured from a crystalline material. device. 39. The positioning device of claim 31, wherein each of the first and second arms is made of a crystalline material. device. 40. The positioning method of claim 30, wherein each of the first and second arms is made of a crystalline material. device. 41. Each of the first and second arms further has a trough therein, each trough having an arm placed on the arm at a predetermined distance behind the trough of the trough, and in the closed position the troughs are A claim for defining a guide path that acts in the same manner to guide a cylindrical member toward the entrance end of the passage. Item 30: Positioning device. 42. The positioning method of claim 41, wherein each of the first and second arms is made of a crystalline material. device. 43. first and second arms, the first arm extending from at least the first sidewall and the second sidewall; , the second arm has a surface thereon, and the first and second sidewalls cooperate. defines a groove in the first arm, and the first and second arms are arranged in superimposed interrelationship. and movable from a first closed position to a second centered position, substantially a hand forcing each of the arms with an equal and opposite forcing force directed toward the first closed position; Step, In the closed position the arms cooperate to define a passageway having a reference axis of passage; having an inlet end and an outlet end, each of the arms having an axis spaced apart from the reference axis. a cylindrical member introduced into the entrance end of the passage in a state in which at least one of the first arms The planned point of the end surface of the member is initially aligned with the reference axis by contact with the side wall or the surface of the second arm. the arms are displaceably disposed such that they are aligned with each other; and maintains the point of the member on the reference axis by contact with the second side wall and the surface of the second arm. to move through the passageway by moving against a forcing force toward the centering position. response to further axial movement of the member A positioning device for positioning a cylindrical member. 44. The groove in the first arm is tipped so that the passage is a partially flattened passage. 44. The positioning device according to claim 43, which is a narrow groove. 45. The groove in the first arm is a groove of uniform width so that the pilgrim has a rectangular cross section, and the groove on the side Claim 4: Each of the walls has an edge thereon, the edges of the side walls contacting the member. 3 positioning device. 46. The forcing means includes a reduced thickness portion on each of the first and second arms; The thin section defines the flexure in each arm, which means that each arm makes contact with the member. A restoring force on each arm that forces each arm toward the closed position when bent by The positioning device according to claim 43 that generates. 47. first and second arms, each arm having at least first and second sidewalls; , the first and second side walls cooperate to define a groove in each of the arms, and the first and second side walls cooperate to define a groove in each of the arms; The arms are arranged in superimposed relation to one another and are moved from a first closed position to a second centered position. of the arm with substantially equal and oppositely directed forcing forces. means for forcing each toward a first closed position; In the closed position the arms cooperate to define a passageway having a reference axis of passage; Has an entrance end and an exit end Each of the arms is introduced into the entry end of the passageway with its axis spaced from the reference axis. a cylindrical member that is initially separated by contact with one side wall of at least one arm. Displaceably arranged so that the planned point of the end face of the material is aligned with the reference axis, The arm aligns the plane of the member on the reference axis by contact with each first and second side wall of the arm. by moving against the forcing force toward the centering position to hold the point. positioning of a cylindrical member with a cylindrical member responsive to further axial movement of the member through a passageway; positioning device for. 48. The grooves in the first and second arms are tapered so that the passage is completely funnel-shaped. 48. The positioning device according to claim 47, which is a groove. 49. The grooves in the first and second arms are of uniform width so that the passage is of rectangular cross section. , each of the sidewalls has an edge on it, and the edge of the sidewall contacts the fiber The positioning device according to claim 47. 50. The forcing means includes a thinned portion on each of the first and second arms, the forcing means having a thinned portion on each of the first and second arms; The thin section defines the flexure in each arm, which means that each arm makes contact with the member. A restoring force on each arm that forces each arm toward the closed position when bent by The positioning device according to claim 47 that generates. 51. A connector for positioning the first cylindrical member and the second cylindrical member, The first positioning device includes first and second arms, each of the first and second arms has a has at least first and second sidewalls disposed therein, and has first and second arms. the side walls of each cooperate to define a tapered groove therein, and the first and second arms define a narrow groove therein; grooves therein cooperate to define a first fully funnel-shaped passageway having a reference axis of passage; The first funnel-like passageway is fixed in superimposed interrelationship with the inlet end and the outlet end. having a mouth end, the arm extends through the first funnel-shaped passage with the axis spaced from the reference axis. A first cylindrical member introduced at the entrance end of the channel is provided with a first cylindrical member by at least one side wall. The planned point of the end face is placed in alignment with the reference axis, and the first and second side walls of both arms are placed there. each of the first and second arms; further has troughs therein, each trough extending from the arm at a predetermined distance behind the groove in the arm. in the closed position the troughs cooperate to move the cylindrical member into the passageway. Determine a guide route that will guide you towards the end of the entrance; The second positioning device includes third and fourth arms, each of the third and fourth arms has at least first and second sidewalls disposed therein, and third and fourth arms. the side walls of each of the side walls cooperate to define a tapered groove therein, and the third and fourth arms define a narrow groove therein; act together to define a second fully funnel-shaped passageway having a reference axis of passage. a second funnel-shaped passage having an inlet end and an outlet end; The third and fourth arms are connected to the second leak with the axis spaced apart from the reference axis. A second cylindrical member introduced at the entrance end of the funnel-shaped passageway is connected to at least a third or a fourth cylindrical member. A predetermined point on the end face of the second member is aligned with the reference axis by one side wall of the arm. The third and fourth arms are held therein by contact with both the first and second side walls. each of the third and fourth arms displaceably displaces the trough therein; and each trough is placed on the arm at a predetermined distance behind the arm groove and in the closed position. In the position, the troughs cooperate to move the second cylindrical member toward the entrance end of the passageway. determine the guide route to be guided; and The substrate, the first and third arms are arranged such that outlet ends of the first and second passages face each other. and the reference axis passing through the second funnel-shaped passage and the reference axis passing through the first funnel-shaped passage coincide. A connector that is attached to a base material in such a manner as to be attached to a base material. 52. Each of the first, second, third and fourth arms connects its first and second sidewalls. It has a main surface that connects and acts together to define a narrow groove here, and this narrow groove is 52. The positioning device of claim 51 having a flattened V-shape. 53. Each of the first, second, third and fourth arms and base material is manufactured from a crystalline material. The positioning device according to claim 51. 54. The first, second, third and fourth arms and base are disposed within the housing. A positioning device for the desired range 53. 55. The first, second, third and fourth arms and base are disposed within the housing. A positioning device for the desired range 52. 56. The first, second, third and fourth arms and base are disposed within the housing. A positioning device for the desired range 51. 57. a coupling for positioning the first cylindrical member with respect to the second cylindrical member; , The first positioning device includes first and second arms, each arm being disposed therein. at least first and second sidewalls, the first and second sidewalls cooperating to define each aperture. defining a narrow groove in the arm, the arms are arranged in superimposed relation to each other, each arm movable from a first closed position to a second centered position; A substantially equal and oppositely directed forcing force forces each of the first and second arms into the first means for forcing the arm towards the closed position, in which the arm cooperates to force the passing base defining a first fully funnel-shaped passageway having a quasi-axis; with an inlet end and an outlet end, Each of the arms enters the first funnel-shaped passageway with the axis spaced from the reference axis. A cylindrical member introduced at the end of the mouth is brought into contact with one side wall of at least one arm. It is arranged so that it can be displaced so that the planned point of the end face of the fiber is aligned with the reference axis. and the arm is aligned on the reference axis by contact with the first and second side walls of both arms. moves against a forcing force toward the centering position to hold the point on the face of the member. a second positioning device; responsive to further axial movement of the member through the passage; has third and fourth arms, each of the third and fourth arms having at least first and second sidewalls, the first and second sidewalls cooperating to provide a converging configuration for each arm; defining a groove in the third and fourth arms, the arms being arranged in superimposed relation to each other; each is movable from a first closed position to a second centered position and are substantially equal. and forcing each of the third and fourth arms into the first closed position with force directed in opposite directions. means for forcing the third and fourth arms in the closed position to defining a second fully funnel-shaped passageway having a reference axis; It has an entrance end and an exit end, Each of the third and fourth arms is connected to the second leak with the axis spaced from the reference axis. A second cylindrical member introduced at the entrance end of the funnel-shaped passageway is connected to at least a third or a fourth cylindrical member. Due to contact with one side wall of the arm, the planned point of the end face of the member initially aligns with the reference axis. the arm is displaceably disposed so as to be placed at the and the center to maintain the point of the face of the member on the reference axis by contact with the second side wall. a further axis of the member passing through the passageway by moving against a forcing force towards the mating position; responsive to directional movement; and The substrate, the first and third arms are arranged such that outlet ends of the first and second passages face each other. The reference axis passing through the second funnel-shaped passage and the reference axis passing through the first funnel-shaped passage coincide with each other. A connecting tool that is attached to a base material in such a manner as to be attached to a base material. 58. Each of the first, second, third and fourth arms connects its first and second sidewalls. It has main surfaces that connect and cooperate to define the groove, and this narrow groove has a flat tip. The positioning device according to claim 57, having a V-shape. 59. The forcing means includes a thin portion on each of the first, second, third and fourth arms. The thinner portion defines the deflection portion in each arm, which means that each arm Each arm forces each arm toward a closed position when bent by contact with a member. 59. The positioning device of claim 58, which generates a force on the arm. 60. The forcing means includes a thin portion on each of the first, second, third and fourth arms. The thinner portion defines the deflection portion in each arm, which means that each arm Each arm forces each arm toward a closed position when bent by contact with a member. 58. The positioning device of claim 57, which generates a force on the arm. 61. Each of the first, second, third and fourth arms and base material is manufactured from a crystalline material. The positioning device according to claim 60. 62. Each of the first, second, third and fourth arms and base material is manufactured from a crystalline material. The positioning device according to claim 59. 63. Each of the first, second, third and fourth arms and base material is manufactured from a crystalline material. The positioning device according to claim 58. 64. Each of the first, second, third and fourth arms and base material is manufactured from a crystalline material. The positioning device according to claim 57. 65. The first, second, third and fourth arms and base are disposed within the housing. A positioning device with a search range of 60. 66. The first, second, third and fourth arms and base are disposed within the housing. A positioning device for the desired range 58. 67. The first, second, third and fourth arms and base are disposed within the housing. A positioning device for the desired range 57. 68. Each of the first and second arms further has a trough therein, each trough having an arm placed on the arm at a predetermined distance behind the trough of the trough, and in the closed position the troughs are A claim for defining a guide path that acts in the same manner to guide a cylindrical member toward the entrance end of the passage. Item 57 Positioning device. 69. a coupling for positioning the first cylindrical member with respect to the second cylindrical member; , The first positioning device includes first and second arms, the first arm being at least one of the first and second arms. one sidewall and a second sidewall, the second arm having a surface thereon; The first and second sidewalls cooperate to define a groove in the first arm, and the first and second sidewalls cooperate to define a groove in the first arm. The arms are arranged in superimposed relation to one another and are moved from a first closed position to a second centered position. positions, substantially equal and oppositely oriented to the first closed position; means for forcing each of the arms by force; In the closed position, the arms cooperate to define a passageway having a reference axis of passage; has an inlet end and an outlet end, each of the arms having an axis spaced from a reference axis. the cylindrical member introduced into the entrance end of the passageway in a state in which at least one of the first arms The planned point of the end surface of the member is initially aligned with the reference axis by contact with the side wall of the member or the surface of the second arm. the arm is displaceably arranged to be aligned with the first arm of the first arm; and maintains the point of the member on the reference axis by contact with the second side wall and the surface of the second arm. to hold the passageway by moving against a forcing force toward the centering position. in response to further axial movement of the passing member; The second positioning device includes third and fourth arms, the third arm being at least the third arm. a fourth arm having a surface thereon; The first and second sidewalls cooperate to define a groove in the third arm and define a groove in the third and fourth arm. The arms are arranged in superimposed relation to one another and are moved from a first closed position to a second centered position. positions, substantially equal and oppositely oriented to the first closed position; means for forcing each of the arms by force; In the closed position, the third and fourth arms cooperate to form a second arm having a passing reference axis. defining a passageway, the second passageway having an inlet end and an outlet end, and third and fourth arms; each introduced into the entrance end of the passageway with the axis spaced from the second reference axis. the second cylindrical member is attached to at least one side wall of the third arm or the fourth arm. The planned point of the end face of the member is initially aligned with the second reference axis by contact with the surface of arranged so that it can be displaced so that The third and fourth arms are connected to the first and second side walls of the third arm and the fourth arm. center to hold a point on the surface of the second member on the reference axis by contact with the surface of the movement of the second member through the passageway by moving against the forcing force toward the mating position; in response to axial movement of the substrate, the first and third arms of the first and second passages; a reference shaft and a first funnel whose outlet ends are arranged opposite each other and which pass through the second funnel-shaped passage; A coupling device that is attached to a base material so that the reference axis passing through the passage coincides with the base material. . 70. Each of the grooves in the first arm and the third arm is connected to a first passage and a second passage. The positioning of claim 69 in which the channel is a narrow groove so that it is a partially funnel-shaped channel. Device. 71. The grooves in the first arm and the third arm are grooves of uniform width; each of the first and second side walls of each of the third arms has an edge thereon; and the edges of the side walls of the first arm such that each of the second passages is of rectangular cross section; Edges of the side walls of the third arm are in contact with the first member and the second member, respectively. 71. The positioning device of claim 70. 72. The forcing means includes a thin portion on each of the first, second, third and fourth arms. each of the thinner sections defines a deflection section in each arm, which Each arm forces each arm toward the closed position when the arm is bent by contact with a member. 72. The positioning device according to claim 71, which generates a restoring force on the arm. 73. The forcing means includes a thin portion on each of the first, second, third and fourth arms. each of the thinner sections defines the deflection in each arm, which Each arm forces each arm toward the closed position when the arm is bent by contact with a member. 71. The positioning device of claim 70, which generates a restoring force on the beam. 74. Each of the first, second, third and fourth arms and base material is manufactured from a crystalline material. Positioning device according to claim 69. 75. The first, second, third and fourth arms and base are marked within the housing. Positioning device according to requirement 69. 76. a coupling for positioning the first cylindrical member with respect to the second cylindrical member; , The positioning device includes first and second arms, each of the arms having at least the first and second arms. two side walls, the first and second side walls cooperating to define a groove in each of the arms; The first and second arms are arranged in superimposed relation to each other and extend from the first closed position to the first closed position. 2 centering positions with substantially equal and oppositely directed forces. means for forcing each of the arms toward a first closed position with a restraining force; In the closed position the arms cooperate to define a passageway having a reference axis of passage; Has an entrance end and an exit end Each of the arms has a cylindrical member introduced at the entrance end of the passageway, and the end face of the member from the reference axis by contact with at least one of the side walls such that the Its spaced axes are first disposed for displacement; The arm moves the member on the reference axis by contacting the first and second side walls of both arms. to move against the forcing force toward the centering position in order to hold the points on the surface. responsive to further axial movement of the member through the passageway; a second positioning device is responsive to further axial movement of the member through the passageway; and a fourth arm, each of the third and fourth arms extending from at least the first and second sides. walls, the first and second side walls cooperating to form a groove in each of the third and fourth arms. and the third and fourth arms are arranged in superimposed relation to each other and in the first closed position. can be moved from one position to a second centered position; forcing each of the third and fourth arms into the first with substantially equal and oppositely directed forcing forces; means for forcing the third and fourth arms toward a closed position; in the closed position the third and fourth arms jointly operatively defining a second passageway having a passage reference axis, the second passageway having an inlet end and an outlet end. and each of the third and fourth arms has an axis spaced apart from the second reference axis. a second cylindrical member introduced into the inlet end of the passageway in a state in which at least a third arm or is caused by the contact with one side wall of the fourth arm to cause the planned point of the end face of the second member to start. displaceably disposed so as to be aligned with the second reference axis; The third and fourth arms are referenced by contact with respective first and second side walls of the arms. A forcing force toward the centering position is applied to hold the point of the face of the second member on the axis. responsive to further axial movement of the second member through the passageway by opposing movement; The substrate, the first and third arms are arranged such that outlet ends of the first and second passages face each other. and the reference axis passing through the second funnel-shaped passage and the reference axis passing through the first funnel-shaped passage coincide. A connecting tool that is attached to a base material in such a manner as to be attached to a base material. 77. The grooves in the first arm and the third arm and the second passage are respectively completed. 77. The positioning device of claim 76, wherein the locating device is a tapered groove such that the channel is entirely funnel-shaped. 78. The grooves in the first and third arms are such that the first and third passages are rectangular, respectively. The cross section is a groove of uniform width, each of the side walls having an edge thereto, the first and The edge of the side wall of the second arm is in contact with the first member and the side wall of the first and second arms is in contact with the first member. 77. The positioning device of claim 76, wherein: is in contact with the first member. 79. The forcing means includes a thin portion on each of the first, second, third and fourth arms. each of the thinner sections defines a deflection section in each arm, which Each arm forces each arm toward the closed position when the arm is bent by contact with a member. 79. The positioning device of claim 78 which generates a restoring force on the arm. 80. The forcing means includes a thin portion on each of the first, third, third and fourth arms. each of the thinner sections defines a deflection section in each arm, which Forces each arm toward a closed position when the arm is bent by contact with a member 78. The positioning device of claim 77, which generates a restoring force on each arm. 81. Each of the first, second, third and fourth arms and base material is manufactured from a crystalline material. The positioning device according to claim 76. 82. The first, second, third and fourth arms and base are disposed within the housing. Positioning device according to requirement 69. 83. A predetermined feature on the first wafer and a predetermined feature on the second wafer. Each wafer has at least two peripheral and a) the shape of the predetermined feature in the center of the first wafer; At the same time as the first wafer is formed, a plurality of alignment grooves are formed on both sides of the first wafer. Each of the grooves has a predetermined depth and associated width dimension, and the alignment grooves each in a predetermined alignment with respect to the features on the first wafer; and b) the second wafer. Both the formation of predetermined features in the center of the wafer and the periphery of the second wafer simultaneously. A plurality of alignment grooves are formed in the groove, and each of the alignment grooves has a planned depth and a combination thereof. each of the alignment grooves has a predetermined width dimension with respect to the feature on the first wafer. c) a plurality of alignments on both sides of the first wafer; Alignment grooves of the intended diameter combined with the selected one of the grooves for A plurality of alignment grooves are selected, each of which has an alignment groove placed therein. Each alignment fiber has depth and width dimensions that most closely correspond to the diameter of the alignment fiber. The bar protrudes a predetermined distance from the alignment groove in which it is placed, d) the corresponding alignment groove of the second wafer receives the protruding portion of the alignment fiber; Stack the second wafer on top of the first wafer so that the second wafer positioning the intended feature on the wafer with respect to the intended feature on the first wafer; A method that encompasses the stages. 84. 84. The method of claim 83, wherein the alignment fiber is a quartz fiber. 85. A method of manufacturing a fiber-to-fiber coupler, comprising: a) a first silicone coating; forming first and second arms on the surface of the wafer; the arm has at least first and second sidewalls, each sidewall of the first and second arms being the first and second arms cooperate to define a tapered groove having a mouth end; first located on the surface of the wafer such that the outlet ends of the grooves of b are adjacent end-to-end; ) forming first and second arms on the surface of the second silicon wafer; Each of the two arms has at least first and second sidewalls thereon, and has first and second side walls. The side walls of each of the beams cooperate to define a tapered groove having an outlet end, the first and The second arm is attached to the second wafer so that the outlet ends of the narrow grooves are adjacent end to end. c) the first and second attachments to the surface of the third silicon wafer; forming a substrate having a region for d) the corresponding first and second grooves of each of the first and second silicon wafers are connected to the first and second silicon wafers; The first and second wafers are stacked and secured to define a second completely funnel-shaped passageway. established, e) Place the first wafer in the 3 to the mounting area on the wafer, midway between the exit ends of the first and second passages. Stages that cut only the first and second wafers stacked along a passing separation line. How to contain floors.