JPS60211342A - X-ray two crystal diffraction device - Google Patents

Abstract

PURPOSE:To measure the locking curve of a sample without rotating a sample base by an X-ray two crystal diffraction device by rotating a support carrying a monochromator and X-ray tube bulb around the point of the sample on which the X-ray is made incident. CONSTITUTION:A sample 21 is placed horizontally on a sample base 22. An X-ray tube bulb 23 and a monochromator 25 are placed in a support 26 by fixing the relative position thereof. An X-ray beam is made incident on the monochromator 25 from the tube 23 and thereafter the beam is made incident on the point O of the sample 21. The diffracted beam from the sample 21 is made incident on a detector 210 and a locking curve is obtd. The support 26 is made rotatable around the point O of the sample 21 and the incident beam 30 is made incident to the sample at an incident angle theta so as to increase parallelism and monochromaticity. The support 26 is rotated by means of a motor 29 and an arm 27. Since the support is rotated, the crystal is evaluated easily without the need for moving the sample base even in the case of a heavy sample such as ingot.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an X-ray double crystal diffraction device used when a sample cannot be rotated.

(Prior Art and its Problems) As one means of examining the crystallinity of a single crystal using X-rays, there is a method of measuring an X-ray rocking curve based on kinetic theory. Normally, in order to accurately measure an X-ray rocking curve, it is necessary to improve the parallelism and monochromaticity of the X-ray beam incident on a single crystal sample. Therefore, as shown in FIG. 1, the X-ray beam emitted from the X-ray tube 11 and passed through the slit 15 is made parallel and monochromatic by the monochromator 12, and then enters the sample 13. A so-called two-crystal arrangement is used to measure the X-ray PY King curve by rotating the crystal around a rotation axis.

By the way, when rotating the sample 13 around the rotation axis, if the sample 13 is small and lightweight, it can be easily rotated without creating a mechanical load on the goniometer. However, if the sample is large or heavy, a mechanical load may be placed on the goniometer, making it impossible to rotate it with high precision. For example, when examining the crystallinity of the side surface of a Si single-crystal ingot with a diameter of 5 inches and a length of 1 m at any point in the longitudinal direction, or when examining crystals from a melt whose shape changes freely when rotated. When examining the growth in situ, it is necessary to maintain a horizontal free liquid level, and it is no longer possible to measure the curve by rotating the sample.

(Object of the Invention) The present invention aims to eliminate such conventional drawbacks and to provide an apparatus that enables X-ray double-concentration diffraction measurement without rotating the sample.

(Structure of the Invention) According to the present invention, a horizontal parallel movement sample stage is provided, and an XfJ! There is obtained an X-ray double crystal diffraction apparatus characterized in that the monochromator and the X-ray tube rotate horizontally around a vertical axis passing through the point of incidence of the monochromator while maintaining a constant relative positional relationship.

(Example) Hereinafter, an example of the present invention will be described in detail with reference to the drawings. FIG. 2 is a diagram showing an embodiment of the present invention.

Sample 21 (large in shape and heavy ingot)
It is fixed on a parallel moving sample stage 22 that is kept precisely horizontal using a spirit level or the like. The change in the angle of incidence θ on the sample 21 is determined by
3, a divergence slit 24 for suppressing the divergence angle of the X-ray beam from the X-ray tube 23, and a monochromator 25.
A monochromator 25 is installed on the stand 26
This is possible by rotating the X-rays emitted from the sample 21 around a vertical axis passing through the point 0 of incidence on the sample 21.

At this time, the relative positional relationship between the X-ray tube 23 and the monochromator 25 is maintained constant, and the monochromator 25 controls the parallelism and monochromaticity of the X-ray beam emitted from the X-ray tube 23. The Bragg angle θ8 to be increased is also maintained.

The rotational movement of the table 26 in the direction of arrow A about the vertical axis passing through point 0 is obtained as follows. Pulse motor 29
The pulse drive from is converted into a motion in the direction of arrow B by a gear, and this motion is transmitted to the arm 27 and converted into a linear motion in the direction shown by D.

The tip of the arm 27 is in contact with the stand 26, and linear motion in the D direction is converted into rotational motion about point 0. This conversion mechanism is the same as a normal goniometer. Also screw 28
is for switching the rotation mechanism of the table 26 between pulse drive and manual operation.

In this way, by rotating the table 26 around the vertical axis passing through the point O, the intensity of the diffracted beam from the sample 21 can be detected by the detector 210 when the incident angle θ on the sample 21 is arbitrarily changed. , it becomes possible to measure the X-ray rocking curve.

Furthermore, by moving the sample 21 in parallel in the direction of arrow C using the horizontal parallel-moving sample stage 22, it becomes possible to measure other parts of the sample.

(Effects of the Invention) As described above, according to the present invention, it is possible to perform an X-ray double crystal diffraction experiment on a sample having any shape or a large weight without disturbing the sample i. Furthermore, by using the parallel movement mechanism of the sample stage, it is possible to measure differences in crystallinity due to differences in measurement points on the sample.

[Brief explanation of drawings]

FIG. 1 is a conceptual diagram of a conventional X-ray double-crystal diffractometer, and FIG. 2 is a plan view of an embodiment of the X-ray double-crystal diffractometer. In the figure, 11...X-ray tube, 12...monochromator, 13
... Sample, 14... Detector, 15... Diverging slit, 21... Sample, 22... Horizontal precision parallel movement sample stage, 23... X-ray tube, 24... divergent slit,
25...monochromator, 26...unit, 28...
A screw, 29...pulse motor, and 210...detector are shown, respectively. ￥1 Figure 2 Figure 2I:l

Claims (1)

[Claims] It has a horizontal parallel movement sample stage, and the monochromator and the X-ray tube rotate horizontally around the vertical axis that passes through the point where the X-rays are incident on the sample, keeping the relative positional relationship constant. Characteristics of the X-ray double crystal diffraction device.