JPS60202648A - 電子衝撃型イオン源の熱陰極構造 - Google Patents

電子衝撃型イオン源の熱陰極構造

Info

Publication number
JPS60202648A
JPS60202648A JP59058029A JP5802984A JPS60202648A JP S60202648 A JPS60202648 A JP S60202648A JP 59058029 A JP59058029 A JP 59058029A JP 5802984 A JP5802984 A JP 5802984A JP S60202648 A JPS60202648 A JP S60202648A
Authority
JP
Japan
Prior art keywords
filament
hot cathode
ion source
arms
annular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59058029A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0234416B2 (enrdf_load_stackoverflow
Inventor
Fumio Watanabe
文夫 渡辺
Yoshiaki Hara
原 良昭
Masao Miyamoto
正夫 宮本
Yasuo Kusumoto
楠元 靖夫
Shojiro Komaki
小牧 昭二郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
Original Assignee
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Instruments Inc filed Critical Seiko Instruments Inc
Priority to JP59058029A priority Critical patent/JPS60202648A/ja
Publication of JPS60202648A publication Critical patent/JPS60202648A/ja
Publication of JPH0234416B2 publication Critical patent/JPH0234416B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns
    • H01J27/08Ion sources; Ion guns using arc discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/02Details
    • H01J49/10Ion sources; Ion guns
    • H01J49/14Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Sources, Ion Sources (AREA)
JP59058029A 1984-03-26 1984-03-26 電子衝撃型イオン源の熱陰極構造 Granted JPS60202648A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59058029A JPS60202648A (ja) 1984-03-26 1984-03-26 電子衝撃型イオン源の熱陰極構造

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59058029A JPS60202648A (ja) 1984-03-26 1984-03-26 電子衝撃型イオン源の熱陰極構造

Publications (2)

Publication Number Publication Date
JPS60202648A true JPS60202648A (ja) 1985-10-14
JPH0234416B2 JPH0234416B2 (enrdf_load_stackoverflow) 1990-08-03

Family

ID=13072519

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59058029A Granted JPS60202648A (ja) 1984-03-26 1984-03-26 電子衝撃型イオン源の熱陰極構造

Country Status (1)

Country Link
JP (1) JPS60202648A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007139425A1 (fr) * 2006-05-29 2007-12-06 Blashenkov Nikolai Mikhailovic Ioniseur à bande d'une source d'ions d'un spectromètre en masse

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH061218U (ja) * 1992-06-12 1994-01-11 スミ株式会社 包装容器
JPH0740571U (ja) * 1993-12-28 1995-07-18 マルイ包装株式会社 容 器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007139425A1 (fr) * 2006-05-29 2007-12-06 Blashenkov Nikolai Mikhailovic Ioniseur à bande d'une source d'ions d'un spectromètre en masse

Also Published As

Publication number Publication date
JPH0234416B2 (enrdf_load_stackoverflow) 1990-08-03

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