JPS60202648A - Structure of hot cathode of electron-impact-type ion source - Google Patents
Structure of hot cathode of electron-impact-type ion sourceInfo
- Publication number
- JPS60202648A JPS60202648A JP59058029A JP5802984A JPS60202648A JP S60202648 A JPS60202648 A JP S60202648A JP 59058029 A JP59058029 A JP 59058029A JP 5802984 A JP5802984 A JP 5802984A JP S60202648 A JPS60202648 A JP S60202648A
- Authority
- JP
- Japan
- Prior art keywords
- filament
- hot cathode
- ion source
- arms
- annular
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000605 extraction Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 abstract description 28
- 230000035945 sensitivity Effects 0.000 abstract description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000919 ceramic Substances 0.000 abstract description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract description 2
- 229910052721 tungsten Inorganic materials 0.000 abstract description 2
- 239000010937 tungsten Substances 0.000 abstract description 2
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 abstract 1
- 229910001948 sodium oxide Inorganic materials 0.000 abstract 1
- 239000000843 powder Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 2
- ZCUFMDLYAMJYST-UHFFFAOYSA-N thorium dioxide Chemical compound O=[Th]=O ZCUFMDLYAMJYST-UHFFFAOYSA-N 0.000 description 2
- 229910003452 thorium oxide Inorganic materials 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 235000012489 doughnuts Nutrition 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 230000000968 intestinal effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は電子衝撃型イオン源の熱陰極構造に係り、更に
詳しくは、フィラメント交換が容易でかつまたフィラメ
ントの位置精度が高い熱陰極構造に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a hot cathode structure for an electron impact ion source, and more particularly to a hot cathode structure in which filament replacement is easy and filament position accuracy is high.
従来、質量分析計、電離真空計等に用いられてきたイオ
ン源は第１図に示すように、イオン収率な高める目的に
より陽極１を金属格子又は金網を半球状にプレス成形し
たものが知られている。そして、陽極１の外周面に沿っ
て環状熱陰極フイラ依
メント２を配設し、陽極１の開俯端に対向させてイオン
引出し電極３″ｆｔ構成していた。しかるに、該フィラ
メント２は直径が約０．１５ｍと細く断線し易いばかり
でなく、フィラメント温度の割には放出電子全沢山得る
手段として、酸化トリウムの粉１１着により付着させて
焼結した酸化物の環状フィラメントを用いるため、取扱
い時に粉体が脱落するという危険が併ない、取扱い、取
付は時の作業を非常に困難なものとしていた。また、一
般に、フィラメント２は両端を電極棒４に溶接あるいは
カシメ等の手段で取付けられるが、フィラメント２とイ
オン引出し電極６との平行度、及びフィラメント２と陽
極１との距離等の相対位置精度を出すことが難しく、感
度のバラツキを生じさせるという欠点があった。Conventionally, ion sources used in mass spectrometers, ionization vacuum gauges, etc. are known to have an anode 1 formed by press-forming a metal grid or wire mesh into a hemispherical shape for the purpose of increasing the ion yield, as shown in Figure 1. It is being An annular hot cathode filament 2 was disposed along the outer peripheral surface of the anode 1, and opposed to the open end of the anode 1 to form an ion extraction electrode 3"ft. However, the filament 2 had a diameter of Not only is it thin and easily broken, as it is about 0.15 m, but also a ring-shaped filament of oxide that is adhered with thorium oxide powder and sintered is used as a means to obtain a large number of emitted electrons considering the filament temperature. There is also the danger that the powder may fall off during handling, making handling and installation extremely difficult.Furthermore, generally, the filament 2 is attached to the electrode rod 4 at both ends by means such as welding or caulking. However, it is difficult to achieve relative position accuracy such as the parallelism between the filament 2 and the ion extraction electrode 6 and the distance between the filament 2 and the anode 1, resulting in variations in sensitivity.
本発明はかかる従来の欠点に鑑み改良しようとするもの
であって、環状フィラメントと、これを保持する複数個
のアームと、このアームのそれぞれを連結したリムとに
よシ熱陰極を構成し、イオン源に取付は電気的な結合が
完了した後にはアームとリムを切離そうとするものであ
るから、熱陰極の取扱い、イオン源への取付は作業中は
何らフィラメントに触れることがないので、フィラメン
トの破損の恐れをなくし、ユーザーか容易にフィラメン
ト交換することができる手段を提供するものである。The present invention aims to improve upon these conventional drawbacks, and includes a hot cathode made up of an annular filament, a plurality of arms that hold the filament, and a rim that connects each of the arms. When attaching to the ion source, the arm and rim are separated after the electrical connection is completed, so the hot cathode is handled and attached to the ion source without touching the filament at all. This eliminates the fear of filament breakage and provides a means by which the filament can be easily replaced by the user.
以下、図示した実施例に基すき本発明の詳細な説明する
。第２図は本発明に従う電子衝撃腸イオン源の一実施例
を示す断面図である。陽極５は線径ＣＬＯ５ｍで３０
ｍｅｓｈのモリブデン金網全半球面状にプレス成形した
ものに、メツシュの拡カ９をなくすためモリブデン製の
円環５ａｉはめて一体構造としたもので、円環５ａの一
部はネジ止め可能な手段を有する。例えば、第６図に示
すような小孔の明いた耳部５ｂｉ設ければよい。なお、
陽極５は半球形状に限るものでなく、回転楕円体を半分
に切ったものや、円筒状格子の一方を金網で塞いだ構造
のもの等、電子通過可能な籠状構造で一方に開放端を有
するものであれば如何なる形状のものであっても良い。The present invention will now be described in detail based on the illustrated embodiments. FIG. 2 is a cross-sectional view of one embodiment of an electron impact intestinal ion source according to the present invention. The anode 5 has a wire diameter of CLO5m and a wire diameter of 30
A molybdenum ring 5ai is fitted onto a hemispherical molybdenum wire mesh press-molded to eliminate the expansion 9 of the mesh, and a part of the ring 5a has a screwable means. has. For example, an ear portion 5bi with a small hole as shown in FIG. 6 may be provided. In addition,
The anode 5 is not limited to a hemispherical shape, but may have a cage-like structure that allows electrons to pass through, such as a spheroid cut in half or a cylindrical lattice with one side closed with a wire mesh, with an open end at one end. It may be of any shape as long as it has.
イオン引出し電極６はイオンの収束性を良くするために
、下方から上方に行くに従い順次拡開するラッパ状に形
成されており、陽極５の開放端側に僅かの間隔金おいて
対向配置される。なお、イオン引出し電極６の形状もラ
ッパ状に限定されるものでなく、漏斗状、あるいは単に
ドーナツ板でもよい。熱陰極７は第４図に示す如く、フ
ィラメント８、アーム９、リム１０で構成される。フィ
ラメント８は直径が約α１５鶏のレニュームあるいはタ
ングステン等の高融点材料でできた線材を環状に成形し
、放出電子を沢山得る手段として酸化トリウムの粉を電
着により付着させて焼結させたものである。６本のアー
ム９はフィラメント８ｔ−保持し、電極と結合する手段
であり、一端をフィラメントと溶接接合され、放射状に
伸びた他端は環状のリム１０と一体構造をなし、薄板の
プレス加工によシ同時に成形されるものである。なお、
リム１０の近傍にあるアーム９に明けられた小孔はアー
ム９をイオン源にネジ止めする手段である。第５図は熱
陰極７の他の実施例を示す斜視図である。環状フィラメ
ント８は多数のアーム９と結合しておシ放射状に拡がっ
たアーム９は環状リム１０と一体構造をなす。ここで、
多数のアーム９を形成したのはフィラメント８１に分割
するためであり、イオン源への取付は終了後には第６図
に示すようにフィラメントの一部を切断し、一部の円弧
状フィラメントのみを使用する。即ち、アーム９ａと９
ｂｌＣ［圧を与えればフイラメン）８ａのみが熱せられ
作用する。In order to improve ion convergence, the ion extraction electrode 6 is formed in a trumpet shape that gradually expands from the bottom to the top, and is disposed opposite to the open end side of the anode 5 with a slight distance therebetween. . Note that the shape of the ion extraction electrode 6 is not limited to the trumpet shape, but may be a funnel shape or simply a donut plate. The hot cathode 7 is composed of a filament 8, an arm 9, and a rim 10, as shown in FIG. The filament 8 is a wire rod made of high melting point material such as aluminum or tungsten with a diameter of approximately α15, which is formed into a ring shape, and thorium oxide powder is deposited by electrodeposition as a means of obtaining a large number of emitted electrons, and then sintered. It is. The six arms 9 are means for holding the filament 8t and connecting it to the electrode. One end is welded to the filament, and the other radially extending end is integrated with the annular rim 10, and is suitable for press working of thin plates. Both are molded at the same time. In addition,
A small hole in the arm 9 near the rim 10 is a means for screwing the arm 9 to the ion source. FIG. 5 is a perspective view showing another embodiment of the hot cathode 7. The annular filament 8 is connected to a plurality of arms 9, and the arms 9, which extend radially, form an integral structure with the annular rim 10. here,
The reason for forming a large number of arms 9 is to divide the filament into filaments 81, and after installation to the ion source, a part of the filament is cut off as shown in Figure 6, and only a part of the arc-shaped filament is separated. use. That is, arms 9a and 9
Only blC (filament when pressure is applied) 8a is heated and acts.
もし、寿命によりフィラメント８ａか断線した場合はア
ーム９ｃと９（ｌｌｃ！圧を与えてフィラメント８ｂを
動作させるように電子回路でコントロールすればよい。If the filament 8a breaks due to its lifespan, it may be controlled by an electronic circuit to apply pressure to the arms 9c and 9(llc!) to operate the filament 8b.
上述し＊１１３極５、イオン引出し電極６、熱陰極７は
セラミックスでできたドーナツ状絶縁板１１にネジ止め
される。電極棒と結合する手段の一例としてはイオン源
を取付けた絶縁板１１の裏側にＬ字型の座金１２を設け
、この座金と電極棒１３とを溶接すればよい。このよう
にして組立が完成した後アーム９とリム１０′ｊｋ切離
せばフィラメント８に必要な電力を供給することができ
る。かかる構成のイオン源の特徴を列挙する。The above-mentioned *113 pole 5, ion extraction electrode 6, and hot cathode 7 are screwed to a donut-shaped insulating plate 11 made of ceramics. As an example of means for coupling with the electrode rod, an L-shaped washer 12 may be provided on the back side of the insulating plate 11 to which the ion source is attached, and this washer and the electrode rod 13 may be welded. After the assembly is completed in this manner, the necessary power can be supplied to the filament 8 by separating the arm 9 and the rim 10'jk. The characteristics of the ion source having such a configuration will be listed below.
１、 構成部品がすべて着脱容易である。1. All component parts are easy to attach and detach.
Ｚ イオン源として独立に構成されているので、質量分
析計あるいは電離真空計のイオン源とし取換えることが
でき、互換性を持たせることが可能である。Since it is configured independently as a Z ion source, it can be replaced as an ion source for a mass spectrometer or ionization vacuum gauge, making it compatible.
五 フィラメントに直接触れることがなくイオン源への
取付けが可能であるから、熟練を要しないでフィラメン
ト交換ができる。(5) Since the filament can be attached to the ion source without directly touching it, the filament can be replaced without requiring any skill.
４、 フィラメントの相対位置精度が高く、感度のバラ
ツキが小さい。4. The relative position accuracy of the filament is high, and the variation in sensitivity is small.
以上、本発明を図示した実抱例で説明して１！穴がこれ
に限定されるものではない。例えば、必要に応じて各電
極さ＠種棒は直接溶接により結合してもよいし、咬た、
オスメスのビン結合であってもよいことは明らかである
。The present invention has been explained above using illustrated practical examples. The hole is not limited to this. For example, each electrode and seed rod may be connected by direct welding, or
It is clear that male and female bottle combinations are also possible.
上述しかように本発明＆Ｃよれば、熱陰極、陽極、引出
し電極とで構成される三極構造の電子衝撃型イオン源に
おいて、熱陰極が環状フィラメントと、フィラメントを
保接するための複数個のアームと、アームのそれぞれに
連結しタリムとで構成することにより、フィラメント交
換が容易でかつフィラメントの相対位置精度が良く、ひ
いては感度のノ（ラツキの少ないイオン源が得られた。As described above, according to the present invention &C, in an electron impact ion source having a three-pole structure consisting of a hot cathode, an anode, and an extraction electrode, the hot cathode has a ring-shaped filament and a plurality of arms for tightly connecting the filament. By constructing the ion source with a talim connected to each of the arms, the filament can be easily exchanged, the relative position of the filament is accurate, and the ion source has less sensitivity (lack).
また、複数のアームを用意し、フィラメントを分割でき
る熱陰極を用いれば、断線してもその都度交換する必要
がないので、その効果はさらに高まる。従い、本発明の
電子衝撃型イオン源を質量分析計や電離真空計に用いて
、実用上の価値は大きい。Furthermore, if a plurality of arms are prepared and a hot cathode that can split the filament is used, there is no need to replace it each time the filament breaks, which further increases the effectiveness. Therefore, the electron impact ion source of the present invention has great practical value when used in mass spectrometers and ionization vacuum gauges.
第１図は従来の電子衝撃型イオン源を示す断面図である
。第２図は本発明に従うイオン源の一実施例を示す断面
図である。第６図は陽極の斜視図であり、第４図、第５
図、第６図は熱陰極の実飛例を示した斜視図である。
５・・・陽極
６・・・イオン引出し電極
７・・・熱陰極８・−フィラメント
？・・・アーム １０・・・リム
１１・・・絶縁板
以上
出願人 セイコー電子工業株式会社
（他１名）
代理人弁理士 最上 務
第３図
可
第１頁の続き
０発 明 者 楠 元 端 夫 東京都江東区亀戸会社
内
０発 明 者 小牧 昭二部 東京都江東区亀戸会社内FIG. 1 is a sectional view showing a conventional electron impact ion source. FIG. 2 is a sectional view showing an embodiment of an ion source according to the present invention. FIG. 6 is a perspective view of the anode, and FIGS.
FIG. 6 is a perspective view showing an actual flying example of a hot cathode. 5... Anode 6... Ion extraction electrode 7... Hot cathode 8... - filament? ...Arm 10...Rim 11...Insulating plate and above Applicant: Seiko Electronics Industries Co., Ltd. (1 other person) Representative Patent Attorney: Tsutomu Mogami Figure 3 available Continued from page 1 0 Inventor: Hajime Kusunoki Husband: Kameido Company, Koto-ku, Tokyo Inventor: Sho Nibe Komaki, Kameido Company, Koto-ku, Tokyo
Claims (3)
とで構成される二極構造の電子衝撃型イオン源において
、該熱陰極が、高融点材料でできた環状フィラメントと
該フィラメントを保持するため複数個のアームと該アー
ムのそれぞれを連結したリムとで構成されたことを特徴
とした電子衝撃型イオン源の熱陰極構造。(1) In an electron impact ion source with a bipolar structure consisting of at least a hot cathode, an anode, and an ion extraction electrode, the hot cathode includes an annular filament made of a high melting point material and a plurality of annular filaments for holding the filament. 1. A hot cathode structure for an electron impact ion source, characterized in that it is comprised of two arms and a rim connecting each of the arms.
れて円弧状をなすことｔ−Ｓ徴とし−ｆｃ特許請求の範
囲第一項記載の電子衝激型イオン源の熱陰極構造。(2) A hot cathode structure of an electron bombardment type ion source according to claim 1, wherein the annular filament is divided into at least two parts to form an arc shape, which is a t-S characteristic.
て熱陰極が絶縁板にネジ結合されることを特徴とする特
許請求の範囲第一項記載の電子衝撃型イオン源の熱陰極
構造。(3) A hot cathode of an electron impact ion source according to claim 1, wherein a small hole is formed in a part of the arm, and the hot cathode is screwed to the insulating plate through the small hole. structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59058029A JPS60202648A (en) | 1984-03-26 | 1984-03-26 | Structure of hot cathode of electron-impact-type ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59058029A JPS60202648A (en) | 1984-03-26 | 1984-03-26 | Structure of hot cathode of electron-impact-type ion source |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60202648A true JPS60202648A (en) | 1985-10-14 |
| JPH0234416B2 JPH0234416B2 (en) | 1990-08-03 |
Family
ID=13072519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59058029A Granted JPS60202648A (en) | 1984-03-26 | 1984-03-26 | Structure of hot cathode of electron-impact-type ion source |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60202648A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007139425A1 (en) * | 2006-05-29 | 2007-12-06 | Blashenkov Nikolai Mikhailovic | Tape ioniser for the ion source of a mass-spectrometer |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH061218U (en) * | 1992-06-12 | 1994-01-11 | スミ株式会社 | Packaging container |
| JPH0740571U (en) * | 1993-12-28 | 1995-07-18 | マルイ包装株式会社 | Container |
-
1984
- 1984-03-26 JP JP59058029A patent/JPS60202648A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007139425A1 (en) * | 2006-05-29 | 2007-12-06 | Blashenkov Nikolai Mikhailovic | Tape ioniser for the ion source of a mass-spectrometer |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0234416B2 (en) | 1990-08-03 |
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